第四章 結果與討論結果與討論結果與討論
4.1 ITO 基板測試 基板測試 基板測試 基板測試
首先將ITO基板作測試，分為16列3欄的方式去編號與量測阻值。一列高2公分，
一欄寬5公分，如下表所示。”+”為四點探針量測點。規劃如下表4-1。
表 4-1 基板測試分區
1 + 17 + 33 +
2 + 18 + 34 +
3 + 19 + 35 +
4 + 20 + 36 +
5 + 21 + 37 +
6 + 22 + 38 +
7 + 23 + 39 +
8 + 24 + 40 +
9 + 25 + 41 +
10 + 26 + 42 +
11 + 27 + 43 +
12 + 28 + 44 +
13 + 29 + 45 +
14 + 30 + 46 +
15 + 31 + 47 +
16 + 32 + 48 +
測得數據如下表4-2，測得的單位為Ω-cm。
表 4-2 基板測試阻值 編
號 阻值 編
號 阻值 編
號 阻值
1 377.4695 17 327.982 33 336.2154
2 351.873 18 319.5404 34 386.2665
3 469.9536 19 401.4974 35 368.4001
4 609.8843 20 601.4946 36 546.0986 5 584.3926 21 638.8584 37 453.2451
6 585.5658 22 614.146 38 620.3924
7 401.6974 23 484.1435 39 571.4961
8 347.5558 24 359.0285 40 394.0185 9 344.3216 25 315.082 41 484.7784
10 357.6865 26 438.6102 42 328.6217
11 347.4192 27 488.7574 43 465.2839
12 583.7602 28 556.1887 44 520.7182 13 346.3039 29 332.1366 45 399.2182
14 346.1503 30 332.8278 46 337.1977
15 344.0917 31 454.5231 47 402.8350
16 416.2082 32 394.5198 48 414.1372 表4-2
以區域1～16列為一個量測區域，所量測的阻值分佈圖4-1。
圖4-1 區域1～16列的阻值
以區域17～32列為一個量測區域，所量測的阻值分佈圖4-2。
圖4-2 區域17～32列的阻值
以區域33～48列為一個量測區域，所量測的阻值分佈圖4-3。
圖4-3 區域33～48列的阻值
總分佈圖如圖4-4。
圖4-4 區域總分佈圖
阻值散佈圖，阻值的高低以顏色的深淺來代表，區域 5、21、37 是阻值最高的部份。
表 4-3 基板的阻值散佈圖
1 + 17 + 33 +
2 + 18 + 34 +
3 + 19 + 35 +
4 + 20 + 36 +
5 + 21 + 37 +
6 + 22 + 38 +
7 + 23 + 39 +
8 + 24 + 40 +
9 + 25 + 41 +
10 + 26 + 42 +
11 + 27 + 43 +
12 + 28 + 44 +
13 + 29 + 45 +
14 + 30 + 46 +
15 + 31 + 47 +
16 + 32 + 48 +
4.1.1 4.1.1 4.1.1
4.1.1 退火後的透光度量測 退火後的透光度量測 退火後的透光度量測 退火後的透光度量測
在各個退火的參數退火後，量測各個退火參數的透光率，設定的溫度參數為
80
oC、100
oC、120
oC、140
oC 依此為組別，共分為四組，一組三個樣本，因此有十
二個樣本，而各個溫度參數下的時間參數為 60min、90min、120min。樣本 0 是未經過退火的 ITO 塑膠基板之透光率。使用的量測儀器是 Jasco V-550 頻譜分析儀。表 4-5 至表 4-16 是樣本一到樣本十二的數值。退火實驗也依照表 4-4 的四組十二個樣本進行退火。
表 4-4 退火溫度與時間參數表 溫度（o
C）
退火時間(min)
80 100 120 140
60
樣本一 樣本四 樣本七 樣本十90
樣本二 樣本五 樣本八 樣本十一120
樣本三 樣本六 樣本九 樣本十二表 4-5 樣本一退火後透光度 樣本一 透光率(％)：84.5
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 90.5 669 87.8 638 87.8 607 86.7 576 85.8 545 84.4 514 84.2 483 82.3 452 80.5 421 77.6 699 90.5 668 87.8 637 87.9 606 86.8 575 85.7 544 84.4 513 84.1 482 82.3 451 80.4 420 77.7 698 90.5 667 87.8 636 87.9 605 86.8 574 85.5 543 84.4 512 84.0 481 82.3 450 80.3 419 77.6 697 90.4 666 87.7 635 87.9 604 86.6 573 85.4 542 84.4 511 83.9 480 82.4 449 80.3 418 77.4 696 90.3 665 87.7 634 87.8 603 86.6 572 85.2 541 84.3 510 83.8 479 82.5 448 80.4 417 77.3 695 90.2 664 87.6 633 87.7 602 86.6 571 85.1 540 84.5 509 83.6 478 82.5 447 80.3 416 77.1 694 90.0 663 87.5 632 87.6 601 86.4 570 84.9 539 84.5 508 83.5 477 82.5 446 80.3 415 76.9 693 89.8 662 87.4 631 87.4 600 86.3 569 85.0 538 84.6 507 83.3 476 82.5 445 80.2 414 76.7 692 89.6 661 87.3 630 87.3 599 86.3 568 84.9 537 84.6 506 83.3 475 82.4 444 80.1 413 76.6 691 89.3 660 87.2 629 87.2 598 86.1 567 84.8 536 84.7 505 83.1 474 82.3 443 80.0 412 76.4 690 89.1 659 87.1 628 87.0 597 86.0 566 84.9 535 84.7 504 83.1 473 82.2 442 79.8 411 76.3 689 88.8 658 87.0 627 86.7 596 85.9 565 85.0 534 84.7 503 83.1 472 82.1 441 79.7 410 76.1 688 88.5 657 86.9 626 86.6 595 85.8 564 85.1 533 84.7 502 83.1 471 81.8 440 79.6 409 76.0 687 88.3 656 86.9 625 86.5 594 85.9 563 85.0 532 84.7 501 83.1 470 81.7 439 79.5 408 75.9 686 88.0 655 86.8 624 86.3 593 85.8 562 85.2 531 84.5 500 83.1 469 81.7 438 79.4 407 75.7 685 87.8 654 86.7 623 86.2 592 85.8 561 85.3 530 84.5 499 83.3 468 81.5 437 79.3 406 75.5 684 87.6 653 86.7 622 86.1 591 85.9 560 85.4 529 84.4 498 83.4 467 81.4 436 79.3 405 75.3 683 87.4 652 86.7 621 86.1 590 85.7 559 85.6 528 84.2 497 83.4 466 81.4 435 79.3 404 75.1 682 87.4 651 86.7 620 86.0 589 85.9 558 85.5 527 84.1 496 83.4 465 81.5 434 79.2 403 74.9 681 87.3 650 86.7 619 85.9 588 85.9 557 85.6 526 83.9 495 83.4 464 81.5 433 79.2 402 74.6 680 87.3 649 86.8 618 86.0 587 86.0 556 85.7 525 83.9 494 83.4 463 81.4 432 79.1 401 74.3 679 87.4 648 87.0 617 86.0 586 86.1 555 85.6 524 83.9 493 83.3 462 81.4 431 79.0 400 74.2 678 87.4 647 86.9 616 86.1 585 86.1 554 85.5 523 83.8 492 83.2 461 81.4 430 78.9 AVG 84.5 677 87.5 646 87.1 615 86.1 584 86.2 553 85.5 522 83.8 491 83.1 460 81.4 429 78.7
676 87.6 645 87.2 614 86.2 583 86.3 552 85.4 521 83.8 490 82.9 459 81.3 428 78.5 675 87.7 644 87.3 613 86.3 582 86.2 551 85.2 520 84.0 489 82.8 458 81.2 427 78.4 674 87.7 643 87.4 612 86.4 581 86.2 550 85.1 519 84.1 488 82.6 457 81.1 426 78.2 673 87.7 642 87.5 611 86.5 580 86.2 549 84.9 518 84.1 487 82.4 456 80.9 425 78.0 672 87.7 641 87.7 610 86.6 579 86.2 548 84.8 517 84.1 486 82.4 455 80.7 424 77.8 671 87.8 640 87.8 609 86.6 578 86.0 547 84.7 516 84.2 485 82.3 454 80.6 423 77.7 670 87.8 639 87.8 608 86.7 577 85.9 546 84.5 515 84.2 484 82.3 453 80.5 422 77.7
表 4-6 樣本二退火後透光度 樣本二 透光率(％)：85.5
