奈米壓印的概念
奈米壓印 奈米印章 即刻印、蓋印章的概念
一個印章可以使用很多 次
模子有多精細，印出來 就有多精細流程步驟
製作一個模子
在基版上塗上高分子 (高分子在高 溫時成膠狀)
高溫下，下壓模子
靜待冷卻(此時高分子會漸漸固化)
將模子剝離，高分子上便留下模 子的反向印痕1
o 下 壓2
o3
o模子 高分子 基版
奈米壓印 VS. 傳統微影技術
傳統微影技術
光學微影：步驟簡易快速，大面積製作 缺點：受光學繞射限制，解析度只能到微 米(10-6
m)
電子束微影：解析度可達奈米(10-9
m)缺點：面積製作過小，步驟繁雜費時，成 本高
奈米壓印
步驟簡易快速，成本小，大面積製作，解析 度更可達奈米程度！奈米壓印的應用
應用於半導體製程中，主要針對100奈米 以下的精細結構
光碟製作，可提高儲存容量
光元件奈米構造、生醫晶片…等
生醫晶片 晶圓
Bio-mimic Gecko Tape
y Geckos rely on nanohairs to adhere to ceilings and vertical walls
Metin Sitti et al.
J. Adhesion Sci. Technol., Vol. 17, No. 8, pp. 1055–1073 (2003)107
National Taiwan University National Taiwan University
y The subwavelength anti-reflective feature on cicada wings is caused by hair-like structures
Guoyong Xie et al.
Nanotechnology 19 (2008) 095605108 Introduction Introduction
-
-Nanohair StructureNanohair Structure
National Taiwan University National Taiwan University
109
National Taiwan University National Taiwan University
An SEM image of a large area of elongated nanohairs fabricated from mold 1 (5.0 μm in depth and 840 nm in width with a 2 μm pitch).
110
National Taiwan University National Taiwan University
An SEM image of a large area of elongated nanohairs fabricated from mold 1 (5.0 μm in depth and 840 nm in width with a 2 μm pitch).
111
National Taiwan University National Taiwan University
An SEM image of a large area of elongated nanohairs fabricated from mold 2 (3.3 μm in depth and 640 nm in width with a 1 μm pitch).
112
National Taiwan University National Taiwan University
113
An SEM image of a large area of elongated nanohairs fabricated from mold 2 (3.3 μm in depth and 640 nm in width with a 1 μm pitch).
National Taiwan University National Taiwan University
The digital camera image of a DI water dropped on the flat FEP. The contact angle here is about 108.0°, proving that FEP is highly hydrophobic itself.
The digital camera image of a DI water dropped on the FEP with Nanohair structures fabricated from mold 2. The maximum static apparent contact angle can reach
151.8°. 118
National Taiwan University National Taiwan University
2 2 2
2
0 0
1
) cos 1 ( sin 2
d r d
d r rd
f
π π θ θ θ φ π+
θ=
= ∫ ∫
−120
National Taiwan University National Taiwan University
