• 沒有找到結果。

我們在利用分子束磊晶成長樣品時,根據理論調整樣品應變雙層薄膜的厚度以及材 料比例,並且透過黃光微影以及蝕刻等製程,製作出符合我們需求、具有精確位置以及 尺寸的微米捲管元件。接著我們利用微光激發螢光系統量測微米捲管之發光特性。

針對置於溝槽上以及置於玻璃基板上之單根微米捲管,在低溫 77K 之下,我們都能 夠量到光波在捲管管壁全反射而造成的光學共振模態。除此之外,我們也針對置於玻璃 基板上之單根微米捲管進行變溫的量測,觀察到共振峰值隨溫度上升而有紅移的現象。

我們根據量測到的共振峰值隨溫度變化,擬合出折射率隨溫度變化的一次項係數,發現 與文獻[25]相吻合。

接著我們在低溫 77K 下,量測置於玻璃基板上之雙捲管元件,並透過 Rsoft 模擬軟 體,利用 FDTD 的方式來預測頻譜上出現的各個峰值所代表的意義。我們證明了在我們 所設計的元件尺寸以及結構之下,模分裂的確會發生,並將模擬頻譜上的峰值對應到實 驗量測到的頻譜之上。

我們期望未來能夠適當地改進元件的設計與製程,比方說增加軸向的光學侷限,能 夠進一步提高雙捲管元件的 Q factor。另一方面,在積體光學的濾波器或是光篩取多功 器之應用上,模分裂之特性能夠被用來增加頻道的數目,我們希望未來能夠精準地控制 雙捲管之間的間距,藉以控制模分裂的大小,同時發展出能夠在不破壞捲管的前提下,

另外在基板上製作出能與其相耦合的波導管,在積體光路方面能夠有實際上的應用。

53

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簡歷 (Vita)

姓名:彭柏霖 (Po-Lin Peng) 性別:男

出生年月日:民國 79 年 5 月 5 日 籍貫:台灣省桃園市

學歷:

國立交通大學電機資訊學士班學士 (97.9~101.6) 國立交通大學電子所碩士班 (101.9~103.10)

碩士論文題目:

三五族半導體微米捲管耦合發光特性

III-V Semiconductor Rolled-up Microtubes and Their Coupled Mode Characteristics

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