高頻振動輔助之智能化臥式精微工具機開發與Zerodur®陶瓷玻璃奈米研銑加工研究

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(1)Zerodur® Development of an intelligent horizontal micro machine tool with high-frequency vibration assisted machining and research of nano milling-grinding on Zerodur® glass ceramic. 1. 0. 3. 0. 7.

(2) Zerodur® Zerodur® Zerodur® Zerodur®. Zerodur®. Zerodur® 0.005µm/mm Ra0.388µm Zerodur®. 0.002µm/mm. Zerodur® (Ductile regime). (Quasi-ductile regime). Zerodur®. i.

(3) Abstract The primary purpose of the thesis is to develop an intellectualized milling-grinding technique for machining ZERODUR® glass-ceramic. ZERODUR® glass-ceramic which owns an extremely low coefficient of thermal expansion, excellent physical properties and chemical stability is very suitable for the fabrication of various micro components in aerospace and high-precision optical industry. However, brittle fracture will be easy occurred following the progress of machining such as brittle material. To machine the ZERODUR® glass-ceramic under ductile or quasi-ductile regime, an intelligent horizontal micro machine tool is developed and proposed in this study. The innovation combines a home-made boron-doped polycrystalline composite diamond (BD-PCD) tool with high-frequency vibration assisted machining and intellectualized milling-grinding force detection. The machining force measurement via the designed load-cells and the stage-current to on-line detect the force coming from machining resistance of the glass-ceramic workpiece for self-regulating the tool’s feed-rate is recommended. Milling-grinding can be implemented favorably under a non-brittle fracture regime. Experimental results indicated that the intellectualized milling-grinding technique decreases evidently the probability of brittle fracture of the machined glass, improving its surface roughness and reducing the tool wear rate down to 0.005µm per mm. Besides which, the high-frequency vibration assisted machining is also confirmed that can help in sending out the debris, improving the surface roughness (Ra 0.388µm) and alleviating the tool wear rate (0.002µm per mm). How the self-regulating feed-rate works is carefully examined and verified in the manufacture of a miniaturized cube on ZERODUR® glass-ceramic. It is demonstrated that the proposed integrated technique can achieve a machining on ductile or quasi-ductile regime on the hard-brittle glass-ceramic. The technique is inexpensive and easily controllable, which is worthy of commercialization. Keywords: ZERODUR® glass-ceramic, BD-PCD milling-grinding cutting tool, intellectualized milling-grinding technique, quasi-ductile regime, high-frequency vibration assisted machining. ii.

(4) Rita. 2014/07/28 iii.

(5) .................................................................................................................. i Abstract ............................................................................................................ii ................................................................................................................iii ................................................................................................................ iv ..........................................................................................................viii ............................................................................................................. x ....................................................................................................... xv .................................................................................................... 1 1.1. ................................................................................................... 1. 1.2. ........................................................................................... 3 1.2.1. .......................................................................... 4. 1.2.2 Zerodur®. ........................................................ 7. 1.2.3. ........................................... 9. 1.2.4. ................................................. 12. 1.3. ......................................................................................... 16. 1.4. ......................................................................................... 19. 1.5. ......................................................................................... 19 .......................................................................................... 21. 2.1. ....................................................... 21. 2.2. .................................................................. 23. 2.3. ................................................................................. 24 2.3.1. 2.4. ............................................................ 25 .............................................................................. 27 iv.

(6) 2.4.1. .................................................................................. 27. 2.4.2. ........................................................... 28. 2.5. ................................................... 29. 2.6. .......................................................... 30. 2.7. ......................................................................................... 31 ............................................................................... 34. 3.1 CNC. .................................................................. 34. 3.2 CNC. ...................................................................... 35. 3.3. ...................................................................... 35. 3.4. .............................................................................. 36. 3.5. ....................................................... 37 3.5.1. ............................................................... 37. 3.5.2. ........................................ 38. 3.6. ....................................................... 40. 3.7. .............................................................................. 41. 3.8. ......................................................................................... 42 3.8.1. .................................................................... 42. 3.8.2. ............................................................... 42. 3.8.3 3D 3.8.4 3.8.5 X-. .......................................................... 43 ................................................................... 44 ................................................................ 44. 3.8.6 3.9. ........................................................... 45 ......................................................................................... 46. 3.9.1 3.9.2. Zerodur®. ............................................ 46. ....................................................................... 47 v.

