智能化精微工具機開發與光學玻璃微結構加工研究

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(1)Development of an intellectualized machine tool and research of microstructure machining on optical glass. 1. 0. 1. 7.

(2)

(3) 3C. (BK7) (Gorilla glass). (Quartz) —. (Intellectualized). Ra 0.099 µm µm 0.7 mm. 0.3 mm. i. Ra 0.056.

(4) Abstract Optical glass is widely applied in smart-phones, digital cameras and other consumer-oriented electronic products because of the excellent physical, electronic and optical properties. However, it is dif cult in material removal resulting from an unpredictable brittle fracture. Brittle fracture such optical glass cannot thus be employed extensively. The primary purpose of the thesis is to develop an intellectualized machine tool and using the finished machine tool to fabricate microstructure on optical glass as BK7, gorilla glass and quartz. To avoid brittle fracture damage and micro cracks, a sensor (feedback) mechanism made with a three-axis load-cell constantly detects the drilling force is proposed to give real-time feedback to regulate the feed-rate. Grinding-drilling is applied whereby the diamond tool slowly mills into the glass grinding layer by layer. By applying the human-like feedback mechanism, the machine tool can achieve an intellectualized machining and improve the processing quality. Experimental results demonstrate that the designed feedback mechanism can provide an effective protection against abrupt cutting force. The roughness of grinding surface can be accomplished from Ra 0.099 µm down to Ra 0.056 µm. A precision bar-shaped groove with 0.7 mm in depth and a micro tower with 0.3 mm in height can be finished on a toughened gorilla glass and quartz, respectively.. Compared. to. commercial. machine. tool. with. ultrasonic. vibration-assisted, this development is simple and cost-effective.. Keywords: Intellectualized machine tool, optical glass, micro machining, feed-rate feedback mechanism ii.

(5) SEM. 2012.07 iii.

(6) ............................................................................................................. i Abstract .............................................................................................................. ii ................................................................................................................... iii ................................................................................................................... iv .............................................................................................................. vii ............................................................................................................... ix ......................................................................................................... xiii ...................................................................................................... 1 1.1. ...................................................................................................... 1. 1.2. ............................................................................................. 3. 1.3. ............................................................................................. 4. 1.4. ............................................................................................. 5. 1.5. ............................................................................................. 6 1.5.1. ........................................................................... 6. 1.5.2. ......................................................... 10. 1.5.2. ................................................... 12 ............................................................................................ 15. 2.1. ................................................................. 15. 2.2. ..................................................................................... 16 2.2.1. .............................................................. 17. 2.3. .................................................................... 18. 2.4. ................................................................................. 19 2.4.1. .................................................................................... 20 iv.

(7) 2.4.2. ............................................................. 20 ................................................................................. 22. 3.1 CNC. ........................................................................ 22. 3.2. ......................................................................... 23. 3.3. ............................................................................ 24. 3.4. ................................................................. 25. 3.5. ............................................................................................ 26 3.5.1. .................................................................. 26. 3.5.3. (BK7 Gorilla glass) ................................................ 28. 3.6. ..................................................................................... 30 3.6.1. ...................................................................... 30. 3.6.2. .................................................................. 30. 3.6.3. ...................................................... 31. 3.6.4. .................................................................. 31 ............................................................................................ 33. 4.1. CNC. ................................................ 34. 4.1.1. CNC. .................................................... 34. 4.1.2. CNC. .................................................... 36. 4.1.3. ....................................... 39. 4.1.4. CNC. ............................. 40. 4.1.5. CNC. .................................... 41. 4.2. ......................................................... 45 4.2.1. ...................................................... 46. 4.2.2. ................................................... 47. 4.2.3. ............................................................. 48 v.

