The immobilization between the solid support and biomolecules is very important for the interdisciplinary studies of biotechnology and semiconductor fields. In this study, we firstly immobilize rhodamine by APTES modification onto silicon oxide substrates, and successfully investigated a fast and easy protocol to enhance the efficiency of immobilization. Furthermore, we successfully fabricated the metal-semiconductor-metal photo diode, and applied it on bio-sensing; it can be a very effective means to sense various important biomolecules. These devices also possess the advantages of very high sensitivity, label free and low cost.
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