CNC(Computer numerical control)
CNC
3.2
3-2(a) (b)
X Y Z
3-2
(a) loadcell(LA-20) (b) loadcell(LA-200)
3-2
3-2
Model (LA-20) (LA-200)
Original size 12.7 12.7 80mm 25 22 130mm
Material(measuring element) Aluminum Aluminum
3-2
Model (LA-20) (LA-200)
Material(coating) Silicone rubber Silicone rubber
Weight 30g 250g
Max. capacity 5Kg 10Kg
Max. platform size 150 150mm 300 300mm
Sensitivity 2mV/V 2mV/V
Input/output resistance 1000/1000 500/500
Excitation voltage 5-15V 5-15V
3.3
3-3
X,Y 600×400mm
AC Servo Motor 1µm
930×700×295mm
X,Y Max. 800mm/min
3-3 ( ) Ø0.15~0.3mm
3.4
(Steel balls)
(Ceramic balls) (Air) (Maglev) [40]
3-4(a)
3-4
3-4(b)
3-4 [41]
Model NAKANISHI (NRF-3060SDL) Outside diameter Ø30mm
Motor type Electric system Allowable motor speed 60,000rpm
Bearings Ceramic bearings Spindle accuracy Within 1 m
(a) (NRF-3060SDL) (b)
(Single crystalline diamond, SCD)
(B-doped diamond,
BDD) (B-doped
polycrystalline diamond, BD-PCD)
(Random)
(Isotropic)
(Tungsten carbide, WC) 30mm 2mm
3-5(a)
6mm
6mm 3-5(b) 3-5
3-5 [43]
Properties BD-PCD Density 3.8~4.1g/cm3 Knoop hardness 5000~8000kg/mm2
Toughness 6.1~8.9MPa/m2 Compression strength 7700MPa
Tensile strength 1300MPa Thermal expansion 1.5~3.8×10-6/ Thermal conductivity 560W/mK
(a) (b) 3-5
3.5.3 (BK7 Gorilla glass)
BK7 (Gorilla glass) BK7
3-6(a)
BK7 [44]
3-6(b) (Ion exchange)
(Soda lime glass) [45] 3-7
3-6 BK7
3-6 [46]
Work-piece BK7 Gorilla glass Density (g/cm3) 2.51 2.42
Young's modulus (GPa) 86.3 71.5 Poisson's ratio 0.208 0.21 Shear modulus (GPa) 34 30.1 Vickers hardness (kgf/mm2) 496 649 Fracture toughness (MPa/m2) 1.1 0.68
(a) BK7 (b) (Gorilla glass)[45]
3-6
3-7
3.6
(Scanning electron microscope, SEM) 3-9
[47]
3-8
[50]
3-10
3-10 [51]
Jobin Yvon T64000 5 ~ 6,000cm-1 ±25°
632.8nm m
3-11 4~1773k
CNC
CNC 4-1
4-1
4.1 CNC
CNC
CNC
X Y Z
A/D
4.1.1 CNC
CNC
X Y Z
(hysteresis) (backlash) [52]
CNC 4-2(a)
X Y Z
(Lift stage) (Compact)
4-1 X Y Z [53]
X-axis Y-axis Z-axis
Model ANT-95-50-XY-PLUS AVL125
Travel 50mm 50mm 25mm
Resolution 1nm 1nm 0.0045µm-1.0µm
Repeatability ±75nm ±75nm ±300nm
Straightness ±1 m ±1 m ±3 m
Maximum Speed 500mm/s 500mm/s 100mm/s
Stage Mass 3.2kg 5.6kg
Material Aluminum Body/Black Hardcoat Finish
(a) (b)
4-2 CNC
3D
4-3(a)
4-3(b) CNC 3D
(a) CNC (b) CNC 3D
4-3 CNC
4.1.2 CNC
(Finite element method, FEM)
(Nature frequency)
4-4(a) (Base)
400N 0.08 m 4-4(b)
(Bracket) 4-5(a)
Fn=100N m
0.028 m 4-5(b)
(Cast iron) X Y Z
(Al alloy) (SS alloy)
(PMMA)
=4.474 m 4-6(b)
