本計畫之目的為驗證於 TFBAR 元件中可以使用多孔性材料來取代氣隙結構，仍然能 得到共振濾波效果，初步實驗結果已證明此構想的可行性，進一步提高此型濾波器的高頻 濾波品質需調整多孔性材料微結構。製作此型 TFBAR 元件使用的製程步驟比現有背孔隔 離型、面加工氣隙型、Agilent 專利氣隙型等現有 TFBAR 元件簡化，具有產品化潛力。
本計畫之成果已投稿 2005 年中國材料科學學會年會，將於 2005 年 11 月發表。本計 畫執行期間也已培育 2 名碩士班研究生具備研製 TFBAR 元件的能力，並已完成學位論文:
白景文，「多孔性基材上之薄膜體聲波元件研製」，台灣科技大學碩士論文 (2005)。
楊詠暉，「以反應式磁控濺鍍法低溫濺鍍氮化鋁薄膜之研究」，台灣科技大學碩士論文 (2004)。
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可供推廣之研發成果資料表
□ 可申請專利 ■ 可技術移轉 日期：94 年 8 月 25 日
國科會補助計畫
計畫名稱：氣隙型氮化鋁薄膜體聲波振盪器研製 計畫主持人： 周賢鎧
計畫編號：NSC 93－2213－E－011－021學門領域：通訊