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6.1 - Conclusion

In this work, we investigated terahertz time-domain spectroscopy of c-plane InN and InN:Mg films. We studied the terahertz wave transmittance through undoped InN and Mg-doped InN film and calculated the complex of conductivity and refractive index. The transmittance of undoped InN film is less than 20%, whereas that of doping magnesium acceptors into InN films enhances the transmittance of terahertz around three times (>60%). Our results reveal that the optical conductivity of Mg-doped InN films is almost frequency independent and does not closely depend on the carrier concentration. We use the simple Drude model to describe the InN and InN:Mg films that can be obtained a best fitting. The calculated carrier mobility and concentration of undoped InN and Mg-doped InN film which are consistent with those from the Hall effect measurement. The refractive index and conductivity of InN:Mg are much smaller than those of undoped InN and the reduction of conductivity is dominated by the carrier scattering time. We use electron effective mass to calculate the carrier concentration and mobility are similar Hall effect measurement that may indicate our result is n-type semiconductor.

For a-plane InN, we found the anisotropy of refractive index and electrical conductivity along parallel and perpendicular to c-axis direction. The THz-TDS and Hall effect measurement experimental results are opposite. The carrier mobility is independence on crystal crystalline quality. It’s indicate that the InN structure induce the internal electrical field affect the carrier mobility.

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6.2 - Future Work

InN is a prospect of material for high-frequency electronic devices. But the crucial for growing p-InN is an advanced challenge. So it is important to successful develop a direct method to identify the doping type of InN. It is inadequate to rely on the terahertz time-domain spectroscopy to identify the type of InN. Currently, we need trying to find other experimental methods distinguishing that is p-type or n-type InN.

Although the InN film growth direction is non-polar face (a-axis or m-axis), the lattice mismatch still due to substrate and InN film and results a built-in electric field. So we need to improve the lattice defect problems and increase the electronic devices efficiency.

We want to obtain more information of difference growth direction and material (GaN) samples by the THz-TDS. Now we are establishing the terahertz imaging system which can help us to understand the corresponding of material informational.

We need to understanding the transient carrier dynamics in the InN:Mg, so it is important to investigate the InN:Mg films by the Optical Pumb-Terahertz Probe (OPTP) system.

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References

[1] D. H. Auston, k. P. Cheung, and P. R. Smith, “Picosecond photoconducting Hertzian dipoles,”Appl. Phys. Lett. 45 (3), 284 (1984).

[2] Q. Wu and X. C. Zhang, “Free-space electro-optic sampling of terahertz beams,”

Appl. Phys. Lett. 67 (24), 3253 (1995).

[3] B. B. Hu and M. C. Nuss, “Imaging with terahertz waves,” Opt. Lett. 20, 1716 (1995).

[4] A. G. Markelz, A. Roitberg, and E. J. Heilweil, “Pulsed terahertz spectroscopy of DNA, bovine serum albumin and collagen between 0.1 and 2.0 THz,” Chem.

Phys. Lett. 320, 42 (2000).

[5] D. Grischkowsky, S. Keiding, M. Van Exter, and Ch. Fattinger, “Far-infrared time-domain spectroscopy with terahertz beams of dielectrics and semiconductors,” J. Opt. Soc. Am. B 7 (10), 2006 (1990).

[6] V. Yu Davydov, A. A. Klochikhin, R. P. Seisyan, V. V. Emtsev, S. V. Ivanov, F. emission by InN,” Appl. Phys. Lett. 84, 4810 (2004).

[10] H. Ahn, Y.-J. Yeh, Y.- L. Hong, and S. Gwo, “Background and Photoexcited Carrier Dependence of Terahertz Radiation from Mg-Doped Nonpolar Indium Nitride Films,” Appl. Phys. Expr. 3, 122105 (2010).

[11] Y.-S. Lin, S.-H. Koa, C.-Y. Chan, and Shawn S. H. Hsu, “High current density InN/AIN heterojunction field-effect transistor with a SiNx gate dielectric layer,”

Appl. Phys. Lett. 90, 142111 (2007).

