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In this study we have successfully proceeded numerical investigations of noble gas flow through nano- channels with various boundary conditions. Cases of isothermal and non-isothermal flow are considered. As a part of this study we have developed a new statistical boundary conditions and created a parallel program code for implementation on Graphic Processing Units.

Results discussed above allow us to conclude that gaming GPUs have good potential to become a foundation base for “home” or desktop supercomputers. Such GPUs have lower prices than professional systems, but the main disadvantage of gaming devices is the relatively low amount of installed RAM. Another important conclusion is that optimal choice of GPU for computations depends on which algorithms will be implemented on a specific GPU. Proceeded optimizations of CUDA program made it possible to create an effective computational model which allowed us to provide studies of the argon nano-scale flow in a wide range of such parameters like pressure, temperature and Knudsen number.

Rarefied gas flow between two tanks has been investigated in the study and our results are in a good agreement with theoretical and experimental studies of other researches. On the other hand, results of MD simulations have shown that diffuse boundary conditions represent rough rather than the smooth wall. It was found that the known theoretical prediction of flow rate through the channel with diffuse BC is valid only if the length-to-height ration is greater than 10, while in case of short channel, dependence between flow rate and length is nonlinear. Analysis of the obtained results leads us to conclusion that neither rarefaction parameter nor pressure difference

74

influence on the curvature of correlation between flow rate and length-to-height ration in case of pressure driven flow.

The discrepancy of 15% between the values of hydrodynamic conductance measured in simulations of gas flow through the smooth tungsten channel and the conductivity obtained from semi-empirical equation has been observed. However, it was found that in case of rough surface this gap becomes less than 5%. The last fact means that appearance of surface’s roughness turns ideal smooth surface into the more realistic one. On the other we have found hydrodynamic conductance of channel with diffuse BC is close to the conductance of the channel with rough walls. Thus, the last two issues allow one to conclude that flow inside the channel produced with high level of precision cannot be modeled using the assumption of diffuse BC and a more complex model of BC is required.

In this work we developed new boundary conditions which are able to reproduce the behavior of argon atoms collided with tungsten surface. The new proposed boundary conditions are based on Gaussian, uniform and Maxwellian probability distribution functions conducted together by using a set of polynomial functions. Such approach made this model of boundary condition more flexible and realistic compared with the simple specular-diffusive one. In the previous section we have proposed an algorithm to describe how the polynomial and probability distribution functions mentioned above could be used as boundary conditions. Generally, this works explains how to implement normalization and further conversion of the experimental or simulation results into boundary conditions.

We have observed that the distribution of the velocities of the scattered atoms becomes more Maxwell-like in the case of a rough surface, while the mean kinetic

75

energy of scattered atoms is almost independent of surface roughness. Furthermore, it was shown that even small surface’s irregularities transform gas-surface interactions to more diffusive-like.

Application of the new proposed boundary conditions for Ar-W interactions is proven to be able to significantly speed up computations. The computation time by use of this algorithm is only about one-twelfth of computation time of MD simulation involving the real tungsten substrate. This is implemented by replacement of atoms on solid surfaces with surfaces following the gas scattering law described by the new boundary conditions.

76

Tables

Table 2.3-1 Coefficients for interpolation formula (2.3-8).

P2/P1 A B C D E

0 0.182 0.006 0.0011 0.257 0.0020 0.1 0.218 0.006 0.0052 0.235 0.0072 0.5 0.276 0.026 0.0241 0.076 0.0137 0.7 0.297 0.049 0.0253 0.017 0.0090

Table 2.3-2 Reduced flow rates vs δ

δ WP WT δ WP WT

Table 2.3-3 Pressure driven flow coefficient QP vs δ in case of square cross-section

δ QP δ QP δ QP

77

Table 2.3-4 Temperature driven flow coefficient QT vs δ in case of square cross-section

δ QT δ QT δ QT

0 0.4193 0.2 0.3390 5 0.1366 0.001 0.4181 0.4 0.3071 8 0.1017 0.01 0.4110 0.5 0.2953 10 0.0868 0.02 0.4037 0.8 0.2684 15 0.0632 0.04 0.3912 1 0.2545 20 0.0495 0.05 0.3857 1.5 0.2275 30 0.0344 0.08 0.3716 2 0.2070 40 0.0263

0.1 0.3637 4 0.1539

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Table 3.1- 1 Software packages for molecular dynamic simulations

Name Manufacturer/Creator Description

AMBER Peter Kollman's group at the University of California

Provides a set of programs for applying the AMBER forcefields to simulations of biomolecules. It is written in Fortran

90 and C with support for most major Unix-like systems and compilers.

