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Measuring relative performance of wafer fabrication operations: a case study

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Fig. 1 Fab production process
Figure 2 is the box plot for the wafer-based efficiency scores for the four fabs. The y-axis represents the efficiency scores obtained by ( 1 ), that is, the reciprocal of optimal value of Model ( 1 ), where value 1 is the best and the smaller values indic
Fig. 2 Wafer-based efficiency
Fig. 5 Changes of efficiency scores (Fab A)
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