Highly automated material handling is one of the most concerns to foundry practitioners because efficient manual operations and coordination have been the core competence in their glory 200mm experiences. Especially, one of the critical problems is how to provide an almost no-wait transport for hot lots in an automatic material handling environment.
The more accurate forecast of lot delivery time is, the more efficient of fab scheduling performs. In the fab operations, scheduling is the major control factor of tools capacity allocation, tools utilization control and bottleneck management.
However, there is no effective method to estimate delivery time in 300mm AMHS fab operations. We try to solve these issues. Therefore, there are two objectives of this paper.
The first purpose is to develop an effective OHT dispatching policy, PPP, to provide the transport services for hot lots against the normal lots transport requirements under 300mm frequently blocking transportation situation. The objective of these rules is to minimize the transport delay of hot lots and to convey our idea for hot lots transport services.
Intuitively, a lot with higher priority should enjoy its privilege of transportation against those with lower priority. Observing the empirical human operations for carrying hot lots and considering the effect and limitation from OHT transportation, we propose a heuristic OHT dispatching rule to expedite the movement of the hot lots in order to avoid any blocking due to normal lots.
Simulation experiments based on realistic data from a Taiwan 300mm fab are conducted. Given a configuration of loading ratio, population of hot lots, and the number of OHTs in the loop, the results demonstrate that the PPP policy dominates the good delivery performances of hot lots with no significant time delays incurred in normal lots. The incurred time delay of normal lots gets improved as the number of OHTs increases.
The second objective of this paper is to propose the modularized estimation methodology, MSM, for OHT delivery time forecast to differentiated lots in 300mm AMHS environment. According to the basic information of loop parameters of (ρ, Ω, υ), we can find out the characteristics of each loop by simulation techniques.
We then use statistical regression to modularize the loop characteristic equations.
Along the job transport path, we can easily sum to estimate the precisely integrated delivery time by these modularized loop characteristic equations.
We conduct simulation experiments based on realistic data from a local 300mm manufacturing fab. Simulation results demonstrate that the MSM achieves a sound
performance of delivery time estimation for differentiated lots with short computer running time. Using the MSM method to forecast AMHS delivery time can help streamline the shop floor operations, like scheduling and dispatching, by eliminating time delays in the 300mm automatic environment.
Both of the results of PPP and MSM have been verified by some 300mm fab managers. The consequences are both affirmative.
Future researches include developing the estimation method of lots cycle time, combining with processing time, queuing time, delivery time, which is more complicated due to large variances in different loops, and the integration of the proposed differentiated material handling mechanism with fab shop floor control systems to provide no-wait services for lot management.
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AUTOBIOGRAPHY
E-mail: [email protected] Website: www.newfancy.com/cnwang/
Education
Ph.D., Industrial Engineering & Management Institute, June 2004, National Chiao-Tung University, Taiwan
MS, Industrial Engineering & Management Institute, June 1993, National Chiao-Tung. University, Taiwan
BS, Industrial Engineering and Management department, June 1991, National Chiao-Tung. University, Taiwan
Experiences
07/02-now Director (part time), Newfancy Tech. (前衛科技)
• In charge of digital marketing on internet
• In charge of strategy management
Technology consultant (part time), Chiayi County Government Ph.D. Candidate, Industrial Engineering & Management Institute, National Chiao-Tung University
09/01-07/02 Lecturer (part time), Shih-Chien University, major: E-Business Lecturer (part time), Ming-Shin University of Science of Technology, major: Investment
Technology consultant (part time), Chiayi County Government Ph.D. Study, Industrial Engineering & Management Institute, National Chiao-Tung University
01/00-09/01 Section Manager, Manufacturing Dept., Fab 12, TSMC (台積電)
• In charge of 300mm factory operation, planning and training
• Manufacturing CIM system development
• Evaluation of AMHS (Automatic Material Handling System), PGV (Person Guide Vehicle), FOUP, and sorter
01/98-12/99 Project Manager, Productivity and Infrastructure, International SEMATECH (ISMT, 美國國際半導體協會)
• In charge of 300mm AMHS (Automatic Material Handling System); OHT (Overhead Hoist Transport) SG (Study Group) leader, PGV (Person Guide Vehicle) SG co-leader, CIM
(Computer Integration Manufacturing) SG member, factory modeling SG member and SEMI standard member.
• Responsible for project planning, budget, project executing, supplier relationship, equipment improvement method
development, performance documentation, integrating members concerns to consensus.
• Lead the OHT SG to complete Tool Acceleration Project (TAP) with a good performance (MCBI form 118 to 7000).
• Lead the OHT SG to complete all 300mm AMHS demonstrations (interbay transport, stocker and intrabay transport systems) for the top 4 biggest suppliers in the world.
• Leader of OHT SG
• Co-leader of PGV study group
• TSMC standard representative
09/97-12/97 Fab Integration Senior Engineer, 300mm Project, TSMC (台積電)
• In charge of the evaluation and design of CIM and AMHS for 300mm Fab
• Developed the macro layout arrangement method
03/97-09/97 Coordinator, manufacture department, Fab2b, TSMC (台積電)
• In charge of the whole foundry Fab manufacturing control, including all lines dispatching, CVP (confirmed volume
performance), CLIP (confirmed line items performance), wafer start release, lots priority control, capacity check, wafer out control and reticle bar code control system evaluation; leading 4 shift managers, 20 supervisors and 400 technicians.
• Developed the cycle time calculation system, WIP tracking system and dispatching system.