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 90.8 669 89.0 638 88.6 607 88.2 576 86.8 545 85.3 514 85.3 483 83.6 452 81.6 421 79.0 699 90.7 668 89.1 637 88.6 606 88.1 575 86.7 544 85.3 513 85.2 482 83.7 451 81.7 420 79.1 698 90.5 667 89.1 636 88.6 605 88.2 574 86.6 543 85.3 512 85.2 481 83.8 450 81.6 419 78.9 697 90.3 666 89.1 635 88.6 604 88.1 573 86.5 542 85.5 511 85.1 480 83.9 449 81.7 418 78.7 696 90.0 665 89.1 634 88.4 603 87.9 572 86.4 541 85.5 510 85.0 479 83.9 448 81.7 417 78.6 695 89.8 664 89.1 633 88.2 602 87.8 571 86.2 540 85.6 509 84.8 478 83.9 447 81.7 416 78.4 694 89.4 663 89.0 632 88.1 601 87.6 570 86.2 539 85.7 508 84.6 477 83.8 446 81.7 415 78.1 693 89.2 662 88.9 631 88.1 600 87.5 569 86.1 538 85.9 507 84.5 476 83.7 445 81.5 414 77.9 692 88.9 661 88.8 630 87.8 599 87.3 568 86.0 537 86.0 506 84.5 475 83.6 444 81.4 413 77.7 691 88.6 660 88.7 629 87.7 598 87.2 567 86.1 536 86.0 505 84.3 474 83.4 443 81.2 412 77.6 690 88.3 659 88.6 628 87.5 597 86.9 566 86.2 535 86.1 504 84.3 473 83.2 442 81.0 411 77.6 689 88.1 658 88.5 627 87.4 596 87.0 565 86.2 534 86.2 503 84.3 472 83.0 441 80.9 410 77.4 688 87.9 657 88.3 626 87.2 595 86.7 564 86.4 533 86.1 502 84.4 471 82.8 440 80.7 409 77.4 687 87.7 656 88.3 625 87.1 594 86.6 563 86.4 532 85.9 501 84.4 470 82.7 439 80.7 408 77.3 686 87.5 655 88.2 624 87.0 593 86.6 562 86.5 531 85.8 500 84.4 469 82.6 438 80.5 407 77.1 685 87.5 654 88.1 623 87.0 592 86.6 561 86.6 530 85.7 499 84.6 468 82.6 437 80.5 406 76.8 684 87.5 653 88.0 622 86.9 591 86.7 560 86.7 529 85.5 498 84.6 467 82.6 436 80.6 405 76.6 683 87.5 652 88.1 621 86.9 590 86.6 559 86.8 528 85.4 497 84.6 466 82.7 435 80.6 404 76.3 682 87.5 651 88.0 620 86.9 589 86.7 558 86.9 527 85.2 496 84.6 465 82.8 434 80.6 403 76.1 681 87.6 650 88.0 619 87.0 588 86.8 557 86.8 526 85.1 495 84.6 464 82.8 433 80.5 402 75.8 680 87.8 649 88.0 618 87.0 587 86.8 556 86.8 525 84.9 494 84.5 463 82.9 432 80.5 401 75.6 679 87.9 648 88.1 617 87.1 586 86.9 555 86.7 524 84.8 493 84.4 462 82.9 431 80.3 400 75.4 678 88.0 647 88.2 616 87.3 585 87.1 554 86.6 523 84.8 492 84.3 461 82.9 430 80.2 AVG 85.5 677 88.2 646 88.2 615 87.4 584 87.1 553 86.5 522 84.8 491 84.1 460 82.7 429 79.9
676 88.4 645 88.2 614 87.5 583 87.2 552 86.2 521 84.9 490 83.9 459 82.7 428 79.8 675 88.5 644 88.4 613 87.7 582 87.2 551 86.1 520 84.9 489 83.7 458 82.4 427 79.6 674 88.6 643 88.4 612 87.8 581 87.2 550 86.0 519 85.1 488 83.5 457 82.3 426 79.3 673 88.7 642 88.5 611 87.9 580 87.2 549 85.7 518 85.2 487 83.5 456 82.1 425 79.2 672 88.9 641 88.6 610 88.0 579 87.1 548 85.6 517 85.2 486 83.4 455 81.9 424 79.1 671 89.0 640 88.6 609 88.1 578 87.0 547 85.5 516 85.2 485 83.4 454 81.7 423 79.1 670 89.0 639 88.7 608 88.2 577 87.0 546 85.4 515 85.3 484 83.5 453 81.6 422 79.0
表 4-7 樣本三退火後透光度 樣本三 透光率(％)：85
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 90.9 669 88.3 638 88.2 607 87.5 576 86.3 545 84.9 514 84.6 483 83.0 452 81.1 421 78.3 699 90.8 668 88.3 637 88.2 606 87.5 575 86.2 544 84.8 513 84.7 482 83.0 451 81.0 420 78.4 698 90.7 667 88.3 636 88.2 605 87.5 574 86.1 543 84.7 512 84.6 481 83.1 450 81.0 419 78.3 697 90.5 666 88.4 635 88.2 604 87.5 573 86.0 542 84.8 511 84.5 480 83.2 449 81.0 418 78.2 696 90.3 665 88.4 634 88.1 603 87.4 572 85.9 541 84.8 510 84.4 479 83.2 448 81.1 417 78.0 695 90.0 664 88.3 633 88.0 602 87.4 571 85.7 540 85.0 509 84.3 478 83.3 447 81.0 416 77.9 694 89.8 663 88.3 632 87.9 601 87.3 570 85.6 539 85.0 508 84.2 477 83.3 446 81.0 415 77.6 693 89.5 662 88.3 631 87.7 600 87.1 569 85.6 538 85.1 507 84.0 476 83.2 445 81.0 414 77.4 692 89.3 661 88.2 630 87.5 599 87.0 568 85.5 537 85.2 506 83.9 475 83.1 444 80.9 413 77.3 691 88.9 660 88.1 629 87.4 598 86.8 567 85.5 536 85.3 505 83.9 474 82.9 443 80.7 412 77.1 690 88.6 659 88.0 628 87.2 597 86.7 566 85.5 535 85.4 504 83.8 473 82.8 442 80.5 411 76.9 689 88.4 658 87.9 627 87.0 596 86.6 565 85.6 534 85.4 503 83.7 472 82.6 441 80.4 410 76.8 688 88.0 657 87.8 626 86.9 595 86.4 564 85.7 533 85.5 502 83.7 471 82.4 440 80.3 409 76.7 687 87.8 656 87.7 625 86.8 594 86.3 563 85.7 532 85.4 501 83.8 470 82.2 439 80.1 408 76.6 686 87.5 655 87.6 624 86.6 593 86.3 562 85.9 531 85.3 500 83.8 469 82.1 438 80.0 407 76.4 685 87.4 654 87.6 623 86.5 592 86.2 561 86.0 530 85.2 499 83.9 468 82.1 437 80.0 406 76.3 684 87.3 653 87.5 622 86.4 591 86.1 560 86.1 529 85.1 498 83.9 467 82.0 436 79.9 405 76.1 683 87.1 652 87.5 621 86.3 590 86.2 559 86.1 528 85.0 497 84.0 466 82.0 435 79.9 404 75.9 682 87.1 651 87.4 620 86.3 589 86.2 558 86.2 527 84.8 496 84.1 465 82.1 434 79.9 403 75.6 681 87.2 650 87.4 619 86.3 588 86.2 557 86.3 526 84.7 495 84.0 464 82.2 433 79.9 402 75.3 680 87.2 649 87.5 618 86.3 587 86.3 556 86.3 525 84.6 494 84.0 463 82.2 432 79.9 401 75.1 679 87.3 648 87.5 617 86.4 586 86.4 555 86.1 524 84.5 493 83.9 462 82.2 431 79.8 400 74.9 678 87.4 647 87.6 616 86.5 585 86.5 554 86.2 523 84.3 492 83.8 461 82.2 430 79.6 AVG 85 677 87.5 646 87.6 615 86.6 584 86.5 553 86.1 522 84.3 491 83.6 460 82.2 429 79.5 676 87.7 645 87.8 614 86.7 583 86.6 552 85.9 521 84.3 490 83.4 459 82.1 428 79.3 675 87.7 644 87.8 613 86.8 582 86.6 551 85.7 520 84.4 489 83.3 458 81.9 427 79.1 674 87.8 643 87.9 612 87.0 581 86.6 550 85.6 519 84.4 488 83.2 457 81.8 426 78.8 673 88.0 642 87.9 611 87.1 580 86.6 549 85.4 518 84.5 487 83.0 456 81.6 425 78.7 672 88.1 641 88.1 610 87.2 579 86.6 548 85.3 517 84.6 486 82.9 455 81.4 424 78.5 671 88.1 640 88.1 609 87.4 578 86.5 547 85.0 516 84.6 485 82.9 454 81.2 423 78.4 670 88.2 639 88.2 608 87.4 577 86.5 546 84.9 515 84.7 484 82.9 453 81.1 422 78.3
