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Catalyst-Free Fabrication of align Ag Nanorods Using Mixed-Gases Sputtering

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Catalyst-Free Fabrication of align Ag Nanorods

Using Mixed-Gases Sputtering

1Institute of Electro-Optical Science and Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, TAIWAN.

2Institute of Nanotechnology and Microsystems Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, TAIWAN.

3Institute of Microelectronics & Department of Electrical Engineering, Center for Micr/Nano Science and Technology, National Cheng Kung University, Tainan 701, TAIWAN.

4Institute of Microelectronics, National Cheng Kung University, Tainan 701, TAIWAN.

5Department of Electronic Engineering National Taiwan University of Science and Technology, Taipei 106, TAIWAN

* Corresponding author: [email protected]

Figure 2 SEM images of (a) Silver oxide nuclei, (b) Ag nanorod s.

Figure 3 XRD spectra of Ag nanorods and silver oxide clusters. Figure 1 Growth mechanism of Ag nanorod arrays by sputtering

(b) Ag grain Ag nanorod (a) Si (111) (200)

Figure 4. (a) A typical TEM images of Ag nanorods. The inset is SAED of the white circle. (b) The interface between Ag nanorod and reduced metal nucleus.

Paper ID: PTu-24

ABSTRACT:

Ag nanorods have been successfully fabricated by a mixed-gases sputtering without any extra catalysts and Ag nanorods were arrayed on the film surface. The Ag buffer layer existed between the bottom of Ag nanorods and Si substrate. Ag nanorods located on the metallic silver particles after the thermal decomposition of the silver oxide. The formation of silver oxide resulted from the input of oxygen during the sputtering. The subsequent growth for Ag nanorods started from the single metal silver grain that originated from the decomposition through thermal reduction. This mechanism of oxidation reduction growth (MORG) used no catalysts and improved interface effect.

Zhan-Shuo Hu

1

, Fei-Yi Hung

2*

, Shoou-Jinn Chang

1,3

,Kuan-Jen Chen

4

, Bo-Cheng Lin

5

Jay Chang

1

, Sheng-Po Chang

4

20 30 40 50 60 70 80 Ag3O4 (111) AgO (200) (111) (200) (220) (311) Int ens it y ( a .u. ) 2θ degree AgO nanoclusters Ag nanorods

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