(8) (1). ..... 50. (2). ....................................... 51. 4.2.4. ........................ 53 ............................................................................................ 58. 5.1. .................................................................... 58 5.1.1. .......................................................... 59. 5.1.2. ...................................................................... 61. 5.1.4. .......................................................................... 64. 5.1.3. .......................................................................... 68. 5.2. ............................................................................. 71 5.2.1. .......................................................................... 72. 5.2.2. .......................................................... 73. 5.2.3. .......................................................... 76. (1). ...................................................................... 76. (2). ...................................................................... 77 ................................................................................. 80. 6.1. .................................................................................................... 80. 6.2. ............................................................................................ 81 .......................................................................................................... 83 .......................................................................................................... 91. vi.

(9) 3-1 CNC. ................................................................... 22. 3-2. ........................................................................... 23. 3-3. ....................................................................... 25. 3-4. ............................................................... 26. 3-5. .............................................................................. 27. 3-6. ........................................................... 29. 3-7. ........................................................................... 30. 3-8. ....................................................................... 31. 3-9. ........................................................................... 31. 3-10 4-1 X. ..................................................................... 32 Y. Z. ............................................................... 35. 4-2. ........................................................................... 38. 4-3. ....................................................................... 43. 4-4. ........................................................................... 47. 4-5. ........................................ 49. 4-6. ............................................................... 54. 5-1 WD-40. ........................................................................... 59. 5-2. ................................................................... 60. 5-3. ....................................................................... 62. 5-4. ................................................................... 64. 5-5. ....................................................................... 65. 5-6. ....................................................................... 68. 5-7. ............................................................... 74 vii.

(10) 5-8. ....................................................................... 76. 5-9. .............................................................................. 78. 5-10. ..................................................................... 78. viii.

(11) 1-1. ..................................................................... 1. 1-2. ......................................................... 3. 1-3. ............................................................. 3. 1-4. ............................................................................................ 5. 1-5. ..................................................... 7. 1-6. ................................................. 8. 1-7. ............................................................. 9. 1-8. ............................................................... 10. 1-9. ................................................11. 1-10. ...........................11. 1-11. ......................................................... 12. 1-12. ..................................................................... 13. 1-13. ................................................................. 13. 1-14. ......................................................................... 14. 2-1. .................................................................... 16. 2-2. ........................................................... 17. 2-3. ........................................................................... 18. 2-4. ............................................ 19. 2-5. ........................................................................... 20. 2-6. .................................................................................. 21. 3-1 CNC. .......................................................................... 22. 3-2. ............................................................... 23. 3-3. .............................................................................. 25 ix.

(12) 3-4. ................................................................... 26. 3-5. ........................................................... 28. 3-6. ....................................................................... 29. 3-7. ................................ 29. 3-8. .................................................................................. 30. 3-9. .............................................................................. 31. 3-10. .................................................................. 31. 3-11. ............................................................................. 32. 4-1. ...................................................................................... 33. 4-2. CNC. .......................................... 35. 4-3. CNC. ......................................................... 36. 4-4. ............................................................... 37. 4-5. ............................................................... 37. 4-6. ........................................................... 38. 4-7. ............................................................ 38. 4-8. ........................................................... 39. 4-9. ............................................................... 40. 4-10. ......................................................... 41. 4-11. .................................................. 41. 4-12. ..................................................................... 42. 4-13. ...................................... 43. 4-14. ...................................... 45. 4-15. ................................................................. 46. 4-16. ............................................................................. 47. 4-17. ..................................................... 48 x.

(13) 4-18. ................................... 50. 4-19. ...................... 51. 4-20. .......................................... 52. 4-21. ................................................. 53. 4-22. .................................. 53. 4-23. .............................................. 54. 4-24. ........................... 55. 4-25. ............... 56. 4-26. .................................. 57. 5-1. ........................................................... 59. 5-2. ............................................ 61. 5-3. ................. 62. 5-4 0° 5-5. -60. ............................................. 63. -60. ................................................ 63. 5-6. (SEM. 5-7. (SEM. 5-8. (. 5-9. (SEM. 5-10. ) ........................................ 64 ) ............................................. 66 ) ....................... 67 ) ............................................ 69. (. ) .................... 70. 5-11. .................................. 71. 5-12. ......................................................... 72. 5-13. ............................................................. 73. 5-14. (SEM. 5-15. )................... 74. ................................................. 75. 5-16. ( xi. ) .... 75.