(7) 3.9.3. .............................................................................. 49 .......................................................................................... 50. 4.1. ................................ 51 4.1.1. ........................................................... 52. 4.1.2. .................................... 56. 4.1.3. ................................. 58. 4.1.4. ............................................................... 59. 4.1.5. ............................................ 61. 4.2. ............................................... 64 4.2.1. ....................................................................... 64. 4.2.2. ................................................ 65. 4.3. .................................................................. 66 4.3.1. ............................................ 66. 4.3.2. ................................................ 68. 4.3.3. .................................... 69. 4.3.4. ........................................ 72 .......................................................................................... 75. 5.1 Zerodur®. -. ......................... 75. 5.1.1. ........................................................... 76. 5.1.2. ............................................................... 78. 5.1.3. ........................................................... 80. 5.1.4. ....................................................... 83. 5.1.5. ....................................................................... 86. 5.2 Zerodur®. -. 5.2.1. ..................... 90. ....................................................... 91 vi.

(8) 5.2.2. ....................................................................... 97. 5.2.3. ................................................................. 101. 5.3. ................................................................ 104. 5.4. ................................................................ 105 5.4.1. ..................................................................... 108. 5.4.2. ..................................................... 110. 5.5. ........................................................................ 112. 5.6. .................................................................... 115. 5.7. ........................................................ 117. 5.8. ................................. 120 ............................................................................. 123. 6.1. ............................................................................................... 123. 6.2. ....................................................................................... 126 ..................................................................................................... 128 ..................................................................................................... 135. vii.

(9) 3-1 CNC. ............................................................ 34. 3-2 CNC. ............................................................ 35. 3-3. ................................................................ 36. 3-4. ........................................................................ 37. 3-5 PZT. ................................................................. 38. 3-6. .................................................................... 39. 3-7. ................................................................................ 39. 3-8. .................................................................................... 40. 3-9. ................................................................................ 40. 3-10. ................................................................... 42. 3-11. .................................................................. 42. 3-12. .............................................................. 43. 3-13 3D. .......................................................... 43. 3-14. .................................................................. 44. 3-15 X-. ............................................................... 45. 3-16. .................................................................. 45. 3-17 Zerodur®. ............................................................................ 46. 3-18. ................................... 48. 3-19. .............................................................................. 49. 4-1 X. Y. Z. ............................................................ 53. 4-2. ................................................................ 58. 4-3. ............................................................ 58. 4-4. .................................................................... 62 viii.

(10) 4-5. ............................. 70. 5-1. ......................................................... 77. 5-2. ............................................................ 79. 5-3. ................................................................ 81. 5-4. ............................................................ 83. 5-5. .................................................................... 86. 5-6. ............................................................ 91. 5-7. .................................................................... 98. 5-8. .............................................................. 101. 5-9. .......................................................... 104. 5-10. ................................................................................ 106. 5-11. ........................................................................ 109. 5-12. ................................................................ 111. 5-13. ............................................................ 116. 5-14. ................................................................ 118. 6-1 Zerodur®. ................................................. 125. ix.

(11) 1-1. ........................................................... 1. 1-2. ........................................................... 5. 1-3. ................................................... 6. 1-4. .............................................................. 7. 1-5 1-6 ELID. Zerodur®. ................................ 8 ............................................................. 9. 1-7. .................................................................... 10. 1-8. ................................................................ 10. 1-9. ............................................. 11. 1-10. NAK80. ..................... 11. 1-11. ...................................................................... 13. 1-12. ................................................... 14. 1-13. ....................................................... 14. 1-14. ....................................................... 15. 1-15. .............................................................. 15. 1-16. ........................................................... 17. 1-17. .................................................... 17. 1-18. .................................................................................. 18. 1-19. .......................................................................... 18. 1-20. .......................................................................... 20. 2-1. ......................................... 22. 2-2. ..................................... 24. 2-3. .................................................................................... 24 x.

