In this thesis, a novel strategy for fabricating the self-organized, solid and hollow nanopyramid-array tantalum oxide was investigated with anodic alumina film to serve the template. The average diameter and height of the hollow and solid nanostructure are both 200nm with a 2×109/cm2 density. The pyramid structure was formed as the underlying tantalum film oxidized and localized by the pore of alumina. A gaseous pressure expands the hillock and leaves a void inside the tantalum oxide to form hollow structure with the thinner tantalum film in the initial deposition. To our best knowledge, this is first report of hollow pyramid-array nanostructure fabricated on the substrate. Besides, solid nanopyramid-array coated on silicon substrate shows well antireflective property because the gradient of O2- concentration resulting in high electric field assists both TaOX and substrate Si with graded change of refractive index smoothly. Moreover, the rigorous coupled wave analysis (RCWA) simulation has also been developed to complement the reflectivity of hollow nanopyramid-array coating on AlN substrate. The RCWA simulation can effectively predict the reflectivity, and it shows potentiality for customization of various antireflective coating on different substrates.
Reference
Chapter 1
[ 1] Rayleigh, J. S., On reflection of vibrations at the confines of two media between which the transition is gradual. Proceedings of the London Mathematical Society 1880, 11, 51–56 .
[ 2] Southwell, W. H., Gradient-index antireflection coatings. Optical Letters 1983, 8, 584–586
[ 3] Dobrowolski, J. A.; Poitras, D.; Ma, P.; Vakil, H.; Acree, M., Toward perfect antireflection coatings: numerical investigation. Applied Optics 2002, 41, (16), 3075-3083.
[ 4] Poitras, D.; Dobrowolski, J. A., Toward perfect antireflection coatings. 2. Theory.
Applied Optics 2004, 43, (6), 1286-1295.
[ 5] Vollgraff, J. A., Snellius’ notes on the reflection and refraction of rays. Osiris 1936, 1, 718–725.
[ 6] Boutry, G. A., Augustin Fresnel: His time, life and work 1788–1827. Science Progress 1948, 36, 587–604.
[ 7] Bernhard, C. G.; Miller, W. H., A corneal nipple pattern in insect compound eyes.
Acta Physiologica Scandinavica 1962, 56, 385-386.
[ 8] Bernhard, C. G.; Miller, W. H., The insect corneal nipple array. Acta Physiologica Scandinavica 1965, 63, 1-25.
[ 9] Stavenga, D. G.; Foletti, S.; Palasantzas, G.; Arikawa, K., Light on the moth-eye corneal nipple array of butterflies. Proceedings of the Royal Society B-Biological Sciences 2006, 273, (1587), 661-667.
[10] Sun, C. H.; Jiang, P.; Jiang, B., Broadband moth-eye antireflection coatings on silicon. Applied Physics Letters 2008, 92, (6), -.
[11] Langer, R., Drug delivery and targeting. Nature 1998, 392, (6679), 5-10.
[12] Bergbreiter, D. E., Self-assembled, sub-micrometer diameter semipermeable capsules. Angewandte Chemie-International Edition 1999, 38, (19), 2870-2872.
[13] White, S. R.; Sottos, N. R.; Geubelle, P. H.; Moore, J. S.; Kessler, M. R.; Sriram, S. R.; Brown, E. N.; Viswanathan, S., Autonomic healing of polymer composites.
Nature 2001, 409, (6822), 794-797.
[14] Caruso, F., Nanoengineering of particle surfaces. Advanced Materials 2001, 13, (1), 11-+.
[15] Caruso, F.; Caruso, R. A.; Mohwald, H., Nanoengineering of inorganic and hybrid hollow spheres by colloidal templating. Science 1998, 282, (5391), 1111-1114.
[16] Zhong, Z. Y.; Yin, Y. D.; Gates, B.; Xia, Y. N., Preparation of mesoscale hollow spheres of TiO2 and SnO2 by templating against crystalline arrays of polystyrene beads. Advanced Materials 2000, 12, (3), 206-+.