(a) (b)
4-4
(a) (b)
4-5
(a) (b) 4-6
(Forced vibration) (self-excited
vibration)
[54] 4-7
(131.24Hz) 4-2
4-2
Spindle speed(rpm) Freq.(Hz) 7874.4 131.24 9985.8 166.43 15142.8 252.38 18000.6 300.01
4.1.3
X Y Z
4-8(a)
X Y 5kg
0.2g Z
10kg 0.2g
X Y X Y Z
Z
4-8(b)
(a) (b)
4-8
4.1.4 CNC
3D 2D
CNC 4-9
(Locating Pin) (Hard chromium plating)
(Stainless steel screw)
(Stainless steel shim) 4-10(a)
1 (Micrometer) X Y
Z 4-10(b)
1µm/50mm 4-11
(a) (b)
4-9
(a) (b) 4-10
(a) (a)
4-11
4.1.5 CNC
Ss
5000, 10000, 15000, 20000, 25000 30000rpm 2000ms
X Y Z Ep
(Gain)
4-12 Kp
(Proportional gain)
Ki (Integral gain)
Kpos (Position gain)
Vff (Velocity feedforward gain)
Aff (Acceleration feedforward gain)
Fs
4-12 [55]
4-3 4-13(a)
(b)
15000 30000rpm
4-2
4-3
Parameters X-axis Y-axis Z-axis
Kp 1000 2000 1133
Ki 20 14 47
Kpos 50 300 22.9
Vff 7.1399 0 7.4800
Aff 1770 1096 1386
(a) (b)
4-13
(a) 5000rpm ( ) (b) 5000rpm ( )
(c) 10000rpm ( ) (d) 10000rpm ( )
(e) 15000rpm ( ) (f) 15000rpm ( )
(i) 25000rpm ( ) (j) 25000rpm ( )
(k) 30000rpm ( ) (l) 30000rpm ( )
4-14
4.2
CAD
4.2.1
4-15(a)
Td 1mm ( Ø6mm)
4-15(b)
(Clearance angle)
[56]
(a) (b)
4-15
(Torque)
(Normal force) Nf
)
T=0.0005N-m Nf=1N =10°
=1.105 m( 4-16(b)) 20°
4-4
Parameter Condition Tool material BD-PCD Tool diameter(Td) 1mm
Back rake angle 0°
Normal force (Nf) 1N
Test torque (T) 0.0005N-m
Clearance angle ( ) 10°, 15°, 20°, 25°, 30°
(a) (b) ( =20°)
4-16
4.2.2
(High frequency welding, HFW) (Rotation wire
electrical discharge machining, RWEDM) 4-17
30mm
6mm (a)
6mm (Silver
brazing) (b)
CNC
(c) (Rake face)
(d)
4-17
4.2.3
CAM
CNC CNC
4-18(a)
4-5
500 rpm
Brass wire(Ø250µm) BD-PCD & WC
(a) RWEDM (b)
4-18
(1)
(Spark erosion rate) 4-19(a)
4-19(b)
4-19(c) 4-19(d)
(a) (b)
(c) (d)
4-19
(2)
600
[57] 4-20(a)
(D-D bonding)
4 (Raman spectrum)
1334cm-1 sp3 4-20(b)
(a) (b) ( )
4-20
4-21(a) (b)
4 4-22(a) (b)
sp3 1334cm-1
1334cm-1 1584cm-1
sp2
(a) (b) 4-21
(a) ( ) (b) ( )
4-22
4.2.4
4-6
(Breakage) 4-23(a)
(Cutting edge) (Push zone) (Pull zone) 4-23(b)
(Push force) (Pull force)
4-6
Parameter Condition
Tool BD-PCD
Work-piece BK7 Cutting speed(V) 50m/min
Feed rate(F) 0.6mm/min Depth of cut(Dc) m
Total depth(Dt) 10 m
(a) (b)
4-23
4-24(a) (1mm) 4-24(b)
(Z ) Fc
(a) (a)
4-24
4-25(a)
(T=0.0005N-m, Nf=1N)
0.383 m =1.105 m
( 4-15(b)) 65% 4-25(b)
(a) (b) 4-25
4-26(a)
Ø6mm Ø6mm
Ø1mm
(Flank) (Rake face)
90
4-26(b) 4-26(c)
(a) ( )
(b) (c)
4-26
5.1
5-1(a)
1mm 500 m
0.1 m/step
(a) (b) 5-1
5.1.1
[58] 5-1