[12] Y.-S. Lu, Y.-H. Chang, Y.-L. Hong, H.-M. Lee, S. Gwo, and J. A. Yeh,

“Investigation on –c-InN and a-InN:Mg field effect transistors under electrolyte gate bias,” Appl. Phys. Lett. 95, 102104 (2009).

[13] A. Yoshikawa, X. Wang, Y. Ishitani, and Akira Uedono, “Recent advances and challenges for successful p-type control of InN films with Mg acceptor doping by molecular beam epitaxy,” Phys. Stat. Sol. A 207, 1011-1023, (2010).

62

[14] A. V. Blant, T. S. Cheng, N. J. Jeffs, L. B. Flannery, I. Harrison, J. F .W.

Mosselmans, A. D. Smith, and C. T. Foxon, “EXAFS studies of Mg doped InN grown on Al2O3,” Mater. Sci. Eng. B 59, 218 (1999).

[15] P. A. Anderson, C. H. Swartz, D. Carder, R. J. Reeves and S. M. Durbin, S.

Chandril and T. H. Myers, “Buried p-type layers in Mg-doped InN,” Appl. Phys.

Lett. 89, 184104 (2006).

[16] R. E. Jones, K. M. Yu, S. X. Li, W. Walukiewicz, J. W. Ager, E. E. Haller, H.

Lu, and W. J. Schaff, “Evidence for P-type doping of InN,” Phys. Rev. Lett. 96, 125505, (2006).

[17] P. D. C. King, T. D. Veal, P. H. Jefferson, C. F. McConville, H. Lu, and W. J.

Schaff, “Variation of band bending at the surface of Mg-doped InGaN:Evidence of p-type conductivity across the composition range,” Phys. Rev. B 75, 115312 (2007).

[18] Y. M. Chang, Y. L. Hong, and S. Gwo, “Direct probe of the built-in electric field of Mg-doped a-plane wurtzite InN surfaces with time-resolved electric-field-induced second harmonic generation,” Appl. Phys. Lett. 93, 131106 (2008).

[19] X. Wang, S.-B. Che, Y. Ishitani, and A. Yoshikawa, “Growth and properties of Mg-doped In-polar InN films,” Appl. Phys. Lett. 90, 201913 (2007).

[20] P. K. Benicewicz, J. P. Roberts, and A. J. Taylor, “Scaling of terahertz radiation from large-aperture biased photoconductors,” J. Opt. Soc. Am. B 11, 2533, (1994).

[21] X. C. Zhang and D. H. Auston, “Optoelectronic measurement of semiconductor surfaces and interfaces with femtosecond optics,” J. Appl. 71 (1), 326 (1992).

[22] T. Dekorsy, H. Auer, H. J. Bakker, H. G. Roskos, and H. Kurz, “THz electromagnetic emission by coherent infrared-active phonons,” Phys. Rev. B 53 (7), 4005 (1996).

[23] W. Mönch, “Semiconductor surface and interface,” (Springer, Berlin, Heidelberg, 1993).

[24] S. Boyd, “Nonlinear Optics,” (Academic, San Diego, 1992).

[25] N. W. Ashcroft and N. D. Mermin, “Solid State Physics,” (Saunders College Publishing, Philadelphia, 1976).

[26] H. Ahn, Y.-P. Ku, Y.-C. Wang, and C.-H. Chuang, “Terahertz spectroscopic study of vertically aligned InN nanorods,” Appl. Phys. Lett. 91, 163105 (2007).

[27] N. V. Smith, “Classical generalization of the Drude formula for the optical conductivity,” Phys. Rev. B 64, 155106 (2001).

[28] W. Walukiewicz, S. X. Li, J. Wu, K. M. Yu, J. W. Ager, E. E. Haller, H. Lu, and W. J. Schaff, “Optical properties and electronic structure of InN and In-rich

63

group Ⅲ- nitride alloys,” J. Cryst. Growth 269 (1), 119 (2004).