[17] Marinakos, S. M.; Novak, J. P.; Brousseau, L. C.; House, A. B.; Edeki, E. M.;
Feldhaus, J. C.; Feldheim, D. L., Gold particles as templates for the synthesis of hollow polymer capsules. Control of capsule dimensions and guest encapsulation.
Journal of the American Chemical Society 1999, 121, (37), 8518-8522.
[18] von Werne, T.; Patten, T. E., Preparation of structurally well-defined
polymer-nanoparticle hybrids with controlled/living radical polymerizations.
Journal of the American Chemical Society 1999, 121, (32), 7409-7410.
[19] Fleming, M. S.; Mandal, T. K.; Walt, D. R., Nanosphere-microsphere assembly:
Methods for core-shell materials preparation. Chemistry of Materials 2001, 13, (6), 2210-2216.
[20] Jackson, J. B.; Halas, N. J., Silver nanoshells: Variations in morphologies and optical properties. Journal of Physical Chemistry B 2001, 105, (14), 2743-2746.
[21] Cohen, I.; Li, H.; Hougland, J. L.; Mrksich, M.; Nagel, S. R., Using selective withdrawal to coat microparticles. Science 2001, 292, (5515), 265-267.
[22] Kamata, K.; Lu, Y.; Xia, Y. N., Synthesis and characterization of monodispersed core-shell spherical colloids with movable cores. Journal of the American
Chemical Society 2003, 125, (9), 2384-2385.
[23] Pekarek, K. J.; Jacob, J. S.; Mathiowitz, E., Double-Walled Polymer
Microspheres for Controlled Drug-Release. Nature 1994, 367, (6460), 258-260.
[24] Wong, M. S.; Cha, J. N.; Choi, K. S.; Deming, T. J.; Stucky, G. D., Assembly of nanoparticles into hollow spheres using block copolypeptides. Nano Letters 2002, 2, (6), 583-587.
[25] Hentze, H. P.; Kaler, E. W., Polymerization of and within self-organized media.
Current Opinion in Colloid & Interface Science 2003, 8, (2), 164-178.
[26] Pochan, D. J.; Chen, Z. Y.; Cui, H. G.; Hales, K.; Qi, K.; Wooley, K. L., Toroidal triblock copolymer assemblies. Science 2004, 306, (5693), 94-97.
Chapter 2
[ 1] Keller, F.; Hunter, M. S.; D. L. Robinson, D. L., Structural Features of Oxide Coatings on Aluminium. Journal of the Electrochemical Society. 1953, 100, 411-419
[ 2] O’Sullivan, J. P.; Wood, G. C., The Morphology and Mechanism of Formation of Porous Anodic Films on Aluminium. Proceedings of the Royal Society of London, Series A 1970, 317, 511
[ 3] Masuda, H.; Hasegwa, F.; Ono, S., Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution. Journal of the Electrochemical Society 1997, 144, (5), L127-L130.
[ 4] Liang, J. Y.; Chik, H.; Yin, A. J.; Xu, J., Two-dimensional lateral superlattices of nanostructures: Nonlithographic formation by anodic membrane template.
Journal of Applied Physics 2002, 91, (4), 2544-2546.
[ 5] Masuda, H.; Satoh, M., Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask. Japanese Journal of Applied Physics Part 2-Letters 1996, 35, (1B), L126-L129.
[ 6] Masuda, H.; Yasui, K.; Nishio, K., Fabrication of ordered arrays of multiple nanodots using anodic porous alumina as an evaporation mask. Advanced Materials 2000, 12, (14), 1031-1033.
[ 7] Sander, M. S.; Tan, L. S., Nanoparticle arrays on surfaces fabricated using anodic alumina films as templates. Advanced Functional Materials 2003, 13, (5), 393-397.
[ 8] Wu, C. T.; Ko, F. H.; Hwang, H. Y., Self-aligned tantalum oxide nanodot arrays through anodic alumina template. Microelectronic Engineering 2006, 83, (4-9), 1567-1570.