CHARMM Martin Karplus, Accelrys

Allows generation and analysis of a wide range of molecular simulations.

The most basic kinds of simulation are minimization of a given structure and

production runs of a molecular dynamics trajectory.

NAMD University of Illinois at Urbana-Champaign.

It is a parallel molecular dynamics code designed for high-performance simulation of large biomolecular

systems

Materials

Studio Accelrys

It provides tools for modeling crystal structure and crystallization processes,

for the study of polymer properties, catalysis, and the study of

structure-activity relationships.

TINKER Jay Ponder

It is a computer software application for molecular dynamics simulation with a

complete and general package for molecular mechanics and molecular dynamics, with some special features

for biopolymers.

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Table 3.5-1 Properties of graphic processing units used in current work [101]

PARAMETER GTS250 GTX580 GTX 460 GTX590

CUDA Cores 128 512 336 1024

Graphics Clock (MHz) 738 772 675 607

Processor Clock (MHz) 1836 1544 1350 1215

Memory Clock (MHz) 1242 2004 1800 1900

Standard Memory Configuration 1 GB GDDR3 Memory Interface Width 256-bit 384-bit 256-bit 384-bit Memory Bandwidth (GB/sec) 70.4 192.4 115.2 327.7

Compute Capability 1.1 2.0 2.1 2.0

Table 3.5-2 Time spent for different procedures (in ms) by CPU (Intel Q9400) and by GPU (NVIDIA GeForce GTS250).

PROCEDURE OpenMP(4 cores) CUDA (GTS 250) Acceleration

Output 700.99 0.07% 656 0.11% 1.07

VerletList 295702 31.36% 0 0.00% N/A

Forces 559109 59.30% 359.9986 0.06% 1553

Integration 87209.1 9.25% 691.99 0.11% 126.03

Temperature 76.99 0.01% 200.999 0.03% 0.383

Exchanges 0 0.00% 611998 99.69% 0

Total Time 942798.1 613906.99

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Table 3.5-3 Simulation time (in sec) of copper crystal on various GPUs versus number of atoms. System was simulated over 20000 time steps.

Number of atoms

Code without 3rd Newton’s law Code with 3rd Newton’s law

GTX460 GTX580 C2075 GTX460 GTX580 C2075

14896 20.81 19.32 20.75 12.06 8.36 11.79

34461 54.89 52.29 55.59 31.84 30.68 32.54

66326 119.38 121.89 120.89 67.59 76.79 72.90

113491 236.81 222.88 228.23 137.14 133.57 136.46

178956 451.57 410.36 408.16 302.22 256.97 260.29

265721 816.64 679.69 701.08 454.46 414.75 415.74

Table 3.5-4 Normalized time of execution of MD program on various computational systems.

Number of atoms

CPU (intel i7-950) GTX590 Sequential OpenMP

CUDA+OpenMP 1 CPU 4 CPUs

14894 52.20 13.7 1.00

34461 155.78 40.35 2.98

66326 416.34 111.05 5.17

178956 2258.29 590.49 19.67 265721 4703.86 1205.8 33.89

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Table 4.1-1. Correlation coefficients between <Ei> and <Es> for different angle of incidence βi

βi 0° 5° 10° 15° 20°

Correlation

coefficient 0.999437 0.999431 0.999467 0.999439 0.999435

βi 25° 30° 35° 40° 45°

Correlation

coefficient 0.999452 0.999453 0.999389 0.999429 0.999468

βi 50° 55° 60° 65° 70°

Correlation

coefficient 0.999478 0.999499 0.999486 0.999549 0.999626

Table 4.1-2. Coefficients A0 and B0 of the approximation polynomial (4.1-3)

k 0 1 2 3 4 5

A0k 0.7657 -8.5557*10-5 5.4918*10-5 -4*10-7 - - B0k 0.14 1.183*10-4 3.1536*10-5 -1.963*10-6 4.44*10-8 -3.1069*10-10