(12) 2-4. ........................................................................ 27. 2-5. ........................................................................ 28. 2-6. ................................................................................ 29. 2-7. ..................................................... 30. 2-8. ..................................... 30. 2-9. ................................................. 32. 2-10. ............................... 33. 3-1 CNC. .................................................................... 34. 3-2 CNC. ........................................................................ 35. 3-3. ........................................................................ 36. 3-4. ........................................................................ 36. 3-5. ................................................................ 38. 3-6. PZT. ........................................................................... 38. 3-7. ............................................................................ 39. 3-8. ....................................................................................... 39. 3-9. .................................................................... 39. 3-10. .............................................................................. 40. 3-11. (NRF-3060SDL) ................................................................ 40. 3-12. ........................................................ 41. 3-13. .............................................................................. 42. 3-14. .............................................................................. 42. 3-15. .......................................................................... 43. 3-16 3D 3-17 3-18 X-. ..................................................................... 43 .............................................................................. 44 ........................................................................... 45 xi.

(13) 3-19. ...................................................................... 45. 3-20 Zerodur®. ......................................................... 47. 3-21 Zerodur®. ..................................... 47. 3-22. ............................................... 48. 3-23. .............................................................. 49. 3-24. ...................................................................................... 49. 4-1. ............................................................................ 51. 4-2. ................................................................ 53. 4-3. ...................... 54. 4-4. -. ......................................... 55. 4-5. -. .................................... 55. 4-6. .......... 56. 4-7. ........................................................................ 58. 4-8. ................................. 59. 4-9. ...................... 59. 4-10. ............. 60. 4-11. .......................................................................... 61. 4-12. ............................ 62. 4-13. .................................................................. 62. 4-14. .......................................................................... 65. 4-15. .................................................................. 66. 4-16. .............................................................. 68. 4-17. .......................................................................... 69. 4-18. .................... 71. 4-19. ................ 71 xii.

(14) 4-20. ............................................... 71. 4-21. (XRD. 4-22. (. ) ................ 73 ) ................. 74. 5-1. ........................................................................ 76. 5-2. ............................................................................ 76. 5-3. Zerodur®. ..................................... 78. 5-4 5-5 5-6 5-7. ( Zerodur®. 4-19)........................... 79 ................................. 80. -50°, -60°, -70°. ............................. 81. Zerodur®. ..................................... 82. 5-8. ................................. 85. 5-9. ............................. 85. 5-10. ................................................... 88. 5-11. ............................ 88. 5-12. ........................................... 90. 5-13. ....................................... 94. 5-14. ................................................... 97. 5-15. ............................ 97. 5-16. ................................................. 100. 5-17. .......................... 100. 5-18. ............................................. 103. 5-19. ...................... 103. 5-20. ..................................... 105. 5-21. ...................... 107. 5-22. ................................. 109 xiii.

(15) 5-23. ............................. 110. 5-24. ............................. 111. 5-25. ................................. 112. 5-26. ................................. 112. 5-27. ..................................................... 114. 5-28. ......................................... 115. 5-29. ................................................. 116. 5-30. ............................................. 117. 5-31. .............. 120. 5-32. ...................... 120. 5-33. .......................... 122. xiv.

(16) A. (cm2). At. Aff. b. C. c. D. DT (nm/stroke ). Dc. E. Eo Fa. F ( kgf/cm 2). H. Ip Io It. (mm/min). Fs. (Hz). f. m). Dt. m). dc. (mm). (A). Ilimit (A). (A). Inow (A). Jt. Kp. Ki. Kpos. Kc. Kd. k. kc. l. m. Nf. xv. (mm) (N).

(17) n. Pair (mmHg). Pv. (mmHg) (µm ). Ra. R1. 1( ). R2. 2( ). R3. 3( ). R4. 4( ). S. SV. T. (min). V. (m/min). Vout. Vo. (V). Vff. VEX. (V). Vin. yc. (V) (mm). t. m). (V). (V) (µm). t (µm ). l. (rev/s). b. (N). c on. s). off. 0. xvi. s).