[ 9] Wong, M. S.; Cha, J. N.; Choi, K. S.; Deming, T. J.; Stucky, G. D., Assembly of
nanoparticles into hollow spheres using block copolypeptides. Nano Letters 2002, 2, (6), 583-587.
[10] Pekarek, K. J.; Jacob, J. S.; Mathiowitz, E., Double-Walled Polymer Microspheres for Controlled Drug-Release. Nature 1994, 367, (6460), 258-260.
[11] Langer, R., Drug delivery and targeting. Nature 1998, 392, (6679), 5-10.
[12] Xia, Y. D.; Mokaya, R., Ordered mesoporous carbon hollow spheres nanocast using mesoporous silica via chemical vapor deposition. Advanced Materials 2004, 16, (11), 886-891.
[13] Fialkowski, M.; Bitner, A.; Grzybowski, B. A., Self-assembly of polymeric microspheres of complex internal structures. Nature Materials 2005, 4, (1), 93-97.
[14] Caruso, F.; Caruso, R. A.; Mohwald, H., Nanoengineering of inorganic and hybrid hollow spheres by colloidal templating. Science 1998, 282, (5391), 1111-1114
[15] Lou, X. W.; Wang, Y.; Yuan, C. L.; Lee, J. Y.; Archer, L. A., Template-free synthesis of SnO2 hollow nanostructures with high lithium storage capacity.
Advanced Materials 2006, 18, (17), 2325-+.
[16] Lou, X. W.; Yuan, C. L.; Rhoades, E.; Zhang, Q.; Archer, L. A., Encapsulation and Ostwald ripening of Au and Au-Cl complex nanostructures in silica shells.
Advanced Functional Materials 2006, 16, (13), 1679-1684.
[17] Zoldesi, C. I.; Imhof, A., Synthesis of monodisperse colloidal spheres, capsules, and microballoons by emulsion templating. Advanced Materials 2005, 17, (7), 924-+.
[18] Zoldesi, C. I.; Steegstra, P.; Imhof, A., Encapsulation of emulsion droplets by organo-silica shells. Journal of Colloid and Interface Science 2007, 308, (1), 121-129.
[19] White, S. R.; Sottos, N. R.; Geubelle, P. H.; Moore, J. S.; Kessler, M. R.; Sriram, S. R.; Brown, E. N.; Viswanathan, S., Autonomic healing of polymer composites.
Nature 2001, 409, (6822), 794-797.
[20] Guo, L.; Liang, F.; Wen, X. G.; Yang, S. H.; He, L.; Zheng, W. Z.; Chen, C. P.;
Zhong, Q. P., Uniform magnetic chains of hollow cobalt mesospheres from one-pot synthesis and their assembly in solution. Advanced Functional Materials 2007, 17, (3), 425-430.
[21] Zhong, Z. Y.; Yin, Y. D.; Gates, B.; Xia, Y. N., Preparation of mesoscale hollow spheres of TiO2 and SnO2 by templating against crystalline arrays of polystyrene beads. Advanced Materials 2000, 12, (3), 206-+.
[22] Park, S. H.; Qin, D.; Xia, Y., Crystallization of mesoscale particles over large areas. Advanced Materials 1998, 10, (13), 1028-+.
[23] Larsen, A. E.; Grier, D. G., Like-charge attractions in metastable colloidal crystallites. Nature 1997, 385, (6613), 230-233.
[24] Park, S. H.; Xia, Y. N., Macroporous membranes with highly ordered and three-dimensionally interconnected spherical pores. Advanced Materials 1998, 10, (13), 1045-+.
[25] Liu, Q.; Liu, H. J.; Han, M.; Zhu, J. M.; Liang, Y. Y.; Xu, Z.; Song, Y., Nanometer-sized nickel hollow spheres. Advanced Materials 2005, 17, (16), 1995-+.
[26] Pileni, M. P., Nanosized particles made in colloidal assemblies. Langmuir 1997, 13, (13), 3266-3276.
