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面射型雷射製程技術之研究

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國 立 交 通 大 學

光電工程研究所

博 士 論 文

面射型雷射製程技術之研究

Study of Process Techniques of

Vertical-Cavity Surface-Emitting Lasers

研 究 生: 賴芳儀

Student: Fang-I Lai

指導教授:

王興宗 教授

郭浩中 教授

Advisor:

Dr. Shing-Chung Wang

Dr. Hao-Chung Kuo

(2)

面射型雷射製程技術之研究

Study of Process Techniques of

Vertical-Cavity Surface-Emitting Lasers

研 究 生:賴芳儀 Student:Fang-I Lai

指導教授:王興宗 教授 Advisor:Dr. Shing-Chung Wang

郭浩中 教授 Dr. Hao-Chung Kuo

國 立 交 通 大 學 電機資訊學院

光電工程研究所

博 士 論 文

A dissertation

Submitted to Institute of Electro-Optical Engineering College of Electrical Engineering and Computer Science

National Chiao Tung University in partial Fulfillment of the Requirements

for the Degree of Doctor of Philosophy

in

Electro-Optical Engineering September 2005

Hsinchu, Taiwan, Republic of China

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