表 4-8 樣本四退火後透光度 樣本四 透光率(％)：85
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 89.7 669 88.6 638 88.1 607 87.6 576 85.9 545 85.0 514 84.7 483 83.4 452 81.3 421 78.6 699 89.4 668 88.5 637 87.9 606 87.5 575 85.9 544 85.0 513 84.5 482 83.5 451 81.4 420 78.5 698 89.2 667 88.5 636 87.8 605 87.4 574 85.7 543 85.2 512 84.4 481 83.6 450 81.4 419 78.4 697 89.0 666 88.4 635 87.7 604 87.1 573 85.6 542 85.4 511 84.3 480 83.5 449 81.3 418 78.1 696 88.7 665 88.3 634 87.5 603 87.0 572 85.6 541 85.4 510 84.1 479 83.4 448 81.3 417 77.9 695 88.4 664 88.2 633 87.3 602 86.9 571 85.6 540 85.5 509 84.0 478 83.3 447 81.1 416 77.7 694 88.3 663 88.1 632 87.2 601 86.8 570 85.7 539 85.6 508 83.9 477 83.1 446 81.0 415 77.5 693 88.0 662 88.0 631 87.0 600 86.6 569 85.7 538 85.6 507 83.9 476 83.0 445 80.8 414 77.4 692 87.8 661 87.9 630 86.8 599 86.5 568 85.8 537 85.7 506 83.9 475 82.7 444 80.7 413 77.3 691 87.6 660 87.8 629 86.7 598 86.4 567 85.9 536 85.6 505 83.9 474 82.6 443 80.5 412 77.3 690 87.3 659 87.8 628 86.6 597 86.3 566 86.0 535 85.6 504 83.9 473 82.4 442 80.3 411 77.2 689 87.2 658 87.7 627 86.5 596 86.2 565 86.1 534 85.5 503 84.1 472 82.3 441 80.3 410 77.1 688 87.0 657 87.6 626 86.4 595 86.2 564 86.4 533 85.3 502 84.1 471 82.2 440 80.3 409 77.0 687 87.0 656 87.6 625 86.4 594 86.3 563 86.3 532 85.2 501 84.2 470 82.2 439 80.2 408 76.8 686 87.0 655 87.6 624 86.4 593 86.2 562 86.4 531 85.0 500 84.2 469 82.3 438 80.3 407 76.5 685 87.0 654 87.6 623 86.4 592 86.3 561 86.5 530 84.8 499 84.3 468 82.3 437 80.3 406 76.2 684 87.0 653 87.6 622 86.4 591 86.4 560 86.4 529 84.7 498 84.3 467 82.4 436 80.3 405 76.0 683 87.2 652 87.7 621 86.6 590 86.5 559 86.4 528 84.6 497 84.2 466 82.5 435 80.2 404 75.7 682 87.3 651 87.8 620 86.7 589 86.6 558 86.4 527 84.5 496 84.1 465 82.5 434 80.1 403 75.5 681 87.4 650 87.8 619 86.8 588 86.6 557 86.2 526 84.5 495 84.0 464 82.4 433 80.0 402 75.3 680 87.6 649 87.9 618 86.9 587 86.8 556 86.1 525 84.4 494 83.7 463 82.5 432 79.8 401 75.2 679 87.9 648 88.0 617 87.1 586 86.8 555 85.9 524 84.5 493 83.5 462 82.4 431 79.6 400 75.0 678 88.1 647 88.0 616 87.2 585 86.8 554 85.7 523 84.5 492 83.4 461 82.2 430 79.4 AVG 85 677 88.2 646 88.1 615 87.3 584 86.8 553 85.5 522 84.5 491 83.2 460 82.0 429 79.3 676 88.3 645 88.1 614 87.5 583 86.8 552 85.3 521 84.7 490 83.1 459 81.8 428 79.1 675 88.5 644 88.2 613 87.6 582 86.7 551 85.2 520 84.8 489 83.0 458 81.7 427 79.0 674 88.5 643 88.3 612 87.6 581 86.6 550 85.1 519 84.9 488 83.0 457 81.5 426 78.9 673 88.6 642 88.3 611 87.7 580 86.5 549 84.9 518 84.9 487 83.1 456 81.3 425 78.8 672 88.5 641 88.2 610 87.7 579 86.3 548 84.9 517 84.9 486 83.1 455 81.3 424 78.8 671 88.6 640 88.2 609 87.7 578 86.2 547 84.8 516 84.8 485 83.3 454 81.3 423 78.7 670 88.6 639 88.2 608 87.6 577 86.1 546 85.0 515 84.8 484 83.4 453 81.3 422 78.6
表 4-9 樣本五退火後透光度 樣本五 透光率(％)：84.5
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 90.2 669 88.0 638 87.9 607 87.1 576 85.9 545 84.4 514 84.5 483 82.7 452 80.7 421 78.1 699 90.0 668 88.0 637 87.9 606 87.2 575 85.7 544 84.4 513 84.3 482 82.8 451 80.7 420 78.2 698 89.9 667 88.0 636 87.8 605 87.1 574 85.5 543 84.4 512 84.3 481 83.0 450 80.8 419 78.1 697 89.7 666 88.0 635 87.7 604 87.0 573 85.4 542 84.5 511 84.2 480 82.9 449 80.8 418 77.9 696 89.5 665 87.9 634 87.6 603 86.9 572 85.3 541 84.6 510 84.0 479 83.1 448 80.8 417 77.7 695 89.2 664 87.8 633 87.4 602 86.8 571 85.2 540 84.7 509 83.8 478 83.1 447 80.8 416 77.5 694 88.9 663 87.8 632 87.3 601 86.7 570 85.1 539 84.8 508 83.7 477 82.9 446 80.7 415 77.2 693 88.6 662 87.7 631 87.1 600 86.5 569 85.1 538 85.0 507 83.5 476 82.8 445 80.7 414 77.0 692 88.3 661 87.6 630 86.9 599 86.3 568 85.1 537 85.1 506 83.4 475 82.7 444 80.4 413 76.8 691 88.0 660 87.5 629 86.8 598 86.2 567 85.1 536 85.1 505 83.3 474 82.5 443 80.3 412 76.7 690 87.7 659 87.4 628 86.6 597 86.0 566 85.2 535 85.3 504 83.4 473 82.3 442 80.1 411 76.6 689 87.4 658 87.3 627 86.4 596 86.0 565 85.3 534 85.1 503 83.4 472 82.1 441 79.9 410 76.5 688 87.2 657 87.1 626 86.2 595 85.9 564 85.4 533 85.1 502 83.4 471 81.9 440 79.8 409 76.5 687 86.9 656 87.1 625 86.1 594 85.8 563 85.5 532 85.1 501 83.5 470 81.8 439 79.7 408 76.4 686 86.8 655 87.1 624 86.0 593 85.8 562 85.6 531 84.9 500 83.7 469 81.7 438 79.7 407 76.2 685 86.7 654 87.0 623 85.9 592 85.7 561 85.8 530 84.8 499 83.7 468 81.7 437 79.7 406 76.0 684 86.6 653 86.9 622 85.8 591 85.8 560 85.9 529 84.6 498 83.8 467 81.8 436 79.7 405 75.7 683 86.5 652 87.0 621 85.8 590 85.8 559 86.0 528 84.4 497 83.9 466 81.8 435 79.7 404 75.4 682 86.6 651 87.0 620 85.9 589 85.9 558 86.0 527 84.3 496 83.9 465 81.9 434 79.7 403 75.1 681 86.7 650 87.0 619 85.9 588 86.0 557 86.1 526 84.1 495 83.8 464 81.9 433 79.7 402 74.8 680 86.8 649 87.0 618 86.0 587 86.1 556 85.9 525 84.1 494 83.7 463 82.0 432 79.6 401 74.7 679 86.9 648 87.1 617 86.2 586 86.1 555 85.9 524 84.0 493 83.6 462 82.0 431 79.5 400 74.6 678 87.2 647 87.3 616 86.2 585 86.2 554 85.8 523 84.0 492 83.4 461 82.0 430 79.2 AVG 84.6 677 87.2 646 87.3 615 86.3 584 86.3 553 85.6 522 84.0 491 83.1 460 81.8 429 79.1