(18) 1.1. (Precision). (Multi-function). (Miniaturization). 1-1(a) 1-1(b). 3C(Computer, Communication, Consumer electronics) (Glass ceramic). (a). (Optical glass). [1]. (b). 1-1. 1. (Sapphire). [2].

(19) (. ... ) (Brittle failure). (Laser-beam machining) machining). (Water-jet. (Abrasive-jet machining). (Ultrasonic. machining). (Excimer laser). (Femtosecond laser). (Sub-µm). [3]. (Crystallization). (Polycrystalline. materials). [4]. [5] 1739. Reamur[6] 1950. (Silicate glasses). 850 ( 2. Dr. Stookey[6].

(20) ). (Cubic Boron Nitride, CBN). (Tungsten carbide, WC) (Single Crystal. Diamond, SCD). (Polycrystalline Diamond, PCD). 80~120 ~HV8,000[7] (Boron-Doped Polycrystalline Composite Diamond, BD-PCD). (Co). (Binder). (Boron). 1.2. (Hard-brittle material). Zerodur®. Zerodur®. 3. HV6,500.

(21) (High-frequency vibration assisted). 1.2.1. [8] Dr. Singh(2007). [9]. (Laser Assisted Mechanical. Micromachining, LAMM). H-13. Dr. Yang(2009). [10]. (Laser Assisted Milling, LAMill) 1-2(a). / Dr.. Tseng(2014) system). [11]. (Ultraviolet laser processing (Glassy Carbon, GC). 1-2(b). [12]. 4.

(22) (a). [10]. (b). [11]. 1-2. (. ) Dr.. Park(2004). [13]. (Micro-Abrasive Jet Machining,. MAJM). 100 m. Dr. Matsumura(2011). [14]. (CeO2). 1-3(a). (Computational Fluid Dynamics, CFD). 45° Dr. Nouraei(2014) [15]. (Abrasive Slurry Jet Micro-machining,. ASJM). 1-3(b). 5.

(23) (a). [14]. (b). [15]. 1-3. [16] Dr. Puttick(1989). Kentucky. [17]. Dr. Morgan(2004). [18]. 1-4(a). (Ultra-Low. Expansion , ULE®). 1-4(b). Dr. Matsumura(2013). [19]. (Crown glass). 6.

(24) (a) ULE®. [18]. (b). [19]. 1-4. 1.2.2 Zerodur® Zerodur®. (Röntgensatellit, ROSAT). Cranfield. [20]. Dr. Tonnellier(2007) Zerodur®. ULE®. [21]. Holroyd Edgetek 1-5(a) (HF). 1-5(b) (Cluster depth). (Single last fracture depth). 1-5(c)(b). 7. (HCl).

(25) (b) Zerodur®. (a) Holroyd Edgetek. (c). D46. (d) Zerodur®. 1-5. Dr. Yin(2009) In-process Dressing, ELID). D25 [21]. [22]. (Electro-Lytic. Zerodur®. 1-6(a). Zerodur® 1-6(b). 8.

(26) (a) ELID. (b) ELID 1-6 ELID. [22]. 1.2.3. [23]. Dr. Okano(1990). [24]. (Thermal. filament CVD). 1-7(a) B2O3(Boron trioxide powder). (Four-point probe) 1-7(b). (Seebeck effect) P. 9.

(27) (a). (b) 1-7. [24]. Dr. Sidorov(2005). [25] 1-8(a). 4 K(-269.15. ) 1-8(b). (a). (b) BD-PCD 1-8. Miyashiro. [25] Dr. Suzuki(2009). [26]. 1-9(a) ( ). ). (. Rz=8 m Rz=3 m. Rz=2.7 m. Rz=1.7 m Rz=0.4 µm 1-9(b). 10.

(28) (a). BD-PCD. (b). 1-9. [26]. Dr. Chen(2013). [27]. (Rotary Wire Electrical Discharge Machining, RWEDM) 1-10(a). 5µm. (High-Speed & Fast-Shallow Grinding, HSFSG). 1-10(b). RWEDM HSFSG. NAK80. (a). (b) NAK80 1-10. NAK80. 11. [27].

