智能传感器ZS-CRT命令参考欧姆龙ZS-CRT手册_广州菱控

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Cat. No. Z232-E1-02

ZS Series

Non-procedual Communication

Command Reference

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Introduction

Thank you for purchasing the ZS Series.

This manual provides reference information on non-procedural communication commands for ZS Series.

This manual provides information for the following models and versions.

Different firmware versions may cause communication errors, unintended setting overwrite, and damages on the controller. Please make sure to use the controller with the correct software version.

If your software version is not listed in the table above, please update the software using the SmartMonitorZS firmware update software, such as WarpEngineZS, to match the software version.

When using the ZS Series, be sure to observe the following:

• The ZS Series must be operated by personnel knowledgeable in electrical engineer- ing.

• To ensure correct use, please read this manual thoroughly to deepen your under- standing of the product.

• Please keep this manual in a safe place so that it can be referred to whenever neces- sary.

Model Firmware Version

ZS-LDC v2.000 or later

ZS-HLDC v1.000 or later

ZS-MDC v2.000 or later

ZS-DSU v2.000 or later

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Setting the Communication Specifications... 2

Format... 3

List of Non-procedural Commands ... 4

List of Parameters (ZS-LDC)... 7

List of Parameters (ZS-HLDC) ... 12

List of Parameters (ZS-MDC)... 20

List of Parameters (ZS-DSU) ... 25

FLOWDATA Reference... 30

Capturing Image Data ... 36

Example of Usage... 38

Revision History ... 42

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Setting the Communication Specifications

Change the settings of the controller communication specifications for non-procedural communication with the external device.

Use USB cable or RS-232C cable to connect ZS Series controllers to external devices. For USB cable connection, install Smart Monitor ZS and USB driver beforehand. After installing Smart Monitor ZS, USB ports are recognized as standard COM ports, and communication is achieved as with the RS-232C.

(Setting the communication specifications including baud rate is not necessary.) For details on how to connect cable, refer to the User's Manual for each controller.

1. Set the mode switch to "FUN".

2. Select [System] - [Communication] - [Mode] menu.

3. Select [non-procedural].

4. For RS-232C cable connection, select [System] - [Communication] - [RS-232C]

menu to set the appropriate communication specifications for the external device.

5. Save the settings.

If you are connecting multiple controllers, set all controllers other than ZS-HLDC to [non-procedural].

Note that the communication with SmartMonitor ZS is not available in [non-procedural] mode. If you want to communicate with SmartMonitor ZS, reset to [CompoWay/F] communication.

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Format

The format of non-procedural commands are as follows:

Example: A command to acquire a measured value MEASURE command

* Each character is output as an ASCII code (except for FLOWDATA response).

The format of returned values changes depending on the command.

For the description of each command, refer to "List of Non-procedural Commands"

section.

•MEASURE / M / DATAGET

The returned value consists of right aligned 11 characters and a delimiter. The unit is nm for a displacement value. Shortfalls of the characters are filled with spaces from the left.

Example: The returned value is -30.719923 mm.

•BANKGET command

The returned value is output as 1 character bank No.

Example: The bank No. is 2.

•VERGET command

The returned value is output in the following format:

•Other commands

Either OK or ER is returned according to the result of the command. The command was executed properly:

The command was not executed properly or the setting was NG:

Space Delimiter

M E A S U R E O CR

- 3 0 7 1 9 9 2 3 CR

1 CR

Z S - L D C 2 . 0 0 0 CR

Version

O K CR

E R CR

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List of Non-procedural Commands

Command

name Format Returned value Description Support

LDC ^HLDC MDC DSU

MEASURE MEASURE

Acquires a measured value.

If <Task No.> is omitted, it aqcuires the displayed measured value.

Yes Yes Yes Yes

M M <Task No.>

Same as MEASURE

command. ^Yes ^Yes ^Yes ^Yes

DATAGET DATAGET <Unit No.>

<Data>

Acquires measurement data or setting data of the processing unit.

* For details of numbers, refer to "List of

Parameters."

p.7

Yes Yes Yes Yes

DATASET DATAGET <Unit No.>

OK <delimiter>

ER <delimiter>

Changes setting data of the processing unit.

* For details of numbers, refer to "List of

Parameters."

p.7

Yes Yes Yes Yes

BANKGET BANKGET<delimiter> <Bank No.>

Acquires the current bank

No. ^Yes ^Yes ^Yes ^Yes

BANKSET BANKSET<Bank No.>

OK <delimiter>

ER <delimiter>

Switches to the designated

bank No. ^Yes ^Yes ^Yes ^Yes

ZERORST ZERORST

OK <delimiter>

ER <delimiter>

Executes a zero-reset. If

<Task No.> is omitted, it executes on the task currently displayed as a result. If <Task No.> is set to 4, it executes on all the tasks.

Yes Yes Yes No

ZEROCLR ZEROCLR

OK <delimiter>

ER <delimiter>

Cancels a zero-reset. If

<Task No.> is omitted, it executes on the task currently displayed as a result. If <Task No.> is set to 4, it executes on all the tasks.

Yes Yes Yes No

DATASAVE DATASAVE

OK <delimiter>

ER <delimiter>

Saves all the bank data on the flash memory of the controller.

Yes Yes Yes Yes

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List of Non-procedural Commands

VERGET VERGET<delimiter> <Type/Version>

Acquires version information of the system.

Example: ZS-LDC 1.100<delimiter>

Yes Yes Yes Yes

BKMC2CTR BKMC2CTR

OK <delimiter>

ER <delimiter>

Sends bank files stored on a memory card to the specified bank of the specified controller.

Example: To transfer the bank data of the bank file No. 2 on the memory card to the controller of 1CH, enter the following command.

BKMC2CTR 2 1<delimiter>

No No No Yes

BKCTR2MC BKCTR2MC

OK <delimiter>

ER <delimiter>

Sends the specified bank of the controller of the specified CH to the memory card.

Example: To transfer the bank data on the Bank 3 of 2CH to the Bank file No. 10 on the memory card, enter the following command.

BKCTR2MC 10 2 3<delimiter>

No No No Yes

FLOWDATA FLOWDATA

OK <delimiter>

ER <delimiter>

Used to acquire measurement data at the shortest intervals possible.

For details, refer to

"FLOWDATA Reference."

p.30

Yes (*1)

Yes (*1) No

CFLOGGET CFLOGGET

:

Or, if the file with the specified logging No. does not exist, the return value is as follows:

NO FILE <delimiter>

If memory card is not inserted, the return value is as follows:

Obtains the measurement value from the logging file with the specified No.

Enter 3-digits number to the logging No.

Examples:

For the Logging No. 1

⇒

001

For the Logging No. 11

⇒

011

No No No Yes (*2) Command

LDC HLDC MDC DSU

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List of Non-procedural Commands

*1 It is available when USB cable connection is used.