676 87.4 645 87.4 614 86.5 583 86.3 552 85.4 521 84.0 490 83.0 459 81.7 428 78.7 675 87.5 644 87.5 613 86.6 582 86.4 551 85.2 520 84.2 489 82.8 458 81.5 427 78.6 674 87.6 643 87.6 612 86.8 581 86.3 550 85.1 519 84.2 488 82.6 457 81.3 426 78.4 673 87.7 642 87.7 611 86.9 580 86.3 549 84.9 518 84.3 487 82.5 456 81.2 425 78.2 672 87.8 641 87.7 610 87.0 579 86.2 548 84.6 517 84.4 486 82.5 455 80.9 424 78.2 671 87.9 640 87.9 609 87.2 578 86.1 547 84.5 516 84.4 485 82.5 454 80.8 423 78.2 670 87.9 639 87.9 608 87.1 577 86.0 546 84.5 515 84.4 484 82.6 453 80.8 422 78.1
表 4-10 樣本六退火後透光度 樣本六 透光率(％)：85.4
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 90.9 669 89.0 638 88.8 607 88.2 576 86.6 545 85.1 514 85.3 483 83.6 452 81.4 421 78.9 699 90.7 668 89.0 637 88.6 606 88.1 575 86.4 544 85.2 513 85.2 482 83.8 451 81.6 420 79.0 698 90.4 667 89.0 636 88.5 605 88.1 574 86.3 543 85.2 512 85.1 481 83.9 450 81.6 419 78.8 697 90.2 666 88.9 635 88.5 604 87.9 573 86.1 542 85.3 511 84.9 480 83.9 449 81.7 418 78.6 696 89.9 665 88.9 634 88.3 603 87.8 572 86.0 541 85.5 510 84.8 479 84.0 448 81.8 417 78.4 695 89.7 664 88.8 633 88.1 602 87.6 571 86.0 540 85.7 509 84.6 478 84.0 447 81.7 416 78.0 694 89.3 663 88.7 632 87.9 601 87.4 570 85.8 539 85.8 508 84.3 477 83.7 446 81.5 415 77.8 693 89.0 662 88.6 631 87.8 600 87.2 569 85.9 538 86.0 507 84.3 476 83.6 445 81.4 414 77.6 692 88.8 661 88.5 630 87.6 599 87.1 568 86.0 537 86.1 506 84.2 475 83.4 444 81.2 413 77.4 691 88.4 660 88.3 629 87.3 598 86.8 567 85.9 536 86.1 505 84.1 474 83.1 443 81.0 412 77.3 690 88.1 659 88.3 628 87.2 597 86.7 566 86.0 535 86.1 504 84.1 473 82.8 442 80.7 411 77.2 689 87.9 658 88.2 627 87.1 596 86.6 565 86.2 534 86.1 503 84.2 472 82.7 441 80.5 410 77.3 688 87.7 657 88.0 626 86.8 595 86.4 564 86.3 533 86.0 502 84.2 471 82.5 440 80.4 409 77.3 687 87.5 656 88.0 625 86.8 594 86.4 563 86.5 532 85.8 501 84.3 470 82.4 439 80.4 408 77.1 686 87.4 655 87.9 624 86.7 593 86.4 562 86.6 531 85.7 500 84.5 469 82.4 438 80.3 407 76.9 685 87.3 654 87.8 623 86.6 592 86.4 561 86.7 530 85.5 499 84.6 468 82.5 437 80.4 406 76.7 684 87.3 653 87.8 622 86.6 591 86.5 560 86.8 529 85.3 498 84.6 467 82.6 436 80.5 405 76.4 683 87.3 652 87.9 621 86.7 590 86.5 559 86.9 528 85.1 497 84.7 466 82.6 435 80.5 404 76.0 682 87.4 651 87.8 620 86.7 589 86.7 558 86.9 527 84.9 496 84.7 465 82.8 434 80.6 403 75.7 681 87.5 650 87.9 619 86.8 588 86.8 557 86.9 526 84.8 495 84.6 464 82.9 433 80.5 402 75.4 680 87.6 649 87.9 618 86.9 587 86.8 556 86.7 525 84.6 494 84.4 463 82.9 432 80.4 401 75.3 679 87.8 648 88.0 617 87.0 586 87.0 555 86.6 524 84.7 493 84.2 462 83.0 431 80.2 400 75.0 678 88.0 647 88.1 616 87.2 585 87.1 554 86.5 523 84.7 492 84.1 461 82.9 430 79.9 AVG 85.4 677 88.1 646 88.2 615 87.3 584 87.2 553 86.2 522 84.7 491 83.8 460 82.6 429 79.6
676 88.4 645 88.3 614 87.5 583 87.2 552 86.0 521 84.8 490 83.6 459 82.4 428 79.4 675 88.6 644 88.4 613 87.7 582 87.3 551 85.9 520 85.0 489 83.5 458 82.2 427 79.1 674 88.6 643 88.5 612 87.8 581 87.1 550 85.6 519 85.1 488 83.3 457 81.9 426 79.0 673 88.7 642 88.6 611 88.0 580 87.1 549 85.4 518 85.2 487 83.2 456 81.7 425 78.9 672 88.9 641 88.7 610 88.2 579 87.1 548 85.3 517 85.3 486 83.3 455 81.5 424 78.8 671 88.9 640 88.7 609 88.1 578 86.9 547 85.1 516 85.3 485 83.3 454 81.4 423 78.9 670 88.9 639 88.7 608 88.2 577 86.8 546 85.0 515 85.3 484 83.5 453 81.4 422 79.0
表 4-11 樣本七退火後透光度 樣本七 透光率(％)：85.3
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 90.2 669 88.5 638 88.2 607 87.5 576 86.8 545 85.3 514 85.0 483 83.4 452 81.6 421 78.6 699 90.3 668 88.5 637 88.2 606 87.4 575 86.6 544 85.3 513 85.0 482 83.5 451 81.4 420 78.7 698 90.2 667 88.5 636 88.3 605 87.3 574 86.5 543 85.4 512 85.0 481 83.6 450 81.4 419 78.5 697 90.1 666 88.4 635 88.3 604 87.3 573 86.4 542 85.4 511 84.9 480 83.6 449 81.4 418 78.3 696 90.1 665 88.3 634 88.3 603 87.2 572 86.3 541 85.4 510 84.8 479 83.5 448 81.4 417 78.2 695 89.9 664 88.2 633 88.1 602 87.1 571 86.1 540 85.6 509 84.6 478 83.6 447 81.3 416 78.0 694 89.8 663 88.2 632 88.1 601 87.0 570 86.0 539 85.6 508 84.6 477 83.5 446 81.3 415 77.8 693 89.6 662 88.0 631 88.0 600 86.8 569 85.9 538 85.7 507 84.5 476 83.4 445 81.2 414 77.6 692 89.5 661 87.9 630 87.9 599 86.7 568 85.9 537 85.7 506 84.3 475 83.4 444 81.1 413 77.5 691 89.3 660 87.8 629 87.8 598 86.6 567 85.9 536 85.8 505 84.3 474 83.3 443 81.0 412 77.4 690 89.0 659 87.7 628 87.7 597 86.5 566 85.8 535 85.8 504 84.2 473 83.0 442 80.8 411 77.2 689 88.9 658 87.5 627 87.6 596 86.5 565 85.9 534 85.7 503 84.1 472 82.9 441 80.7 410 77.1 688 88.7 657 87.4 626 87.4 595 86.3 564 86.0 533 85.7 502 84.2 471 82.8 440 80.5 409 76.9 687 88.5 656 87.3 625 87.3 594 86.3 563 86.0 532 85.7 501 84.2 470 82.7 439 80.5 408 76.7 686 88.3 655 87.3 624 87.2 593 86.3 562 86.0 