[PDF] Top 20 Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net

... parallel process with inputloutput ports configuration, (8) sequential process with inputloutput ports configuration, ( 9 ) route determined single wafer grouping process with inpu[r] ... See full document

... the modeling capabilities for new systems and the remodeling of reconfigured ...systems. A resource-oriented modeling approach was used in this ...types of tools. Such a ... See full document

... particular, using the real furnace for testing not only introduces trouble but also wastes ...model and construct an emulation environment for the furnace. The colored timed Petri ... See full document

... Places: Place type (immediate place, timed place, and so on), place name, place priority, place color sets, boundedness, conflict transitions resolution rule, remote [r] ... See full document

... Abstract—The performance of a flexible manufacturing system (FMS) depends on the equipment efficiency and process ...ysis and fault diagnosis can be used to reduce the frequency ... See full document

... Practitioners—Performance evaluation and scheduling are two functions required by fab managers and ...proposed a tool which consists of a simulator and ... See full document

... wafer fab scheduling problem. We first proposed a systematic CTPN model for a wafer ...composed of two modules, one is routing module, and the other is elementary ...wafer fab, ... See full document

... Modeling, Analysis, Simulation and Control of Semiconductor Manufacturing Systems: A Generalized Stochastic Colored Timed Petri Net Approach.. Ming-Hung Lin and Li-Chen F’u[r] ... See full document

... The purpose of the Elementaly Module is to model the detailed equipment behavior in a wafer probe center, such as processing, setup, unscheduled equip- ment breakdown, [r] ... See full document

... The CTPN with object-oriented approach is a suitable modeling representation of a distributed system because a Petri net model has properties, such as imodularity (macro transition)[r] ... See full document

... Since the CTPN-based SPC and fault diagnosis models depend on the measured data from the inspection machines and the sensors’ data from the devices, they can be incorpor[r] ... See full document

... use of simulation models and optimization methods has been widely studied (Dolgui and O® tserov ...describes a schedule adjustment method that uses data from the previous optimization method ... See full document

... The HCTPN can be used to model the complex process flows i n wafer fah efficiently and the detailed manufacturing characteristics.. Also, new transitions are introduced [r] ... See full document

... continuous-time and discrete-time domains, respectively, for a digital controller ...properties and then translating the analog design into a discrete one using a suitable ... See full document

... The colored timed Petri net (CTPN) is used to model the furnace in the IC wafer fabrication [3] and in the whole wafer fabrication manufacturing system [4][1 I].. Jeng et [r] ... See full document

... Since the timed place Petri-net model can represen- t in routing flexibility, shared resources, and various lot sizes, as well as concurrency and precedence con- s[r] ... See full document

... From this entire fab model, several performance indexes, such as WIP, bottleneck detection, cycle time, wafer operation history tracking, and vehicle utilization can be eval[r] ... See full document

... is a normal action that can change the display of ...display of media normally implies a reschedule of current media ...OCPN and XOCPN lack the mod- eling components for these ... See full document

... §Department of Electrical Engineering, National Taiwan Ocean University, Keelung 202, Taiwan }Department of Electronic Engineering, Chung Yuan Christian University, Chung-Li 320, Taiwan Manufacturing ... See full document

... In this paper, a genetic algorithm (GA) embedded adaptive scheduling over a timed place Petri net (TPPN) model provides a new method for a flexible manufacturing[r] ... See full document