09/96-03/97 Shift Manager, manufacture department, Fab2b, TSMC (台積電)
• In charge of dispatching and shop floor control for one shift;
leading 4 supervisors and 100 technicians.
• Built up real time reporting system in Fab manufacturing management, which provided required date by real time for manufacturing management.
06/95-09/96 Supervisor of thin film area, manufacture department, Fab2b, TSMC (台積電)
• In charge of thin film area dispatching and shop floor control;
leading 25 technicians.
• Built up “supervisor menu system “ and “technician menu system
“, which provided supervisors and technicians the shop floor search functions.
• Built up “control/dummy wafer control system “, “ manpower evaluation method “.
07/93-05/95 Lieutenant, Air Force, Taiwan Government
• In charge of the protecting air bases in south Taiwan.
09/91-06/93 Master studying
• Executing Secretary, “science city technology resources integration project” of National Science Council, Taiwan Government.
• Assistant, “Hsin-Chu area resources integration project” of National Science Council, Taiwan Government.
• Assistant, “the analysis of management decision information system” of Science Park Administration, Taiwan Government.
Honors
• 1st place of traffic ranking within all KMT websites for President Election (http://ooblue.newfancy.com), 2004.
• Successful Internet promoting for Newfancy’s customer by reaching 100,000 hit rate per day within one month, 2004.
• Taiwan patent #: 00451285, “產品即時出貨之控管方法”, 2001.
• Successful planed and built up TSMC 300mm Factory (Fab. 12), 2001.
• Successful built up TSMC 300mm pilot line, 2000.
• International SEMATECH AWARD for great contribution, twice, 1999, 1998.
• TSMC best performance record of super hot run throughput among all TSMC factories, 0.75 day/per layer in 1997.
• TSMC best performance record for on time delivery (>96%) in Fab-2b, 1997.
• TSMC first places in “ move ”, “ cycle time “,“ productivity “,
“ hot run push “ index among all shifts every month (total more than half year) in Fab-2b, 1996.
Publications Patents
• #: 00451285, “產品即時出貨之控管方法,” 2001/08/21 -
2017/11/27, R.O.C.
Refereed Papers
• Da-Yin Liao, Chia-Nan Wang, (2003), “Neural-Network-Based Delivery Time Estimates for Prioritized 300mm Automatic Material Handling Operations,” Accepted in IEEE Transaction on Semiconductor Manufacturing. (SCI)
• Shing-Ko Liang, Chia-Nan Wang, (2003), “Modularized
Simulation for Lot Delivery Time Forecast in Automatic Material Handling Systems of 300mm Semiconductor Manufacturing,”
Accepted in International Journal of Advanced Manufacturing Technology. (SCI, EI)
• Shing-Ko Liang, Chia-Nan Wang, (2003), “Preemptive Priority Policy for Hot Lots Transport Services in 300 mm Semiconductor Foundry,” Accepted in Journal of Information and Optimization Science. (EI)
• Chia-Nan Wang, Da-Yin Liao, “Effective OHT Dispatching for Differentiated Material Handling Services in 300mm Wafer Foundry,” proceedings of IEEE International Conference on Robotics and Automations, pp. 1027-1032, Taipei, Taiwan, 2003.
(EI)
Conference Papers
• James Fan, Shing-Ko Liang, Chia-Nan Wang, “An Effective Method on Candidates Selection of Merger & Acquisition for Technology Oriented Business,” accepted in Workshops of Portland International Center for Management of Engineering and Technology, Seoul, Korea, 2004.
• Da-Yin Liao, Chia-Nan Wang, “Statistical Carrier Delivery Time Estimate in 300mm AMHS,” proceedings of SEMI Technology Symposium: Innovations in Semiconductor Manufacturing, San Francisco, U.S., 2003.
• Da-Yin Liao, Chia-Nan Wang, “A Neural-Network Approach to Delivery Time Estimation for 300mm Automatic Material
Handling Operations,” proceedings of IEEE International Conference on Machine Learning and Cybernetics, China, 2003.
• Chia-Nan Wang, Da-Yin Liao, “Prioritized Automatic Material Handling Services in 300mm Foundry Manufacturing,”
proceedings of IEEE Semiconductor Manufacturing Workshop, Hsinchu, Taiwan, 2002.
• Shing-Ko Liang, Chia-Nan Wang, “Hot Lot Handling Policy for 300 mm Semiconductor Factories,” proceedings of Conference of Chinese Society for Management of Technology, Kaohsiung , Taiwan, 2002.
Technical Working Reports
• Chia-Nan Wang, “Daifuku Interbay Transport and Stocker Demonstration Test Report,” International SEMATECH, 1999.
• Chia-Nan Wang, “Murata Machinery, Ltd. (Muratec) Intrabay Overhead Hoist Transport (OHT) Tool Acceleration Project Report,” International SEMATECH, 1999.
• Chia-Nan Wang, “Murata Machinery, Ltd. (Muratec) Interbay Transportation System and Stocker Demonstration Report,”
International SEMATECH, 1999.
• Chia-Nan Wang, “Murata Machinery, Ltd. (Muratec) Intrabay Overhead Hoist Transport (OHT) System Demonstration Report,”
International SEMATECH, 1999.
• Chia-Nan Wang, “PRI Automation Interbay Transport and Stocker Demonstration Test Final Report,” International SEMATECH, 1999.
• Chia-Nan Wang, “Shinko Electric Company, Ltd. Intrabay Transport System Demonstration Report,” International SEMATECH, 1999.
• Chia-Nan Wang, “Shinko Electric Company, Ltd. Interbay Transportation System and Stocker Demonstration Report,”
International SEMATECH, 1999.