2、本系統的方法偵測極限，對醋酸氣體為 1.24 ppbv、硝酸氣體為 0.17 ppbv。驗 證結果顯示，傳統吸收瓶採樣法對於醋酸氣體的採集效率高達99%，在測試
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附表 A
Permeation rate
（Avg.±1SD, ng/min）
Gas Concentration
（Avg.±1SD, ppbv）
55 20.76 2062.73±62.31 106.91±3.23 45 20.76 1115.48±32.17 57.82±1.67 35 20.76 553.74±9.98 28.70±0.52 30 20.76 426.79±22.23 22.12±1.15 30 16.00 277.10±30.17 14.36±1.56 30 14.87 195.08±10.14 10.11±0.53 30 11.58 116.09±13.05 6.02±0.68
30 9.49 82.42±10.74 4.27±0.56
Permeation rate
（Avg.±1SD, ng/min）
Gas Concentration
（Avg.±1SD, ppbv）
60 28.95 3472.14±92.15 171.26±4.54 50 28.95 2167.09±39.64 106.89±1.95 40 28.95 872.48±25.71 43.03±1.27 30 28.95 601.32±15.52 29.66±0.77 25
(room temperature) 28.95 374.62±22.59 18.48±1.11
附表 A.2 有機醋酸氣體及無機硝酸氣體濃度值，（a）醋酸氣體，（b）硝酸氣體。
(%) PPWDAvg.PPWDStdevImpingerAvg.
相對誤差
（b）平行平板濕式分離器與多孔金屬片固氣分離器收集硝酸氣體濃度值 Heating
Temperature（℃） Dilute X (70.0%)Nitric Acid(%)PPWDAvg.PPWDStdev PMDAvg.
相對誤差 (%) 60 3.0 28.95 171.26 4.54 166.10 -3.11 50 3.0 28.95 117.27 1.15 114.86 -2.10 50 3.0 28.95 106.89 1.95 121.15 11.77 40 3.0 28.95 42.90 1.03 42.24 -1.57 40 3.0 28.95 45.89 1.17 46.17 0.60 30 3.0 28.95 29.59 0.75 25.64 -15.44 25 3.0 28.95 17.70 1.43 12.40 -42.69
附表 A.3 平行平板濕式分離器之實際吸收效率，（a）醋酸氣體，（b）硝酸氣體。
（a）醋酸氣體 Gaseous of Acetic Acid
PPWD（ppbv） Impinger after PPWD（ppbv） Absorption Efficiency（％）
402.56±22.27 31.10 92.83
183.80±2.56 13.70 93.06
183.63±12.80 13.34 93.23
155.04±3.31 13.13 92.19
113.94±4.17 9.88 92.02
99.42±2.31 4.48 95.68
95.86±3.85 3.02 96.95
90.21±2.17 6.19 93.57
48.12±1.71 0.92 98.13
47.51±2.20 1.71 96.52
47.17±1.48 3.61 92.89
24.46±1.70 0.88 96.54
20.42±0.83 0.00 100.00
8.19±0.58 0.00 100.00
7.05±1.04 0.00 100.00
4.56±0.68 0.00 100.00
3.83±0.67 0.00 100.00
Average of Absorption Efficiency（％） 96.10±3.14
（b）硝酸氣體 Gaseous of Nitric Acid
PPWD（ppbv） PMD after PPWD（ppbv） Absorption Efficiency（％）
117.27±1.15 0.00 100
42.90±1.03 0.00 100
29.59±0.75 0.00 100
17.70±1.43 0.00 100
13.03±0.78 0.00 100
9.03±1.12 0.00 100
Average of Absorption Efficiency（％） 100