本論文研究為設計雙軸高速共振式壓電片致動平台，並結合像散式藍光讀取 頭建立一個小型表面輪廓掃描系統。定位平台採共平面式設計，使用壓電蜂鳴片 驅動，運用其黃銅基板作為導引機構，結合壓電陶瓷的逆壓電效應進行平台的致 動，並運用正壓電效應達成平台位移感測回饋，建立了閉迴路定位系統。快軸部 分採用共振式驅動以放大掃描行程，也藉此提高掃描速度。掃描平台尺寸為長 47 mm×寬 33 mm×高 20 mm，總重量為 21.40 g。快軸與慢軸最大行程分別可達 140 μm與5 μm，全域非線性度分別為5.90%與3.07%，空負載下快軸共振頻率為 675 Hz。並成功克服不同樣品質量與質心位置對快軸動態性能之影響，閉迴路系 統中，快軸與慢軸之位移回饋訊號與實際位移量非線性度分別為 2.71%與 4.49%。
二維掃描平台結合像散式藍光讀取頭進行表面輪廓量測，可成功掃描得 TGZ3 標 準樣品周期3 μm的台階，速度可達 730 Hz。
本論文研究成果如下
開發一個二維壓電掃描平台，並透過理論與實驗驗證其致動狀況
運用正壓電效應開發蜂鳴片位移感測回饋裝置，可以即時量測掃描平台之位 移
結合像散式藍光讀取頭，可測得標準樣品 TGZ3 之細微輪廓
從實驗結果得知，掃描平台在掃描之初會有不穩定的振動，且因共平面式設 計，慢軸對快軸的交錯干擾影響較為嚴重，使得快軸方向掃圖有些許振動，影響 掃描精度，且必須改善樣品固定強度。此外不同溫度下將影響快軸結構剛性，造 成共振頻率的改變，因此在每次掃圖前均須進行掃頻，以了解其共振頻率與相位 變化，以利後續繪圖作業。並可採用不同的樣品固定方式，以減少載台重量增加 掃描速度。且目前掃描平台的快軸結構共振頻率受到環境影響而產生浮動，差異 最高達 100 Hz，需試圖減少此現象。
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本論文開發之掃描平台的掃描步驟如下：
1. 固定樣品，並放上平衡質心的質量塊
2. 進行快軸結構掃頻，得到共振頻率值與頻率-相位關係圖 3. 選擇掃描頻率與相位補償量值，並進行掃描
本論文開發之掃描平台的優勢如下：
1. 所需驅動電壓小，使用較為方便
2. 掃描速度快，遠超過一般表面輪廓掃描速度 3. 具位移回饋機制
本論文開發之掃描平台的劣勢如下：
1. 有起始振動問題，開始掃圖時的前一兩張圖會因振動而失真 2. 繪圖的邊緣有失真狀況，不過不影響其他區域繪圖結果 3. 繪圖結果有細微快軸方向振動問題，需加強樣品固定強度
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附錄
附錄 A 市售三軸位移平台 P-611.3 規格
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