(29) 1.2.4 Dr. Legge. 1964. [28]. [29]. 1994. E. Shamoto. [30]. (Piezoelectric ceramic material) 1-11(a). (Oxygen Free. Copper, OFC) 1-11(b). 1-11(c)(d). (a). (b) 1-11. [30]. 12.

(30) (c). (d) 1-11. ( )[30]. Dr. Zhou(2002). 1-12(a). 1-12(b). 13. [31].

(31) (a). (b) 1-12. [31]. Dr. Egashira. [32]. (Cemented. carbide) 1-13(a). (Borosilicate. glass) 60~70%. 1-13(b). (a). (b) 1-13. [32]. Dr. Yang(2006). [33]. (Ultrasonic Vibration Grinding, UVG) 1-14(a). 14.

(32) 1-14(b). (a). (b) 1-14. Dr. Nath(2009). [33]. [34]. (Ultrasonic Elliptical Vibration Cutting, UEVC). 1-15(a). UEVC. 30~50 nm. (a). (b) 1-15. [34]. 15. 1-15(b).

(33) Zerodur® ELID Zerodur®. Zerodur®. Zerodur® Zerodur®. 1.3 3C BBC Research Market Forecasting [35] 2016. 1-16. 21.6%. 42. European Technology Platform - Photonics 21. [36]. 1-17. 2008. 2,700. 16.

(34) 2017. 6,000. 1-16. [35]. 1-17. [36]. 17.

(35) [37] Zerodur®. Shoctt Zerodur® CTE). (Coefficient of Thermal Expansion, 1-18 [38]. (European. Extremely Large Telescope, E-ELT) Zerodur®. 1-19. (Yield strength) (Difficult to machine material). 1-18. [39]. 1-19. 18.

(36) 1.4 Zerodur® (. ) Zerodur®. (Micro crack) (Milling-grinding force) (Load cell) (Manual Feedrate Override, MFO) 1 m. 1 kHz Zerodur®. (Material Removal Rate, MRR) Zerodur®. 1.5 Zerodur®. 1-20 3D (Finite Element Method, FEM). (Optimization). C#. 19.

(37) (Double negative back rake angle). (Press-cutting). (Probe). 1-20. 20.

(38) Zerodur®. (Brittle-ductile transition) (. ) Zerodur®. (620 HK). X. Y. Z. 2.1 Zerodur®. 21.

(39) [40]. 2-1(a). yc (Cut surface plane). [41]. 2-1(b) (Critical depth of cut, dc). 2-1. kc dc =b H. 2. E H. (2-1). b. kc. H. E. (a). [40]. (b). [41]. 2-1. (dc) Zerodur®. (yc). 22.

(40) 2.2. [42]. [43]. K. Okano. [44]. (Doping). (Boron) (Electron-hole). 2-2(a) [45] 2-2(b). 23.

(41) (a). (b) PCD. BDPCD. 2-2. [45]. 2.3 (Electrical Discharge Machining, EDM). (. µm). 8,000-12,000°C[46]. [47]. 2-3(b). (a). 2-3(a). [48]. (b). 2-3. 24.

(42) 2.3.1 (Wire Electrical Discharge Machining, WEDM) 2-4(a). (Spark erosion) (7×104 •m). (DI-Water). (Debris). (BD-PCD=5~37×10. •m, Fe=8×10. •m). 2-4(b) (Peak current, Ip) (Pulse duration time,. on). (Pulse off time,. (Servo voltage, SV). 1.. (Open voltage, Vo). (Ip). 25. off). 8.

(43) 2.. (Vo). 3.. (. 4.. 5.. on). (. off). (SV). 26.

(44) (a). [49]. (b). (ø250 µm). 2-4. 2.4. (Transducer). (Strain. gauge). (Structure member). [50]. 2.4.1. [51] [52]. 2-5(a). 2-5(b). 27.

