In this thesis, a cross-coupled synchronized control unit is applied on stage so that the consistency of two axes piezo actuators is guaranteed. Besides, a linearization of hysteresis phenomenon is utilized specially for every piezo-actuator in order to achieve precision positioning control. A modified Preisach model is used to simulate the hysteresis difference and compensate the nonlinearity caused by the hysteresis. The hysteresis differences of signals under different frequencies can be closely approximated by amplifying the differences of a static hysteresis model with certain gain. The movement difference of dual axes is compensated as well under all frequencies. With all of those techniques, the performance of the tracking signal is enhanced.
What’s more, to improve the accuracy of tracking control, a PI controller and a feedback filter with a corner frequency are added as outer control loop.
Although now the synchronized unit is added under the cost of lower the overall performance, the balance taken after specific design. As tried before, too powerful synchronized unit is will result a huge influence on overall control that may cause unstable. On the other side, the performance of synchronization cannot meet requirement.
However, the stability of dual axes pushing force should have improved the performance, this means there is still a space for reducing algorithm complexity and decoupling the system synchronization.
There’s no doubt that the hysteresis linearization can effectually improve the performance of the tracking control, but the relationship between the multiplied gain and the frequency of the input signal is still not formulated which still need to be decided mainly by experiments.
To proceed with this topic for practical and industrial usage, the author suggests
following points for further research:
1. Observe and formulate the relationship between the differences of hysteresis phenomena while the frequency of the signal changes.
2. Self-tuning linearization and synchronization design to set parameters automatically so that the process of duplicated experiments can be omitted
3. Decoupling the system in a more proper way so that it not only reducing overall complexity but also makes the overall performance better than individual overall performance without synchronization.
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