In the future, a single sensor cannot fulfill the demand of the trends of the System on Chip (SoC). A multi-sensor on a single chip must be developed for wider applications. But under the limitation of the finite chip area, a single readout circuits with auto-gain tuning is very suitable for multi-sensor sensing system that is low cost for commercial considerations. Moreover, the smarter methodologies for the auto-calibration become an important issue for CMOS MEMS sensor.
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Bibliography
[1] G. Zhang, H. Xie, L. E. de Rosset, and G. K. Fedder, “A lateral capacitive CMOS accelerometer with structural curl compensation,” in Tech. Dig. 12th IEEE Int.
Conf.Micro Electro Mechanical System (MEMS’99), Orlando, FL, 1999, pp. 606–611.
[2] J.Wu, G. K. Fedder, and L. R. Carley, “A low-noise low-offset capacitive sensing amplifier for a 50 ug/√Hz monolithic CMOS MEMS accelerometer,” IEEE J.Solid-State Circuits, vol. 39, no. 5, pp. 722–730,May 2004.
[3] Hongzhi Sun, Fares Maarouf, Deyou Fang, Kemiao Jia, and Huikai Xie, “An Improved Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers” IEEE SENSORS JOURNAL, VOL. 11, NO. 4, pp.
925–933,APRIL 2011
[4] Jack Shiah, Hooman Rashtian, and Shahriar Mirabbasi “A Low-Noise Parasitic-Insensitive Switched-Capacitor CMOS Interface Circuit for MEMS Capacitive Sensors” IEEE(2011)
[5] Chun-Kai Wang, Che-Sheng Chen and Kuei-Ann Wen “A Monolithic CMOS MEMS Accelerometer with Chopper Correlated Double Sampling Readout Circuit”
978-1-4244-9474-3/11/$26.00 ISCAS (2011)
[6] Quoc-Hoang Duong, Le-Quan, Sang-Gug Lee, “An All CMOS 84dB-Linear Low-Power Variable Gain Amplifier” Symposium on VLSI Circuits Digest of Technical Papers(2005)
127
[7] Massimiliano Belloni, Edoardo Bonizzoni, Andrea Fornasari, Franco Maloberti ”A Micropower Chopper—CDS Operational Amplifier” IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 45, NO. 12, DECEMBER 2010 pp, 2521-2528
[8] National chip implementation center” The CIC CMOS MEMS Design Platform for Heterogeneous Integration”
[9] G. Zhang,H.Xie, L. E. de Rosset, andG.K. Fedder, “Alateral capacitiveCMOS accelerometer with structural curl compensation,” in Tech. Dig.12th IEEE Int.
Conf.Micro ElectroMechanical System (MEMS’99), Or-lando, FL, 1999, pp. 606–611.
[10] C. C. Enz and G. C. Temes, "Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization,"
Proceedings of the IEEE, vol. 84, pp. 1584-1614, 1996.
[11] Deyou Fang, “LOW-NOISE AND LOW-POWER INTERFACE CIRCUITS DESIGN FOR INTEGRATED CMOS-MEMS INERTIAL SENSORS” UNIVERSITY OF FLORIDA 2006
[12] G. K. Fedder, "Simulation of microelectromechanical systems," Ph.D. Dissertation, Univ. California at Berkeley, 1994
128
[13] John A. Geen, Steven J. Sherman, John F. Chang, and Stephen R. Lewis,
“Single-Chip Surface Micromachined Integrated Gyroscope With 50 ∘ /h Allan Deviation” IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 37, NO. 12, DECEMBER 2002.
[14] Babak Vakili Amini, Siavash Pourkamali, Mohammad Zaman and Farrokh Ayazi ,“A New Input Switching Scheme for a Capacitive Micro-G Accelerometer”
Symposium On VLSl Circuits Digest of Technical Papers, pp310-313
[15] J. Wu, "Sensing and Control Electronics for Low-Mass Low-Capacitance MEMS Accelerometers," Ph.D Dissertation in Electrical and Computer Engineering Department.