(14) 5-17. ......................................................... 77. 5-18. .............................................. 77. 5-19. ................................................. 79. 5-20. (SEM. xii. ) ........... 79.

(15) m). dc. b. kc. E. H. yc. VEX. (V). VO. m) (V). R1. 1( ). R2. 2( ). R3. 3( ). R4. 4( ) (N). Ss. (rpm). Nf. Td. (mm). Ep. m) V. Fc Ra. (degree). (m/min). T. m). Dc. F. (g). (N-m) (mm/min) m). Dt (µm). Tw. (sec). Kp. b. Ki. kpos. Vff. Aff. Fs. At. Jt. Fo. Fnow. (nm). (g). Ft. xiii. (g) (g).

(16) 1.1. 3C (Sapphire) (Smartphone) 1-1(a). (a). (b) 1-1. 1.

(17) (Laser-beam Machining). (Water-jet Machining). (Ultrasonic Machining). (Electrochemical Discharge Machining). [1]. 1-1(b). µm. mm. (Sub-µm). (Single crystal diamond, SCD) (Polycrystalline diamond, PCD) 6500HV~8000HV. 2. 80~120. [2].

(18) 1.2. (International Data Corporation, IDC). [3]. 2014 1-2. 1-3(a). 1-3(b). 1-2. [3]. (a). (b) 1-3 3.

(19) (Excimer laser). (Femtosecond Laser). ( ). 1.3. (BK7 Gorilla glass). 4.

(20) 1.4. 3D. 2D. (Boron-doped polycrystalline diamond, BD-PCD) 1mm. (Loadcell). 1-4. 1-4 5.

(21) 1.5. 1.5.1. [4]. [5] 1964 Legge. [6]. 2010. G. Hu. Percy. (Rotary ultrasonic. machining, RUM) [7]. (Alumina ceramics). 1-5(a) 2012. [8]. C. Nath. 1-5(b). [9]. 6.

(22) (a). [7]. (b). [8]. 1-5. 2009 S. Melkote. 4. 3D. [10]. A2(62 HRc) 1-6(a) B. Yang. CNC [11]. 1-6(b). [12]. 7.

(23) (a). [10]. (b). [11]. 1-6. [13] (Electrochemical machining, ECM) (Electrical discharge machining, EDM) [14]. 2009. X. D. Cao. (Soda-lime glass) [15] Han. 1-7(a). ( [16]. 100 m 2011. M. S.. 50 m). 1-7(b). (Heat affected-zone) (Sodium hydroxide, NaOH). 8.

(24) (a). [15]. (b). [16]. 1-7. [17] 1986. Marshall and. Lawn [18]. 2004. C. J Morgan (ultra-low expansion, ULE). [19]. 2008. 1-8(a). T. Ono (Crown glass) 1-8(b) [20]. 9. (TiAlN).

(25) (a). [19]. (b). [20]. 1-8. 1.5.2 (Boron PCD). (PCD). [21] PCD. 2009. K. Suzuki [22]. 1-9 Rz = 0.4 m. 10.

(26) (a). (b) 1-9. [22]. 2011. CNC ( [23]. 1-10(a)). 1-10(b). m. (a). (b) 1-10. 2012. [23]. A. Perveen. [24] 1-11(a) (material. 11.

(27) removal rate, MRR). 1-11(b). (a). (b) BK7 1-11. [24]. 1.5.2. [25]. 2005. T. Matsumura. (Piezo dynamometer) [26]. 1-12(a) 1-12(b). 12.

