Zerodur®
Zerodur®
Zerodur®
Zerodur®
5.1 Zerodur
®Zerodur®
76
5-1
0.1 m/step
(Critical contact) 5-2
5-1 5-2
5.1.1
Zerodur®
(Discontinuous chips)
5-1
(Dry air) (Oil flushing)
(Oil mist)
77
5-3(a)(b)
5-3(c)(d)
5-3(e)(f)
5-1
Parameter Condition Workpiece Zerodur® Cutting tool Two flutes Back rake angle( b) -70°
Spindle speed 22000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 9 m
Lubricant Dry, Oil flushing, Oil mist
(a) (b)
5-3 Zerodur®
78
(c) (d)
(e) (f)
5-3 Zerodur® ( )
5.1.2
3D
5-2
5-4
5-5(a)(b)
79
5-5(c)(d) Zerodur®
5-2
Parameter Condition Workpiece Zerodur®
Cutting tool Two flutes, Four flutes Back rake angle( b) -70°
Spindle speed 22,000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 9 m Lubricant Oil mist
(a) -70 (b) -70
5-4 ( 4-19)
80
(a) (b)
(c) (d)
5-5 Zerodur®
5.1.3
Zerodur®
5-3
-50°, -60°,
-70° 5-6
5-7 Zerodur®
81
-70°
5-7(a)(b) -50° -60°
-50° -50°
5-7(c)~(f) -70°
5-3
Parameter Condition Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -50°, -60° ,-70°
Spindle speed 22,000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 9 m Lubricant Oil mist
5-6 -50°, -60°, -70°
82
(a) -70° (b) -70°
(c) -60° (d) -60°
(e) ( -50°) (f) ( -50°)
5-7 Zerodur®
83
5.1.4
4,000(V=
12.56 m/min), 10,000(V= 31.4 m/min), 16,000(V= 50.24 m/min), 22,000(V=
69.08 m/min), 28,000(V= 87.92 m/min) rpm Zerodur®
5-4 5-4
Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 4,000, 1,0000, 16,000, 22,000, 28,000 rpm Feed-rate(F) 20 mm/min
Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 9 m
Lubricant Oil mist
5-8(a)~(j)
(0.006 mm/min)
5-8(a)(c) 5-9
Ra0.01 µm 5-9(a)
3D
0.1 µm 5-9(b)
9 m
84
(a) (4,000 rpm) (b) (4,000 rpm)
(c) (10,000 rpm) (d) (10,000 rpm)
(e) (16,000 rpm) (f) (16,000 rpm)
5-8
85
(g) (22,000 rpm) (h) (22,000 rpm)
(i) (28,000 rpm) (j) (28,000 rpm)
5-8 ( )
(a) (b)
5-9
86
5.1.5
Zerodur®
Zerodur®
100, 300, 500, 700, 900 nm/stroke 5-5
5-5
Parameter Condition Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 22,000 rpm Feed-rate(F) 20 mm/min
Depth of cut(Dc) 100, 300, 500, 700, 900 nm/stroke Total depth(Dt) 9 m
Lubricant Oil mist
5-10(a)~(j)
3D
Ra0.01 m 5-11(a)
5-11(b) 100 nm/stroke (Dt)
900 nm/stroke
100 nm/stroke (646 nm) 900 nm/stroke
(86 nm)
87
(a) ( 100 nm) (b) ( 100 nm)
(c) ( 300 nm) (d) ( 300 nm)
(e) ( 500 nm) (f) ( 500 nm)
5-10
88
(g) ( 700 nm) (h) ( 700 nm)
(i) ( 900 nm) (j) ( 900 nm)
5-10 ( )
(a) (b)
5-11
89
90
(a) (b)
5-12 [91]
5.2 Zerodur
®5.1
Zerodur®
91
5.2.1
5-6
4,000(V=
12.56 m/min), 10,000(V= 31.4 m/min), 16,000(V= 50.24 m/min), 22,000(V=
69.08 m/min), 28,000(V= 87.92 m/min), 34,000(V= 106.76 m/min), 40,000 rpm(V= 125.6 m/min)
5-6
Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed
4,000, 1,0000, 16,000, 22,000, 28,000, 34,000, 40,000 rpm Feed-rate(F) 20 mm/min
Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 6 m
Lubricant Oil mist
5-13(a)~(n)
3D 16,000 rpm
5-13(a)~(f)
92
5-14(a)~(f) 22,000 rpm
5-14(g) 5-14(h)
(Ra0.478 m) 28,000 rpm
(Ra0.453 m)
5-14(i)(j) 34,000 rpm
(Ra0.539 m) 5-14(k)(l)
40,000 rpm
(Ra0.440 m) 5-14(m)(n)
3D
5-15(a)
28,000 rpm 5-15(b)
(a) (4,000 rpm) (b) (4,000 rpm)
5-13
93
(c) (10,000 rpm) (d) (10,000 rpm)
(e) (16,000 rpm) (f) (16,000 rpm)
(g) (22,000 rpm) (h) (22,000 rpm)
5-13 ( )
94
(i) (28,000 rpm) (j) (28,000 rpm)
(k) (34,000 rpm) (l) (34,000 rpm)
(m) (40,000 rpm) (n) (40,000 rpm)
5-13 ( )
95
(a) (4,000 rpm) (b) (4,000 rpm)
(c) (10,000 rpm) (d) (10,000 rpm)
(e) (16,000 rpm) (f) (16,000 rpm)
5-14
96
(g) (22,000 rpm) (h) (22,000 rpm)
(i) (28,000 rpm) (j) (28,000 rpm)
(k) (34,000 rpm) (l) (34,000 rpm)
5-14 ( )
97
(m) (40,000 rpm) (n) (40,000 rpm)
5-14 ( )
(a) (b)
5-15
5.2.2
Zerodur®
Zerodur®
100, 300, 500, 700, 900 nm/stroke 5-7
98
5-7
Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28,000 rpm Feed-rate(F) 20 mm/min
Depth of cut(Dc) 100, 300, 500, 700, 900 nm/stroke Total depth(Dt) 6 m
Lubricant Oil mist
100
nm/stroke
(Ra0.475 µm) 5-16(a)(b) 300 nm/stroke
(Ra0.484 m)
5-16(c)(d) 500 nm/stroke
(Ra0.679 µm) 5-16(e)(f) 700
nm/stroke
99
(a) ( 100 nm) (b) ( 100 nm)
(c) ( 300 nm) (d) ( 300 nm)
(e) ( 500 nm) (f) ( 500 nm)
5-16
100
(g) ( 700 nm) (h) ( 700 nm)
(i) ( 900 nm) (j) ( 900 nm)
5-16 ( )
(a) (b)
5-17
101
Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28,000 rpm
Feed-rate(F) 10, 20, 30, 40, 50 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 6 m Lubricant Oil mist
102
(a) ( 10 mm/min) (b) ( 10 mm/min)
(c) ( 20 mm/min) (d) ( 20 mm/min)
(e) ( 30 mm/min) (f) ( 30 mm/min)
5-18
103
(g) ( 40 mm/min) (h) ( 40 mm/min)
(i) ( 50 mm/min) (j) ( 50 mm/min)
5-18 ( )
(a) (b)
5-19
104
5.3
28,000 rpm 300 nm/stroke
20 mm/min
Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 6 m Lubricant Oil mist Vibration amplitude 1 m Vibration frequency 1kHz
105
(a) (b)
(c) (d)
5-20
5.4
(Ductile regime) (Brittle
regime) Zerodur®
106
Parameter Conditions Workpiece Zerodur® Cutting tool Two flutes Back rake angle( b) -70°
Spindle speed 28000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 18, 24 m Lubricant Oil mist
107
(a) (b)
(c) ( ) (d) ( )
(e) ( ) (f) ( )
5-21
108
5.4.1
5-11
1 A 5-22
1 A
5-23
(Current limit, Ilimit) (Override current, Io) (Judge number, Jt)
Ilimit Inow Ilimit
Jt 20% 5-4
Inow
Io
5-5
109
Parameters Conditions Work-piece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28000rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 6 m Lubricant Oil mist
5-22
110
5-23
5.4.2
Zerodur®
5-12
5-24(a)(b)
5-25(a)
5-26(a) (Ra0.453 m)
111
5-25(b)
Ra0.338 m 5-26(b)
5-12
Parameters Conditions Work-piece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 6 m Lubricant Oil mist Feedback control system on, off
(a) (b)
5-24
112
(a) (b)
5-25
(a) (b)
5-26
5.5
113
40% (HF) 37% (HCl) 2 1 1.5
30 5-27
5-27(a)(b)
(Ra2.117 m) 5-28(a)
5-27(c)(d) 5-28(b) (Ra1.000 m)
5-27(e)(f) (Ra0.792 m) 5-28(c)
5-28(d)
(a) ( ) (b) ( )
5-27
114
(c) ( ) (d) ( )
(e) ( ) (f) ( )
5-27 ( )
(a) (b)
5-28
115
(c) (d)
5-28 ( )
5.6
Zerodur® 0.25 mm
0.3 mm 5-29(a)
5-29(b) 5-13
5-30(a)(c) ;
5-30(b)(d)
5-30(e)(f) 310 min 380 min
Zerodur® 16.3 mm/min
116
5-13
Parameters Conditions Work-piece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Lubricant Oil mist Feedback control system on, off
(a) (b)
5-29
(a) ( ) (b) ( )
5-30
117
(c) ( ) (d) ( )
(e) ( ) (f) ( )
5-30 ( )
5.7
Zerodur®
(Taylor’s formula)
5-6 [92] n C
118
Parameter Condition Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Total depth(Dt) 18 µm Lubricant Oil mist
Total machining distance 300, 600, 900, 1200 mm
Machining regime
Ordinary,
High-frequency vibration assisted, Feedback control system
5-31(a)~(e)
5-32(a) 0.01 µm/mm
0.005 µm/mm
119
0.002
µm/mm 5-32(b)
(a)
(b) 300 mm
(c) 600 mm
(d) 900 mm
5-31
120
(e) 1200 mm
5-31 ( )
(a) (b)
5-32
5.8
Zerodur®
5.7
1200 mm
121
5-33
1586 cm-1 5-33(a) (b)
1586 cm-1 5-33(c)
1332 cm-1
1586 cm-1 1332 cm-1 5-33(d)
5.5
700°C
122
(a) ( ) (b) ( )
(c) ( ) (d) ( )
5-33
123
6.1
Zerodur®
a.
PID
124
Zerodur® b.
c.
a.
b.
c.
(Ra0.004 µm)
d.
6-1
(Ra0.453 µm)
125
6-1 Zerodur®
Parameters Conditions Work-piece Zerodur® Cutting tool Four flutes Back rake angle( b) -70°
Spindle speed 28000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke
Lubricant Oil mist
a.
Ra0.453 µm Ra0.388 µm
b.
0.01 µm/mm 0.002 µm/mm
a.
1A b.
126
(Ilimit) (Io) (Jt)
Zerodur® c.
Ra0.453 µm Ra0.338 µm
d.
0.005 µm/mm
e. Zerodur®
6.2
1.
2.
3.
(40 kHz)
127
4.
5.
6.
128
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