*2 For ZS-DSU Ver 2.00 or later. It is available when USB cable connection is used.

* Specifying CH

In case other than ZS-HLDC

Specify <CH No.> before <delimiter>. If <CH No.> is omitted, the command operates on the CH that received it.

Example: To acquire the result for TASK2 of the controller of 2CH, M 1 2 <delimiter>

In case of ZS-HLDC

Specify #XX at the beginning of the command.

If the CH No. is 1, specify #01. (Be sure to note double digits.)

If <CH No.> is omitted, the command operates on the CH that received it.

Example: To acquire the result for TASK2 of the controller of 2CH,

#02 M 1 <delimiter>

* Specifying the node

Specify @xx at the beginning of the command.

If the node No. is 1, specify @01. (Be sure to note double digits.)

If the node No. is omitted, the command operates on the node that received it.

To specify, the node and CH together in case of ZS-HLDC, specify @XX #∆∆ at the head of the command.

* Format of a returned value

A returned value for MEASURE,M,DATAGET,CFLOGGET,CFDATGET is the right aligned 11 characters.

* Upper case and lower case characters

For alphabetic, only upper case characters are accepted.

* Task No.

Omit <Task No.> when issuing a command for ZS-LDC.

Task Nos are assigned as follows: 0: TASK1 1: TASK2 2: TASK3 3: TASK4.

CFIMGGET CFIMGGET

(Omitted) Capture the specified image data.

"Capturing Image Data."

p.36

No No No Yes (*2)

CFDATGET CFDATGET

:

Obtains the measurement value from the logging file for the image data in the specified group.

"Capturing Image Data."

p.36

No No No Yes (*2) Command

LDC HLDC MDC DSU

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List of Parameters (ZS-LDC)

The following parameters can be obtained or set by DATASET or DATAGET command:

Unit No. Data No. Parameter Setting range/Output range Others

0 0 Measurement mode 0: STANDARD

1: HI-RESO 2: HI-SPEED 3: HI-SENS 4: CUSTOM 12 Start position of area 1 0 to 639 (pix) 14 End position of area 1 0 to 639 (pix) 24 Start position of area 2 0 to 639 (pix) 26 End position of area 2 0 to 639 (pix)

18 Exposure time 2 to 200 (1 div: 0.1ms) Parameters for CUSTOM 19 Number of additional mode

lines

1 to 200

20 Line skipping 0: OFF

1: ON

32 Meas. Cycle 112 to 20000 (us)

1 0 Head installation 0: DIFFUSE

1: REGULAR

2 0 LD power mode 0: Auto

1: Auto-scale 2: Fixed

2 Surface to be

controlled for light amount

0: Peak 1: 1st surface 2: 2nd surface 3: 3rd surface 13 Lower limit of LD

power

0 to 800 (1 div: 0.1%)

14 Upper limit of LD power

0 to 800 (1 div: 0.1%)

37 Incident level (1st surface)

0 to 4095 (tone)

38 Incident level (2nd surface)

0 to 4095 (tone)

39 Incident level (3rd surface)

0 to 4095 (tone)

3 0 Measurement object 0: NORMAL

1: PCB 2: MIRROR 3: GLASS 4: THICK 5: GAP 6: CUSTOM

1 Glass thickness/Gap

mode

0: Normal 1: Film/Else

2 Glass thickness/Gap

mode

0: STOP 1: MOVE

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List of Parameters (ZS-LDC)

3 3 Image smoothing level 0: None

1: Filter size 2 2: Filter size 4 3: Filter size 8 4: Filter size 16

4 Background removing

level before addition

0 to 255 (tone)

level after addition

0 to 4095 (tone)

6 Edge threshold 0: 0%

1: 12.5%

2: 25%

3: 37.5%

4: 50%

5: 62.5%

6: 75%

7: 87.5%

4 0 Mutual interference

prevention mode

0: OFF 1: ON 1 Mutual interference

prevention timing

0: Timing A 1: Timing B

5 0 Gain 1 to 5

40 1 Measurement surface

of area 1

0: 1st surface 1: 2nd surface 2: 3rd surface

Parameters for area 1 at Glass thickness/Gap measurement by moving the objects.

To refer to or set the parameters for area 2, add 20 to the unit No. (*) 32 Measurement value of

area 1 (1st surface)

- (nm)

33 Measurement value of area 1 (2nd surface)

- (nm)

34 Measurement value of area 1 (3rd surface)

- (nm)

41 0 Scaling mode 0: OFF

1: ON

1 Span value -20000 to 20000 (1 div: 0.0001)

2 Offset value -999999999 to 999999999 (nm)

42 2 Smooth 0: OFF

1: ON

43 2 Average 0: 1 time

1: 2 times 2: 4 times 3: 8 times 4: 16 times 5: 32 times 6: 64 times 7: 128 times 8: 256 times 9: 512 times 10: 1024 times 11: 2048 times 12: 4096 times

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List of Parameters (ZS-LDC)

44 2 Differential 0: OFF

1: ON 3 Differentiation cycles 1 to 5000 (ms)

45 2 Hold type 0: OFF

1: PEAK 2: BOTTOM 3: P-P 4: AVERAGE 5: SAMPLE

3 Trigger method 0: EXT

1: SELF-UP 2: SELF-DOWN

4 Trigger level -999999999 to 999999999

(nm)

5 Trigger hysteresis 0 to 999999999 (nm) 6 Trigger delay (ms) 0 to 5000 (ms) 7 Sampling period (ms) 1 to 5000 (ms)

8 Trigger delay mode 0: OFF

1: ON

46 5 Offset at zero reset -999999999 to 999999999

(nm)

6 Zero reset mode 0: REAL

1: HOLD

120 0 Non-measurement

settings

0: KEEP 1: CLAMP

1 Output at CLAMP 0: MAX

1: 20mA 2: 12mA 3: 4mA 4: MIN

121 0 Hysteresis width 0 to 999999999 (nm) Setting judgment process

1 Timer mode 0: OFF

1: OFF DELAY 2: ON DELAY 3: ONE SHOT

2 Delay time 1 to 5000 (ms)

122 2 Monitor focus mode 0: OFF

1: ON 3 Monitor focus distance

value 1

-999999999 to 999999999 (nm)

4 Monitor focus distance value 2

-999999999 to 999999999 (nm)

5 Monitor focus current value 1

4 to 20 (mA)

7 Monitor focus voltage value 1

-10 to 10 (V)

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List of Parameters (ZS-LDC)

(*)

When [Glass thickness/Gap-Film/Else-Move] is selected, task processes similar to those of ZS-MDC are performed internally.

The following processes are assigned to respective tasks:

The measurement conditions can be set for each task in this mode.