(28) (a). (b) 1-12. 2011 [27]. [26]. C. Andersson 1-13(a). 1-13(b). (a). (b) 1-13. 2012. [27]. M. Arif. (Cubic boron nitride, CBN) [28]. 1-14(a). 13.

(29) 1-14(b). (a). (b) 1-14. [28]. 14.

(30) X. Y. Z. 2.1 (Yield strength). [29] (critical depth of cut) 2-1(a). dc. 2-1. kc dc =b H. 2. E H. (2-1). 15.

(31) b. E. kc. H. 2-1(b) yc (Cut surface plane). (a). (b) 2-1. 2.2. ( ) 2-2(a). (. m~. (Inter-electrode gap) 8000 C. 16. [30]. m).

(32) 2-2(b). (a). (b) 2-2. 2.2.1 Wire electrical discharge machining, WEDM. CNC 2-3(a) [31]. 17.

(33) [32]. (a). 2-3(b). (b) 2-3. 2.3. [33]. 18.

(34) [34]. (Doping). (Boron) (E-hole). 2-4(a). [35]. (a). (b) PCD. 2-4(b). BD-PCD. 2-4. 2.4 (Load cell). (Strain guage). (Structure. member) [36]. 19.

(35) 2.4.1. 2-5(a) [37] 2-5(b). (a). (b) 2-5. 2.4.2 (Load cell) (Strain gauge) [38] (Spring material). (Strain) 2-6(a). (Wheatstone bridge). (Resistive arm). VEX 2-6(b). R1. R2 VO 20. R3 2-2. R4.

(36) VO =. R R3 +R4. R R +R. ×V. (2-2) (Full-bridge) [39]. 10mV/V (Signal-to-noise ratios). (a). (b) 2-6. 21.

(37) 3.1 CNC CNC(Computer numerical control). CNC. CNC. Z. XY CNC. CNC. 3-1. CNC. 3-1. 3-1 CNC X,Y,Z. 550 460 430mm 8,000rpm. 5.5kw/HP 300kg. X,Y,Z 3-1 CNC. X,Y,Z. 22. Max. 30/30/24 m/min 550 460 430.

(38) 3.2. 3-2(a) (b) X. Y. Z. 3-2. (a). loadcell(LA-20). (b). loadcell(LA-200). 3-2. 3-2 (LA-20). Model Original size Material(measuring element). (LA-200). 12.7 12.7 80mm. 25 22 130mm. Aluminum. Aluminum. 23.

(39) 3-2 Model. (LA-20). Material(coating). Silicone rubber. Silicone rubber. Weight. 30g. 250g. Max. capacity. 5Kg. 10Kg. 150 150mm. 300 300mm. 2mV/V. 2mV/V. 1000/1000. 500/500. 5-15V. 5-15V. Max. platform size Sensitivity Input/output resistance Excitation voltage. (LA-200). 3.3. (. ). (. ). CNC. 3-3. 3-3. 24.

(40) 3-3 X,Y. 600×400mm AC Servo Motor 1µm 930×700×295mm. X,Y 3-3. Max. 800mm/min (. ) Ø0.15~0.3mm. 3.4. (Steel balls) (Ceramic balls). (Air). (Maglev). 3-4(a). 3-4. 3-4(b). 25. [40].

(41) 3-4. [41] Model. Outside diameter Motor type Allowable motor speed Bearings Spindle accuracy. (a). NAKANISHI (NRF-3060SDL) Ø30mm Electric system 60,000rpm Ceramic bearings Within 1 m. (NRF-3060SDL). (b). 3-4. 3.5. 3.5.1 (Polycrystalline diamond, PCD) [42] (Single crystalline diamond, SCD) (Co). D-D bonding (. ). 26.