Table 4.1-3. Coefficients A1n,k of the approximation polynomial (4.1-4) n

k 0 1 2 3 4 5

0 4.0808E-01 -1.8143E-04 -6.2076E-05 4.0415E-06 -8.7349E-08 6.1889E-10 1 -3.1798E-01 -3.2165E-03 6.3264E-04 -3.1700E-05 5.8999E-07 -3.7420E-09 2 2.2149E-01 5.0261E-03 -9.3310E-04 4.4018E-05 -8.0211E-07 5.0384E-09 3 -9.4382E-02 -2.8516E-03 5.3339E-04 -2.4904E-05 4.5289E-07 -2.8462E-09 4 2.3375E-02 8.1348E-04 -1.5349E-04 7.1564E-06 -1.3024E-07 8.1957E-10 5 -3.2682E-03 -1.2525E-04 2.3666E-05 -1.1032E-06 2.0087E-08 -1.2649E-10 6 2.3874E-04 9.9072E-06 -1.8628E-06 8.6781E-08 -1.5799E-09 9.9487E-12 7 -7.0729E-06 -3.1471E-07 5.8677E-08 -2.7304E-09 4.9678E-11 -3.1269E-13

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Table 4.1-4 Coefficients A2n,k of the approximation polynomial (4.1-6) k

n 0 1 2 3

0 1.0712E+00 7.3238E-02 -8.8442E-02 5.2060E-02 1 -2.0793E-03 1.0793E-02 -2.0503E-02 1.0220E-02 2 8.6448E-04 -8.6467E-03 1.0127E-02 -5.0983E-03 3 -9.8449E-05 7.6928E-04 -9.0643E-04 4.6986E-04 4 4.5169E-06 -3.1373E-05 3.7164E-05 -1.9772E-05 5 -1.0050E-07 6.5031E-07 -7.7981E-07 4.2601E-07 6 1.0868E-09 -6.6825E-09 8.1503E-09 -4.5652E-09 7 -4.5898E-12 2.7098E-11 -3.3664E-11 1.9270E-11

k

n 4 5 6 7

0 -1.6027E-02 2.6247E-03 -2.1649E-04 7.0685E-06 1 -2.2900E-03 2.5026E-04 -1.2243E-05 1.7791E-07 2 1.3124E-03 -1.8107E-04 1.2747E-05 -3.5960E-07 3 -1.2515E-04 1.7885E-05 -1.3046E-06 3.8140E-08 4 5.4091E-06 -7.9247E-07 5.9136E-08 -1.7658E-09 5 -1.1940E-07 1.7857E-08 -1.3563E-09 4.1131E-11 6 1.3062E-09 -1.9861E-10 1.5291E-11 -4.6908E-13 7 -5.6071E-12 8.6358E-13 -6.7172E-14 2.0781E-15

Table 4.1-5. Coefficients A3n,k of the approximation polynomial (4.1-7) n

k 0 1 2 3 4 5

0 7.6831E-01 -1.0661E-03 1.0522E-04 -3.4014E-06 4.5134E-08 -1.9840E-10 1 -5.5235E-01 -2.6447E-03 3.7658E-05 -7.3489E-06 1.7438E-07 -1.1959E-09 2 3.5233E-01 4.3213E-03 -2.0959E-04 1.4560E-05 -3.0241E-07 1.9698E-09 3 -1.3976E-01 -1.8036E-03 1.1142E-04 -7.7702E-06 1.6259E-07 -1.0674E-09 4 3.3855E-02 2.6667E-04 -2.1592E-05 1.8641E-06 -4.1163E-08 2.7775E-10 5 -4.7690E-03 -1.7706E-06 1.2882E-06 -2.1876E-07 5.3403E-09 -3.7634E-11 6 3.5569E-04 -2.7154E-06 6.5481E-08 1.1619E-08 -3.3836E-10 2.5370E-12 7 -1.0811E-05 1.6567E-07 -7.1913E-09 -1.9147E-10 8.0756E-12 -6.6354E-14

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Table 4.1-6. Coefficients A4n,k of the approximation polynomial (4.1-8) k

n 0 1 2

0 5.0233E-01 9.3434E-02 1.4669E-03 1 -8.7760E-01 5.1610E+00 -4.5275E-02 7 -9.4203E-01 3.5421E-01 -3.8039E-03 8 1.6723E-01 -5.5725E-02 5.9857E-04 9 -1.9580E-02 5.9177E-03 -6.3514E-05 10 1.4527E-03 -4.0511E-04 4.3416E-06 11 -6.1898E-05 1.6135E-05 -1.7258E-07 12 1.1538E-06 -2.8400E-07 3.0305E-09

Table 4.1-7 Properties of wavy surfaces. A and B are the surface wave amplitude and wavelength, respectively.