126 4 External input 0

ActiveSelect

0: Low Active 1: High Active

5 External input 1

ActiveSelect

6 External input 2

ActiveSelect

7 External input 3

ActiveSelect

8 External input mode 0: Standard mode 1: Bank switching mode 2: Parallel IN off mode 9 Control TASK setting 0: TASK1

1: TASK2 2: TASK3 3: TASK4

127 0 External input (IN)

task mode

0: None 1: TASK1 2: TASK2 3: TASK3 4: TASK4 5: TASKALL 1 External input (IN)

function mode

0: Standard 1: Bank 2 External output (OUT)

task mode

0: None 1: TASK1 2: TASK2 3: TASK3 4: TASK4 4 Linear output task

mode

0: None 1: TASK1 2: TASK2 3: TASK3 4: TASK4 6 Digital output target 0: OFF

1: ON 10 External input 0 mode 0: Not used

1: Trigger 2: Hold reset 3: Laser off 4: Zero reset 11 External input 1 mode

12 External input 2 mode 13 External input 3 mode

TASK 1 Calculates Area 1 displacement value.

TASK 3 Calculates the difference value (=Thickness/Gap) between TASK1 and TASK2.

TASK 4 Unused

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List of Parameters (ZS-LDC)

Setting Threshold Value

• A mode other than [Glass thickness/Gap-Film/Else-Move] is selected.

• [Glass thickness/Gap-Film/Else-Move] is selected.

48 2 Lower limit of

threshold

-999999999 to 999999999 (nm)

3 Upper limit of

threshold

-999999999 to 999999999 (nm)

4 Hysteresis width 0 to 999999999 (nm)

5 Timer mode 0:OFF

1:OFF DELAY 2:ON DELAY 3:ONE SHOT

88 2 Lower limit of

threshold

-999999999 to 999999999 (nm)

3 Upper limit of

threshold

-999999999 to 999999999 (nm)

5 Timer mode 0:OFF

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List of Parameters (ZS-HLDC)

The following parameters can be obtained or set by DATASET or DATAGET command:

0 0 Measurement mode 0: STANDARD

1: HI-RESO 2: HI-SPEED 3: HI-SENS 4: CUSTOM

When multi-task mode is OFF.

Measurement mode 1: STANDARD 2: HI-RESO 3: HI-SENS 4: CUSTOM

When multi-task mode is ON.

12 Start position of area 1 0 to 639 (pix) 14 End position of area 1 0 to 639 (pix)

13 Start line of area 1 0 to (No. of additional lines - 1) 15 End line of area 1 0 to (No. of additional lines - 1) 24 Start position of area 2 0 to 639 (pix)

26 End position of area 2 0 to 639 (pix)

25 Start line of area 2 0 to (No. of additional lines - 1) 27 End line of area 2 0 to (No. of additional lines - 1)

18 Exposure time 2 to 200 (1 div: 0.1ms)

Parameters for CUSTOM mode 5 to 200 (1 div: 0.1ms)

19 Number of additional lines

1 to 200

8 to 200

20 Line skipping 0: OFF

1: ON

22 2-area mode 0: OFF

1: ON

23 Compensation mode 0: OFF

1: Start position compensation 2: End position compensation 3: Start/End position compensation 32 Measurement cycle 112 to 20000 (us) 192 Reference point teach for

compensation mode

1: Execute teach

193 2-area teach 1: Execute teach

1 0 Head installation 0: Diffuse

1: Regular

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List of Parameters (ZS-HLDC)

2 0 LD power mode 0: Auto

1: Auto-scale 2: Fixed 2 Surface to be controlled

for light amount

0: Peak 1: First surface 2: Second surface 3: Third surface

2 6 LD power when fixed 0 to 800 (1 div: 0.1%)

13 Lower limit of LD power 0 to 800 (1 div: 0.1%) 14 Upper limit of LD power 0 to 800 (1 div: 0.1%)

32 Incident level 0 to 4095

36 LD power 0 to 800 (1 div: 0.1%)

37 Incident level (First surface)

0 to 4095

38 Incident level (Second surface)

0 to 4095

39 Incident level (Third surface)

0 to 4095

3 0 Measurement object 0: Normal

1: PCB 2: Mirror 3: Glass

4: Glass thickness

2 GLASS/GLASS

THICKNESS mode

0: Mode 1 1: Mode 2 3 Image smoothing level 0: No filter

1: Filter size 2 2: Filter size 4 3: Filter size 8 4: Filter size 16

When the

measurement object is changed, the settings are initialized according to the selected object.

level before addition

0 to 255 (tone)

6 Edge threshold 0: 0%

1: 12.5%

2: 25%

3: 37.5%

4: 50%

5: 62.5%

6: 75%

7: 87.5%

4 0 Mutual interference

prevention mode

0: OFF 1: ON

1 Mutual interference

prevention timing

0: Timing A 1: Timing B

5 0 Gain setting 1 to 5

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List of Parameters (ZS-HLDC)

40 0 Measurement mode 0: OFF

1: Average 2: Peak 3: Bottom 4: Thickness 5: Gap 6: K+mX; +nY

TASK1 settings.

The settings in Unit Number 40 are valid only for multi-task mode.

3 Parameter X 0: None

1: TASK 1 2: TASK 2 3: TASK 3 4: TASK 4

4 Parameter Y 0: None

5 Parameter K -999999999 to 999999999 (nm)

8 Parameter M -100 to 100 (1div: 0.1)

9 Parameter N -100 to 100 (1div: 0.1)

1 Surface for

measurement (Area 1)

0: First surface 1: Second surface 2: Third surface

10 Surface for

measurement (Area 2)

0: First surface 1: Second surface 2: Third surface 11 Measurement position 1

(for thickness measurement)

0: None 1: Average 2: Peak 3: Bottom 12 Measurement position 2

(for thickness measurement)

0: None 1: Average 2: Peak 3: Bottom

13 Measurement area 0: Area 1

1: Area 2 14 Width of peak bottom 0 to 255

32 Measurement value

(First surface)

- (nm)

(Second surface)

- (nm)

(Third surface)

- (nm)

1: ON

1 Span value -20000 to 20000 (1 div: 0.0001)

42 2 Smooth 0: OFF

1: ON

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List of Parameters (ZS-HLDC)

(*)

If GLASS/MODE 2 or GLASS THICKNESS/MODE 2 is selected, a process using multiple tasks will be performed, as in the multi-task mode.

The following processes are assigned to the respective tasks:

TASK1 settings.

The settings in Unit Number 40 are valid only for multi-task mode.

