The properties and analysis of the distribution and characterization of the states in diamond thin film bandgap
陳正哲、李世鴻
E-mail: [email protected]
ABSTRACT
Diamond have a lot of prominent properties, including electronic characteristics. Therefore, the application of diamond thin film electronic devices in high power, high frequency and high temperature have larger potentiality in the future. For more effective using the excellent properties of diamond, it is necessary to understand their transport mechanism and bandgap states distribution. In view of this, the major tasks discussed in this research are the electronic characterization measurements in temperature and the analysis of the resultant of the current transportation. Further we can realize the carriers transport mechanism and their states distribution in diamond thin film as newer research and fabrication as reference. Keywords: diamond thin film, transport mechanism, states distribution
Keywords : diamond thin film ; transport mechanism ; states distribution Table of Contents
目錄 簽名頁 授權書 iii 中文摘要 v 英文摘要 vi 誌謝 vii 目錄 viii 圖目錄 x 表目錄 xii 第一章 序論 1 第二章 鑽石薄膜的製程 3 2.1沉積系統 4 2.1.1反應氣體供給系統 4 2.1.2真空系統 4 2.1.3反應沉積系統 5 2.1.4微波電源供給系統 5 2.1.5循環冷卻系統 6 2.2鑽石薄膜的製作 7 2.2.1沉積鑽石薄膜的前處理 8 2.2.2沉積鑽石薄膜的參數 9 2.2.3沉積鑽石薄膜的後處理 9 2.3鑽石薄膜 的鑑定 11 第三章 製程參數對鑽石薄膜的影響 13 3.1鑽石薄膜的物性及電性關係 14 3.1.1鑽石薄膜的物性量測 14 3.1.2鑽石 薄膜的電性量測 14 3.2沉積參數影響 16 3.3沉積參數與電性關係分析 20 第四章 鑽石薄膜的電性量測 22 4.1鑽石材料的特性 22 4.1.1鑽石的基本特性 22 4.1.2鑽石與其它半導體特性比較 23 4.2鑽石薄膜的電性量測 24 4.2.1鑽石薄膜的量測方式 24 4.2.2鑽石薄膜的高溫電性量測 24 4.2.3鑽石薄膜的低溫電性量測 25 第五章 鑽石薄膜的電性分析及狀態分佈 27 5.1高溫電性 分析 28 5.2低溫電性分析 30 第六章 結論 33 參考文獻 35
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