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氮化鈦的鋁化反應與氧化行為

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Fig. 4-18.  為 TiN 在 1150℃/10 hr 鋁化反應的示意圖。
Table 3 Ti-Al-N 系統內各相之晶體結構及晶格常數 [32] 。  Phase Structure
Table 10 TiN 在 1000 o C/10 hr 鋁化反應之 SEM/EDS 成份表(at.%)
Fig. 2-1. Ti-Al  之二元平衡相圖。
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