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新型SOI與SU-8之整合製程與其在微光學系統上的應用

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(1)國. 立. 交. 通. 大. 學. 電機與控制工程研究所 碩士論文. 新型 SOI 與 SU-8 之整合製程與其在 微光學系統上的應用 Novel SOI/SU-8 Integration Process and Its Applications in Micro-Optical Systems. 研究生. :莊志偉. 指導教授:邱一. 博士. 中華民國九十四年九月.

(2) 新型 SOI 與 SU-8 之整合製程與其在 微光學系統上的應用 Novel SOI/SU-8 Integration Process and Its Applications in Micro-Optical Systems. 研 究 生:莊志偉. Student:Zhi-Wei Zhuang. 指導教授:邱一. Advisor:Yi Chiu 國立交通大學 電機資訊學院 電機與控制工程研究所 碩士論文. A Thesis Submitted to Department of Electrical and Control Engineering College of Electrical Engineering and Computer Science National Chiao Tung University In Partial Fulfillment of the Requirement For the Degree of Master In Electrical and Control Engineering September 2005 Hsinchu, Taiwan, R.O. C 中華民國九十四年九月.

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