[27] Im, S. H.; Jeong, U. Y.; Xia, Y. N., Polymer hollow particles with controllable holes in their surfaces. Nature Materials 2005, 4, (9), 671-675.
[28] Lou, X. W.; Wang, Y.; Yuan, C. L.; Lee, J. Y.; Archer, L. A., Template-free synthesis of SnO2 hollow nanostructures with high lithium storage capacity.
Advanced Materials 2006, 18, (17), 2325-+.
[29] Ait-Hamouda, K.; Ababou, A.; Ouchabane, M.; Gabouze, N.; Belhousse, S.;
Menari, H.; Beldjilali, K., Study of optical properties of diamond-like
carbon/porous silicon antireflective coating layers for multicrystalline silicon solar cell applications. Vacuum 2007, 81, (11-12), 1472-1475.
[30] Yoshida, Y.; Tokashiki, S.; Kubota, K.; Shiratuchi, R.; Yamaguchi, Y.; Kono, M.; Hayase, S., Increase in photovoltaic performances of dye-sensitized solar cells - Modification of interface between TiO2 nano-porous layers and F-doped SnO2 layers. Solar Energy Materials and Solar Cells 2008, 92, (6), 646-650.
[31] You, J. S.; Kim, D.; Huh, J. Y.; Park, H. J.; Pak, J. J.; Kang, C. S., Experiments on anisotropic etching of Si in TMAH. Solar Energy Materials and Solar Cells 2001, 66, (1-4), 37-44.
[32] Thong, J. T. L.; Choi, W. K.; Chong, C. W., TMAH etching of silicon and the interaction of etching parameters. Sensors and Actuators a-Physical 1997, 63, (3), 243-249.
[33] Papet, P.; Nichiporuk, O.; Kaminski, A.; Rozier, Y.; Kraiem, J.; Lelievre, J. F.;
Chaumartin, A.; Fave, A.; Lemiti, M., Pyramidal texturing of silicon solar cell with TMAH chemical anisotropic etching. Solar Energy Materials and Solar Cells 2006, 90, (15), 2319-2328.
[34] Sakoda, T.; Matsukuma, K.; Sung, Y. M.; Otsubo, K.; Tahara, M.; Nakashima, Y., Additional plasma surface texturing for single-crystalline silicon solar cells using dielectric barrier discharge. Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers 2005, 44, (4A), 1730-1731.
[35] Huang, Y. F.; Chattopadhyay, S.; Jen, Y. J.; Peng, C. Y.; Liu, T. A.; Hsu, Y. K.;
Pan, C. L.; Lo, H. C.; Hsu, C. H.; Chang, Y. H.; Lee, C. S.; Chen, K. H.; Chen, L.
C., Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures. Nature Nanotechnology 2007, 2, (12), 770-774.
[36] Sai, H.; Fujii, H.; Arafune, K.; Ohshita, Y.; Yamaguchi, M.; Kanamori, Y.;
Yugami, H., Antireflective subwavelength structures on crystalline Si fabricated using directly formed anodic porous alumina masks. Applied Physics Letters 2006, 88, (20), -.
[37] Jiang, H.; Yu, K.; Wang, Y. C., Antireflective structures via spin casting of polymer latex. Optics Letters 2007, 32, (5), 575-577.
[38] Kim, H.; Sigmund, W., Zinc oxide nanowires on carbon nanotubes. Applied Physics Letters 2002, 81, (11), 2085-2087.
Chapter 3
[ 1] Kamiya, N., Rigorous coupled-wave analysis for practical planar dielectric gratings: 1. Thickness-changed holograms and some characteristics of diffraction efficiency. Applied Optics 1998, 37, (25), 5843-5853.
[ 2] Moharam, M. G.; Grann, E. B.; Pommet, D. A.; Gaylord, T. K., Formulation for Stable and Efficient Implementation of the Rigorous Coupled-Wave Analysis of Binary Gratings. Journal of the Optical Society of America a-Optics Image Science and Vision 1995, 12, (5), 1068-1076.
