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結果與討論

本論文研究了如何應用埋藏式BCB 波導於 1×2 Y-branch 分光器 結構,其中包含了理論計算與實際製作。

在理論部分,證明 micro-prism bending 確實有好的輸出效率,所 以應用在分光器結構上很適合,況且我們所製作的波導結構為埋藏式 結構,製程困難度相對於其他波導結構降低許多,所以實作上容易達 成。

在實作部份,我們不僅成功改善了 SOG 龜裂的問題,也製作出 較低損耗的Channel waveguide,量得的傳播損耗為 0.47dB/cm,而耦 合損耗較大的原因為導光 core 較小,且利用徒手切割其斷裂面不是 很好,最好的解決方式須將裂面加以研磨;以相同埋藏式波導製作方 式,製作1×2 Y-branch power splitter 元件,看到 3° 的輸出效率,可 知我們埋藏式結構確實有發揮其優點,在分光的部分,果真如我們所 推測的結果,利用側蝕現象,削尖了尖端部份,但角度越大效率愈差 的原因在micro-prism bending 的 prism 斜邊部分,角度越大斜邊形同 波浪狀的現象越明顯,所以損耗越高。

在斜邊波浪狀的改進,可以調整製程條件或是將光阻改變成靈敏 度(Sensitivity)較高的類型,這樣必會提升元件最後的輸出效率。

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