Table 4.2-1 Flow rate through the channel versus the length-to-height ratio. Wreal is the flow rate through the real channel with smooth walls; Wdiff is the flow rate through the

channels with diffusive BCs. P2/P1=0.5; T1=T2=350K; δ1=0.2

84

Table 4.2-2 Hydrodynamic conductance of the channel with various BCs on the walls.

Parameters of simulations Lch/hch=0.55; T1=T2=350K; δ1=0.2 Semi Empirical eq. by Sreekanth [31] 0.3372 Specular BC 0.4955

Table 4.2-3 Gas flow rate through the channels with various BCs on the walls, length and pressure ratios.

Table 4.2-4 Flow rate through various channels versus the length-to-height ratio.

Parameters of simulations: P2/P1=0.5; T1=T2=350K; δ1=0.2

85

Table 4.3-1 Gas flow rate through the channels with various BCs on the walls.

Parameters of simulations: P2/P1=1; T2/T1=500/350; δ=0.2

Table 4.3-2 Gas flow rate through the channels with various BCs on the walls.

Parameters of simulations: P2/P1=1; T2/T1=500/350; δ=0.2 Lch/hch Diff. Type A Type D New BC

W W ε. % W ε. % W ε. % 0.55 0.115 0.129 11.96% 0.109 5.27% 0.126 9.19%

1.08 0.090 0.115 28.48% 0.095 5.83% 0.112 24.90%

2.68 0.050 0.072 42.24% 0.055 9.59% 0.07 39.13%

4.80 0.032 0.036 13.03% 0.030 6.29% 0.034 5.97%

9.57 0.017 0.020 15.1% 0.019 8.1% 0.019 8.1%

13.91 0.012 0.014 14% 0.013 6.78% 0.014 14%

86

Figures

Figure 2.1-1 One stage of Knudsen compressor [64]

Figure 2.2-1 Sketch of the system used for simulations. H and L – height and length of the tanks; hch and Lch – height and length of the channel;

87

Figure 2.3-1 Sketch of the 3D system used for theoretical analysis. Volumes of tanks are equal; lateral size of orifice is much smaller than the lateral size of tank.

Figure 3.3-1a Sketch of specular reflection model Left tank Right tank

T1, N

1

T2, N

2

88

Figure 3.3-1b Sketch of diffusive reflection model

Figure 3.3-2. Coordinate system, where αi and βi – incident azimuthal and polar angles, respectively; αS and βS are scattered beam’s azimuthal and polar angles, respectively;

α=αS-αi – azimuthal angle change caused by the scattering of the beam; Vni and Vτinormal and tangential velocity components of the incident beam; VnS and VτS – normal and tangential velocity components of the scattered beam.

βs

βi

αi

αs

α Vi

Vs

Vτs s

Vn

i

Vn

Vτi

y x

z

αi

89

Figure 3.3-3a. Sketch of tungsten channel used for simulations. The tungsten channel (right picture) was created by removal of excess atoms of the tungsten bar (left picture).

Figure 3.3-3b. Side view of the channel with smooth and wavy walls. AW – wave amplitude BW – is the wavelength; hch – height of the channel.

Figure 3.4-1. Lennard-Jones potential and force functions for argon

Tungsten bar Tungsten channel

smooth channel wavy channel 2B hch

y(x)=AWsin(2πx/BW)

-2 0 2 4 6 8 10

2 3 4 5 6 7 8

r, 10-10m

Lennard-Jones potential

Interatomic interaction force

90

Figure 3.4-2. The Verlet list: a particle i interacts with those particles within the cutoff radius rc the Verlet list contains all particles within a sphere with radius rv-rc.

Figure 3.5-1. Cubic unit of copper.

rv

rc

i

91

Figure 3.5-2 Pseudo code of OpenMP program. N is the number of simulated atoms;

NnMx is the maximum number of neighbors; Nthr is the number of threads sharing the job, while ThrID – id number of current thread; jarlst(NnMx*N) stores indexes of neighboring atoms; iarlst(N) stores the number of neighbors; x(N), Vx(N) and fx(N)

store coordinates, velocities and forces, respectively.

