• 沒有找到結果。

1.藉由光激螢光的量測我們得知 AAO 的發光波段位於 419nm,並且 透過穿透的量測得知 AAO 在 400nm 以下,穿透性即大幅衰減。另 外我們由 XRD 光譜圖得知,AAO 經過長時間的陽及氧化處理以及 回火過後,都會變成結晶態γ-Al2O3

2.將陽極氧化處理時間加長,製作出規則排列的 AAO,並且對於 AAO 的 Interpore distance(a)與電壓(v)做圖,得到一關係式:

a = 15.4+2.63×v。

3.使用高濃度的磷酸硫酸混合液,藉由施加不同的電壓與溫度,看到 AAO 的變化,同時也看到了 pre-sites 的形成,最後得到規則排列 的陽極氧化鋁孔洞。

4.以 AAO 當作 mask 在製程技術上的運用部份,我們分別製作出金屬 奈米點,奈米點的直徑大約為 80nm,並且利用不同深寬比的 AAO,

觀察到奈米點的形狀會隨著 AAO 深寬比有所改變,以及分別利用 RIE 與 ICP-RIE 來蝕刻矽基板與 GaAs 基板,將 AAO 圖案轉移至矽 基板與 GaAs 基板。

5.我們從 PL 量測結果發現貼過 AAO 後的磊晶結構,AAO slabs 會大 大的增加量子點磊晶結構 light extraction,並且可以控制 PL 發光波 段。這現象和發光層與 AAO 間的距離有相當大的關係。

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