44 2 Differential type 0: OFF

45 2 Hold type 0: Through

1: Peak 2: Bottom 3: Peak to peak 4: Average 5: Sampling

3 Trigger method 0: External input

1: Self up 2: Self down

4 Trigger level -999999999 to 999999999 (nm)

5 Trigger hysteresis 0 to 999999999 (nm)

6 Trigger delay (ms) 0 to 5000 (ms)

7 Sampling period (ms) 1 to 5000 (ms)

1: ON

46 5 Offset at zero reset -999999999 to 999999999 (nm)

1: HOLD

64 Status 0: OFF

1: ON

TASK 3 GLASS: Calculates the result of the NEAR side of TASK 1 and TASK 2.

GLASS THICKNESS: Calculates the difference value between TASK1 and TASK2.

TASK 4 Unused

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List of Parameters (ZS-HLDC)

The measurement conditions can be set for each task in this mode.

• Configuration of Task

The ZS-HLDC performs task processing.

The processing units for each task are grouped into 20 units.

To refer to the processing unit of TASK N, therefore, add 20×(N-1) to the above pro- cessing unit No.

Example: To change the averaging process of TASK2, refer to or set to a parameter with:

Process unit No.=43+20×(2-1)=63 and Data No.=2

120 0 Hysteresis width 0 to 999999999 (nm) Setting judgment process

1 Timer mode 0: OFF

1: OFF-Delay 2: ON-Delay 3: One shot

3 Judgment output

TASK

settings

0: Keep 1: Clamp

value 1

-999999999 to 999999999 (nm)

4 to 20 (mA)

-10 to 10 (V)

21 Output mode TASK When multi-task mode is OFF.

0: OFF 1: ON

0: OFF 1: TASK 1 2: TASK 2 3: TASK 3

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List of Parameters (ZS-HLDC)

122 23 Output at CLAMP Voltage output

0: MAX 1: 10 V 2: 9 V 3: 8 V 4: 7 V 5: 6 V 6: 5 V 7: 4 V 8: 3 V 9: 2 V 10: 1 V 11: 0 V 12: -1 V 13: -2 V 14: -3 V 15: -4 V 16: -5 V 17: -6 V 18: -7 V 19: -8 V 20: -9 V 21: -10 V 22: MIN Current output 0: MAX 1: 20 mA 2: 19 mA 3: 18 mA 4: 17 mA 5: 16 mA 6: 15 mA 7: 14 mA 8: 13 mA 9: 12 mA 10: 11 mA 11: 10 mA 12: 9 mA 13: 8 mA 14: 7 mA 15: 6 mA 16: 5 mA 17: 4 mA 123

Digital output

2 Monitor focus mode 0: OFF

value 1

-999999999 to 999999999 (nm)

0 to 65535

6 Monitor focus current 0 to 65535

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List of Parameters (ZS-HLDC)

123 8 Output at CLAMP 0 to 65535

10 Output TASK

(When the

measurement value is output)

0: TASK 1 1: TASK 2 2: TASK 3 3: TASK 4 4: Consecutively

11 Output mode 0: OFF

1: Measurement value 2: Judgment

12 Update cycle 0 to 100

124 Logging

2 Mode 0: OFF

1: ON

3 Buffering period 1 to 65535

4 Buffer size per item of data

1 to 1000

14 TASK 1 0: OFF

1: ON

15 TASK 2 0: OFF

1: ON

16 TASK 3 0: OFF

1: ON

17 TASK 4 0: OFF

1: ON 126

Link

0 Output TASK 0: TASK 1

1: TASK 2 2: TASK 3 3: TASK 4

6 Mode 0: OFF

1: ON 240

Parallel input

4 Input 0 0: Low Active

1: High Active

5 Input 1

6 Input 2

7 Input 3

8 External input mode 0: Normal mode 1: Bank switching mode 2: Parallel IN off mode 9 Control TASK setting 0: TASK1

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List of Parameters (ZS-HLDC)

Setting Threshold Value

When multi-task mode is OFF

• When selecting a mode other than "GLASS/MODE 2" and "GLASS THICKNESS/

MODE 2".

• When selecting "GLASS/MODE 2" or "GLASS THICKNESS/MODE 2" mode.

When multi-task mode is ON

• Can be set for each TASK.

48 2 Lower limit of

threshold

-999999999 to 999999999 (nm)

3 Upper limit of

threshold

-999999999 to 999999999 (nm)

5 Timer mode 0:OFF

88 2 Lower limit of

threshold

-999999999 to 999999999 (nm)

3 Upper limit of

threshold

-999999999 to 999999999 (nm)

5 Timer mode 0:OFF

48 2 Lower limit of

threshold

-999999999 to 999999999 (nm) TASK1 settings.

For TASK2 to TASK4, the unit numbers are as follows:

TASK2: 68 TASK3: 88 TASK4: 108

3 Upper limit of

threshold

-999999999 to 999999999 (nm)

5 Timer mode 0:OFF

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List of Parameters (ZS-MDC)

The following parameters can be obtained or set by DATASET or DATAGET command:

0 0 Destination CH to

input data A

0 to 11 (CH)

1 Destination CH to

input data B

0 to 11 (CH)

2 Destination CH to

input data C

0 to 11 (CH)

3 Destination CH to

input data D

0 to 11 (CH)

4 Destination CH to

input data E

0 to 11 (CH)

5 Destination CH to

input data F

0 to 11 (CH)

6 Destination CH to

input data G

0 to 11 (CH)

7 Destination CH to

input data H

0 to 11 (CH)

8 Destination CH to

input data I

0 to 11 (CH)

9 Input mode of data A 0: OFF 1: ON 10 Input mode of data B 0: OFF 1: ON 11 Input mode of data C 0: OFF 1: ON 12 Input mode of data D 0: OFF 1: ON 13 Input mode of data E 0: OFF 1: ON 14 Input mode of data F 0: OFF 1: ON 15 Input mode of data G 0: OFF 1: ON 16 Input mode of data H 0: OFF 1: ON 17 Input mode of data I 0: OFF 1: ON

32 Acquisition result A -999999999 to 999999999 (nm) 33 Acquisition result B -999999999 to 999999999 (nm) 34 Acquisition result C -999999999 to 999999999 (nm) 35 Acquisition result D -999999999 to 999999999 (nm) 36 Acquisition result E -999999999 to 999999999 (nm) 37 Acquisition result F -999999999 to 999999999 (nm) 38 Acquisition result G -999999999 to 999999999 (nm) 39 Acquisition result H -999999999 to 999999999 (nm) 40 Acquisition result I -999999999 to 999999999 (nm)

40 0 Data setting mode 0: OFF

1: Individual 2: Calculation

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List of Parameters (ZS-MDC)

40 1 Individual setting

mode

0: Input A 1: Input B 2: Input C 3: Input D 4: Input E 5: Input F 6: Input G 7: Input H 8: Input I 2 Calculation setting

mode

0: Thickness (K-(X+Y)) 1: Step (X-Y)

