5-1 Conclusions
The physical, chemical, mechanical, and electronic characteristics of CNTs are discussed in this dissertation. Numerous important results are summarized and discussed.
Effect of pretreatment on the increasing time from the SEM image of Ni catalyst layer was described. By the nanoindentation technique, it is observed that the decreased in modulus (from 238.9±8.4 to 176.2±6.1GPa) and hardness (from 17.2±1.6 to 11±0.8 GPa) than those of the Ni film. Also, the density and alignment of CNTs could be controlled by nickel nanoparticles. Raman spectrum indicates that the pretreatment time decrease the disorder structures, which in turn yields the amounts of amorphous carbon and carbonaceous particles in the CNTs. TEM indicate that the crystalline graphite structure, depending on the H2 plasma pretreatment flow rate. Surface performance of CNTs from CF4/O2 plasma post-treatment was investigated. The ID/IG ratios reveal that chemical treatment with CF4/O2 plasma for 2 min reduces the degree of disorder. After 10 min, however, the degree of disorder in CNTs is increased. FTIR absorption spectra include peaks that correspond to C-O and C-F stretching vibrations. The TDS results yield adsorption information. XPS datum reveals fluorination in CF4/O2 plasma-treated CNTs and the absence of a significant of physisorbtion on CNTs. This result shows that adding oxygen to the plasma increases the decomposition efficiency.
A CNT bridge on SiO2 that is patterned photolithographically in an electronic device is described. The CNTs grow laterally to the substrate over a TiN vertical growth barrier and connect to the side of the electrode pad. The CF4/O2 post-treated has a higher current-voltage curve than the surface-modified. The typical Schottky contact characteristics at room temperature are discussed. The surface of the CNT interacts with
the surrounding plasma, breaking C-C bonds and creating active sites to bond the functional groups. Therefore, C-F binding in the amorphous carbon can be reduced by modifying the CNTs. A CNT film was studied using nanoindentation equipment (Berkovitch indenter) by varying the loading force. CNT films exhibit features that are associated with toughening against cracks caused by indentation. The quantitative indentation force is utilized to determine the CNTs axial modulus, depending on the Raman shift. The ID/IG ratios of the CNTs films are associated with an increase in the force. Such features follow in part from the fact that CNTs films generally contain some disordered regions.
5-2 Future work
The following issues warrant further research.
(a) The buffer layer study involves some interesting candidate materials, including thin Ti, Ta, Hf and HfN films on Si substrates. Sputtering (PVD) or electron beam evaporation (E-GUN) were used to,
(i) Strengthen the adhesion between Si substrates and catalyst thin films.
(ii) Elucidate the relationship between the buffer layer and the catalysts.
(iii) Improve the properties of CNTs for use in interconnection and metallization.
(b) The effect of plasma treatment on CNT thin films or a single CNT should be studied.
The effects of different plasma treatments (H2, NH3, O2 etc.) on CNTs should also be compared.
(c) The tensile properties of the composite upon addition of MWCNTs to the polymer matrix are of interest.
142
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Publications List of Hua-Chiang Wen
A-接受之國際期刊論文 (SCI Journal)
A1. Microelectronic Engineering
Hua-Chiang Wen *, Koho Yang, Keng-Liang Ou, Wen-Fa Wu, Jen-Tsung Luo, Chang-Pin Chou,
“Carbon nanotubes grown using cobalt silicids as catalyst and hydrogen pre-treatment”, Microelectronic Engineering, 2005, 82 (3-4), pp. 221-227, (SCI).
A2. Surface & Coatings Technology
Hua-Chiang Wen *, Koho Yang, Keng-Liang Ou, Wen-Fa Wu, Chang-Pin Chou, Jen-Tsung Luo, Yu-Ming Chang,“ Effects of Ammonia Plasma Treatment on the Surface Characteristics of Carbon Nanofiber”, Surface & Coatings Technology, 2005, 200 (10), pp. 3166-3169, (SCI).
A3. Journal of Physics: Conference Series
Hua-Chiang Wen*, Yao-Nan Lin, Sheng-Rui Jian, Shih-Chun Tseng, Ming-Xiang Weng, Yu-Pin Liu, Po-Te Lee, Pai-Yen Chen, Ray-Quan Hsu, Wen-Fa Wu, and Chang-Pin Chou, “Observation of Growth of Human Fibroblasts on Silver Nanoparticles“, Journal of Physics: Conference Series, Accepted.