531 85.5 500 84.2 469 82.6 438 80.4 407 76.6 685 88.2 654 87.2 623 87.1 592 86.3 561 86.1 530 85.4 499 84.3 468 82.5 437 80.3 406 76.4 684 88.1 653 87.2 622 87.0 591 86.4 560 86.2 529 85.2 498 84.3 467 82.5 436 80.3 405 76.1 683 87.9 652 87.0 621 86.9 590 86.3 559 86.2 528 85.1 497 84.3 466 82.5 435 80.3 404 75.9 682 87.8 651 87.1 620 86.9 589 86.4 558 86.2 527 85.0 496 84.3 465 82.5 434 80.3 403 75.7 681 87.9 650 87.1 619 86.9 588 86.6 557 86.3 526 84.8 495 84.3 464 82.5 433 80.2 402 75.5 680 88.0 649 87.1 618 87.0 587 86.6 556 86.3 525 84.8 494 84.2 463 82.6 432 80.1 401 75.2 679 88.0 648 87.1 617 86.9 586 86.7 555 86.2 524 84.7 493 84.1 462 82.5 431 80.0 400 75.0 678 88.1 647 87.3 616 87.0 585 86.9 554 86.1 523 84.6 492 84.0 461 82.5 430 79.8 AVG 85.3 677 88.2 646 87.4 615 87.1 584 86.9 553 86.0 522 84.6 491 83.9 460 82.4 429 79.7
676 88.3 645 87.5 614 87.1 583 87.0 552 86.0 521 84.6 490 83.8 459 82.3 428 79.5 675 88.4 644 87.5 613 87.2 582 87.0 551 85.9 520 84.7 489 83.6 458 82.2 427 79.3 674 88.4 643 87.7 612 87.3 581 87.1 550 85.7 519 84.8 488 83.6 457 82.0 426 79.1 673 88.5 642 87.8 611 87.3 580 87.1 549 85.6 518 84.9 487 83.4 456 81.9 425 79.0 672 88.5 641 87.9 610 87.4 579 87.0 548 85.6 517 84.9 486 83.4 455 81.8 424 78.9 671 88.5 640 88.0 609 87.4 578 86.9 547 85.4 516 85.0 485 83.4 454 81.6 423 78.7 670 88.5 639 88.2 608 87.4 577 86.9 546 85.3 515 85.1 484 83.4 453 81.6 422 78.6
表 4-12 樣本八退火後透光度 樣本八 透光率(％)：85.5
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 91.2 669 88.8 638 88.7 607 87.8 576 87.2 545 85.5 514 85.5 483 83.5 452 81.4 421 78.7 699 91.2 668 88.9 637 88.9 606 87.8 575 87.0 544 85.4 513 85.6 482 83.6 451 81.4 420 78.9 698 91.1 667 88.8 636 88.8 605 87.8 574 86.9 543 85.4 512 85.5 481 83.7 450 81.5 419 78.8 697 91.0 666 88.8 635 88.8 604 87.7 573 86.7 542 85.5 511 85.4 480 83.8 449 81.6 418 78.6 696 90.9 665 88.8 634 88.9 603 87.6 572 86.4 541 85.5 510 85.3 479 84.0 448 81.6 417 78.5 695 90.7 664 88.6 633 88.8 602 87.5 571 86.3 540 85.7 509 85.0 478 84.0 447 81.7 416 78.2 694 90.5 663 88.5 632 88.7 601 87.4 570 86.1 539 85.8 508 84.9 477 83.9 446 81.7 415 77.9 693 90.3 662 88.5 631 88.5 600 87.2 569 85.9 538 85.9 507 84.7 476 83.9 445 81.5 414 77.6 692 89.9 661 88.3 630 88.4 599 87.1 568 85.8 537 86.0 506 84.5 475 83.7 444 81.4 413 77.4 691 89.7 660 88.2 629 88.3 598 87.0 567 85.8 536 86.1 505 84.4 474 83.5 443 81.3 412 77.2 690 89.4 659 88.0 628 88.0 597 86.8 566 85.8 535 86.2 504 84.2 473 83.3 442 81.0 411 77.1 689 89.1 658 87.9 627 87.9 596 86.6 565 85.8 534 86.2 503 84.1 472 83.1 441 80.8 410 77.0 688 88.8 657 87.7 626 87.8 595 86.6 564 85.9 533 86.2 502 84.1 471 82.9 440 80.6 409 77.0 687 88.7 656 87.6 625 87.5 594 86.4 563 86.0 532 86.1 501 84.2 470 82.6 439 80.4 408 77.0 686 88.4 655 87.5 624 87.3 593 86.4 562 86.1 531 85.9 500 84.2 469 82.5 438 80.4 407 76.8 685 88.2 654 87.4 623 87.2 592 86.4 561 86.2 530 85.7 499 84.3 468 82.5 437 80.3 406 76.6 684 88.0 653 87.3 622 87.0 591 86.5 560 86.3 529 85.5 498 84.4 467 82.5 436 80.3 405 76.4 683 87.9 652 87.3 621 87.0 590 86.5 559 86.6 528 85.4 497 84.6 466 82.5 435 80.4 404 76.1 682 87.8 651 87.3 620 86.9 589 86.6 558 86.6 527 85.1 496 84.6 465 82.7 434 80.4 403 75.7 681 87.8 650 87.3 619 86.9 588 86.8 557 86.7 526 84.9 495 84.6 464 82.8 433 80.5 402 75.4 680 87.9 649 87.3 618 86.9 587 86.9 556 86.8 525 84.8 494 84.6 463 82.9 432 80.4 401 75.2 679 88.0 648 87.4 617 86.9 586 87.0 555 86.7 524 84.6 493 84.6 462 82.9 431 80.3 400 75.0 678 88.0 647 87.5 616 87.0 585 87.2 554 86.7 523 84.6 492 84.4 461 82.9 430 80.2 AVG 85.5 677 88.1 646 87.6 615 87.1 584 87.4 553 86.6 522 84.7 491 84.3 460 82.9 429 79.9
676 88.3 645 87.7 614 87.1 583 87.4 552 86.4 521 84.6 490 84.1 459 82.7 428 79.6 675 88.4 644 87.9 613 87.3 582 87.5 551 86.3 520 84.8 489 83.9 458 82.6 427 79.4 674 88.4 643 88.1 612 87.4 581 87.6 550 86.2 519 84.9 488 83.7 457 82.4 426 79.1 673 88.6 642 88.2 611 87.5 580 87.6 549 86.0 518 85.1 487 83.5 456 82.0 425 78.9 672 88.6 641 88.4 610 87.6 579 87.5 548 85.8 517 85.2 486 83.5 455 81.9 424 78.8 671 88.7 640 88.5 609 87.7 578 87.5 547 85.7 516 85.3 485 83.4 454 81.6 423 78.7 670 88.7 639 88.6 608 87.8 577 87.4 546 85.5 515 85.5 484 83.4 453 81.5 422 78.7
表 4-13 樣本九退火後透光度 樣本九 透光率(％)：86
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 91.3 669 89.1 638 89.2 607 88.1 576 87.1 545 86.1 514 85.8 483 84.3 452 82.2 421 79.3 699 91.1 668 89.0 637 89.2 606 88.0 575 86.9 544 86.2 513 85.8 482 84.4 451 82.3 420 79.3 698 91.0 667 88.9 636 89.1 605 87.9 574 86.8 543 86.2 512 85.6 481 84.5 450 82.2 419 79.1 697 90.9 666 88.9 635 89.0 604 87.8 573 86.7 542 86.4 511 85.4 480 84.4 449 82.2 418 78.9 696 90.7 665 88.7 634 88.9 603 87.6 572 86.5 541 86.4 510 85.4 479 84.3 448 82.2 417 78.7 695 90.4 664 88.6 633 88.7 602 87.5 571 86.5 540 86.5 509 85.2 478 84.2 447 82.0 416 78.5 694 90.3 663 88.5 632 88.6 601 87.5 570 86.5 539 86.6 508 85.0 477 84.1 446 81.9 415 78.3 693 90.0 662 88.4 631 88.5 600 87.2 569 86.4 538 86.6 507 84.9 476 83.9 445 81.8 414 