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利用常壓微電漿裝置進行水酸化之研究

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圖  2.1  不同氣體的 Paschen’s curve 3
圖  2.2  不同電漿的電子密度和電子溫度示意圖 4
圖  2.3  電子溫度和氣體溫度於不同環境壓力下之示意圖 5, 8
圖  2.5  (a)中空陰極放電型為電漿裝置之示意圖 13 (b)毛細管放電型微電漿裝置之示 意圖 9 (c)微電漿陣列裝置之示意圖 5
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