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高介電係數介電質在金氧金電容之研究

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電子工程學系 電子研究所

高介電係數介電質於金氧金電容之研究

The Investigation of Metal-Insulator-Metal Capacitor Using

High-κ as Dielectrics

研 究 生:江國誠

指導教授:荊鳳德 教授

(2)

高介電係數介電質於金氧金電容之研究

The Investigation of Metal-Insulator-Metal Capacitor

Using High-κ as Dielectrics

研 究 生:江國誠 Student:Kuo-Cheng Chiang

指導教授:荊鳳德 Advisor:Dr. Albert Chin

國 立 交 通 大 學

電子工程系 電子研究所博士班

博 士 論 文

A Dissertation

Submitted to Department of Electronics Engineering & Institute of Electronics College of Electrical and Computer Engineering

National Chiao Tung University in partial Fulfillment of the Requirements

for the Degree of Doctor of Philosophy

in

Electronics Engineering

June 2007

Hsinchu, Taiwan, Republic of China

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