78.3 692 89.8 661 88.2 630 88.3 599 87.2 568 86.4 537 86.6 506 84.9 475 83.7 444 81.7 413 78.1 691 89.6 660 88.2 629 88.1 598 87.1 567 86.5 536 86.5 505 84.8 474 83.6 443 81.5 412 78.0 690 89.4 659 88.1 628 87.9 597 87.0 566 86.6 535 86.5 504 84.8 473 83.5 442 81.3 411 77.9 689 89.3 658 88.0 627 87.8 596 87.0 565 86.7 534 86.4 503 84.9 472 83.3 441 81.3 410 77.8 688 89.0 657 87.9 626 87.8 595 87.0 564 86.7 533 86.2 502 84.9 471 83.3 440 81.2 409 77.6 687 88.8 656 87.9 625 87.6 594 87.1 563 86.8 532 86.1 501 85.0 470 83.3 439 81.1 408 77.3 686 88.7 655 87.8 624 87.5 593 87.2 562 87.0 531 85.9 500 85.0 469 83.3 438 81.1 407 77.1 685 88.6 654 87.8 623 87.6 592 87.2 561 87.0 530 85.7 499 85.1 468 83.3 437 81.1 406 77.0 684 88.5 653 87.9 622 87.5 591 87.4 560 87.1 529 85.6 498 85.1 467 83.4 436 81.1 405 76.7 683 88.4 652 87.9 621 87.5 590 87.5 559 87.2 528 85.5 497 85.0 466 83.4 435 81.0 404 76.4 682 88.5 651 88.0 620 87.5 589 87.5 558 87.0 527 85.3 496 85.0 465 83.5 434 80.9 403 76.2 681 88.5 650 88.1 619 87.6 588 87.7 557 87.0 526 85.3 495 85.0 464 83.4 433 80.9 402 76.0 680 88.6 649 88.2 618 87.7 587 87.8 556 87.0 525 85.4 494 84.8 463 83.4 432 80.8 401 75.8 679 88.7 648 88.4 617 87.7 586 87.9 555 86.8 524 85.3 493 84.6 462 83.3 431 80.5 400 75.6 678 88.9 647 88.5 616 87.8 585 87.9 554 86.7 523 85.4 492 84.5 461 83.2 430 80.4 AVG 86 677 88.9 646 88.6 615 87.9 584 88.0 553 86.6 522 85.5 491 84.4 460 83.0 429 80.2 676 89.0 645 88.8 614 88.0 583 88.0 552 86.5 521 85.6 490 84.3 459 82.9 428 80.0 675 89.1 644 88.9 613 88.1 582 87.9 551 86.3 520 85.8 489 84.2 458 82.7 427 79.9 674 89.2 643 89.0 612 88.2 581 87.8 550 86.3 519 85.9 488 84.2 457 82.5 426 79.8 673 89.2 642 89.1 611 88.1 580 87.8 549 86.2 518 85.9 487 84.2 456 82.4 425 79.7 672 89.1 641 89.2 610 88.2 579 87.6 548 86.1 517 86.0 486 84.2 455 82.3 424 79.6 671 89.2 640 89.3 609 88.2 578 87.4 547 86.0 516 86.0 485 84.3 454 82.3 423 79.4 670 89.2 639 89.2 608 88.1 577 87.3 546 86.1 515 85.9 484 84.3 453 82.2 422 79.4
表 4-14 樣本十退火後透光度 樣本十 透光率(％)：85.1
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 89.8 669 88.3 638 88.4 607 87.3 576 86.1 545 85.5 514 85.0 483 83.8 452 81.4 421 78.1 699 89.6 668 88.4 637 88.2 606 87.1 575 85.8 544 85.7 513 84.8 482 83.7 451 81.5 420 78.1 698 89.4 667 88.2 636 88.0 605 87.0 574 85.8 543 85.7 512 84.6 481 83.6 450 81.4 419 77.9 697 89.2 666 88.1 635 87.9 604 86.9 573 85.7 542 85.8 511 84.5 480 83.5 449 81.3 418 77.6 696 89.0 665 88.0 634 87.8 603 86.8 572 85.7 541 85.8 510 84.3 479 83.4 448 81.2 417 77.4 695 88.8 664 87.9 633 87.6 602 86.7 571 85.7 540 85.8 509 84.2 478 83.2 447 81.0 416 77.2 694 88.6 663 87.9 632 87.4 601 86.6 570 85.7 539 85.8 508 84.2 477 83.0 446 80.8 415 77.1 693 88.4 662 87.7 631 87.2 600 86.5 569 85.8 538 85.8 507 84.1 476 82.8 445 80.7 414 77.0 692 88.1 661 87.7 630 87.1 599 86.5 568 85.9 537 85.7 506 84.1 475 82.8 444 80.5 413 76.9 691 88.0 660 87.6 629 87.0 598 86.4 567 86.0 536 85.6 505 84.2 474 82.6 443 80.4 412 76.9 690 87.9 659 87.5 628 86.8 597 86.4 566 86.1 535 85.4 504 84.2 473 82.5 442 80.3 411 76.7 689 87.7 658 87.5 627 86.8 596 86.5 565 86.2 534 85.3 503 84.2 472 82.5 441 80.3 410 76.5 688 87.6 657 87.5 626 86.7 595 86.6 564 86.3 533 85.2 502 84.3 471 82.5 440 80.2 409 76.3 687 87.6 656 87.5 625 86.7 594 86.6 563 86.4 532 85.0 501 84.3 470 82.6 439 80.2 408 76.0 686 87.6 655 87.6 624 86.6 593 86.7 562 86.4 531 84.9 500 84.4 469 82.7 438 80.2 407 75.8 685 87.5 654 87.6 623 86.7 592 86.9 561 86.5 530 84.8 499 84.3 468 82.7 437 80.2 406 75.4 684 87.5 653 87.7 622 86.8 591 86.9 560 86.4 529 84.7 498 84.3 467 82.7 436 80.1 405 75.2 683 87.7 652 87.8 621 86.8 590 87.0 559 86.4 528 84.7 497 84.3 466 82.7 435 80.0 404 75.0 682 87.8 651 87.8 620 86.9 589 87.1 558 86.3 527 84.6 496 84.1 465 82.7 434 79.9 403 74.8 681 87.8 650 88.0 619 87.0 588 87.2 557 86.2 526 84.7 495 84.0 464 82.7 433 79.7 402 74.6 680 88.0 649 88.2 618 87.1 587 87.2 556 86.1 525 84.8 494 83.9 463 82.5 432 79.5 401 74.4 679 88.2 648 88.2 617 87.2 586 87.2 555 86.0 524 84.8 493 83.8 462 82.4 431 79.3 400 74.3 678 88.3 647 88.3 616 87.3 585 87.1 554 85.8 523 84.9 492 83.6 461 82.2 430 79.2 AVG 85.1 677 88.4 646 88.5 615 87.4 584 87.2 553 85.7 522 85.1 491 83.6 460 82.0 429 79.0
676 88.5 645 88.5 614 87.4 583 87.0 552 85.6 521 85.2 490 83.5 459 81.8 428 78.9 675 88.6 644 88.6 613 87.4 582 86.9 551 85.5 520 85.3 489 83.5 458 81.6 427 78.8 674 88.6 643 88.6 612 87.5 581 86.8 550 85.4 519 85.3 488 83.5 457 81.6 426 78.8 673 88.5 642 88.6 611 87.5 580 86.6 549 85.4 518 85.3 487 83.6 456 81.5 425 78.6 672 88.5 641 88.7 610 87.4 579 86.5 548 85.4 517 85.3 486 83.6 455 81.4 424 78.5 671 88.5 640 88.5 609 87.4 578 86.2 547 85.4 516 85.2 485 83.6 454 81.4 423 78.4 670 88.4 639 88.4 608 87.3 577 86.1 546 85.5 515 85.1 484 83.7 453 81.5 422 78.3
表 4-15 樣本十一退火後透光度 樣本十一 透光率(％)：85.2