[29] J. Q. Wu, “When groupⅢ- nitride go infrared: New properties and prespectives,”

J. Appl. Phys. 106, 011101 (2009).

[30] P. Gu, M. Tani, S. Kono, K. Sakai, and X. C. Zhang, “A simple solution for an intense terahertz emitter,” in SPIE Newsroom (2009).

[31] A. Chakraborty, B. A. Haskell, S. Keller, J. S. Speck, S. P. DenBaars, S.

Nakamura, and U. K. Mishra, “Nonpolar InGaN/GaN emitters on reduced-defect lateral epitaxially overgrown a-plane GaN with drive-current-independent electroluminescence emission peak,” Appl. Phys.

Lett. 85, 5143 (2004).

[32] F. Bernardini, V. Fiorentini, and D. Vanderbilt, “Spontaneous polarization and piezoelectric constants of III-V nitrides,” Phys. Rev. B 56, 10024 (1997).

[33] Yun-shik Lee, “Principles of Terahertz Science and Technology,” (Springer, Corvallis, Oregon, 2009).

[34] J. Wu, W. Walukiewicz, W. Shan, K. M. Yu, J. W. AgerⅢ, E. E. Haller, Hai Lu, and W. J. Schaff, “Effects of the narrow band gap on the properties of InN,”

Phys. Rev. B 66, 201403 (2002).

[35] B. Arnaudov, T. Paskova, P. P. Paskov, B. Magnusson, E. Valcheva, and B.

Monemar, H. Lu and W. J. Schaff, H. Amano and I. Akasaki, “Energy position of near-band-edge emission spectra of InN epitaxial layers with different doping levels,” Phys. Rev. B 69, 115216 (2004).

[36] Y. Ishitani, W. Terashima, S. B. Che, and A. Yoshikawa, “Conduction and valence band edge properties of hexagonal InN characterized by optical measurements,” Phys. Stat, Sol. C 3, 1850 (2006).

[37] P. Y. Yu and M. Cardona, “Fundamentals of semiconductors,” (Springer, Berlin, 2001).

[38] H. Ahn, Y.-J. Yeh, and S. Gwo, “Terahertz emission from Mg-doped a-plane InN” Proc. Of SPIE, 7945, 79450Z (2011).

[39] X. M. Duan and C. Stampfl, “Defect complexes and cluster doping of InN:

First-principles investigations,” Phys. Rev. B 79, 035207 (2009).

[40] Hadis Morkoç, “Handbook of Nitride Semiconductors and Devices (Volume Ⅰ:

Materials Properties, and Growth),” (John Wiley & Sons Inc, 2008).

[41] D. Fu, R. Zhang, B. Liu, Z. L. Xie, X. Q. Xiu, S. L. Gu, H. L. Lu, Y. D. Zheng, Y. H. Chen, and Z. G. Wang , “Investigation of structural and optical anisotropy of m-plane InN films grown on γ-LiALO2 (100) by metal organic chemical vapour deposition,” J. Phys. D: Appl. Phys. 44, 245402 (2011).

[42] Q. Sun, B. H. Kong, C. D. Yerino, T.-S. Ko, B. Leung, H. K. Cho, and J. Han,

“Morphological and microstructural evolution in the two-step growth of

64

nonpolar a-plane GaN on r-plane sapphire,” J. Phys. D: Appl. Phys. 106, 123519 (2011).

[43] V. Darakchieva, M.-Y. Xie, N. Franco, F. Giuliani, B. Nunes, E. Alves, C. L.

Hsiao, L. C. Chen, T. Yamaguchi, Y. Takagi, K. Kawashima, and Y. Nanishi,

“Structural anisotropy of nonpolar and semipolar InN epitaxial layers,” J. Phys.

D: Appl. Phys. 108, 073529 (2010).

[44] K. Wang, T. Yamaguchi, A. Takeda, T. Kimura, K. Kawashima, T. Araki, and Y. Nanishi, “Optical polarization anisotropy of nonpolar InN epilayers,” Phys.

Stat, Sol. A 207, 1356 (2010).

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