In this thesis, we propose an optical system design and performance optimization method for a LiDAR scanning system based on MEMS mirror and wide-angle lens, and fabricate a small and lightweight MEMS LiDAR. The weight of the entire system is less than 230 g. The volume is 150 mm×50 mm×25 mm, and through the ToF calculation method, the image processing program is developed to generate the point cloud image.
Through the system we designed, we demonstrated a wide-angle LiDAR with a FoV of 100 degrees. We use Zemax to design all the optical lenses in the system, including collimator, laser scanning system, wide-angle lens and receiver lens. In order to expand the scanning angle, we proposed a method of designing a high-performance wide-angle lens, and designed a wide-angle scanning lens that can magnify the scanning angle of the MEMS mirror to 100 degrees and the distortion is less than 3 %. It is worth mentioning that the use of MEMS mirror on the scanning device can achieve a smaller size and faster scanning speed, with high efficiency, large field of view, simple structure, low power consumption and light weight, which means that the 3D image LiDAR has very application value. In the 2 klux natural light environment, the wide-angle LiDAR is measured and analyzed. The maximum error is 4.1 cm, so the error is within 2 %. Finally, a self-written image processing program was used to convert the scanned data into a 3D point cloud image, and the generated image proved the complete function of LiDAR.
REFERENCE
[1] D. Wang, C. Watkins, and H. Xie, "MEMS Mirrors for LiDAR: A review,"
Micromachines (Basel), vol. 11, no. 5, Apr 27 2020, doi: 10.3390/mi11050456.
[2] S. Royo and M. Ballesta-Garcia, "An Overview of Lidar Imaging Systems for Autonomous Vehicles," Applied Sciences, vol. 9, no. 19, 2019, doi:
10.3390/app9194093.
[3] T. Raj, F. H. Hashim, A. B. Huddin, M. F. Ibrahim, and A. Hussain, "A Survey on LiDAR Scanning Mechanisms," Electronics, vol. 9, no. 5, 2020, doi:
10.3390/electronics9050741.
[4] S.-H. Chung, S.-W. Lee, S.-K. Lee, and J.-H. Park, "LIDAR system with electromagnetic two-axis scanning micromirror based on indirect time-of-flight method," Micro and Nano Systems Letters, vol. 7, no. 1, 2019, doi:
10.1186/s40486-019-0082-9.
[5] G. Kim and Y. Park, "LIDAR pulse coding for high resolution range imaging at improved refresh rate," Opt Express, vol. 24, no. 21, pp. 23810-23828, Oct 17 2016, doi: 10.1364/OE.24.023810.
[6] F. Schwarz et al., "Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR," presented at the MOEMS and Miniaturized Systems XIX, 2020.
[7] N. Radwell, A. Selyem, L. Mertens, M. P. Edgar, and M. J. Padgett, "Hybrid 3D ranging and velocity tracking system combining multi-view cameras and simple LiDAR," Sci Rep, vol. 9, no. 1, p. 5241, Mar 27 2019, doi: 10.1038/s41598-019-41598-z.
[8] L. A. Eldada, E.-H. Lee, S. He, G. Kim, J. Eom, and Y. Park, "Design and implementation of 3D LIDAR based on pixel-by-pixel scanning and DS-OCDMA," presented at the Smart Photonic and Optoelectronic Integrated Circuits XIX, 2017.
[9] K. Kuzmenko et al., "3D LIDAR imaging using Ge-on-Si single-photon avalanche diode detectors," Opt Express, vol. 28, no. 2, pp. 1330-1344, Jan 20 2020, doi: 10.1364/OE.383243.
[10] R. Tobin, A. Halimi, A. McCarthy, M. Laurenzis, F. Christnacher, and G. S. Buller,
"Three-dimensional single-photon imaging through obscurants," Opt Express, vol.
27, no. 4, pp. 4590-4611, Feb 18 2019, doi: 10.1364/OE.27.004590.
[11] Y. Takashima et al., "Development of coaxial 3D-LiDAR systems using MEMS scanners for automotive applications," presented at the Optical Data Storage 2018:
Industrial Optical Devices and Systems, 2018.
