Experimental flow visualization and temperature measurement have been conducted here to explore the effects of the sidewall converging and the duct inclination on the buoyancy induced vortex flow and return flow in mixed convection of air in a horizontal flat duct, modeling horizontal MOCVD processes. In the experiment the Reynolds number is varied from 5 to 50 and Rayleigh number from 7,200 to 21,000 for various degrees of sidewall converging and duct inclination. The major conclusions obtained from the results obtained here can be summarized as follows:
(1) Due to the acceleration of the main flow by the converging of the sidewalls, and the reduction of normal buoyancy component by the duct inclination, the buoyancy driven unstable L-rolls and T-rolls can be effectively stabilized. Besides, the onsets of longitudinal and transverse vortex rolls are delayed to a significant degree.
(2) The main flow acceleration in the convergent duct and the duct inclination noticeably delay the onset of the return flow and weakens it to some degree.
(3) Empirical equations have been proposed to correlate the onset conditions of the return flow.
(4) The sidewall converging and duct inclination also greatly suppress the temporal
oscillation of the flow. At a high converging angle of the sidewalls or a small inclined angle of the duct the buoyancy driven unstable flow oscillation can be completely suppressed.
(5) The reduction in the size of the return flow zone by the sidewall converging and the duct inclination are more effective at a higher Re.
(6) When the duct is inclined slightly, the onsets of thermals and longitudinal and transverse vortex rolls are significantly delayed.
During the course of this investigation, it is recognized that the elimination of the return flow is still very important in the MOCVD processes. Simple methods to delay and even eliminate the return flow need to be further developed and explored in the future.
REFERENCES
[1] J.T. Lir, M.Y. Chang, T. F. Lin, Vortex Flow Patterns near Critical State for Onset of Convection in Air Flow through a Bottom Heated Horizontal Flat Duct, International Journal of Heat and Mass Transfer 44 (2001) 705-719.
[2] T.C. Cheng, J.T. Lir, T.F. Lin, Stationary Transverse Rolls and U-rolls in Limiting low Reynolds number Mixed Convective Air Flow near the Convective Threshold in a Horizontal Flat Duct, International Journal of Heat and Mass Transfer 45 (2002) 1211-1227
[3] E. P. Visser, C. R. Kleijn, C. A. M. Govers, C. J. Hoogendoorn, L. J. Giling, Return flows in horizontal MOCVD reactors studied with the use of TiO2 particle injection and numerical calculations, Journal of Crystal Growth 94 (1989) 929-946.
[4] J.L. Tuh, Experimental Study on the Mixed Convective Air Flow Structure Driven by a Heated Circular Plate Embedded in the Bottom of a Horizontal Flat Duct, Ph.D.
thesis, Nation Chiao Tung University, Hsinchu, Taiwan, 2003.
[5] H. Zhang, X.Y. Huang, H.S. Li, L.P. Chua, Flow Pattern and Heat Transfer Enhancement in low-Reynolds-Rayleigh-number Channel Flow, Applied Thermal Engineering 22 (2002) 1277-1288.
[6] Y. Kamotani, S. Ostrach, Effect of thermal instability on thermally developing channel flow, ASME Journal of Heat Transfer 98 (1976) 62-66.
[7] E. L. Koschmieder, S. G. Pallas, Heat transfer through a shallow, horizontal convecting fluid layer, International Journal of Heat and Mass Transfer 17 (1974) 991-1002.
[8] Y. Mori, Y. Uchida, Forced convective heat transfer between horizontal flat plates, International Journal of Heat and Mass Transfer 9 (1966) 803-817.
[9] J. M. Luijkx, J. K. Platten, J. C. Legros, On the existence of thermoconvective rolls, transverse to a superimposed mean Poiseuille flow, International Journal of Heat and Mass Transfer 24 (7) (1981) 1287-1291.