01. Data initialization !initial velocities and positions 02. !$omp parallel private(ThrID,i,j,ii,rx) !begin Verlet lists 03. dev=omp_get_thread_num()

11. jarlst((i-1)*NnMx+iarlst(i))=j 12. !$omp end critical

13. endif

14. enddo

15. enddo

16. !$omp end parallel !end Verlet lists

17. !$omp parallel private(ThrID,i,j,ii,jm,rx,dflj) !begin Forces 18. dev=omp_get_thread_num()

19. do ii=1,N, Nthr

20. i=ii+ ThrID; j=1

21. do while (jarlst((i-1)*NnMx+j).gt.0) 22. jm=jarlst((i-1)*NnMx+j)

34. !$omp end parallel !end Forces

35. !$omp parallel private(ThrID,i,ii) !begin Velocity 36. do ii=1,N, Nthr

37. i=ii+ThrID

38. Vx(i)=Vx(i)+Fx(i)*dt/am0 39. x(i)=x(i)+ Vx(i)*dt 40. enddo

41. !$omp end parallel !end Velocity 42. do k=1,ntau !opening the loop in time 43. call Forces !lines 17-34

44. call Velocity !lines 35-40

45. If (maximum displacement of any atom is greater than 0.5(rc-rn)) then 46. call VerletList !lines 02-16

47. endif

48. if(mod(k,iPrint).eq.0) then !printing of atoms coordinates if “k” is multiple of “iPrint”

49. call Temp(am0,Vx,Temp) !calculation of temperature

50. Print to files (x,Vx,Temp) !printing atom’s coordinates and velocities into files 51. endif

52. enddo !closing the loop in time

92

Figure 3.5-3 Acceleration of MD program versus number of threads. Crystal of 178956 copper atoms was simulated for 20000 time steps. Simulations were executed on Intel

Q9400 quad core CPU.

Figure 3.5-4 Acceleration of “Verlet list” and “Forces” subroutines of MD program versus number of threads. Crystal of 66326 copper atoms was simulated for 1 time step.

Simulations were executed on Intel Q9400 quad core CPU.

0

93

Figure 3.5-5 Pseudo code of CUDA program. N is the number of simulated atoms;

NnMx is the maximum number of neighbors; BlkSz is the number of threads in each block, while N/BlkSz+1 blocks are run on the device; jarlst(NnMx*N) stores indexes of

neighboring atoms; x(N), Vx(N) and fx(N) store coordinates, velocities and forces, respectively.

Figure 3.5-6 Pseudo code of GPU’s subroutine for integration of equation of motion. N is the number of simulated atoms; threadidx%x, blockidx%x and blockdim%x are predefined variables that store information about current thread, current block and size of a block, respectively; x(N), Vx(N) and Fx(N) store coordinates, velocities and forces,

respectively.

01. Data initialization !initial positions and velocities 02. Upload coordinates and velocities to GPU

03. call VerletKernel<<<N/BlkSz+1,BlkSz>>>(N,NnMx,x,jarlst,…) !Verlet lists

04. call ForceKernel<<<N/BlkSz+1,BlkSz>>>(N,NnMx,x,jarlst,Fx) !calculation of forces 05. call VelKernel<<<N/BlkSz+1,BlkSz>>>(N,x,Fx,Vx,…) !integration of equation of motion 06. do k=1,ntau !opening the loop in time

07. Set forces to zero

08. call ForceKernel<<<N/BlkSz+1,BlkSz>>>(N,NnMx,x,jarlst,Fx,…) 09. call VelKernel<<<N/BlkSz+1,BlkSz>>>(N,x,Fx,Vx,…)

10. Download displacements of atoms from GPU

11. If (maximum displacement of any atom is greater than 0.5(rc-rn)) then 12. Set jarlst and displacements to zero

13. call NeighKernel<<<N/BlkSz+1,BlkSz>>>(N,NnMx,x,jarlst,…) 14. endif

15. if(mod(k,iPrint).eq.0) then !printing of atoms coordinates if “k” is multiple of “iPrint”

16. Download velocities and coordinates of atoms from GPU 17. call Temp(am0,Vx,Temp) !calculation of temperature

18. Print to files (x,Vx,Temp) !printing to atom’s coordinates and velocities to files 19. endif

20. enddo !closing the loop in time

01. attributes(global) subroutine VelKernel(N,NnMx,x,Fx,Vx,dl2)

02. i = (blockidx%x-1)*blockdim%x+threadidx%x !computation of ”i” based on grid size 03. if (i.le.N) then

04. Vx(i)=Vx(i)+Fx(i)*dt/am0 !velocity of the i-th atom 05. dx=Vx(i)*dt !instant displacement of the i-th atom 06. x(i)=x(i)+dx ! new coordinate of the i-th atom 07. dlx(i)=dlx(i)+dx !total displacement of the i-th atom 08. endif

09. end subroutine VelKernel

94

Figure 3.5-7a Pseudo code of GPU’s subroutine for construction of neighbors lists.

