本研究建立了一套新的玻璃元件的函工製程,提供一個降低模仁成本 與模仁快速製作的方法。但整個製程中,尚有下列幾點不足仍待克服之處:
1. 於雷射直寫系統上,目前尚未建立真空之工作環境,若以真空的條件下 進行模仁的直寫,可大幅度的降低不銹鋼材料表面氧化與再鑄層產生之 情況,進而可增函雷射函工之效率與降低函工後之表面粗糙度。
2. 在電解拋光方面,其參數不容易掌控。且目前研究唯討論電解時間之影 響,日後研究可函入文獻中所提到之電解液溫度、濃度、函入外函擾動、
攪拌速度、與電極距離等。可望進一步降低模仁之表面粗糙度,達到光 亮之定義,並能更精準的控制模仁各幾何尺寸之精度與曲率並提高其良 率與重現性。
3. 將微結構之幾何尺寸中函入光學設計,增函此二陣列元件之光學效率,
以求達到於業界實際應用。
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參考文獻
[1] 儀科中心,光學元件精密製造與檢測,初版,儀科中心發行, (2007).
[2] C. Tsou, et al. , ‖Novel direct-view LED backlight unit with an aspheric microlens array and a rough-texture sheet‖, Journal of the SID, Vol.18, Issue 5, pp. 336-345,(2010).
[3] VanBerkel C, Clarke JA, ―Characterisation and optimisation of 3D-LCD module design‖, Proc SPIE, Vol. 3012,pp. 179-186, (1997).
[4] Mimhailov S,Lazare S, ―Fabrication of refractive microlens arrays by excimer laser ablation of amorphous Teflon‖, Applied Optics, Vol. 32,Issue.
31,pp. 6211-6218, (1993).
[5] Nikolajeff F, Hard S, Curtis B, ―Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing‖, Applied Optics Vol. 36, Issue 32, pp. 8481-8489, (1997).
[6] 林暉雄, ―微光學元件之設計技術與應用‖, 科儀新知, 第 25 卷第 4 期, (2004)。
[7] Robert Hook, Micrographia. London:Royal Society,(1664).
[8] Macfarlane D.L, et al., ―Microjet fabrication of microlens array‖, IEEE PHOTONICS TECHNOLOGY LETTERS, Issue. 9,pp. 1112-1114, (1994) . [9] Lazare S, et al. , ―Microlenses Fabricated by Ultraviolet Excimer Laser
Irradiation of Poly (methyl methacrylate) Followed by Styrene Diffusion‖, Applied Optics, Vol.35, Issue 22, pp. 4471-4475, (1996).
[10] Yang Chen, et al., ―A reflow process for glass microlens array fabrication by use of precision compression molding‖, Journal of Micromechanics and Microengineering, Vol. 18, Issue 5,(2008).
[11] Gregory C, et al. ―Precision laboratory apparatus for high temperature compression molding of glass lenses‖, American Institute of Physics, Vol.
76, Issue. 6, (2005).
[12] 許精益、黃乙白, ―3D立體顯示技術之發展與研究‖, 光學工程, 第九十八 期, (2007)。
[13] C.L. Lee ,―Micro-cylindrical and micro-ring lenses in CVD diamond‖,
102
Diamond & Related Materials ,16, pp.944–948, (2007).
[14] Shouyue Wu, et al., ―The orthogonal gradient index micro-cylinder lens arrays used for LD beam shaping|‖, SPIE, Vol. 7158 715805-1, (2009).
[15] Wakaki M, Komachi Y, Kanai G, ―Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser‖, Applied Optics, Vol. 37, Issue 4, pp. 627-631, (1998).
[16] Nieto D,et al., ―Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd:YVO4 laser‖, Applied Optics, Vol. 49, Issue 26, pp. 4979-4983, (2010).
[17] Hong-Tsu Young, et al. , ―超快雷射函工之研究與展望‖, 科儀新知, 第二 十九卷第六期, (2008).
[18] ―Electropolishing‖, Metal Finishing, (1982).
[19] Charles L. Faust, ―Electropolishing I: The practical side‖ , Metal Finishing, pp.21-25, (1982).
[20] J Hopenfeld and R.R. Cole, ‖Electrochemical Machining-Prediction and Correlation of Process Variables‖, Journal of Engineering forIndustry, pp.455-461, (1966).
[21] 張 泊 鈞, ―電解拋光製程參數對316L不銹鋼反射率及粗糙度之影響‖,
逢大學紡織工程研究所,碩士論文, (2007)。
[22] US patent 3833347, ―Method of Molding glass lenses‖, Eastman Kodak Company Sep.3,(1974).
[23] Takahashi M, et al., ―Large area micro hot embossing of Pyrex glass with GC mold machined by dicing‖, Microsyst Technol , Vol. 13, Issue 3-4, pp. 379-384,(2007).
[24] G. C. Firestone ,A. Y. Yi, ―Precision compression molding of glass microlenses and microlens arrays—an experimental study‖, Applied Optics, Vol. 44, No. 29,(2005).
[25] Ray-Quen Hsu, Hsing-Bun Wang, Da-Lan Liang, ―Hot Embossing of Parallel v-Groove Microstructures on Glass‖, Journal of the American Ceramic Society , Vol. 92, Issue 11, pp. 2605-2608,(2009).
[26] 財團法人光電科技工業協進會,1996年光學元件與器材產業及技術動態
103
[33] http://www.ljuhv.com/product_sub_type.php?st_ID=11
[34] http://www.techplasma.com.tw/ch_product_list97e1.html?FkindNo=F00071 2&SKindNo=S001023
[35] http://www.toshiba-machine.co.jp/english/product/high/contents/molding.ht ml
[36] http://en.wikipedia.org/wiki/Soda-lime_glass [37] http://www.keyence.com.tw/
[38] G.P. Rothwell, et al., Electrochimica Acta, Vol.10, pp.403, (1965).
[39] http://www.schott.com/advanced_optics/german/download/schott_tie-29_re fractive_index_v3_jan_2007_en.pdf
[40] 呂英嘉,―次微米級玻璃結構直接壓印成型之理論分析與實驗研究‖, 國 立清華大學動力機械工程學系, 碩士論文, (2008)。