[ 3] Moharam, M. G.; Pommet, D. A.; Grann, E. B.; Gaylord, T. K., Stable Implementation of the Rigorous Coupled-Wave Analysis for Surface-Relief Gratings - Enhanced Transmittance Matrix Approach. Journal of the Optical Society of America a-Optics Image Science and Vision 1995, 12, (5), 1077-1086.
[ 4] Ahmed, S.; Glytsis, E. N., Comparison of beam propagation method and rigorous coupled-wave analysis for single and multiplexed volume gratings.
Applied Optics 1996, 35, (22), 4426-4435.
[ 5] Kamiya, N., Rigorous coupled-wave analysis for practical planar dielectric gratings: 2. Diffraction by a surface-eroded hologram layer. Applied Optics 1998, 37, (25), 5854-5863.
[ 6] Ye, J. S.; Kanamori, Y.; Hu, F. R.; Hane, K., Self-supported subwavelength gratings with a broad band of high reflectance analysed by the rigorous coupled-wave method. Journal of Modern Optics 2006, 53, (14), 1995-2004.
[ 7] Lin, C. H.; Chen, H. L.; Chao, W. C.; Hsieh, C. I.; Chang, W. H., Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis. Microelectronic Engineering 2006, 83, (4-9), 1798-1804.
[ 8] Zhang, D.; Wang, P.; Jiao, X.; Yuan, G.; Zhang, J.; Chen, C.; Ming, H.; Rao, R., Investigation of the sensitivity of H-shaped nano-grating surface plasmon
resonance biosensors using rigorous coupled wave analysis. Applied Physics a-Materials Science & Processing 2007, 89, (2), 407-411.
Chapter 4
[ 1] Lu, W.; Ji, Z. Q.; Pfeiffer, L.; West, K. W.; Rimberg, A. J., Real-time detection of electron tunnelling in a quantum dot. Nature 2003, 423, (6938), 422-425.
[ 2] Harman, T. C.; Taylor, P. J.; Walsh, M. P.; LaForge, B. E., Quantum dot superlattice thermoelectric materials and devices. Science 2002, 297, (5590), 2229-2232.
[ 3] Gammon, D.; Snow, E. S.; Shanabrook, B. V.; Katzer, D. S.; Park, D., Homogeneous linewidths in the optical spectrum of a single gallium arsenide quantum dot. Science 1996, 273, (5271), 87-90.
[ 4] hou, S. Y.; Krauss, P. R.; Renstrom, P. J., Imprint lithography with 5-nanometer resolution. Science 1996, 272, (5258), 85-87.
[ 5] Freeman, R. G.; Grabar, K. C.; Allison, K. J.; Bright, R. M.; Davis, J. A.; Guthrie, A. P.; Hommer, M. B.; Jackson, M. A.; Smith, P. C.; Walter, D. G.; Natan, M. J., Self-Assembled Metal Colloid Monolayers - an Approach to Sers Substrates.
Science 1995, 267, (5204), 1629-1632.
[ 6] Roder, H.; Hahn, E.; Brune, H.; Bucher, J. P.; Kern, K., Building
One-Dimensional and 2-Dimensional Nanostructures by Diffusion-Controlled Aggregation at Surfaces. Nature 1993, 366, (6451), 141-143.
[ 7] Notzel, R.; Temmyo, J.; Tamamura, T., Self-Organized Growth of Strained Ingaas Quantum Disks. Nature 1994, 369, (6476), 131-133.
[ 8] Masuda, H.; Fukuda, K., Ordered Metal Nanohole Arrays Made by a 2-Step Replication of Honeycomb Structures of Anodic Alumina. Science 1995, 268, (5216), 1466-1468.
[ 9] Sapp, S. A.; Lakshmi, B. B.; Martin, C. R., Template synthesis of bismuth telluride nanowires. Advanced Materials 1999, 11, (5), 402-404.