This algorithm does not allow implementation Newton’s third law. N is the number of simulated atoms; threadidx%x, blockidx%x and blockdim%x are predefined variables

that store information about current thread, current block and size of a block, respectively; jarlst(NnMx*N) array of indexes of neighboring atoms; x(N) stores

coordinates of atoms.

Figure 3.5-7b Pseudo code of GPU’s subroutine for construction of neighbors lists in case of Newton’s third law implementation. N is the number of simulated atoms;

threadidx%x, blockidx%x and blockdim%x are predefined variables that store information about current thread, current block and size of a block, respectively;

jarlst(NnMx*N) array of indexes of neighboring atoms; x(N) stores coordinates of atoms.

01. attributes(global) subroutine VerletKernel(N,NnMx,rnCh2,x,jarlst)

02. i = (blockidx%x-1)*blockdim%x+threadidx%x !computation of ”i” based on grid size 03. if (i.le.N) then

04. njlst=0 05. do j=1,N

06. rx=x(i)-x(j) !distance between atoms i and j

07. rr=rx*rx

08. if (rr.le.rnCh2.and.i.ne.j) then !check if the distance is less than rn

09. njlst=njlst+1 !number of neighbors of i-th atom

02. i = (blockidx%x-1)*blockdim%x+threadidx%x !computation of ”i” based on grid size 03. if (i.le.N-1) then

04. njlst=0 05. do j=i+1,N

06. rx=x(i)-x(j) !distance between atoms i and j

07. rr=rx*rx

08. if (rr.le.rnCh2.and.i.ne.j) then !check if the distance is less than rn

09. njlst=njlst+1 !number of neighbors of i-th atom

95

Figure 3.5-8a Pseudo code of GPU’s subroutine for Forces computations. This algorithm does not use Newton’s third law. N is the number of simulated atoms;

threadidx%x, blockidx%x and blockdim%x are predefined variables that store information about current thread, current block and size of a block, respectively;

jarlst(NnMx*N) array of indexes of neighboring atoms; x(N) and Fx(N) are arrays of coordinates and forces, respectively.

Figure 3.5-8b Pseudo code of GPU’s subroutine for Forces computations. This algorithm uses Newton’s third law. N is the number of simulated atoms; threadidx%x,

blockidx%x and blockdim%x are predefined variables that store information about current thread, current block and size of a block, respectively; jarlst(NnMx*N) array of

indexes of neighboring atoms; x(N) and Fx(N) are arrays of coordinates and forces, respectively.

01. attributes(global) subroutine ForceKernel(N,NnMx,rcCh,X,,jarlst,Fx) 02. i = (blockidx%x-1)*blockdim%x+threadidx%x

03. if (i.le.N) then

04. j=1

05. jm=jarlst((i-1)*NnMx+j) 06. do while (jm.gt.0)

07. rx=x(i)-x(jm)

08. rr=sqrt(rx*rx) !absolute value of distance between atoms 09. dflj=0.E0; dfx=0.0E0;

10. if (rr.gt.rcCh) goto 111 !check if the distance is less than rc

11. dflj=bt*De*(dexp1ij-dexp2ij)/rr !compute acting force using potential

12. dfx=dflj*rx 02. i = (blockidx%x-1)*blockdim%x+threadidx%x

03. if (i.le.N) then

04. j=1

05. jm=jarlst((i-1)*NnMx+j) 06. do while (jm.gt.0)

07. rx=x(i)-x(jm)

08. rr=sqrt(rx*rx) !absolute value of distance between atoms 09. dflj=0.E0; dfx=0.0E0;

10. if (rr.gt.rcCh) goto 111 !check if the distance is less than rc

11. dflj=bt*De*(dexp1ij-dexp2ij)/rr !compute acting force using potential

12. dfx=dflj*rx

13. istat=atomicadd(Fx(i),dfx) !compute the total force acting on atom i 14. istat=atomicadd(Fx(jm),-dfx) !compute the total force acting on atom jm

15. 111 continue

96

Figure 4.1-1 Sketch of argon beam colliding with smooth tungsten surface

Figure 4.1-2 Mean energy of scattered atoms versus energy of impinging atoms at βi=45°. Solid line - result from Janda experiments [102]; black cross

symbols represent MD results obtained in the current study.

