壓電薄膜之生醫感測器應用於牙科植體穩固度檢測
曾效祖(Shiau-Tzu Tzeng);李勝揚(Sheng-Yang Lee);蔡明宏(Ming-Hung Tsai);黃豪銘
(Haw-Ming Huang);詹宗瑾(Chung-Chin Chan);黃瓊芳(Chiung-Fang Huang);謝家倫
(Chia-Lun Hsieh);林哲堂(Che-Tong Lin);李柏德(Po-Te Lee);歐耿良(Keng-Liang Ou)
Abstract
In this study, an aluminum nitride thin film was deposited on a dental implant by thin film deposition technology. A sensing device was developed by integration of cells and the piezoelectrical thin-film reaction. The piezoelectrical property was used as the sensing signal after reaction of the cell and the thin film. Based on the results, phase transformation of the aluminum nitride thin films and the cell reaction with the piezoelectrical thin film were helpful in the integration processes of creating an integrated circuit for a sensing device, which can be used for monitoring the initial stability of dental implants and the process of osseointegration of bone-implant interfaces.