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 89.0 669 87.9 638 87.8 607 86.8 576 85.9 545 86.3 514 84.4 483 83.6 452 81.5 421 77.5 699 88.8 668 87.8 637 87.5 606 86.7 575 85.9 544 86.2 513 84.3 482 83.3 451 81.2 420 77.5 698 88.8 667 87.7 636 87.4 605 86.6 574 86.1 543 86.2 512 84.3 481 83.1 450 81.1 419 77.4 697 88.7 666 87.7 635 87.3 604 86.6 573 86.2 542 86.1 511 84.3 480 82.9 449 80.8 418 77.3 696 88.5 665 87.6 634 87.1 603 86.7 572 86.3 541 86.0 510 84.3 479 82.8 448 80.7 417 77.3 695 88.5 664 87.6 633 87.0 602 86.7 571 86.5 540 85.7 509 84.4 478 82.7 447 80.5 416 77.1 694 88.5 663 87.7 632 86.9 601 86.8 570 86.5 539 85.6 508 84.5 477 82.6 446 80.5 415 77.1 693 88.3 662 87.7 631 87.0 600 86.9 569 86.7 538 85.4 507 84.6 476 82.6 445 80.5 414 77.0 692 88.3 661 87.8 630 87.0 599 86.9 568 86.7 537 85.2 506 84.7 475 82.7 444 80.4 413 76.7 691 88.3 660 87.9 629 87.0 598 87.1 567 86.8 536 85.0 505 84.7 474 82.8 443 80.4 412 76.5 690 88.2 659 88.0 628 87.1 597 87.3 566 86.8 535 84.9 504 84.7 473 82.9 442 80.5 411 76.2 689 88.2 658 88.1 627 87.2 596 87.4 565 86.8 534 84.8 503 84.7 472 83.0 441 80.5 410 75.9 688 88.2 657 88.2 626 87.2 595 87.5 564 86.7 533 84.8 502 84.6 471 83.1 440 80.4 409 75.6 687 88.3 656 88.4 625 87.3 594 87.5 563 86.6 532 84.8 501 84.4 470 83.1 439 80.3 408 75.4 686 88.3 655 88.5 624 87.4 593 87.6 562 86.5 531 84.8 500 84.3 469 83.0 438 80.1 407 75.2 685 88.3 654 88.6 623 87.6 592 87.7 561 86.3 530 85.0 499 84.1 468 83.0 437 79.9 406 75.1 684 88.4 653 88.8 622 87.7 591 87.6 560 86.2 529 85.0 498 83.9 467 82.8 436 79.7 405 74.9 683 88.5 652 89.0 621 87.7 590 87.6 559 86.0 528 85.2 497 83.9 466 82.5 435 79.5 404 74.8 682 88.5 651 88.9 620 87.8 589 87.6 558 85.9 527 85.3 496 83.6 465 82.3 434 79.3 403 74.7 681 88.6 650 89.1 619 87.9 588 87.4 557 85.8 526 85.4 495 83.6 464 82.1 433 79.2 402 74.4 680 88.7 649 89.1 618 87.8 587 87.2 556 85.6 525 85.6 494 83.6 463 81.9 432 79.1 401 74.2 679 88.7 648 89.1 617 87.8 586 87.0 555 85.6 524 85.5 493 83.7 462 81.8 431 79.2 400 73.9 678 88.7 647 89.1 616 87.8 585 86.9 554 85.6 523 85.6 492 83.7 461 81.7 430 79.1 AVG 85.2 677 88.7 646 89.0 615 87.7 584 86.7 553 85.6 522 85.6 491 83.8 460 81.6 429 79.1
676 88.6 645 88.9 614 87.6 583 86.4 552 85.7 521 85.4 490 83.9 459 81.7 428 79.1 675 88.6 644 88.8 613 87.5 582 86.2 551 85.7 520 85.4 489 84.0 458 81.7 427 78.9 674 88.5 643 88.7 612 87.4 581 86.1 550 85.9 519 85.3 488 84.0 457 81.8 426 78.7 673 88.3 642 88.5 611 87.2 580 86.0 549 86.0 518 85.0 487 84.0 456 81.8 425 78.5 672 88.2 641 88.4 610 87.1 579 85.9 548 86.0 517 84.8 486 84.1 455 81.8 424 78.2 671 88.1 640 88.1 609 87.0 578 85.8 547 86.1 516 84.7 485 83.9 454 81.7 423 78.0 670 88.0 639 87.9 608 86.9 577 85.8 546 86.2 515 84.5 484 83.7 453 81.7 422 77.7
表 4-16 樣本十二退火後透光度 樣本十二 透光率(％)：85.8
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 89.1 669 88.9 638 88.5 607 87.8 576 86.4 545 86.5 514 85.2 483 84.4 452 82.4 421 78.7 699 88.9 668 88.8 637 88.3 606 87.6 575 86.3 544 86.6 513 85.0 482 84.3 451 82.3 420 78.7 698 88.7 667 88.7 636 88.1 605 87.5 574 86.4 543 86.6 512 85.0 481 84.2 450 82.2 419 78.5 697 88.5 666 88.6 635 87.9 604 87.4 573 86.5 542 86.7 511 84.8 480 83.9 449 82.0 418 78.3 696 88.3 665 88.5 634 87.6 603 87.3 572 86.6 541 86.6 510 84.8 479 83.8 448 81.8 417 78.2 695 88.3 664 88.4 633 87.5 602 87.2 571 86.7 540 86.5 509 84.9 478 83.7 447 81.7 416 78.1 694 88.2 663 88.4 632 87.5 601 87.3 570 86.9 539 86.5 508 84.8 477 83.5 446 81.4 415 78.0 693 88.0 662 88.3 631 87.3 600 87.2 569 86.9 538 86.3 507 84.9 476 83.4 445 81.3 414 78.0 692 87.9 661 88.3 630 87.2 599 87.2 568 87.0 537 86.1 506 85.1 475 83.5 444 81.2 413 77.8 691 87.9 660 88.2 629 87.3 598 87.4 567 87.3 536 86.0 505 85.1 474 83.4 443 81.2 412 77.7 690 87.8 659 88.3 628 87.2 597 87.4 566 87.3 535 85.8 504 85.2 473 83.5 442 81.2 411 77.5 689 87.9 658 88.4 627 87.2 596 87.5 565 87.4 534 85.7 503 85.3 472 83.6 441 81.2 410 77.2 688 87.9 657 88.4 626 87.3 595 87.6 564 87.4 533 85.6 502 85.3 471 83.7 440 81.3 409 77.0 687 88.0 656 88.5 625 87.4 594 87.7 563 87.4 532 85.5 501 85.3 470 83.7 439 81.2 408 76.8 686 88.1 655 88.6 624 87.5 593 87.8 562 87.4 531 85.4 500 85.2 469 83.7 438 81.1 407 76.4 685 88.1 654 88.7 623 87.6 592 87.9 561 87.2 530 85.5 499 85.2 468 83.7 437 81.1 406 76.2 684 88.3 653 88.8 622 87.8 591 88.0 560 87.2 529 85.5 498 85.0 467 83.7 436 80.9 405 76.1 683 88.5 652 89.0 621 87.9 590 88.0 559 87.0 528 85.6 497 84.8 466 83.5 435 80.7 404 75.9 682 88.6 651 89.0 620 88.0 589 88.0 558 86.8 527 85.7 496 84.7 465 83.4 434 80.5 403 75.8 681 88.8 650 89.2 619 88.2 588 88.0 557 86.7 526 85.8 495 84.6 464 83.2 433 80.4 402 75.6 680 89.0 649 89.3 618 88.3 587 88.0 556 86.6 525 85.9 494 84.4 463 82.9 432 80.1 401 75.5 679 89.1 648 89.3 617 88.3 586 87.7 555 86.4 524 86.0 493 84.3 462 82.7 431 80.0 400 75.4 678 89.2 647 89.3 616 88.4 585 87.7 554 86.3 523 86.1 492 84.3 461 82.6 430 80.0 AVG 85.8 677 89.4 646 89.4 615 88.5 584 87.5 553 86.2 522 86.2 491 84.3 460 82.4 429 79.9
