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利用微米透鏡陣列與表面粗化加強垂直式氮化鎵發光二極體發光強度

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Figure 2-3 The processing of vertical light emitting diodes  N-GaNMQW P-GaN LLOAu/Cr  Sapphire
Figure 3-1 The progress of micro lens formed by re-flow of photoresist
Figure 3-2 The SEM images of etching result, the micro lens is fabricated on the  basic structure     Micro lensplanarMicro lensplanar
Figure 3-4With increasing the ratio of BCl 3 , the SEM image of etching result
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