[10] J. L. Tuh, T. F. Lin, Visualization of Return Flow Structure in Mixed Convection of Gas over a Heated Circular Plate in a Horizontal Flat Duct, Journal of Crystal Growth 257 (2003) 199-211
[11] W. k. Cho, D.H. Choi, Optimization of a Horizontal MOCVD Reactor for Uniform Epitaxial Layer Growth, International Journal of Heat and Mass Transfer 43 (2000) 1851-1858.
[12] M. Akiyama, G. J. Hwang, K. C. Cheng, Experiments on the onset of longitudinal vortices in laminar forced convection between horizontal plates, ASME Journal of Heat Transfer 93 (1971) 335-341.
[13] X. Nicolas, J.M. Luijkx, J.K. Platten, Linear Stability of Mixed Convection Flows in Horizontal Rectangular Channels of Finite Transversal Extension Heated from
Below, International Journal of Heat and Mass Transfer 43 (2000) 589-610.
[14] S. Ostrach, Y. Kamotani, Heat transfer augmentation in laminar fully developed channel flow by means of heating from below, ASME Journal of Heat Transfer 97 (1975) 220-225.
[15] Y. Kamotani, S. Ostrach, H. Miao, Convective heat transfer augmentation in thermal entrance regions by means of thermal instability, ASME Journal of Heat Transfer 101 (1979) 222-226.
[16] M.Y. Chang, C. H. Yu and T. F. Lin., Changes of Longitudinal Vortex Roll Structure in a Mixed Convective Air Flow through a Horizontal Plane Channel: an Experimental Study, International Journal of Heat and Mass Transfer 40 (1997) 347-363.
[17] K.C. Chiu, J. Ouazzani, F. Rosenberger, Mixed convection between horizontal plates-II. Fully developed flow, International Journal of Heat and Mass Transfer 30 (1987) 1655-1662.
[18] E. M. Sparrow and W. J. Minkowycz, Buoyancy effects on horizontal boundary-layer flow and heat transfer, International Journal of Heat and Mass Transfer 5 (1962) 505-511.
[19] X. Nicolas and A. Mojtabi, J. K. Platten, Two-dimensional numerical analysis of the Poiseuille-Benard flow in a rectangular channel heated from below, Physics of
Fluids 9 (2) February (1997)
[20] C.H. Yu, M.Y. Chang, T.F. Lin, Structure of moving transverse and mixed rolls in mixed convection of air in a horizontal plane channel, International Journal of Heat and Mass Transfer 40 (2) (1997) 333-346.
[21] C.H. Yu, M.Y. Cheng, T.F. Lin, Unsteady vortex roll structures in a mixed convective air flow through a horizontal plane channel: a numerical study, International Journal of Heat and Mass Transfer 40 (3) (1997) 505-518.
[22] M.L. Hitchman, K.F. Jensen, Chemical Vapor Deposition Principle and Applications, Academic Press, San Diego, 1993, Chapter 6.
[23] Y. Mori, Buoyancy effects in forced laminar convection flow over a horizontal flat plate, ASME Journal of Heat Transfer (1961) 479-482.
[24] F. C. Eversteyn, P. J. W. Severin, C. H. J. v. d. Brekel, H. L. Peek, A stagnant layer model for the epitaxial growth of silicon form silane in a horizontal reactor, Journal of the Electrochemical Society 117 (1970) 925-931.
[25] L. J. Giling, Gas flow patterns in horizontal epitaxial reactor cells observed by interference holography, Journal of the Electrochemical Society 129 (1982) 634-644.
[26] D. I. Fotiadis, M. Boekholt, K. F. Jensen, W. Richter, Flow and heat transfer in CVD reactors:comparison of Raman temperature measurements and finite element model predictions, Journal of Crystal Growth 100 (1990) 577-599.
[27] J. Ouazzani, K. C. Chiu, F. Rosenberger, On the 2D modeling of horizontal CVD reactors and its limitations, Journal of Crystal Growth 91 (1988) 497-508.
