Design and Fabrication of a Micro Pressure Sensor 張益銘、李佳言
E-mail: [email protected]
ABSTRACT
ABSTRACT The purpose of this paper is to apply Surface Micromachining of MEMS techniques to manufacture a micro flexible piezoresistive pressure sensor. Micro sensors not only have a smaller physical size than their traditional counterparts, but also provide a greater measurement accuracy and a higher sensitivity. MEMS components integrate with measured circuit or devices and
miniature dimension is easier to get well to be conveniently portable. In this study, a platinum layer is deposited to form resistors and a Au layer is deposited on the resistors to serve as an electrode and to provide electrical leads, which are sandwiched between two polyimide layers as flexible substrates. Then we manufacture a bottom plate of PDMS which be broached five different diameters of holes. When we apply a weight on the pressure sensor placed on the PDMS, bottom plate we can measure the resistance variation to determine the pressure. The experimental data indicate that sensing sensitivity increases with the diameters of holes of PDMS plates and the applied pressure. Therefore it is easily to measure pressure by simplified structure and characters of materials. Keywords
：polyimide，press sensor，PDMS，MEMS
Keywords : Keywords：polyimide，press sensor，PDMS，MEMS Table of Contents
目錄 封面內頁 簽名頁 授權書...iii 中文摘 要...iv英文摘
要...v 誌 謝...vi 目 錄...vii 圖目 錄...x 表目 錄...xii 符號說
明...xiii 第一章 諸論 1.1前
言...1 1.2微機電系統...2 1.2.1元件與應 用...4 1.3壓力感測器之介紹...5 1.3.1壓力感測器的種 類...7 1.3.2壓力感測器的基本特性...9 1.4壓力感測器研究動機與目 的...12 1.5 文獻回顧 ...13 1.5.1可撓式感測器發展現
況...13 第二章 微壓力感測器理論與設計 2.1微壓力感測器原理 ...17 2.2 微壓力感測器之尺寸設計...18 2.3 不同孔徑尺寸大小之設計...18 第三章 薄 膜結構製作與製程處理 3.1簡介 3.2壓阻式壓力感測器製程介紹 3.2.1晶圓選擇與準備...20 3.2.2蒸 鍍犧牲層...21 3.2.3下保護層之成形...21 3.2.4定義白金電感測電 阻圖案...21 3.2.5定義金電極圖案...22 3.2.6上保護層之成
形...23 3.2.7蝕刻...23 3.2.8 PDMS製 程...23 3.3相關製程技術簡介...24 3.3.1晶片清 潔...24 3.3.2微影製程...26 3.3.3蒸 鍍...29 3.3.4金屬層剝離(Lift-off)...30 3.3.5蝕
刻...31 3.4製程儀器...32 3.4.1電子束蒸鍍 機...32 3.4.2加熱盤...33 3.4.3曝光
機...33 3.4.4烘箱...35 3.5製程與討 論...35 第四章 實驗結果與討論 4.1實驗數據討
論...37 4.2微壓力感測器量測結果...37 4.2.1感測器電阻值對壓 力的變化...37 4.2.2不同孔徑大小對電阻值變化...38 第五章 結論與未來展望 5.1結
論...39 5.2未來展望...39 第六章 參考文 獻...40
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