Pittsburgh, PA: Carnegie Mellon University, 2002.
[16] M. C. Huang, Y. R. Huang and H. P. Chou “A Low-noise CMOS Readout Circuit for Capacitive Micro-sensors” IEEE SENSORS, 2006, pp, 1135-1138
[17] Ack Shiah, Hooman Rashtian, and Shahriar Mirabbasi “A Low-Noise Parasitic-Insensitive Switched-Capacitor CMOS Interface Circuit for MEMS Capacitive Sensors” New Circuits and Systems Conference (NEWCAS), 2011 IEEE 9th,pp,470-473
129
[18] S. S. Tan, C. Y. Liu, L. K. Yeh, Y. H. Chiu, Michael S.-C. Lu, and Klaus Y. J. Hsu,
“Design of Low-noise CMOS MEMS Accelerometer with Techniques for Thermal Stability and Stable DC Biasing” Custom Integrated Circuits Conference (CICC) 2010
[19] Olivier D. Bernal, Kunil Choe, Pradeep K. Gopalakrishnan, Hsiu-Yu Cheng, Kotlanka R. Krishna, David Nuttman, Noel Axelrod, Minkyu Je, “A Low-Power High-Performance Accelerometer ASIC for High-End Medical Motion Sensing “32nd Annual International Conference of the IEEE EMBS, Buenos Aires, Argentina, 2010, pp.190-193.
[20] Jianghua Chen 1,2, Xiaoxin Cui Xuewen Nit, and Bangxian MO “A Low-Noise Low-Offset CMOS Readout Circuitfor MEMS Capacitive Accelerometers” Solid-State and Integrated-Circuit Technology, ICSICT , 2008, pp, 1173-1176
[21] Anton Bakker, Kevin Thiele, and Johan H. Huijsing “A CMOS Nested-Chopper Instrumentation Amplifier with 100-nV Offset, IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 12, DECEMBER 2000, pp1877-1883
[22] H. Hai Tao, L. Toth, and J. M. Khoury, “Analysis of timing jitter in bandpass sigma–delta modulators”, IEEE Trans. Circuits Syst. II, vol. 46, pp. 991–1001, Aug.
1999.
130
[23] P. Malcovati, et al, “Behavioral modeling of switched-capacitor sigma-delta modulators”, IEEE Trans. Circuits Syst. I, vol. 50, no. 3, pp. 352-364, Mar. 2003.
[24] Achim Graupner “A Methodology for the Offset-Simulation of Comparators” Oct, 2006
[25] O. Choksi and L. R. Carley, “Analysis of switched-capacitor common-mode feedback circuit”, IEEE Trans. Circuits Syst. II, vol. 50, no. 12, pp. 906-917, Dec.
2003
[26] Kang Xiaofei, “A fully-differential Chopper-Stabilized Sigma-Delta Interface for MicroAccelerometer” International Conference on Mechanical and Electrical Technology (ICMET 2010)
[27] Ma Li Ya, Sheroz Khan, Anis Nurashikin Nordin, AHM Zahirul Alam, “A Low-Cost First-Order Sigma-Delta Converter Design and Analysis”
Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE
[28] “A Capacitance-to-Digital Converter for Displacement Sensing with 17b Resolution and 20μs Conversion Time” IEEE International Solid-State Circuits Conference, 2012
131
Vita
姓名: 林易達 性別: 男
出生地: 新北市
生日: 西元 1988 年 1 月 10 日
地址: 新北市中和市興南路一段 20 號
學歷: 國立交通大學電子工程研究所碩士班 2010/09~2012/10 國立中興大學電機工程學系 2006/09~2010/06 新北市國立板橋高級中學 2003/09~2006/06 論文題目:單晶片微加速度計與可調式靈敏度讀出電路整合設計