我們根據波導模態共振的物理機制(光柵與波導之耦合)可預測波導共振的位置,並 且依據理論預測可實作出各種高反射率之反射鏡,如遠紅外線波段反射鏡(8 μm 附近有 95%以上之反射率),其結果不但證實了波導模態共振原理之正確性,同時可作為共振型 偵測器之應用,特別是長波段偵測器,可取代 DBR。然而波導光柵不應只偏重在單一 波導光柵之功能,而是要與其他元件互相整合作用,因此我們更進一步將波導光柵整合 於光電元件 RCE-PIN 偵測器上,使波導光柵和共振腔及 DBR 三者互相共振作用,做出 波長選擇偵測器,達成選擇吸收波長之目的(於 950 nm 有 8 nm 之共振吸收範圍),讓波 導光柵不只應用在 VCSEL 發光元件上,也能應用於 RCE-PIN 光偵測器上。不但如此,
以 GMR 取代 DBR 的優點為:晶片磊晶完畢後,可藉由設計不同的光柵來調變等效共 振腔長,解決了傳統 RCE 磊晶完畢後,無法調整共振腔長之窘境。
波導模態共振理論自 1990 年代開始發展,到 2000 年理論發展完全,開始出現許多 濾波器相關的應用,如今更漸漸與光電元件整合,讓光電元件具備許多特殊功能。此論 文依循波導模態共振發展的軌跡,將波導模態共振的原理、驗證、應用做了一系列詳細 的探討,並且設計出波長選擇偵測器,成功製作出來並量測其特性,接著分析問題癥結 找出改善性能之方向。然而波長選擇偵測器中,波導光柵共振與共振腔共振之間的關係 有待釐清,雖然定性上的分析可知其原理,但不足以改善偵測器之性能,故必頇加上定 量分析才能設計出完善的架構。期待未來能做出可調範圍更大、解析度更好(半高寬更 窄)的波長選擇偵測器;或許嘗詴各種不同形狀的光柵(如三角晶格光柵)加寬可調範圍,
或者加強製程技術,提高波長選擇解析程度等等。最後期待未來看到更多與波導模態共 振原理相關之光電整合應用與貢獻。
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