• 沒有找到結果。

以實驗中採用薄晶圓以及網格狀結構的方式,雖然可以大大提高接合 成功率,但是鍺晶片容易產生微小的裂痕,並在後續研磨拋光時擴大,所 以勢必要使用新的方式來避免鍺的龜裂。

介面非晶質結構利用 EDX 作測定其實不太準確,第一很難保證試片 沒有被空氣顆粒汙染,第二對於輕元素的分析能力低。在這種半定性也無 法定量的情況下,EDX 其實只能當作參考,未來如果要做準確定性甚至是 定量,EELS 和 SIMS 一定是不可或缺的。

在電性量測方面,由於是使用塊材接合,單個量測的二極體大小是 1mm×1mm,不容易定義出電流路徑,也不清楚微結構下所觀察到的現象 是否對於電性結果有足夠的影響力。如果能利用黃光微影製作出更小的量 測單位,一定會得到更準確的電流電壓圖,有利於剖析介面電流傳輸機制。

在漏電流方面,如果能夠去除晶圓之間的晶向偏離,使得介面非晶質 層消失,達到完美接合,漏電流就會有效地降低。

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