(42) (B-doped diamond, BDD). (B-doped. polycrystalline diamond, BD-PCD). (Random) (Isotropic). (Tungsten carbide, WC). 30mm. 3-5(a) 6mm 6mm. 3-5(b). 3-5. 3-5. [43]. Properties Density Knoop hardness Toughness. BD-PCD 3.8~4.1g/cm3 5000~8000kg/mm2 6.1~8.9MPa/m2. Compression strength. 7700MPa. Tensile strength. 1300MPa. Thermal expansion Thermal conductivity. 27. 1.5~3.8×10-6/ 560W/mK. 2mm.

(43) (a). (b) 3-5. 3.5.3. (BK7 Gorilla glass). BK7 (Gorilla glass) BK7. 3-6(a) BK7. [44] 3-6(b) (Ion exchange). (Soda lime glass). [45]. 3-7. 3-6. 28. BK7.

(44) 3-6. [46] Work-piece. BK7. Gorilla glass. Density (g/cm3). 2.51. 2.42. Young's modulus (GPa). 86.3. 71.5. 0.208. 0.21. 34. 30.1. Vickers hardness (kgf/mm2). 496. 649. Fracture toughness (MPa/m2). 1.1. 0.68. Poisson's ratio Shear modulus (GPa). (a) BK7. (b) 3-6. 3-7. 29. (Gorilla glass)[45].

(45) 3.6. 3.6.1 3-8. LED. (Chipping). 3-7. 3-7 AIXON 400×300mm X 200, Y 200mm Z. 150mm 0.5 m ±. 3-8. m. 3.6.2. (Scanning electron microscope, SEM) 3-9. [47]. 3-8. 30.

(46) 3-8. 5-300000X 3.00nm 0-30keV 3-9. 3.6.3. (. 3-10). (confocal image) (stray light) 3-9. [48]. 3-9. [49] VK-9700 250×400×42mm 7mm (408nm). 3-10. 0.001 m. 3.6.4 (. 3-11). 31.

(47) [50] 3-10. 3-10. [51] Jobin Yvon T64000 5 ~ 6,000cm-1 ±25° 632.8nm m. 3-11. 4~1773k. 32.

(48) CNC. CNC 4-1. 4-1. 33.

(49) 4.1. CNC CNC. CNC X. Y. Z. A/D. 4.1.1. CNC CNC. X Y Z (hysteresis) (backlash). [52] CNC. 4-2(a). X Y. Z. (Lift stage). (Compact) (Abbe's error) 4-2(b). Z. 25mm. 4-1. 34. X. Y. 50.

(50) 4-1 X. Y. Z. [53]. X-axis. Y-axis. Z-axis. Model. ANT-95-50-XY-PLUS. AVL125. Travel. 50mm. 50mm. 25mm. 1nm. 1nm. 0.0045µm-1.0µm. ±75nm. ±75nm. ±300nm. 500mm/s. 500mm/s. 100mm/s. Resolution Repeatability Straightness Maximum Speed. ±1 m. ±1 m. Stage Mass Material. ±3 m. 3.2kg. 5.6kg. Aluminum Body/Black Hardcoat Finish. (a). (b) 4-2. CNC. 3D 4-3(a) 4-3(b). 35. CNC. 3D.

(51) (a). CNC. (b) 4-3. 4.1.2. CNC. 3D. CNC. CNC. (Finite element method, FEM). (Nature frequency). 4-4(a). (Base). 400N. 0.08 m. 4-4(b). (Bracket). 4-5(a). Fn=100N. m. 0.028 m. 4-5(b). 4-6(a). 36.

(52) (Cast iron). X. Y. (Al alloy). (SS alloy). (PMMA) =4.474 m. 4-6(b). (a). (b) 4-4. (a). (b) 4-5. 37. Z.

(53) (a). (b) 4-6. (Forced vibration). (self-excited. vibration). [54]. 4-7. (131.24Hz). 4-2. 4-2 Spindle speed(rpm). 4-7. 38. Freq.(Hz). 7874.4. 131.24. 9985.8. 166.43. 15142.8. 252.38. 18000.6. 300.01. 44657.4. 744.29.

