7.1 結論
本論文針對壓電定位平台做補償以及探討強韌控制器設計與安裝，以消除系 統中的非線性遲滯效應，並使系統具有高精度的定位性能。研究上首先吾人針對 奈米壓電平台做系統鑑別，接著使用 Bouc-Wen 模型針對壓電平台非線性的遲滯 效應建立模型，其中使用基因演算法來估算出系統 Bouc-Wen 模型的參數，以期 達到準確補償遲滯效應。接著應用對第三章所介紹的間隙度量概念找標稱系統，
最後根據所選定之標稱系統設計強韌控制器。
從第一章的文獻回顧中可知，Ronkanen 等人用電流控制法將遲滯效應消減至 1.5%誤差值為 1.5 m
[10]；Kung 等人用前饋補償器做弦波追跡，實驗得到最大 誤差量為 0.5 m
[11]；Xu 使用 LSSVM 建模作為遲滯效應的補償，其 RSME 為 0.6221 m
[12]，而由本研究的實驗結果可看出，系統在經過所設計的反模型補償 器補償非線性的遲滯現象後，誤差百分比從原本的 12.656%降低至 0.6163%，約 降低了 20 倍的遲滯效應影響。另由步階響應結果得知，安定時間約在 0.078 秒內，RSME 在 2
nm
內。而在速度分析中發現，斜率越高移動速度越快時誤差會跟著增 加，可得知速度與誤差成正比，弦波追跡實驗的 RSME 也都可達到 50nm
之下。綜合上述討論，在引用了補償器以及強韌控制器後，整體控制系統可有效的 降低遲滯效應的影響，且可確保系統穩定性，並提升系統性能，使平台具有高精 密度的定位能力。
7.2 未來展望
針對未來研究有以下建議：
(1) 針對本論文所使用之 Bouc-Wen 模型，可進一步採用不同演算法方式，
以最佳化方式求解更接近原遲滯特性曲線的各項參數。
(2) 針對本論文所提之強韌控制器法則，分析不同的權重函數及系統化設計，
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使系統有更好的輸出響應。
(3) 將本研究所發展之單軸平台補償技術應用於多軸定位平台系統，使平台 能具有兩個維度甚至六個維度，在空間中能做點、線、面的定位控制。
(4) 結合大行程平台，如線性馬達，使平台能做大位移高精準度的定位控制。
壓電奈米平台在高精密度定位應用領域具有發展潛力，可將壓電平台結合本 論文所運用的補償器及控制器設計模式，來提升平台的精密度。
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