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電子資訊產業供應鏈管理---子計畫五:IC製造業MES系統及供應管理系統之研究與介面實作

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(3)     MES  . . The Study of MES System and Supply Management System in IC Industry and the Implementation of Interface Modules 

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(5)               !"#$%&'()*)+,-.(/01 2345Perng@cc.nctu.edu.tw  

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(11) MES >?QPROMIS ().RST UDE.

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(18) cdv•–—˜™ š23kSb›œ“~ƌ. used in wafer fabs. To help users understand the operation mechanisms of a MES, this research aims to construct a pseudo fab. On which the PROMIS system could be used to perform real time control. The pseudo fab includes the allocation of fab equipment and product process flows. For a particular machine, we use a personal computer to emulate the function of the fab equipment and emulate the interaction between the equipment and the PROMIS system. Keyword MES, PROMIS ¢ £‚¤,

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(28) "#m+0Ë Abstract ÌovÍΰ

(29) {|όÐѲ8Ò3 MES (Manufacturing Execution System) ӁÔÕkS3Ó

(30) 23Ö~ is an important element in performing real h23Ī×Ø@™š"#0$3 time monitoring and control in the operations Ó{|Ž;ÙÚ&ÛÜÝÞß3Ó of a wafer fab. PROMIS system is a ²Zà 233v:‚HáNO) proprietary MES software which is widely .

(31) "#ë,"#b“~t:‘d"# bÀvc§¤}~c§-.¬. 1 P /: (2) }~c§ &6"#}~ø$0žÀv: 1/ˆÃ2Ö!$34}~Ã25 bÖ!*¼Àvc§$¨c§& 6¿}~:}~c§×6. 2 P/: 07}~8Ã$%  ON-LINE w OFF-LINE 9w LOAD ~::;<q"#w UNLOAD ~:;=’w STOP >?@Aw PM B=("#CÜw Dr Lot D,K{|

(32) Ew (3) ¨c§ &6"#ˆ}~¨FGG H¾IJ&/b¬. 2 P/:¨c §$% KL(Idle) {|(Run) E" (Break Down) CÜ(PM)F¨: KL "#MNtO

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(42) åæ:Z[\±.«ç^Bcd è PROMIS >?ƒÙ`a¬ 陚›œ23>?b“~uê ëì23>?b“~víîBï

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(44) /^ B_ PROMIS >?`abcd¶, ³ ¢  1.  PROMIS ñV MES >?bg^hi jĪ23kS

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(48) {|¤}~€ ‚ PROMIS ƒa„ †‡23kSˆC 23‰Š

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(53) ²¬’b²   1. híîBïš23"lb}~ ‹ŒZ[\“ƒcd"#}~ ä"#Hv PROMIS  ~;ÙB‘d"#b“~‹ Œcd: 2. Z[\cd"#cdo   c d B    " # : E EAP (Equipment Application Program) t ÉʃÛÁÂcdo; DìÖ!$B"Hv#2¨:‘ d

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(57) 20, No. 5/6, 1992, 587-595. [3] Davis, Tom, “Effective Supply Chain Management, “Sloan Management Review, Summer, pp.35-46, 1993. [4] Glassey, C.R., and M.G. C. Resende, “Closed-Loop Job Release Control for VLSI Circuit Manufacturing, “IEEE Transaction Semiconductor Manufacturing, Vol. 1, pp.36-46, 1988 [5] Hill, T., “Manufacturing Strategy Test and Case, “Irwin. Homewood, 1989, IL. [6] Johnston, R. and Lawrece, P. R., “Beyond Vertical Integration-the Rise of the Value-Adding partnership, “Har. Bus. Rev., July-Aug., 1988,94-101. [7] Kruz, Walter R; Inselberg, Aromond D.; Stepien, Thomas, “Computer aided manufacturing information system implementation insights for mangers, “Proc. Of the 1996 42-nd International Instrumentation Symposium, San Diego CA USA, 1996, p335-344. [8] Kumpe, T. and Bolwijn, P. T., “Manufacturing: The New Case for Vertical Integration, “Har. Bus. Rev., March-Apr., 1988, 75-81. [9] Lee, H.L., “Design for Supply Chain Management: Concepts and Examples, “ in Perspectives in Operations Management, Edited by R. Sarin, Kluwer Academic Publishers, Boston, 1993, 43-65. [10] Lee, H. L. and M. A. Cohen, “Resource Deployment Analysis fo Flobal Manufacturing and Distribution Networks, “J. of Manufacturing and Operations Managemetn, Volume 2, Number 2, 1989, 81-104. [11] McGuire, T. W. and Staelin, R., “An Industry Equilibrium Analysis of Downstream Vertical Integration, “Marketing Sci., Volume 2, Number 2, 1983, 161-191. [12] Richards, Struart, “Manufacturing execution systems: Doing what you do now, but doing it better, “Manufacturing Computer Solutions, vol.2, no.3, 1996, p3. [13] Strothman, Jim, “Evaluating MES: Seven key steps, “Industrial Computing,.  !

