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Modeling, scheduling, and performance evaluation for wafer fabrication: a queueing colored Petri-net and GA-based approach

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Academic year: 2021

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Fig. 1. (a) Original resource contention. (b) QCPN resource contention.
Fig. 3. QCPN-based equipment module.
Fig. 5. Priority class assigning method.
Fig. 7. Architecture of the scheduler.
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