(54) 4.1.3 X. Y. Z 4-8(a) X. Y. 5kg. 0.2g Z 10kg 0.2g X. Y. X Z. 4-8(b). (a). (b) 4-8. 39. Y. Z.

(55) 4.1.4. CNC. 3D. 2D. CNC 4-9. (Locating Pin). (Hard chromium plating). (Stainless steel screw) (Stainless steel shim). 4-10(a) 1. (Micrometer). Z. 4-10(b) 1µm/50mm. 4-11. (a). (b) 4-9. 40. X Y.

(56) (a). (b) 4-10. (a). (a) 4-11. 4.1.5. CNC. Ss 5000, 10000, 15000, 20000, 25000 X. Y. Z. Ep. 41. 30000rpm. 2000ms.

(57) (Gain) 4-12. Kp. (Proportional gain) Ki. (Integral gain) Kpos. Vff. (Position gain) (Velocity feedforward gain). Aff. (Acceleration feedforward gain) Fs. 4-12. [55]. 4-3. 4-13(a). (b) 15000. 30000rpm. 4-2 4-14. 42.

(58) 4-3 Parameters. X-axis. Y-axis. Z-axis. Kp. 1000. 2000. 1133. Ki. 20. 14. 47. Kpos. 50. 300. 22.9. Vff. 7.1399. 0. 7.4800. Aff. 1770. 1096. 1386. (a). (b) 4-13. (a) 5000rpm. (. ). (b) 5000rpm. 43. (. ).

(59) (c) 10000rpm. (. ). (d) 10000rpm. (. ). (e) 15000rpm. (. ). (f) 15000rpm. (. ). (g) 20000rpm. (. ). (h) 20000rpm. (. ). 44.

(60) (i) 25000rpm. (. ). (j) 25000rpm. (. ). (k) 30000rpm. (. ). (l) 30000rpm. (. ). 4-14. 4.2 CAD. 45.

(61) 4.2.1. 4-15(a) Td. 1mm. (. Ø6mm). 4-15(b) (Clearance angle) [56]. (a). (b) 4-15. (Torque) (Normal force). Nf ). (Deformation analysis) 30°. 5. 10°, 15°, 20°, 25°. 4-4. 4-16(a). 46.

(62) T=0.0005N-m. Nf=1N =1.105 m(. =10°. 4-16(b)). 20°. 4-4 Parameter. Condition. Tool material. BD-PCD. Tool diameter(Td). 1mm. Back rake angle. 0°. Normal force (Nf). 1N. Test torque (T). 0.0005N-m. Clearance angle ( ). 10°, 15°, 20°, 25°, 30°. (a). (b). ( =20°). 4-16. 4.2.2. (High frequency welding, HFW). (Rotation wire. electrical discharge machining, RWEDM). 4-17 30mm. 47.

(63) 6mm. (a) 6mm. (Silver. brazing) (b). CNC (c). (Rake face) (d). 4-17. 4.2.3. CAM CNC. CNC. 1mm. 48.

(64) 4-18(a) 4-5. 4-5. 4-18(b). 4-5 *1. *2. (OV). 70V. 70V. (PW). A00. A02. (ON). 2. 2. (OFF). 15. 16. (AN). 1. 1. (AFF). 15. 16. (SV). 65. 65. (FR). 5. 5. (WF). 7. 7. (WT). 7. 10. 49.

(65) 4-5 500 rpm. Brass wire(Ø250µm) BD-PCD & WC. (a). RWEDM. (b). 4-18. (1). (Spark erosion rate) 4-19(a) 4-19(b). 50.

(66) 4-19(c) 4-19(d). (a). (b). (c). (d) 4-19. (2). 600 [57]. 51. 4-20(a).