(58) "# $%&'()*+,-./0123 456-78 *9: ;<=>?. @A BCDE=FG. HI=JKCLMFG. NOPQ. RSTU=VW. 4XYZ. <RS[\=]?. ^_`a'bYZ. c%'b=dSefgh ij. j. 1. kl. . kl. . mnopefqrst u%'b=ovJwghx ij. j. 1. yzF{p|}~€C‚efx yGƒJ w  „ †‡ˆ   ‰ Jw %'byŠ‹Œ8*=x y. >. <B. <M. yx Ž>=‘Myzy’Š“”•–— ˜%'b>™=F{x šxq›œ. 'bž„Ÿ] ¡. ¢£¤¥¦§¤*!‰¨ %© ª«¬­®®¯°±²³ ´¤. %©µd>¶·¤. y>™4X\¸)¤ ¹º»¼%=½¾¿ÀÁ/0= ÂbÃ'Äà 6->?Å4XÆÇghȔ‡ºÉ»Ê % =ËÌ'ÄÍÎyov@ÏÐ6-'ÄÑ% ÒÓ/0Ô=ÕÂIÖ×ØÙ ÚÛ%'b/0Ü»ÈÝxiÞÞ1yß. q ×Ørs [1] Abernathy, F.F., J.T. Dunlop, J.H. Hammond, and D, Weil, “The Information-Integrated Channel   A Study of the U.S. Apparel Industry in Transition, ” Brookings Papers on Economic Activity Micro Economics, Summer, 1995, Bookings Institutions. [2] Billington, C. and T. Davis, “Manufacturing Strategy Analysis   Models and practices,” Omega, Volume . ".

(59) Vol. 15, no.6, 1996, p44-46. [14] Tien, Alan Y.; Strpien, Thomas M, “Automated manufacturing systems using the client/server model, “Proc. Of the International Instrumentation Symposium 1996. Instrument Society of America, Research Triangle Park, NC, USA, 1996, p325-334. [15] Weygandt, Steven L, “Automatic data collection methods for MES “, Proc. Of the 1996 42-nd International Instrumentation Symposium, “San Diego, CA, USA, 1996, p345-354. [16] Hakanson, B.,”MES Stands for Manufacturing Improvements”,IIE Solutions,p.26-28,February,1996. [17] Harrison, J.M.,Holloway, C.A., and Patell, J.M.,”Measuring Delivery Performance A Case Stud from the Semiconductor Industry, in Measure for Manufacturing Excellence”,R.S. Kaplan (ed.) Harvard Business School Press., 1990. [18] Baliga J, “Advances in MES complying with the CIM Framework”, Semiconductor International, p.69-76, January, 1997. [19] Casey, J., “Company Benchmark Mitel Semiconductor Implements Fully Functional MES”, Manufacturing System, p.78-80, Vol 15, March 1997. [20] MESA International-White Paper No.1 The Benefits of MES A Report from the Field, May, 1997 [21] MESA FABuilder User Guide V2.0, MESA System, Inc, San Jose, USA, 1996.. . #.

(60) operating instruction. Operation module. Function module. Ǝ corresponding machine action Operating panels. Ǝ operating process demonstration. associated message. Machine status. Ǝ operating principle description. . 1 Àvc§¤}~c§Qb-.. - Breakdown - Idle - Run - PM. - Stop Icon - PM Icon. . t¡‘d"#u}~v# "#¨ 078Ãw.¡. . x¡aŠb"#a„8Ãtb078Ãy/.¡ . $.

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