• 沒有找到結果。

Chapter 5 Conclusion

5.2 Future Research Direction

The future research directions focus on CTE model derivation and extending application on MEMS-last. Although the residual stress types have be observed as the promising mechanism of CTE variation on Ni-based nanocomposites, a powerful CTE model is still a lack of this region needing to be derived in the future research.

Furthermore, combing the foregoing advantages of material properties and fabrication processes, the electroplated Ni-diamond nanocomposite is expected to integrate CMOS for extending application in the future research.

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Publication List

• Journal papers:

1. Chia-Sheng Huang, Yu-Ting Cheng, Junwei Chung, and Wensyang Hsu,

“Investigation of Ni-based thermal bimaterial structure for sensor and actuator application,” Sensors and Actuators A, vol. 149, pp. 298-304, 2009.

2. Chia-Sheng Huang, Yu-Ting Cheng, Chang-Jhih Yeh, Hsien-Kuang Liu, and Wensyang Hsu “Characterization of fatigue behavior on electroplated Ni-diamond nanocomposites with different particle sizes,” Sensors and Actuators A. (Submitted)

• Conference papers:

1. Chia-Sheng Huang, Yu-Ting Cheng, Chang-Jhih Yeh, Hsien-Kuang Liu, and Wensyang Hsu, “Young’s modulus and fatigue lifetime improvements by diamond size effect on electroplated Ni-diamond nanocomposite,” Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers 2009), Denver, U.S.A, pp. 180-183, 2009.

2. Chia-Sheng Huang, Junwei Chung, Yu-Ting Cheng, and Wensyang Hsu, “Thermal bimetallic microactuators by Ni and Ni-diamond nanocomposite,” Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS), Bangkok, Thailand, pp. 37-40, 2007.

3. Yi-Chung Lo, Chia-Sheng Huang, Wensyang Hsu, Chaoen Wang, “Neural guidance by open-top SU-8 microfluidic channel,” Proceedings of IEEE International Conference on MEMS NANO and Smart System (IEEE-ICMENS), Alberta, Canada, pp. 671-674, 2004.

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