[12] J. Tachella et al., "Real-time 3D reconstruction from single-photon lidar data using plug-and-play point cloud denoisers," Nat Commun, vol. 10, no. 1, p. 4984, Nov 1 2019, doi: 10.1038/s41467-019-12943-7.
[13] X. Zhou, G. Li, J. Huddleston, and A. A. Chesworth, "Precision optical components for lidar systems developed for autonomous vehicles," presented at the Next-Generation Optical Communication: Components, Sub-Systems, and Systems VII, 2018.
[14] C. I. Rablau, A.-S. Poulin-Girard, and J. A. Shaw, "Lidar: a new self-driving vehicle for introducing optics to broader engineering and non-engineering audiences," presented at the Fifteenth Conference on Education and Training in Optics and Photonics: ETOP 2019, 2019.
[15] G. Kim and Y. Park, "Independent Biaxial Scanning Light Detection and Ranging
System Based on Coded Laser Pulses without Idle Listening Time," Sensors (Basel), vol. 18, no. 9, Sep 4 2018, doi: 10.3390/s18092943.
[16] A. McCarthy et al., "Kilometer-range, high resolution depth imaging via 1560 nm wavelength single-photon detection," Opt Express, vol. 21, no. 7, pp. 8904-15, Apr 8 2013, doi: 10.1364/OE.21.008904.
[17] B. Smith, B. Hellman, A. Gin, A. Espinoza, and Y. Takashima, "Single chip lidar with discrete beam steering by digital micromirror device," Opt Express, vol. 25, no. 13, pp. 14732-14745, Jun 26 2017, doi: 10.1364/OE.25.014732.
[18] M. J. Sun et al., "Single-pixel three-dimensional imaging with time-based depth resolution," Nat Commun, vol. 7, p. 12010, Jul 5 2016, doi:
10.1038/ncomms12010.
[19] M. J. Sun and J. M. Zhang, "Single-Pixel Imaging and Its Application in Three-Dimensional Reconstruction: A Brief Review," Sensors (Basel), vol. 19, no. 3, Feb 11 2019, doi: 10.3390/s19030732.
[20] G. Zhou, Z. H. Lim, Y. Qi, and G. Zhou, "Single-Pixel MEMS Imaging Systems,"
Micromachines (Basel), vol. 11, no. 2, Feb 20 2020, doi: 10.3390/mi11020219.
[21] K. Dholakia et al., "Real-time 3D video utilizing a compressed sensing time-of-flight single-pixel camera," presented at the Optical Trapping and Optical Micromanipulation XIII, 2016.
[22] D. Wang, L. Thomas, S. Koppal, Y. Ding, and H. Xie, "A Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR," IEEE Sensors Letters, vol. 4, no. 8, pp. 1-4, 2020, doi: 10.1109/lsens.2020.3006813.
[23] R. Moss et al., "Low-cost compact MEMS scanning ladar system for robotic applications," presented at the Laser Radar Technology and Applications XVII, 2012.
[24] M. D. Turner, G. W. Kamerman, B. L. Stann, J. F. Dammann, and M. M. Giza,
"Progress on MEMS-scanned ladar," presented at the Laser Radar Technology and Applications XXI, 2016.
[25] M. D. Turner, G. W. Kamerman, A. Kasturi, V. Milanovic, B. H. Atwood, and J.
Yang, "UAV-borne lidar with MEMS mirror-based scanning capability," presented at the Laser Radar Technology and Applications XXI, 2016.
[26] G. W. Kamerman et al., "A compact 3D lidar based on an electrothermal two-axis MEMS scanner for small UAV," presented at the Laser Radar Technology and Applications XXIII, 2018.
[27] C. Zhu, M. J. Hobbs, M. P. Grainger, and J. R. Willmott, "Design and realization of a wide field of view infrared scanning system with an integrated micro-electromechanical system mirror," Appl Opt, vol. 57, no. 36, pp. 10449-10457, Dec 20 2018, doi: 10.1364/AO.57.010449.
[28] X. Lee, C. Wang, Z. Luo, and S. Li, "Optical design of a new folding scanning system in MEMS-based lidar," Optics & Laser Technology, vol. 125, 2020, doi:
10.1016/j.optlastec.2019.106013.