2: K+mX+nY 3: AVE 4: MAX-MIN

3 Parameter X 0: Input A

1: Input B 2: Input C 3: Input D 4: Input E 5: Input F 6: Input G 7: Input H 8: Input I 9: TASK 1 10: TASK 2 11: TASK 3 12: TASK 4

4 Parameter Y

5 Parameter K -999999999 to 999999999 (nm)

6 Parameter m -100 to 100 (×0.1)

7 Parameter n -100 to 100 (×0.1)

8 Input A setting

(AVE,MAX-MIN)

0: OFF 1: ON

9 Input B setting

(AVE,MAX-MIN) 10 Input C setting

(AVE,MAX-MIN) 11 Input D setting

(AVE,MAX-MIN) 12 Input E setting

(AVE,MAX-MIN) 13 Input F setting

(AVE,MAX-MIN) 14 Input G setting

(AVE,MAX-MIN) 15 Input H setting

(AVE,MAX-MIN) 16 Input I setting

(AVE,MAX-MIN)

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List of Parameters (ZS-MDC)

40 18 TASK2 setting

(AVE,MAX-MIN)

0: OFF 1: ON

19 TASK3 setting

(AVE,MAX-MIN)

20 TASK4 setting

(AVE,MAX-MIN)

21 Thickness -999999999 to 999999999 (nm)

1: ON

1 Span value -20000 to 20000 (×0.0001)

42 2 Smooth 0: OFF

1: ON

44 2 Differential 0: OFF

45 2 Hold type 0: OFF

1: PEAK 2: BOTTOM 3: P-P 4: AVERAGE 5: SAMPLE

3 Trigger method 0: EXT

1: SELF-UP 2: SELF-DOWN

4 Trigger level -999999999 to 999999999 (nm) 5 Trigger hysteresis 0 to 999999999 (nm) 6 Trigger delay (ms) 0 to 5000 (ms) 7 Sampling period (ms) 1 to 5000 (ms)

1: ON

46 5 Offset at zero reset -999999999 to 999999999 (nm)

1: HOLD

(25)

List of Parameters (ZS-MDC)

settings

0: KEEP 1: CLAMP

1 Output at CLAMP 0: MAX

121 0 Hysteresis width 0 to 999999999 (nm)

1 Timer mode 0: OFF

1: ON

3 Monitor focus

distance value 1

-999999999 to 999999999 (nm)

4 Monitor focus

distance value 2

-999999999 to 999999999 (nm)

4 to 20 (mA)

-10 to 10 (V)

125 4 External input 0

ActiveSelect

0: Low Active 1: High Active

5 External input 1

ActiveSelect

6 External input 2

ActiveSelect

7 External input 3

ActiveSelect

8 External input mode 0: Standard mode 1: Bank switching mode 2: ParallelIN off mode 9 Control TASK setting 0: TASK1

126 0 External input (IN)

task mode

0: None 1: TASK1 2: TASK2 3: TASK3 4: TASK4 5: TASKALL 1 External input (IN)

function mode

0: Standard 1: Bank

(26)

List of Parameters (ZS-MDC)

• Configuration of Task

The ZS-MDC performs task processing. The processing units for each task are grouped into 20 units. To refer to the processing unit of TASK N, therefore, add 20×(N-1) to the above processing unit No.

Example: To change the averaging process of TASK2, refer to or set to a parameter with:

Process unit No.=43+20×(2-1)=63 and Data No.=2

Setting Threshold Value

• In case of TASK1

To change the threshold of TASKN, change the unit No. as follows:

Unit No.=48+20X(N-1)

126 2 External output (OUT)

task mode

0: None 1: TASK1 2: TASK2 3: TASK3 4: TASK4

4 Linear output task

mode

0: None 1: TASK1 2: TASK2 3: TASK3 4: TASK4 6 Digital output target 0: OFF

1: ON 10 External input 0 mode 0: Not used

1: Trigger 2: Hold reset 3: Laser off 4: Zero reset 11 External input 1 mode

12 External input 2 mode 13 External input 3 mode

48 2 Lower limit of

threshold

-999999999 to 999999999 (nm)

3 Upper limit of

threshold

-999999999 to 999999999 (nm)

5 Timer mode 0: OFF

(27)

List of Parameters (ZS-DSU)

The following parameters can be obtained or set by DATASET or DATAGET command:

0 0 Input CH to Source A 0: 1CH

1: 2CH 2: 3CH 3: 4CH 4: 5CH 5: 6CH 6: 7CH 7: 8CH 8: 9CH 9: 10CH : 13: 14CH

1 Input CH to Source B

2 Input CH of Source C

3 Input CH to Source D

4 Input CH to Source E

5 Input CH to Source F

6 Input CH to Source G

7 Input CH to Source H

8 Input CH of Source I

9 Input CH of Source J

10 Input CH of Source K 11 Input CH of Source L 12 Input CH of Source M 13 Input CH of Source N

14 Selected TASK of

Source A

0: TASK1 1: TASK2 2: TASK3 3: TASK4 4: InputA 5: InputB

: 13: InputI

Valid when the connected controller is a ZS-MDC.

15 Selected TASK of

Source B

16 Selected TASK of

Source C

17 Selected TASK of

Source D

18 Selected TASK of

Source E

19 Selected TASK of

Source F

20 Selected TASK of

Source G

21 Selected TASK of

Source H

22 Selected TASK of

Source I

23 Selected TASK of

Source J

24 Selected TASK of

Source K

25 Selected TASK of

Source L

26 Selected TASK of

Source M

27 Selected TASK of

(28)

List of Parameters (ZS-DSU)

0 28 Save mode of Source A 0: OFF

1: ON

29 Save mode of Source B

30 Save mode of Source C

31 Save mode of Source D

32 Save mode of Source E

33 Save mode of Source F

34 Save mode of Source G

35 Save mode of Source H

36 Save mode of Source I

37 Save mode of Source J

38 Save mode of Source K 0: OFF 1: ON

39 Save mode of Source L

40 Save mode of Source M

41 Save mode of Source N

64 Acquisition result A -999999999 to 999999999 (nm) 65 Acquisition result B

66 Acquisition result C 67 Acquisition result D 68 Acquisition result E 69 Acquisition result F 70 Acquisition result G 71 Acquisition result H 72 Acquisition result I 73 Acquisition result J 74 Acquisition result K 75 Acquisition result L 76 Acquisition result M 77 Acquisition result N

1 0 Start trigger mode 0: None

1: External input 2: Data 3: Window 4: I/O 5: HOUR

1 Start trigger

Trigger edge polarity

0: Up trigger 1: Down trigger

2 Start trigger

Data selection

0: Source A 1: Source B

:

13: Source N

3 Start trigger

Delay

-9999 to 9999 (ms) (*1) -127 through 127 (Number of images) (*2)

(*1) [Save image] is set to OFF.

