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一種改良的介面缺陷之橫向剖面分析應用於奈米級應變矽CMOS元件之可靠度探討

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Fig. 2.1 The experimental setup and environment of the basic I-V measurement.
Fig. 2.3 The schematic of charge pumping (CP) for (a) nMOSFET measurement  (b) pMOSFET measurement
Fig. 2.5 Illustration of  ∆L 0 extraction from CP data.  (a) Parameter definition and extraction method.
Table 3-1 The comparison of the three main kinds of the interface states quality  evaluation
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