Smooth tungsten surface

Incident atoms Scattered atoms

97

Figure 4.1-3 Angular distribution of normalized probability density function in case of Ar scattering from W(110) at TG=295K and incident angle βi=45°. +, Tsurf=500K; ○,

Tsurf=350K.

Figure 4.1-4 Mean energy of scattered atoms versus energy of impinging Ar atoms.

+,βi=0°; ,βi=20°; ○,βi=40°; Δ,βi=60°

98

Figure 4.1-5a Root mean square deviation of scattered atom’s velocities σV over mean velocity of scattered atoms μV versus kinetic energy impinging atoms. +,βi=0°;

,βi=15°; □,βi=30°; ○,βi=45°; Δ,βi=60°; ♦,βi=70°

Figure 4.1-5b Root mean square deviation of scattered atom’s velocities σV over mean velocity of scattered atoms μV versus kinetic energy impinging atoms.

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Figure 4.1-6 Density of probability of Vs. Tsurf=350K, +, βi=20°, Vi=100m/s; , βi=20°, Vi=1500m/s; solid line – Maxwell distribution; dashed line – normal distribution.

Figure 4.1-7a Normalized root mean square deviation σα of the azimuthal angle αs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

+,βi=0°; ,βi=15°; □,βi=30°; ○,βi=45°; Δ,βi=60°; ♦,βi=70°

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Figure 4.1-7b Normalized root mean square deviation σα of the azimuthal angle αs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

Figure 4.1-8a Normalized root mean square deviation σβ of the polar angle βs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

+,βi=0°; ,βi=15°; □,βi=30°; ○,βi=45°; Δ,βi=60°; ♦,βi=70°

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Figure 4.1-8b Normalized root mean square deviation σβ of the polar angle βs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

Figure 4.1-9 Fraction of backscattered atoms versus energy of impinging Ar atoms.

+,βi=10°; ,βi=20°; ○,βi=40°; Δ,βi=60°

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Figure 4.1-10a Average polar angle βs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle. +,βi=0°; ,βi=15°; □,βi=30°; ○,βi=45°;

Δ,βi=60°; ♦,βi=70°

Figure 4.1-10b Average polar angle βs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

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Figure 4.1-11 Correlation coefficients between βi and βs versus energy of incident beam

Figure 4.1-12 Density of probability of βsand αs. Tsurf=350K, βi=20°, Vi=100m/s. +, distribution of αs; , distribution of βs; solid line – normal distribution of βs.

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Figure 4.1-13 Density of probability of βsand αs. Tsurf=350K, βi=20°, Vi=1500m/s. +, distribution of αs; , distribution of βs; solid line – normal distribution of βs; dashed

line - normal distribution of αs.

Figure 4.1-14 Sketch of wavy surface

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Figure 4.1-15 Fraction of atoms scattered by tungsten surface in backward direction versus energy of impinging Ar atoms. □,βi=10°; Δ,βi=20°; +,βi=40°; ○,βi=60°. Black symbols correspond to smooth surface. Green, red, blue and yellow symbols correspond

to surface of Type B, C, D and E, respectively.

Figure 4.1-16 Normalized root mean square deviation σα of the azimuthal angle αs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

□,βi=10°; Δ,βi=20°; +,βi=40°; ○,βi=60°. Black symbols correspond to smooth surface.

Green, red, blue and yellow symbols correspond to surface of Type B, C, D and E, respectively.

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Figure 4.1-17 Normalized root mean square deviation σβ of the polar angle βs of scattered atoms versus kinetic energy of impinging atoms and incident polar angle.

□,βi=10°; Δ,βi=20°; +,βi=40°; ○,βi=60°. Black symbols correspond to smooth surface.

Green, red, blue and yellow symbols correspond to surface of Type B, C, D and E, respectively.

Figure 4.1-18a Density of probability of βsand αs. Tsurf=350K, βi=20°, Vi=100m/s. +, distribution of αs (surface Type A); , distribution of βs(surface Type A); solid line –

normal distribution of βs(surface Type A); ○, distribution of αs (surface Type B); ●, distribution of βs(surface Type B); ∆, distribution of αs (surface Type C); ▲, distribution of βs(surface Type C); □, distribution of αs (surface Type D); ■, distribution

of βs(surface Type D); ☆, distribution of αs (surface Type E); ★, distribution of βs(surface Type E).