(67) (D-D bonding). 4. (Raman spectrum). 1334cm-1. sp3. (a). 4-20(b). (b). (. ). 4-20. 4-21(a). (b). 4 4-22(a). (b) sp3. 1334cm-1. 1334cm-1. 1584cm-1 sp2 1334cm-1 1584cm-1. 1334cm-1. 1584cm-1 52.

(68) (a). (b) 4-21. (a). (. ). (b). (. 4-22. 4.2.4. 4-6 (Breakage). 53. 4-23(a). ).

(69) (Cutting edge). (Push zone). (Pull zone). 4-23(b) (Push force). (Pull force). 4-6 Parameter Tool Work-piece Cutting speed(V) Feed rate(F). Condition BD-PCD BK7 50m/min 0.6mm/min. Depth of cut(Dc). m. Total depth(Dt). 10 m. (a). (b) 4-23. 54.

(70) 4-24(a). (1mm) (Z. (a). ). 4-24(b). Fc. (a) 4-24. 4-25(a) (T=0.0005N-m, Nf=1N) 0.383 m (. 4-15(b)). =1.105 m. 65%. 4-25(b). 55.

(71) (a). (b) 4-25. 4-26(a). Ø6mm Ø6mm Ø1mm. (Flank). (Rake face). 90 4-26(b). 4-26(c). 56.

(72) (a). (. (b). (c) 4-26. 57. ).

(73) 5.1. 5-1(a). 1mm. 500 m. 0.1 m/step. (Critical contact) m 5-1(b). 58. 10 m. 2mm.

(74) (a). (b) 5-1. 5.1.1. [58]. 5-1. 5-1 WD-40. [59]. Ingredient Aliphatic Hydrocarbon Petroleum Base Oil Surfactant Non-Hazardous. 59. Percentage 50-70% <25% <2% <10%.

(75) (Dry). (Infiltration). (Oil mist). 5-2. 5-2 (a) (b). (c). 5-2 Parameter. Condition. Tool. BD-PCD. Work piece Cutting speed(V) Feed rate(F). BK7 70m/min 20mm/min. Depth of cut(Dc). m. Total depth(Dt). 10 m. Lubricant. Dry, Infiltration, Oil mist. 60.

(76) (a). (b). (c) 5-2. 5.1.2. 5-3(a). 5-3. 61. 5-3(b).

(77) 5-3 Parameter. Condition. Tool. BD-PCD. Work-piece. BK7. Cutting speed(V). 70m/min. Feed rate(F). 20mm/min. Depth of cut(Dc). m. Total depth(Dt). 10 m. (a). (b) 5-3. 0°. -60. BK7. 5-4 5-5(a). -60. 90. 5-5(b). 62. -60. 0°.

(78) (a). 0. (b) 5-4 0°. (a). -60. -60. -60. (b) 5-5. -60. -60. 5-4. 5-6. 0° (a). -60. (b). 63.

(79) 5-4 Parameter Tool Work-piece Cutting speed(V) Feed rate(F). BD-PCD BK7 70m/min 20mm/min. Depth of cut(Dc). m. Total depth(Dt). 10 m. Back rake angle( b). (a). Condition. 0. 0 , -60. (b). 5-6. -60 (SEM. 5.1.4. 10, 30, 50, 70 5-5. 64. 90m/min. ).

(80) 5-5 Parameter Tool. Condition BD-PCD. Work-piece. BK7. Feed rate(F). 20mm/min. Depth of cut(Dc). 1 m. Total depth(Dt). 10 m. Cutting speed(V). 10, 30, 50, 70, 90m/min. 5-7 10. 30m/min. (a) (b). 50m/min. (c). 70m/min. (d). 90m/min. (e) 10. (Ra 0.039 m. Ra 0.043 m). 30m/min. 5-8(a) (b). 50m/min. 50m/min. 5-8(c). 90m/min 50. (Ra 0.139 m. 5-8. Ra 0.239 m). 5-8(c) (e). 90m/min 70m/min (Ra 0.129 m). 5-8(d) 50. 70m/min. (60m/min). 65.