[29] A. McCarthy et al., "Kilometer-range depth imaging at 1,550 nm wavelength using an InGaAs/InP single-photon avalanche diode detector," Opt Express, vol.
21, no. 19, pp. 22098-113, Sep 23 2013, doi: 10.1364/OE.21.022098.
[30] S. D. Johnson, D. B. Phillips, Z. Ma, S. Ramachandran, and M. J. Padgett, "A light-in-flight single-pixel camera for use in the visible and short-wave infrared,"
Opt Express, vol. 27, no. 7, pp. 9829-9837, Apr 1 2019, doi:
10.1364/OE.27.009829.
[31] M. Zohrabi, W. Y. Lim, R. H. Cormack, O. D. Supekar, V. M. Bright, and J. T.
Gopinath, "Lidar system with nonmechanical electrowetting-based wide-angle
beam steering," Opt Express, vol. 27, no. 4, pp. 4404-4415, Feb 18 2019, doi:
10.1364/OE.27.004404.
[32] K. Ito et al., "System Design and Performance Characterization of a MEMS-Based Laser Scanning Time-of-Flight Sensor MEMS-Based on a 256 $\times$ 64-pixel Single-Photon Imager," IEEE Photonics Journal, vol. 5, no. 2, pp. 6800114-6800114, 2013, doi: 10.1109/jphot.2013.2247586.
[33] M. J. R. Heck, "Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering," Nanophotonics, vol. 6, no.
1, pp. 93-107, 2017, doi: 10.1515/nanoph-2015-0152.
[34] J. Zhou and K. Qian, "Low-voltage wide-field-of-view lidar scanning system based on a MEMS mirror," Appl Opt, vol. 58, no. 5, pp. A283-A290, Feb 10 2019, doi: 10.1364/AO.58.00A283.
[35] P. K. Choudhury and C.-H. Lee, "Simultaneous Enhancement of Scanning Area and Imaging Speed for a MEMS Mirror Based High Resolution LiDAR," IEEE Access, vol. 8, pp. 52113-52120, 2020, doi: 10.1109/access.2020.2979326.
[36] X. Lee and C. Wang, "Optical design for uniform scanning in MEMS-based 3D imaging lidar," Appl Opt, vol. 54, no. 9, pp. 2219-23, Mar 20 2015, doi:
10.1364/AO.54.002219.
[37] X. Zhang, S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid," Opt Express, vol. 24, no.
4, pp. 3479-87, Feb 22 2016, doi: 10.1364/OE.24.003479.
[38] CBC Geospatial Consulting, Inc., “Terrestrial LiDAR 3D Laser Scanning”, 2018, http://www.cbcgeospatial.com/terrestrial-lidar.html”
[39] Kathleen Hagen, “U.S. Airborne LiDAR Market Top Impacting Factors”, 2016,
https://medium.com/@kathleenhagen2/u-s-airborne-lidar-market-top-impacting-factors-b19def6781c4
[40] “Advanced Driver Assistance Systems (ADAS)”, 2019, https://www.youtube.com/watch?v=514-AnwOeGc&app=desktop
[41] Alan Ohnsman, “Lidar Pioneer Velodyne Debuts $100 Auto Safety Sensor As
Self-Driving Cars’ Pace To Market Slows”, 2020,
https://www.forbes.com/sites/alanohnsman/2020/01/07/lidar-pioneer-velodyne-
debuts-100-auto-safety-sensor-as-self-driving-cars-pace-to-market-slows/?sh=47b819ae6cbc
[42] Junko Yoshida, “Lidar Tech Today, Lidar Vendors Tomorrow”, 2018, https://www.eetimes.com/lidar-tech-today-lidar-vendors-tomorrow/
[43] Bharat Lohani, “Surveillance system based on Flash LiDAR”, 2013, https://www.researchgate.net/publication/261333968_Surveillance_system_base d_on_Flash_LiDAR
[44] Quanergy Systems, Inc., https://quanergy.com/products/s3/
[45] Velodyne, Inc., https://velodynelidar.com/products/
[46] Infineon, Inc., https://www.infineon.com/
[47] A. Bauer, E. M. Schiesser, and J. P. Rolland, "Starting geometry creation and design method for freeform optics," Nat Commun, vol. 9, no. 1, p. 1756, May 1 2018, doi: 10.1038/s41467-018-04186-9.