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Figure 4.1-18b. Density of probability of βsand αs. Tsurf=350K, βi=20°, Vi=1500m/s. +, distribution of αs (surface Type A); , distribution of βs(surface Type A); solid line –

normal distribution of βs(surface Type A); ○, distribution of αs (surface Type B); ●, distribution of βs(surface Type B); ∆, distribution of αs (surface Type C); ▲, distribution of βs(surface Type C); □, distribution of αs (surface Type D); ■, distribution

of βs(surface Type D); ☆, distribution of αs (surface Type E); ★, distribution of βs(surface Type E).

Figure 4.1-19 Mean energy of scattered atoms versus energy of impinging atoms at βi=45°. □, surface Type A; ○, surface Type B; Δ, surface Type C; ◊, surface Type D; +,

surface Type E.

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Figure 4.1-20 Root mean square deviation of scattered atom’s velocities σV over mean velocity of scattered atoms μV versus kinetic energy impinging atoms. □,βi=10°;

Δ,βi=20°; +,βi=40°; ○,βi=60°. Black symbols correspond to smooth surface. Green, red, blue and yellow symbols correspond to surface of Type B, C, D and E,

respectively.

Figure 4.2-1 Reduced flow rate versus relative size of the tank.

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Figure 4.2-2 Density of probability of velocity distribution of gas atoms in tank.

T1=350K, ○, H/hch=1; □, H/hch=4; solid line – Maxwell distribution.

Figure 4.2-3a Normalized flow rate versus channel length-to-height ratio. Parameters of simulations: P2/P1=0.5; diffusive BC. +,δ=0.1 (current study); ◊,δ=0.1 (Sharipov[39]); □,δ=0.2 (current study); ○,δ=0.2 (Sharipov [39]); Δ,δ=0.4 (current

study); ♦,δ=0.4 (Sharipov [39]).

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Figure 4.2-3b Normalized flow rate versus channel length-to-height ratio in a log-log scale. Parameters of simulations: P2/P1=0.5; diffusive BC. +,δ=0.1 (current study);

◊,δ=0.1 (Sharipov [39]); □,δ=0.2 (current study); ○,δ=0.2 (Sharipov [39]); Δ,δ=0.4 (current study); ♦,δ=0.4 (Sharipov [39]).

Figure 4.2-4a Normalized flow rate versus channel length-to-height ratio. Parameters of simulations: P2/P1=0.5 (black symbols); P2/P1=0.9 (red symbols); P2/P1=0.1 (blue

symbols); diffusive BC. □,δ=0.2 (current study); ○,δ=0.2 (Sharipov [39]).

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Figure 4.2-4b Normalized flow rate versus channel length-to-height ratio in log-log scale. Parameters of simulations: P2/P1=0.5 (black symbols); P2/P1=0.9 (red symbols);

P2/P1=0.1 (blue symbols); diffusive BC δ=0.2;. □, current study; ○, Sharipov [39].

Figure 4.2-5 Normalized flow rate versus pressure difference. ■, Real Channel (Type A); ◊, Real Channel (Type B); □, Real Channel (Type C); +, Real Channel (Type E); Δ,

Diffuse BC; ●, Semi empirical eq. (1.4-1) [31]; ×, Specular BC.

F

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Figure 4.3-2b Normalized flow rate versus channel length-to-height ratio in log-log scale. Parameters of simulations: P2/P1=1; T2/T1=500/350; diffusive BC.

+,δ=0.2 - current study; +,δ=0.2 – eq. (2.3-15b) derived by Sharipov [39];

◊,δ=0.1 - current study; ◊,δ=0.1 - eq. (2.3-15b) derived by Sharipov [39];

●,δ=0.4 - current study; ●,δ=0.4 - eq. (2.3-15b) derived by Sharipov [39].

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References

[1] I.A. Waitz, G. Gauba, Y.-S. Tzeng, Combustors for Micro-Gas Turbine Engines, Journal of Fluids Engineering, 120 (1998) 109-117.

[2] F. Sharipov, V. Seleznev, Data on Internal Rarefied Gas Flows, Journal of Physical and Chemical Reference Data, 27 (1998) 657-706.

[3] R.M. Young, Analysis of a micromachine based vacuum pump on a chip actuated by the thermal transpiration effect, Journal of Vacuum Science & Technology B:

Microelectronics and Nanometer Structures, 17 (1999) 280-287.

[4] H. Yen-Lin, Thermal-Creep-Driven Flows in Knudsen Compressors and Related

[4] H. Yen-Lin, Thermal-Creep-Driven Flows in Knudsen Compressors and Related

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