在本研究中將已開發完成之微型氣相層析儀，連續分析偵測方式 進行現場有機氣體逸散分布的研究。此次研究可以歸納出以下結論。
第一部分在國立臺灣大學電機工程學系無塵室內進行半導體製程 有機氣體現場分析，使用了不鏽鋼採樣筒進行定性，成功定性出以下 化合物: acetaldehyde、2-methyl butane、pentane、acetone、ethanol、
2-propanol、hexane、2-methyl pentane、2-methoxy 2-methyl propane、
toluene、m/p-xylene、anisole，其中使用微型氣相層析儀所能定性出的
所能吸附體積，因此採樣筒所採集到物種遠少於吸附管，而從質譜鑑 定結果而言，現場濃度低且相當複雜。本次實驗則以五種化合物進行 微型氣相層析儀有機氣體定性及定量，定性出 hexane、benzene、toluene、
ethylbenzene、m-xylene，8 個地點所監測到的濃度範圍介於 0 到 10 ppb。
根據濃度隨時間趨勢圖判斷，部分物種無法被定量，這是由於現場氣
而在偵測器的部分由於受限於偵測器的能力，無法立即定性場所的未 知物種，若能與攜帶型質譜儀結合，將大幅提升儀器定性及定量能力。
本次實驗由於受限於儀器數量及實驗條件並沒有做全面性布點，
無法以模型演算以追溯較大範圍的時間及空間上的物種分布及來源分 析，目前只使用統計軟體進行數據處理，在往後研究如果需要進行模 型演算分析，可以透過更改軟體程式在分析當下先行將數據處理成所 需格式，透過網路上傳至雲端並由人工選擇模型分析條件，大幅減少 前置的處理數據時間，在未來希望能改進上述部分，針對本次實驗未 能提到的物種進行探討並精進本研究方法，未來期望透過長期的監控 並針對不同地區物種背景的資料庫建立，當發生異常情形時就能立即 追溯責任歸屬，保障人員及環境的安全。
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