[10] Cao, H. Q.; Xu, Y.; Hong, J. M.; Liu, H. B.; Yin, G.; Li, B. L.; Tie, C. Y.; Xu, Z.,
Sol-gel template synthesis of an array of single crystal CdS nanowires on a porous alumina template. Advanced Materials 2001, 13, (18), 1393-1394.
[11] Lee, S. B.; Mitchell, D. T.; Trofin, L.; Nevanen, T. K.; Soderlund, H.; Martin, C.
R., Antibody-based bio-nanotube membranes for enantiomeric drug separations.
Science 2002, 296, (5576), 2198-2200.
[12] Che, G.; Lakshmi, B. B.; Martin, C. R.; Fisher, E. R.; Ruoff, R. S., Chemical vapor deposition based synthesis of carbon nanotubes and nanofibers using a template method. Chemistry of Materials 1998, 10, (1), 260-267.
[13] Masuda, H.; Satoh, M., Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask. Japanese Journal of Applied Physics Part 2-Letters 1996, 35, (1B), L126-L129.
[14] Masuda, H.; Yasui, K.; Nishio, K., Fabrication of ordered arrays of multiple nanodots using anodic porous alumina as an evaporation mask. Advanced Materials 2000, 12, (14), 1031-1033.
[15] Sander, M. S.; Tan, L. S., Nanoparticle arrays on surfaces fabricated using anodic alumina films as templates. Advanced Functional Materials 2003, 13, (5), 393-397.
[16] Masuda, H.; Hasegwa, F.; Ono, S., Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution. Journal of the Electrochemical Society 1997, 144, (5), L127-L130.
[17] Wu, C. T.; Ko, F. H.; Hwang, H. Y., Self-aligned tantalum oxide nanodot arrays through anodic alumina template. Microelectronic Engineering 2006, 83, (4-9), 1567-1570.
[18] Maeng, S.; Axe, L.; Tyson, T.; Jiang, A., An investigation of structures of thermal and anodic tantalum oxide films. Journal of the Electrochemical Society 2005, 152, (2), B60-B64.
[19] Werder, D. J.; Kola, R. R., Microstructure of Ta2O5 films grown by the anodization of TaNx. Thin Solid Films 1998, 323, (1-2), 6-9.
[20] Lin, C. H.; Chen, H. L.; Chao, W. C.; Hsieh, C. I.; Chang, W. H., Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis. Microelectronic Engineering 2006, 83, (4-9), 1798-1804.
[21] Geretovszky, Z.; Szorenyi, T.; Stoquert, J. P.; Boyd, I. W., Correlation of compositional and structural changes during pulsed laser deposition of tantalum oxide films. Thin Solid Films 2004, 453-54, 245-250.
[22] Mozalev, A.; Gorokh, G.; Sakairi, M.; Takahashi, H., The growth and electrical transport properties of self-organized metal/oxide nanostructures formed by anodizing Ta-Al thin-film bilayers. Journal of Materials Science 2005, 40, (24), 6399-6407.
Chapter 5
[ 1] Crouse, D.; Lo, Y. H.; Miller, A. E.; Crouse, M., Self-ordered pore structure of anodized aluminum on silicon and pattern transfer. Applied Physics Letters 2000, 76, (1), 49-51.
[ 2] Chu, S. Z.; Wada, K.; Inoue, S.; Todoroki, S., Formation and microstructures of anodic alumina films from aluminum sputtered on glass substrate. Journal of the Electrochemical Society 2002, 149, (7), B321-B327.
[ 3] Gao, Y.; Li, A. D.; Gu, Z. B.; Wang, Q. J.; Zhang, Y.; Wu, D.; Chen, Y. F.;
Ming, N. B.; Ouyang, S. X.; Yu, T., Fabrication and optical properties of
two-dimensional ZnO hollow half-shell arrays. Applied Physics Letters 2007, 91, (3), -.
[ 4] Jellison, G. E.; Sales, B. C., Determination of the Optical Functions of
Transparent Glasses by Using Spectroscopic Ellipsometry. Applied Optics 1991, 30, (30), 4310-4315.