676 89.4 645 89.4 614 88.4 583 87.3 552 86.1 521 86.1 490 84.3 459 82.4 428 79.8 675 89.3 644 89.3 613 88.3 582 87.1 551 86.1 520 86.2 489 84.4 458 82.4 427 79.8 674 89.3 643 89.2 612 88.4 581 87.0 550 86.2 519 86.1 488 84.5 457 82.4 426 79.7 673 89.3 642 89.2 611 88.3 580 86.8 549 86.2 518 86.0 487 84.5 456 82.4 425 79.6 672 89.2 641 89.0 610 88.1 579 86.6 548 86.2 517 85.8 486 84.6 455 82.4 424 79.4 671 89.1 640 88.8 609 88.0 578 86.5 547 86.4 516 85.6 485 84.5 454 82.5 423 79.2 670 89.0 639 88.7 608 87.9 577 86.4 546 86.5 515 85.4 484 84.5 453 82.5 422 79.0
表 4-17 樣本 0 退火後透光度 樣本 0 透光率(％)：83.9
nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T nm %T 700 88.2 669 86.9 638 86.7 607 85.4 576 84.7 545 84.7 514 83.1 483 82.1 452 80.2 421 76.8 699 88.1 668 86.8 637 86.5 606 85.4 575 84.7 544 84.7 513 83.0 482 82.0 451 80.1 420 76.8 698 88.3 667 86.6 636 86.5 605 85.2 574 84.7 543 84.7 512 82.8 481 81.8 450 79.9 419 76.6 697 88.3 666 86.4 635 86.4 604 85.1 573 84.7 542 84.6 511 82.8 480 81.6 449 79.8 418 76.5 696 88.3 665 86.3 634 86.3 603 85.1 572 84.8 541 84.7 510 82.7 479 81.4 448 79.6 417 76.4 695 88.4 664 86.2 633 86.2 602 85.1 571 84.9 540 84.5 509 82.8 478 81.4 447 79.4 416 76.3 694 88.5 663 86.1 632 86.1 601 85.1 570 84.9 539 84.3 508 82.9 477 81.2 446 79.2 415 76.3 693 88.4 662 86.0 631 86.1 600 85.1 569 85.0 538 84.2 507 82.9 476 81.1 445 79.2 414 76.3 692 88.5 661 86.0 630 86.0 599 85.2 568 85.1 537 84.0 506 82.9 475 81.2 444 79.1 413 76.1 691 88.5 660 86.0 629 86.1 598 85.3 567 85.1 536 83.8 505 83.0 474 81.2 443 79.2 412 75.9 690 88.5 659 86.0 628 86.1 597 85.3 566 85.1 535 83.6 504 83.0 473 81.3 442 79.1 411 75.7 689 88.5 658 86.1 627 86.1 596 85.5 565 85.2 534 83.5 503 83.1 472 81.4 441 79.1 410 75.5 688 88.5 657 86.2 626 86.2 595 85.7 564 85.2 533 83.4 502 83.0 471 81.4 440 79.2 409 75.2 687 88.5 656 86.2 625 86.3 594 85.8 563 85.1 532 83.3 501 82.9 470 81.5 439 79.1 408 75.0 686 88.5 655 86.3 624 86.3 593 85.9 562 85.0 531 83.3 500 82.8 469 81.4 438 79.0 407 74.8 685 88.4 654 86.4 623 86.4 592 86.0 561 84.9 530 83.3 499 82.6 468 81.4 437 78.9 406 74.6 684 88.4 653 86.6 622 86.5 591 86.1 560 84.8 529 83.2 498 82.5 467 81.4 436 78.7 405 74.4 683 88.4 652 86.6 621 86.5 590 86.2 559 84.6 528 83.4 497 82.5 466 81.2 435 78.6 404 74.3 682 88.3 651 86.8 620 86.6 589 86.1 558 84.5 527 83.5 496 82.3 465 81.0 434 78.3 403 74.3 681 88.3 650 87.0 619 86.6 588 86.0 557 84.4 526 83.6 495 82.1 464 80.8 433 78.2 402 74.0 680 88.2 649 87.0 618 86.6 587 86.1 556 84.2 525 83.7 494 82.1 463 80.7 432 78.1 401 73.8 679 88.2 648 87.1 617 86.7 586 85.9 555 84.2 524 83.8 493 82.1 462 80.5 431 78.0 400 73.7 678 88.2 647 87.2 616 86.6 585 85.8 554 84.1 523 83.8 492 82.1 461 80.3 430 77.9 AVG 83.9 677 88.1 646 87.2 615 86.5 584 85.7 553 84.1 522 83.9 491 82.1 460 80.2 429 77.9
676 88.1 645 87.2 614 86.4 583 85.5 552 84.2 521 83.8 490 82.2 459 80.2 428 77.9 675 88.0 644 87.2 613 86.4 582 85.3 551 84.1 520 83.9 489 82.3 458 80.2 427 77.8 674 87.8 643 87.2 612 86.2 581 85.2 550 84.2 519 83.8 488 82.3 457 80.2 426 77.7 673 87.6 642 87.2 611 86.1 580 85.0 549 84.3 518 83.6 487 82.3 456 80.3 425 77.6 672 87.5 641 87.0 610 85.9 579 84.9 548 84.4 517 83.5 486 82.4 455 80.3 424 77.5 671 87.3 640 86.9 609 85.8 578 84.8 547 84.5 516 83.4 485 82.3 454 80.3 423 77.2 670 87.1 639 86.9 608 85.5 577 84.7 546 84.6 515 83.2 484 82.2 453 80.2 422 77.0
退火後的透光率平均值折線圖。從圖中可以知道在還沒有退火前的試片樣本 0，
其平均透光度是比較低的，在退火之後，在於透光率方面都有增進，樣本九是最好的，
再來是樣本十二。
圖 4-5 基板退火後透光率平均值
由以下 12 個樣本的透光率圖，明顯看出，退火後的樣本透光率皆有提昇，在可 見光範圍內，ITO 較佳的穿透波段是 600nm 至 700nm。
圖4-6 樣本0退火後透光率
圖4-7 樣本1退火後透光率
圖4-8 樣本2退火後透光率
圖4-9 樣本3退火後透光率
圖4-10 樣本4退火後透光率
圖4-11 樣本5退火後透光率
圖4-12 樣本6退火後透光率
圖4-13 樣本7退火後透光率
圖4-14 樣本8退火後透光率
圖4-15 樣本9退火後透光率
圖4-16 樣本10退火後透光率
圖4-17 樣本11退火後透光率
圖4-18 樣本12退火後透光率
4.2 4.2
4.2 4.2 ITO 透明導電膜退火 透明導電膜退火 透明導電膜退火 透明導電膜退火
使用的透明導電膜是卓韋光電公司生產的ITO PET塑膠基板，其阻值300～600之 間，為了再降低阻值使用低溫退火，退火實驗分為三次的退火與量測。
4.2.1 4.2.1 4.2.1
4.2.1 第一次 第一次 第一次 第一次 ITO 薄膜退火 薄膜退火 薄膜退火 薄膜退火
裁剪出12個樣本，再使用KEITHLEY 4200量測阻值如下表4-18。
表 4-18 1st 退火前試片阻值
樣本 1 2 3 4 5 6
片電阻 Rs (Ω-cm,
Ω/□)
380.3119 370.434 394.5147 343.1520 369.3125 365.6855
樣本 7 8 9 10 11 12
片電阻 Rs (Ω-cm,
Ω/□)
369.466 345.2099 379.0924 366.002 354.1697 381.3816
第一次退火後的阻值如下表。
表 4-19 1st 退火後試片阻值(Ω-cm)
溫度(oC) 退火時間
（min）
80 100 120 140
60
樣 本 1
328.6738 樣 本 4
333.2677 樣 本 7
318.8035 樣 本 10
290.8784
90
樣 本 2
341.1739 樣 本 5
318.3594 樣 本 8
309.1907 樣 本 11
294.8969
120
樣 本 3
315.8446 樣 本 6
323.4932 樣 本 9
302.035 樣 本 12
311.7954
時間固定於60分鐘，在不同的退火溫度下的阻值折線圖如圖4-19，即樣本1，4，
7，10之數據。
圖4-19 1st以60分鐘為退火時間在各個溫度下的退火阻值
時間固定於90分鐘，在不同的退火溫度下的阻值折線圖如圖4-20，即樣本2，5，
8，11之數據。
圖4-20 1st以90分鐘為退火時間在各個溫度下的退火阻值
時間固定於 120 分鐘，在不同的退火溫度下的阻值折線圖如圖 4-21，即樣本 3，
6，9，12 之數據。
圖4-21 1st以120分鐘為退火時間在各個溫度下的退火阻值
第一次退火後的差值與減阻百分比如下表。
表 4-20 1st 退火後的差值與減阻百分比 樣本
差值 樣本 1 樣本 2 樣本 3 樣本 4 樣本 5 樣本 6 百分比(%)
13.577 7.898 19.940 2.88 13.788 11.5378
差值
(Ω-cm) 51.6381 29.2601 78.6701 9.8843 50.9531 42.1923
樣本
差值 樣本 7 樣本 8 樣本 9 樣本 10 樣本 11 樣本 12 百分比(%)
13.712 10.433 20.326 20.525 16.735 18.24
差值
(Ω-cm) 50.6625 36.0192 77.0574 75.1236 59.2728 69.5862
第一次退火後，減阻百分比直方圖 4-22。
圖4-22 1st退火後減阻百分比直方圖
4.2.2 4.2.2 4.2.2
4.2.2 第二次 第二次 第二次 第二次 ITO 薄膜退火 薄膜退火 薄膜退火 薄膜退火
使用KEITHLEY 4200量測阻值，如下表。
表 4-21 2nd 退火前的試片阻值