5-1 WD-40 [59]
Ingredient Percentage Aliphatic Hydrocarbon 50-70%
Petroleum Base Oil <25%
Surfactant <2%
Non-Hazardous <10%
Parameter Condition Tool BD-PCD Work piece BK7 Cutting speed(V) 70m/min
Feed rate(F) 20mm/min Depth of cut(Dc) m
Total depth(D) 10 m
(a)
(b) (c)
5-2
5.1.2
5-3(a) 5-3 5-3(b)
5-3
Parameter Condition
Tool BD-PCD
Work-piece BK7 Cutting speed(V) 70m/min
Feed rate(F) 20mm/min Depth of cut(Dc) m
(a) 0 (b) -60
5-4 0° -60
(a) -60 (b) -60
5-5 -60
5-4 5-6 0°
(a)
-60 (b)
5-4
Parameter Condition Tool BD-PCD Work-piece BK7 Cutting speed(V) 70m/min
Feed rate(F) 20mm/min Depth of cut(Dc) m
5-5
Parameter Condition Tool BD-PCD Work-piece BK7 Feed rate(F) 20mm/min Depth of cut(Dc) 1 m
Total depth(Dt) 10 m
Cutting speed(V) 10, 30, 50, 70, 90m/min
5-7
10 30m/min (a) (b)
50m/min (c)
70m/min (d)
90m/min (e) 5-8
10 30m/min
50 70m/min (60m/min)
(a) 10m/min (b) 30m/min
(c) 50m/min (d) 70m/min
(a) 10m/min (b) 30m/min
(c) 50m/min (d) 70m/min
(e) 90m/min (f)
5-8 ( )
5.1.3
m, 2 m, 3 m, 4 m m
5-6
5-6
Parameter Condition Tool BD-PCD Work-piece BK7 Cutting speed(V) 60m/min
Feed rate(F) 20mm/min
Depth of cut(Dc) 1 m, 2 m, 3 m, 4 m, 5 m
(a) m (b) m
(c) m (d) m
(e) m
5-9 (SEM )
(a) m (b) m
(c) m (d) m
5.2
(Ductile mode)
(Brittle mode) 5-11(a) (b)
(Z ) 5-11(c)
(d)
(a) (b)
(c) (d)
5-11
5.2.1
5-12
5-12
3 (At)
(Jt) (Fo) 5-1
Fnow (g) Ft (g)
At Fo
Fo
(Manual feedrate override, MFO)
(Grinding mark)
Jt MFO 20%
MFO 200% 2
MFO 5-13
5-13
5.2.2
5-7
3 60mm/min
5-14 3
5-7
Parameter Condition Tool BD-PCD Work-piece BK7 Cutting speed(V) 60m/min
Feed rate(F) 60mm/min Depth of cut(Dc) 1 m
Total depth(Dt) 10 m Feedback control off, on
(a) (b)
5-15(a) (b)
5-16 Ra 0.099 m
Ra 0.056 m
(a) (b)
5-15
(a) (b)
5-16 ( )
5.2.3
Parameter Condition Tool BD-PCD Work-piece Gorilla glass Cutting speed(V) 60m/min
Feed rate(F) 120mm/min Depth of cut(D) 1 m
(a) (b) 5-17
(a) (b)
5-18
(2)
5-19(a)
3 0.1mm
0.2mm 0.2mm 5-19(b) 5-9
5-10 5-20
(a)
(b)
(c)
40min
70min (d)
5-9
Work-piece Quartz Density (g/cm3) 2.65 Young's modulus (GPa) 70
Poisson's ratio 0.17 Mohs hardness (kgf/mm2) 7.00
5-10
Parameter Condition Tool BD-PCD Work-piece Quartz Cutting speed(V) 60m/min
Feed rate(F) 120mm/min Depth of cut(Dc) 1 m
Size 600 600 300 m Feedback control off, on
(a) (b) 5-19
(a) (b)
(c) (d)
5-20 (SEM )
6.1
a. 3D PID
b.
c.
a.
b.
a.
b.
(60mm/min) Ra 0.099µm
Ra 0.056µm
c. 3 (At)
(Jt) (Fo) 3
6.2
a.
b.
c. AOI
a.
b.
c.
a.
b.
c.
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