[48] T. Yang, G. F. Jin, and J. Zhu, "Automated design of freeform imaging systems,"
Light Sci Appl, vol. 6, no. 10, p. e17081, Oct 2017, doi: 10.1038/lsa.2017.81.
[49] A. Bauer and J. P. Rolland, "Design of a freeform electronic viewfinder coupled to aberration fields of freeform optics," Opt Express, vol. 23, no. 22, pp. 28141-53, Nov 2 2015, doi: 10.1364/OE.23.028141.
[50] K. Fuerschbach, J. P. Rolland, and K. P. Thompson, "Theory of aberration fields
for general optical systems with freeform surfaces," Opt Express, vol. 22, no. 22, pp. 26585-606, Nov 3 2014, doi: 10.1364/OE.22.026585.
[51] Y. Zhong and H. Gross, "Initial system design method for non-rotationally symmetric systems based on Gaussian brackets and Nodal aberration theory," Opt Express, vol. 25, no. 9, pp. 10016-10030, May 1 2017, doi:
10.1364/OE.25.010016.
[52] T. Gong, G. Jin, and J. Zhu, "Point-by-point design method for mixed-surface-type off-axis reflective imaging systems with spherical, aspheric, and freeform surfaces," Opt Express, vol. 25, no. 9, pp. 10663-10676, May 1 2017, doi:
10.1364/OE.25.010663.
[53] R. Tang, B. Zhang, G. Jin, and J. Zhu, "Multiple surface expansion method for design of freeform imaging systems," Opt Express, vol. 26, no. 3, pp. 2983-2994, Feb 5 2018, doi: 10.1364/OE.26.002983.
[54] T. Yang, J. Zhu, and G. Jin, "Starting configuration design method of freeform imaging and afocal systems with a real exit pupil," Appl Opt, vol. 55, no. 2, pp.
345-53, Jan 10 2016, doi: 10.1364/AO.55.000345.
[55] X. Wu, J. Zhu, T. Yang, and G. Jin, "Transverse image translation using an optical freeform single lens," Appl Opt, vol. 54, no. 28, pp. E55-62, Oct 1 2015, doi:
10.1364/AO.54.000E55.
[56] C. Chen, "Methods of solving aspheric singlets and cemented doublets with given primary aberrations," Appl Opt, vol. 53, no. 29, pp. H202-12, Oct 10 2014, doi:
[57] Robert Fischer, “Optical System Design, Second Edition”, McGraw-Hill Education, ISBN-13 : 978-0071472487, 2008
[58] Eugene Hecht, “Optics”, Pearson, ISBN-13 : 978-0133977226, 2015 [59] Zemax, Inc., https://www.zemax.com/
[60] Veljko Milanovi, “DEVICE FOR OPTICAL IMAGING, TRACKING, AND POSITION MEASUREMENT WITH ASCANNING MEMS MIRROR”, United States Patent, US 8.427,657 B2, 2013
[61] Yew Kwang Low, “WIDE FIELD - OF - VIEW LIDAR OPTICAL ASSEMBLY AND SYSTEM”, United States Patent, US 2020/0096643 A1, 2020
[62] Yew Kwang Low,” MEMS mirror with extended field of view useful for vehicle lidar”, United States Patent, US 2020/0150244 A1, 2020
[63] J. Zhou and K. Qian, "Low-voltage wide-field-of-view lidar scanning system based on a MEMS mirror," Appl Opt, vol. 58, no. 5, pp. A283-A290, Feb 10 2019, doi: 10.1364/AO.58.00A283.
[64] C. Zhu, M. J. Hobbs, M. P. Grainger, and J. R. Willmott, "Design and realization of a wide field of view infrared scanning system with an integrated micro-electromechanical system mirror," Appl Opt, vol. 57, no. 36, pp. 10449-10457, Dec 20 2018, doi: 10.1364/AO.57.010449.
[65] X. Lee, C. Wang, Z. Luo, and S. Li, "Optical design of a new folding scanning system in MEMS-based lidar," Optics & Laser Technology, vol. 125, 2020, doi:
10.1016/j.optlastec.2019.106013.