(*2) [Save image] is set to ON.

4 Start trigger

Data threshold

-999999999 to 999999999 (nm)

(29)

List of Parameters (ZS-DSU)

1 6 Start trigger

Window mode

0: WindowIn 1: WindowOut

7 Start trigger

Window upper limit

-999999999 to 999999999 (nm)

8 Start trigger

Window upper limit

-999999999 to 999999999 (nm)

10 Start trigger

Pattern of I/O I/O selection

0: IN0 1: IN1 2: IN2 3: IN3 4: OUT0 5: OUT1 6: OUT2 7: OUT3 8: OUT4

12 End trigger mode 0: BUTTON

1: EXT 2: DATA 3: WINDOW 4: I/O 5: HOUR 6: QUANT 7: TIME

When [Save image] is set to ON, [TIME] is not available.

13 End trigger

Trigger edge polarity

Same as Start trigger

14 End trigger

Data selection

Same as Start trigger

15 End trigger

Data threshold

17 End trigger

Window mode

18 End trigger

Window upper limit

19 End trigger

Window lower limit

21 End trigger

Pattern of I/O I/O selection

24 End trigger

Logging data points

1 through 999999 (*1) 1 through 128 (*2)

(*1) [Save image] is set to OFF.

(*2) [Save image] is set to ON.

2 0 Save mode 0: OneShot

1: Repeat

When [Save image] is set to ON, [REPEAT]

is not available.

1 Repeat mode 0: New

1: ADD 2: OVER WR

When [Save image] is set to ON, [ADD] is not available.

2 Repeat end conditions 0: None

(30)

List of Parameters (ZS-DSU)

Label input and time settings can not be set or referenced.

2 3 Repeat end conditions

Trigger times

1 to 100000 (pcs)

6 Interval of saving image 0: All 1: Save NG

It is available only if [Save image] is set to

7 NG save mode 0: OR ON.

1: AND

8 Save image mode 0: Standard

1: Latest

3 1 I/O data 0: No save

1: Save 2 Save direction (Range) 0: COLUMN

1: ROW

3 New line input 0: Ignore

1: Enable

(31)

List of Parameters (ZS-DSU)

Judgment relation

For Image Logging

40 0 Input source 0: Source A

1: Source B 2: Source C 3: Source D 4: Source E 5: Source F 6: Source G 7: Source H 8: Source I 9: Source J 10: Source K 11: Source L 12: Source M 13: Source N

1 Lower limit of

threshold

-999999999 to 999999999 (nm)

2 Upper limit of

threshold

-999999999 to 999999999 (nm)

20 0 Align image 0: None

1: 1CH 2: 2CH : 14: 14CH

1 Save image 0: OFF

1: ON

(32)

FLOWDATA Reference

What is FLOWDATA?

The ZS series implements high speed sampling measurement up to 110us.

Handling these measurement data with an external device requires reading in a large amount of data.

The ZS series are provided with a mechanism which enables to handle and acquire measurement data by a given bundle.

This bundle of data is called a FLOWDATA.

■ How to acquire FLOWDATA

FLOWDATA is batch output if the controller has accepted the command for acquiring a FLOWDATA when data is accumulated for the specified buffer size (max. 1000 data).

A device receiving data (such as PC) needs to issue the command before the ZS con- troller accumulates measurement data for the buffer size.

If the controller has not received the command when measurement data for the buffer size is accumulated in the controller, the past data is overwritten:

In this case, it raises an error flag for buffer overflow. A device receiving data (such as PC) needs to check this flag to see if the commands have been issued in time.

PC Controller

Accumulating data

Batch acquire data for the buffer size Output the result

Accumulating data

Receive data Issue command

Output the result

Accumulating data Accumulating data

Receive data Issue command Receive data Issue command Issue command

Output the result

H LD ONZEROENABLE

P L

Batch acquire data for the buffer size Batch acquire data for the buffer size

(33)

FLOWDATA Reference

Format

After outputting the command for acquiring FLOWDATA, the binary data is output in the following format:

Configuration of FLOWDATA p.34

Binary data is used for response data of FLOWDATA to give the highest priority to the speed. Therefore, general purpose communication tools such as HyperTerminal may not be used to receive the data.

■ Buffer size and buffer intervals

The buffer size of measurement data to be accumulated in the ZS controller and its buffer intervals can be changed.

Change the following parameters:

* DATAGET and DATASET commands are used to change and refer to the parameters.

■ Logging data

Data to be accumulated in the ZS controller can be selected.

● In case of ZS-LDC

A maximum of 3 data can be accumulated.

* A setting value changes in accordance with the measurement mode.

•[Glass thickness/Gap-Film/Else-Move] is selected.

Unit No. Data No. Parameter Description

124 2 FLOWDATA accumulation

mode

0: OFF 1: ON

3 Buffer intervals 1 to 65535 (pcs)

4 Buffer size 1 to 1000 (pcs)

124 5 Accumulated data 1 *

6 Accumulated data 2

Value Description

0 No accumulation

1 Result for area 1 2 Result for area 2 3 Thickness/Gap value

Header division (4bytes) Data division (4bytes)

(34)

FLOWDATA Reference

•Glass thickness/Gap except for the above is selected.

•A mode other than above is selected.

● In case of ZS-HLDC

• When multi-task mode is OFF

• When GLASS/MODE 2 or GLASS THICKNESSS/MODE 2 is selected for the mea- surement object

• When a mode other than the above is selected for the measurement object

• When multi-task mode is ON

Value Description

0 No accumulation

1 Thickness/Gap value

Value Description

0 No accumulation

1 Distance value (Measurement value)

Unit No. Data No. Value Description

124 5 0 No accumulation

1 Accumulation of result of area 1

2 Accumulation of result of area 2

3 Accumulation of result of glass surface or

glass thickness

124 5 0 No accumulation

1 Accumulation

124 14 0 Does not accumulate the result of TASK 1

1 Accumulate the result of TASK 1

15 0 Does not accumulate the result of TASK 2

(35)

FLOWDATA Reference

● In case of ZS-MDC

A maximum of 9 data can be accumulated.

Increasing data to be accumulated extends the measurement cycle of the ZS controller. Confirm it by selecting [SYSTEM]-[INFO]-[CYCLE] after setting.