[28] J. Ouazzani, F. Rosenberger, Three-dimensional modeling of horizontal chemical vapor deposition-Ⅰ. MOCVD at atmospheric pressure, Journal of Crystal Growth 100 (1990) 545-576.
[29] E. O. Einset, K. F. Jensen, C. R. Kleijn, On the origin of return flows in horizontal chemical vapor deposition reactors, Journal of Crystal Growth 132 (1993) 483-490.
[30] N. K. Ingle, T. J. Mountziaris, The onset of transverse recirculations during flow of gases in horizontal ducts with differentially heated lower walls, Journal of Fluid Mechanics 277 (1994) 249-269.
[31] D. B. Ingham, P. Watson, P. J. Heggs, Recirculating laminar mixed convection in a horizontal parallel plate duct, International Journal of Heat and Fluid Flow 16 (3) (1995) 202-210.
[32] D. B. Ingham, P. Watson, P. J. Heggs, Upstream migration of heat during combined convection in a horizontal parallel plate duct, International Journal of Heat and Mass Transfer 39 (2) (1996) 437-440.
[33] T. M. Makhviladze, A. V. Martjushenko, Several aspects of the return flows formation in horizontal CVD reactors, International Journal of Heat and Mass Transfer 41 (16) (1998) 2529-2536.
[34] K. W. Park, H. Y. Pak, Characteristics of three-dimensional flow, heat, and mass transfer in a chemical vapor deposition reactor, Numerical Heat Transfer 37 (2000) 407-423.
[35] T.S. Chen, A. Moutsoglou, B.F. Armaly, Thermal instability of Mixed convection flow over inclined surfaces, Numerical Heat Transfer 5 (1982) 343-352.
[36] C. Gau, C.W. Liu, T.M. Huang, Win Aung, Secondary flow and enhancement of heat transfer in horizontal parallel-plate and convergent channels heating from below, International Journal of Heat and Mass Transfer 42 (1999) 2629-2647.
[37] W.S. Tseng, W.L. Lin, C.P. Yin, C.L. Lin, T.F. Lin, Stabilization of buoyancy-driven unstable vortex flow in mixed convection of air in a rectangular duct by tapering its top plate, ASME Journal of Heat Transfer 122 (2000) 58-65.
[38] S.H. Sun, Buoyancy Driven Vortex Flow Structures in Mixed Convective Air Flow through a Horizontal Bottom Heated Convergent Flat Duct, M.S. thesis, National Chiao Tung University, Hsinchu, Taiwan, 2002.
[39] J.Y. Wang, Stabilization of Mixed Convective Air Flow Driven by a Heated Circular Plate Embedded in the Bottom of Horizontal Rectangular Duct by Inclining its Bottom Plate, M.S. thesis, National Chiao Tung University, Hsinchu, Taiwan, 2003.
[40] R.Y. Bai, Elimination of Return Flow in Mixed Convection of Gas over a Heated Circular Plate in a Horizontal Flat Duct by Inserting Curved Blocks Ahead of the
Plate, M.S. thesis, National Chiao Tung University, Hsinchu, Taiwan, 2004.
[41] R.K. Shah, A.L. London, Laminar Flow Forced Convection in Ducts, Academic Press, New York, 1987, pp. 196-198.
[42] S.J. Kline, F.A. McClintock, Describing uncertainties in single-sample experiments, Mechanical Engineering 75 (1953) 3-12.
[43] M.L. Hitchman, K.F. Jensen, Chemical Vapor Deposition Principle and Applications, Academic Press, San Diego, 1993, Chapter 2.
[44] J. L. Tuh, T. F. Lin, Structure of Mixed Convective Longitudinal Vortex Air Flow Driven by a Heated Circular Plate Embedded in the Bottom of a Horizontal Flat Duct, International Journal of Heat and Mass Transfer 46 (2003) 1341-1357.