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奈米微氣泡浮除技術於半導體工業化學機械研磨廢水處理之應用

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(1)國立交通大學 環境工程研究所 碩士論文. 奈米微氣泡浮除技術於半導體工業 化學機械研磨廢水處理之應用. The application of nano-sized bubble flotation technology on the treatment of CMP wastewater of the semiconductor manufactory. 研究生:蘇揚根 指導教授:林志高 博士. 中 華 民 國 九 十 三 年 七 月.

(2) 奈米微氣泡浮除技術於半導體工業 化學機械研磨廢水處理之應用. The application of nano-sized bubble flotation technology on the treatment of CMP wastewater of the semiconductor manufactory. 研究生:蘇揚根. Student:Young-Ken Su. 指導教授:林志高 博士. Adviser:Dr. Jih-Gaw Lin. 國立交通大學 環境工程研究所 碩士論文. A Thesis Submitted to Department of Environmental Engineering College of Engineering National Chiao Tung University In Partial Fulfillment of the Requirements for the Degree of Master of Science in Environmental Engineering July, 2004 Hsinchu, Taiwan, Republic of China 中華民國九十三年七月.

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