124 5 Accumulated data 1 0: No accumulation

1: Measurement result of TASK 1 2: Measurement result of TASK 2 3: Measurement result of TASK 3 4: Measurement result of TASK 4 5: Measurement result of Input A 6: Measurement result of Input B 7: Measurement result of Input C 8: Measurement result of Input D 9: Measurement result of Input E 10: Measurement result of Input F 11: Measurement result of Input G 12: Measurement result of Input H 13: Measurement result of Input I

(36)

FLOWDATA Reference

Configuration of FLOWDATA Response

Details of header division

*1 TASK No.=bit data+1 Example: bit data=10B=2 (dec)

indicates TASK3 data.

*2 The input lines are, from the lower bit, assigned to:

In case of ZS

• Input terminal 4 (Unused. Always set to 0.)

• Input terminal 3

• Input terminal 0 (5 inputs in total.)

1 packet of FLAWDATA

Header division Data

division

1st byte 2nd byte 3rd byte 4th byte –

A B C D E F G H I J K L Data Meaning of

data

8 1 1 2 4 5 1 2 1 1 1 5 32 Number of

bits

=Total 64 bits

Data Name Description

A Unused Reserved bit

B FLOWDATA overflow bit Normally set to 0.Set to 1 when there is an overflow in FLOWDATA accumulation.

C Decimal information Normally set to 0.0: nm order, 1: mm order

D TASK No. TASK1 to TASK4 (*1)

E CH No. CH No. of data source

F Unit states (Input) Indicates ON/OFF states of various input lines. (*2)

G FLOWDATA stop bit • All data are set to 1 if FLOWDATA does not flow over subse- quently. (Always set to 1 for one-shot requests)

• All data are set to 0 if FLOWDATA continues to flow over.

(Until FLOWDATA is stopped after requested (in succession) H TASK judgment result bit Indicates the TASK judgment result of data source. (*3)

I Disabled Reserved bit

J K

L Unit states (Output) Indicates output states (states of measurement results). (*4) Data Measurement data Signed 32 bit data

When the decimal info division is 0, the unit of the data is nm.

When the decimal info division is 1, the unit of the data is mm

(37)

FLOWDATA Reference

*3 Data to be received and their states are as follows:

00b=Not executed 01b=LOW 10b=PASS 11b=HIGH

*4 The output states are, from the lower bit, assigned to:

In case of ZS

• Output terminal 4 (Busy output)

• Output terminal 3 (Enable output)

• Output terminal 2 (Low output)

• Output terminal 1 (Pass output)

• Output terminal 0 (High output)

(5 outputs in total). States in parenthesis indicate the standard states.

[FLOWDATA setting example]

F F 8 1 0 1 0 6 4 2 7 2 4 D 0 A

11 1 1 1 1 1 1 1 0 0 0 0 0 0 1 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 1 0 0 0 0 1 0 0 1 1 1 0 0 1 0 0 1 0 0 1 1 0 1 0 0 0 0 1 0 1 0㸢䇭172847682

F F 8 2 0 1 0 6 5 A 7 4 F 1 0 3

11 1 1 1 1 1 1 1 0 0 0 0 0 1 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 1 0 1 1 0 1 0 0 1 1 1 0 1 0 0 1 1 1 1 0 0 0 1 0 0 0 0 0 0 1 1㸢䇭66155610

F F 8 3 0 3 1 2 F F 8 3 7 4 0 5

11 1 1 1 1 1 1 1 0 0 0 0 0 1 1 0 0 0 0 0 0 1 1 0 0 0 1 0 0 1 0 1 1 1 1 1 1 1 1 1 0 0 0 0 0 1 1 0 1 1 1 0 1 0 0 0 0 0 0 0 1 0 1㸢䇭91522047

F F 8 4 0 3 1 2 4 0 1 1 8 B 0 5

11 1 1 1 1 1 1 1 0 0 0 0 1 0 0 0 0 0 0 0 0 1 1 0 0 0 1 0 0 1 0 0 1 0 0 0 0 0 0 0 0 0 1 0 0 0 1 1 0 0 0 1 0 1 1 0 0 0 0 0 1 0 1㸢䇭92000000

A B C D E F G H I J K L

FLOWDATA accumulation mode ON 1 buffer interval

1 buffer size Input A is 1 CH.

Input B is 2 CH.

Input C is 3 CH.

Input D is 4 CH.

Accumulate data 1 is Input A.

Accumulate data 2 is Input B.

Accumulate data 3 is Input C.

Accumulate data 4 is Input D.

Data save DATASET 124 2 1

DATASET 124 3 1 DATASET 124 4 1 DATASET 0 0 1 DATASET 0 1 2 DATASET 0 2 3 DATASET 0 3 4

DATASET 124 5 5 DATASET 124 6 6 DATASET 124 7 7 DATASET 124 8 8 DATASAVE FLOWDATA

Indicates the unit status (states of measurement results).

From the lower bit Output terminal 4 BUSY Output terminal 3 ENABLE Output terminal 2 LOW Output terminal 1 PASS Output terminal 0 HIGH

Unit status: Indicates ON/OFF states of various input lines.

From lower bit

Input terminal 4 (Unused, Always 0) Input terminal 3

Input terminal 2 Input terminal 1 Input terminal 0 TASK judgment result bit 00b= Not executed 01b= LOW 10b= PASS 11b= HIGH FlowData stop bit Disabled

CH No.

TASK No.

Decimal information

Normally set to 0: nm order, 1: µm order

(38)

Capturing Image Data

For ZS-DSU (Ver 2.000 or later), image data logging from ZFV is available. Image data on the memory card can be shown as image files (.bmp) by inserting the memory card into the memory slot on the personal computer. Image data can also be imported from the memory card inserted into the ZS-DSU by entering the command below.

* Group No. is the logging group number that is assigned for each logging trigger.

* Logging No. is the serial number (logging number) that is assigned during one logging process.

* Receiving of the image data is performed through the XMODEM communication. (Refer to the next topic.)

* For you reference: Folder tree in the memory card

Example:

To read image data with (*) mark, enter the following command.

CFIMGGET 001 002<delimiter>

001 is Group No.

002 is Logging No.

* Numbers must be entered in the 3-digit format.

* Specifying OK/NG folders is not necessary.

Measurement result for the logged image data can also be obtained. Measurement result is stored in the log file in the same group folder. To get the measurement result to the personal computer, enter the following command.

Command name Format

CFIMGGET CFIMGGET <Group No.> <Logging No.> <delimiter>

Top OMRON LOG Date 1 Log000.log

Log001.log

Date 2 Log002.log

↓

Group No.

IMG Date 000 Log.log

↓

Logging No.

OK 000_***.bmp

001_***.bmp Folder

NG 002_***.bmp

File

↓

Group No.

001 Log.log

↓

Logging No.

OK 000_***.bmp

NG 001_***.bmp

002_***.bmp (*)

Command name Format

CFDATGET CFDATGET <Group No.> <delimiter>

(39)

Capturing Image Data

● Flow of XMODEM communication

When you capture image data by entering this command, image data are obtained through XMODEM communication. Communication flow is as follows:

Host device (personal computer) ZS-DSU

Switch XMODEM

Switch XMODEM Request to receiving

* 1 packet = 128 bytes (Check by CRC)

Data are successfully received.