(81) (a). 10m/min. (b). 30m/min. (c). 50m/min. (d). 70m/min. (e). 90m/min. 5-7. (SEM. 66. ).

(82) (a). 10m/min. (b). 30m/min. (c). 50m/min. (d). 70m/min. (e). 90m/min. (f). 5-8. (. 67. ).

(83) 5.1.3. m, 2 m, 3 m, 4 m. m. 5-6. 5-6 Parameter Tool Work-piece Cutting speed(V) Feed rate(F) Depth of cut(Dc). Condition BD-PCD BK7 60m/min 20mm/min 1 m, 2 m, 3 m, 4 m, 5 m. 5-9. m m. m. 5 5-10 (Ra 0.025 m). m m. 68.

(84) (a). m. (b). m. (c). m. (d). m. (e). m. 5-9. (SEM. 69. ).

(85) (a). m. (b). m. (c). m. (d). m. (e). m. (f). 5-10. (. 70. ).

(86) 5.2. (Ductile mode) (Brittle mode). 5-11(a) (b). (Z (d). (a). (b). (c). (d) 5-11. 71. ). 5-11(c).

(87) 5.2.1. 5-12. 5-12. 3 (Jt). (Fo). Fnow -. At t=1 Ft. At. (At) 5-1. (5-1). Fo. 72.

(88) Fnow. (g). Ft. At. (g). Fo. Fo (Manual feedrate override, MFO). (Grinding mark) Jt MFO. MFO. 20%. 200%. 2. MFO. 5-13. 5-13. 5.2.2. 5-7. 73.

(89) 3. 60mm/min. 5-14. 3. 5-7 Parameter Tool Work-piece Cutting speed(V) Feed rate(F) Depth of cut(Dc) Total depth(Dt) Feedback control. (a). Condition BD-PCD BK7 60m/min 60mm/min 1 m 10 m off, on. (b) 5-14. (SEM. 74. ).

(90) 5-15(a) (b). 5-16. Ra 0.099 m. Ra 0.056 m. (a). (b) 5-15. (a). (b) 5-16. (. 75. ).

(91) 5.2.3 (1). 5-8. 5-17. 5-17(b) (Chipping). (#8000). 5-18(a). 5-18(b). 5-8 Parameter. Condition. Tool. BD-PCD. Work-piece. Gorilla glass. Cutting speed(V). 60m/min. Feed rate(F). 120mm/min. Depth of cut(Dc). 1 m. Total depth(Dt). 700 m. Feedback control. on. 76.

(92) (a). (b) 5-17. (a). (b) 5-18. (2). 5-19(a) 3 0.2mm. 0.1mm. 0.2mm. 5-19(b) 5-10. 5-9 5-20 (a). 77.

(93) (b). (c) 40min 70min. (d). 5-9 Work-piece Density (g/cm3) Young's modulus (GPa). Quartz 2.65 70. Poisson's ratio. 0.17. Mohs hardness (kgf/mm2). 7.00. 5-10 Parameter. Condition. Tool. BD-PCD. Work-piece. Quartz. Cutting speed(V). 60m/min. Feed rate(F). 120mm/min. Depth of cut(Dc). 1 m. Size. 600 600 300 m. Feedback control. off, on. 78.

(94) (a). (b) 5-19. (a). (b). (c). (d) 5-20. (SEM. 79. ).

(95) 6.1. a.. 3D. PID. b.. c.. a.. b.. c.. 60m/min 1µm/stroke Ra 0.025µm. 80. 20mm/min.

(96) a.. b.. (60mm/min). Ra 0.099µm. Ra 0.056µm c.. 3 (Jt). (Fo). (At) 3. 6.2. a.. b.. 81.

(97) c.. AOI. a.. b.. c.. a.. b.. c.. 82.

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