A 4. Jorrnal of Composite material
Jen-Tsung Luo *, Hua-Chiang Wen, Wen-Fa Wu, Ben-Zu Wan, Chang-Pin Chou,“ Porous silica reinforced by carbon nanotubes to enhance mechanical performance, Jorrnal of Composite material, 2006, Accepted.
A 5. Journal of Colloid and Interface Science
Jen-Tsung Luo *, Hua-Chiang Wen, Yu-Ming Chang, Wen-Fa Wu, Chang-Pin Chou,
“Mesoporous silica reinforced by silica nanoparticle to enhance mechanical performance”, Journal of Colloid and Interface Science, 2006, Accepted.
A 6. Journal of Colloid and Interface Science
Jen-Tsung Luo *, Hua-Chiang Wen, Wen-Fa Wu, Chang-Pin Chou, “mechanical research of carbon nanotube/PMMA composite films”, Composite composite, 2007, Accepted.
A 7. Thin Solid Film
Jen-Tsung Luo*, Wen-Fa Wu, Hua-ChiangWen, Yu-Ming Chang, Chang-Pin Chou, Jun-Ming Chen, “The role of hydrophobic group on the surface of nanoporuous ultra low dielectric constant during thermal treatment”, Thin Solid Film, 2006 , Accepted.
A 8. Applied Surface Science
Wen-Pin Wang, Hua-ChiangWen, J. C. Huang , Sheng-Rui Jian, Kuan-Ting Chen, Wen-Fa Wu, Chang-Pin Chou, Chien-Huang Tsai, “The effects of hydrogen plasma pretreatment on the formation of vertically aligned carbon nanotubes”, Applied Surface Science, 2007 , Revise.
B-接受之台灣期刊論文 (Taiwan Journal) B1. 奈米通訊
陳百彥*, 溫華強, 王文彬, 鄭宗杰, “場發射平面顯示器技術“, 奈米通訊. 第十三卷. 第.三.
期, pp. 75-80
B2.奈米尺度之接合技術
Ming-Xiang Weng, Hua-ChiangWen, H-Y Huang, Chang-Pin Chou*, “The technology of welding in nano-size, “Welding & Cutting, vol15:4 2005, pp.32-35.
D-國際研討會論文(International Conference Paper) D1. Asian CVD III International conference
. Hua-Chiang Wen*, Yu-Ming Chang, Chang-Pin Chou, Jen-Tsung Luo, Wen-Fa Wu, “Effects of Ammonia Plasma Treatment on the Surface Characteristics of Carbon Nanotubes”, Asian CVD III International conference, Taipei, Taiwan Nov. 12-14, page 116-117, 2004. (台灣)
D 2. Materials for Advanced Metallization International conference
Hua-ChiangWen*, Koho Yang, Keng-Liang Ou, Wen-Fa Wu, Jen-Tsung Luo, Chang-Pin Chou,
“Carbon nanotubes grown using cobalt silicids as catalyst and hydrogen pre-treatment”, Materials for Advanced Metallization International conference, Dresden, Germany, Mar. 06-09,page 41-42, 2005.
(德國)
D 3. 3rd International Conference on Materials for 9th International Conference on Advanced Technologies
Hua-Chiang Wen*, Tien-Yu Lin, Yu-Ming Chang , Jen-Tsung Luo, Wen-Fa Wu, Chang-Pin Chou , J-T Sheu,“Growth Mechanism of Carbon Nanotubes with Hydrogen Plasma Pretreatment on
Nickel/Titanium Nitride System”, 3rd International Conference on Materials for 9th International Conference on Advanced Technologies (ICMAT), Singapore, page 238, 2005. (新加坡)
D 4. 3rd International Conference on Materials for 9th International Conference on Advanced Technologies
Hua-Chiang Wen*, Kuo-Shu Lin, Jen-Tsung Luo, Yu-Ming Chang , Wen-Fa Wu , Chang-Pin Chou ,Jung-Hsiung Shen , Koho Yang, “Carbon Nanotubes Grown on Nickel/Titanium
Nitride/Silicon System at various Temperature and Pretreating”,3rd International Conference on Materials for 9th International Conference on Advanced Technologies (ICMAT), Singapore, page 135, 2005. (新加坡)
D 5. 3rd International Conference on Materials for 9th International Conference on Advanced
D 5. 3rd International Conference on Materials for 9th International Conference on Advanced