* Returns "NAK" if receiving error has been occurred.

Data are successfully received.

Start the reply to the request (Send BK No. 1)

* No reply when "C" is sending.

(Send BK No. 2)

(Send BK No. *)

All data has been completely sent

Completed.

CFIMGGET command

"READY" reply

NAK (a)

128-byte data (BK No. 1)

ACK

128-byte data (BK No. 2)

ACK

XMODEM abort ACK

OK EOT

128-byte data (BK No. *)

(40)

Example of Usage

To give an example, provided below is a procedure to communicate by non-procedural commands using Windows standard tool HyperTerminal.

1. Start up HyperTerminal.

HyperTerminal is located under [Program]-[Accessory]-[Communication].

(1) Enter an appropriate project name.

(2) Select the COM port connected to the ZS in the Connection Method section.

(3) Set the communication conditions.

(41)

Example of Usage

(4) HyperTerminal is started up.

2. To make the interaction with commands easier, set echo and other functions.

(1) Open [Property].

(2) Select the setting tag, and then ASCII settings.

(42)

Example of Usage

(3) Check the following items, and press OK to complete the setting.

3. Set the communication conditions for the ZS side.

(1) Set [System]-[Communication]-[RS-232C] as consistent with the above setting.

(2) Set [System]-[Communication]-[Protocol] as non-procedural.

4. Change ZS into "RUN" mode.

5. Perform non-procedural communication.

(1) Input a command, and then press the return key.

(43)

Example of Usage

(2) A returned value responding to the command is returned from the controller.

(44)

Revision History

Revision

Symbol Revision Date Description

A October 2004 First edition

B June 2005 • Commands and parameters compatible with ZS-DSU (v2.000) are added.

• Multiple controllers connection with ZFV is added.

C October 2005 • Commands and parameters compatible with ZS-HLDC is added.

(45)

Cat. No. Z232-E1-02 Authorized Distributor:

COMRON Corporation 2005

Note: In the interest of product improvement, specifications are subject to change without notice.

Printed in Japan.

1205-0.5C(0705)(M)

Sensing Devices Division H.Q.

Application Sensors Division Shiokoji Horikawa, Shimogyo-ku, Kyoto, 600-8530 Japan

Tel: (81)75-344-7068/Fax: (81)75-344-7107 Regional Headquarters

OMRON EUROPE B.V.

Sensor Business Unit,

Carl-Benz-Str. 4, D-71154 Nufringen, Germany

Tel: (49)7032-811-0/Fax: (49)7032-811-199 OMRON ELECTRONICS LLC

1 East Commerce Drive, Schaumburg, IL 60173 U.S.A.

Tel: (1)847-843-7900/Fax: (1)847-843-8568 OMRON ASIA PACIFIC PTE. LTD.

83 Clemenceau Avenue,

#11-01, UE Square, 239920 Singapore

Tel: (65)6835-3011/Fax: (65)6835-2711 OMRON (CHINA) CO., LTD.

Room 2211, Bank of China Tower, 200 Yin Cheng Road (M), Shanghai, 200120 China

Tel: (86)21-5037-2222/Fax: (86)21-5037-2200

智能传感器ZS-CRT命令参考欧姆龙ZS-CRT手册_广州菱控

Cat. No. Z232-E1-02

ZS Series

Non-procedual Communication

Command Reference

Introduction

Thank you for purchasing the ZS Series.

This manual provides reference information on non-procedural communication commands for ZS Series.

This manual provides information for the following models and versions.

Different firmware versions may cause communication errors, unintended setting overwrite, and damages on the controller. Please make sure to use the controller with the correct software version.

If your software version is not listed in the table above, please update the software using the SmartMonitorZS firmware update software, such as WarpEngineZS, to match the software version.

When using the ZS Series, be sure to observe the following:

• The ZS Series must be operated by personnel knowledgeable in electrical engineer- ing.

• To ensure correct use, please read this manual thoroughly to deepen your under- standing of the product.

• Please keep this manual in a safe place so that it can be referred to whenever neces- sary.

Contents

Setting the Communication Specifications... 2

Format... 3

List of Non-procedural Commands ... 4

List of Parameters (ZS-LDC)... 7

List of Parameters (ZS-HLDC) ... 12

List of Parameters (ZS-MDC)... 20

List of Parameters (ZS-DSU) ... 25

FLOWDATA Reference... 30

Capturing Image Data ... 36

Example of Usage... 38

Revision History ... 42

Setting the Communication Specifications

Setting the Communication Specifications

Change the settings of the controller communication specifications for non-procedural communication with the external device.

1. Set the mode switch to "FUN".

2. Select [System] - [Communication] - [Mode] menu.

3. Select [non-procedural].

4. For RS-232C cable connection, select [System] - [Communication] - [RS-232C]

menu to set the appropriate communication specifications for the external device.

5. Save the settings.

Format

Format

The format of non-procedural commands are as follows:

Example: A command to acquire a measured value MEASURE command

The format of returned values changes depending on the command.

For the description of each command, refer to "List of Non-procedural Commands"

section.

•MEASURE / M / DATAGET

The returned value consists of right aligned 11 characters and a delimiter. The unit is nm for a displacement value. Shortfalls of the characters are filled with spaces from the left.

Example: The returned value is -30.719923 mm.

•BANKGET command

The returned value is output as 1 character bank No.

Example: The bank No. is 2.

•VERGET command

The returned value is output in the following format:

•Other commands

Either OK or ER is returned according to the result of the command. The command was executed properly:

The command was not executed properly or the setting was NG:

Space Delimiter

Version

List of Non-procedural Commands

List of Non-procedural Commands

List of Non-procedural Commands

⇒

⇒

List of Non-procedural Commands

List of Parameters (ZS-LDC)

List of Parameters (ZS-LDC)

The following parameters can be obtained or set by DATASET or DATAGET command:

List of Parameters (ZS-LDC)

List of Parameters (ZS-LDC)

List of Parameters (ZS-LDC)

List of Parameters (ZS-LDC)

Setting Threshold Value

• A mode other than [Glass thickness/Gap-Film/Else-Move] is selected.

• [Glass thickness/Gap-Film/Else-Move] is selected.

List of Parameters (ZS-HLDC)

List of Parameters (ZS-HLDC)

The following parameters can be obtained or set by DATASET or DATAGET command:

List of Parameters (ZS-HLDC)

List of Parameters (ZS-HLDC)

List of Parameters (ZS-HLDC)

List of Parameters (ZS-HLDC)

• Configuration of Task