(45) (a). (b) 2-5. 2.4.2. [53] (Spring material) (Strain). (Wheatstone bridge). 2-6(a). (Full-bridge) [54]. (Resistive arm). VEX. 2-6(b). V out. Vout =. R R3 +R4. 2-2 R R +R. ×V. 10mV/V (Signal-to-noise ratios). 28. (2-2).

(46) (Analog-to-Digital Converter, ADC). (a). (b) 2-6. 2.5. (Current feedback). (Linear scale) (Servo loop) (Linear amplifiers) 2-7 B [55]. 29. A.

(47) 2-7. 2.6. 2-8 Kp. [56]. (Proportional gain) Ki. (Integral Gain). (Stiffness) Kpos. (Position gain). Vff. (Velocity feedforward gain). Aff. (Acceleration feedforward gain) Fs. 2-8. [56] 30.

(48) 2.7. (Piezoelectric actuator) PZT. (Piezoelectricity) 1880. Curie. Jacques. Pierre. [57] (Direct piezoelectric effect). (Converse. piezoelectric effect). (. ). (Barium Titanate, BT). (Lead. zirconate titanate, PZT). PZT. 2-9(a). ( (Strain vector, S). [58]. 3). 2-3 (2-5). 31.

(49) D. Eo E 2. S t. V/t. 3. 1. l / l (Vin. t. l. S. t/t. l. ). 2-4. 2-5. 2-6 (2-5). (2-6). 2-9(b). (Strip extension). 2-6. 2-7. (2-7). (a). (b). [59]. 2-9. (2-7) 2-10(a). 0.1-0.15 %[59]. 32.

(50) (Magnetic hysteresis) 2-10(b) 10%. [60]. (a). (b) 2-10. [60]. 33.

(51) 3.1 CNC CNC(Computer Numerical Control). CNC. (. ). CNC. 3-1. [61]. CNC. 3-1 CNC ( X, Y U, V, Z. ). 600 400 mm 100 100 300 mm Within 1 µm 930 700 295 mm. X, Y. 800mm/min (Max.). 34. 3-1 CNC. 3-1.

(52) 3.2 CNC CNC. CNC. CNC 3-2. [62]. 3-2. CNC. 3-2 CNC ( X, Y, Z. ). 550 460 460 mm 800 460 mm 8,000 rpm 5.5 kw 300 Kg. 3-2 CNC. 3.3. SODICK. SODICK. SVC. [63]. 3-3 3-3 35. [64].

(53) 3-3. X, Y, Z Z. (SODICK, AP1L) 200 120 200 mm Within 1 µm 36 mm/min (Max.) 5 kg (Max.) 25 kg (Max.). 3-3. 3.4. X Y Z. 3-4(a)(b). X Y Z 3-4. (a). load cell(LA-20). (b). 3-4. 36. load cell(LA-200).

(54) 3-4 (LA-20). Regimel Detection axial X. Y axis. (LA-200) Z axis. Original size 12.7 12.7 80 mm Material(measuring element) Aluminum. 25 22 130 mm Aluminum. Material(coating) Silicone rubber. Silicone rubber. Weight 30 g. 250 g. Max. capacity 5 kg. 10 kg. Max. platform size 150 150 mm. 300 300 mm. Sensitivity 2 mV/V. 2 mV/V. Input/output resistance 1000/1000. 500/500. Excitation voltage 5-15 V. 5-15 V. 3.5 3.5.1 PZT. 3-5. 9 m 2,000 N. 3-6 5mm×5mm×9mm. 3-5. [65]. 37. PZT.

(55) 3-5. [65]. 3-5 PZT Ceramic cross section Thickness Max stroke Capacitance Resonance frequency Max load force. 5×5 mm 9 mm <9 µm 800 nF <100 kHz 2000 N 3-6. PZT. 3.5.2 3-7. 3-8. (Power amplifier). PZT. 1 µm. 1 kHz. PZT PZT [67]. 3-9 3-7. [68]. 38. [66]. 3-6.

(56) 3-6 FG708S 8-100 MHz 100 MHz ±10 V 0dB,-20dB,-40dB,-60dB 3-7. 3-7 VP7206 48E150 DC 48 V 20 ±15 V (Max.) 150 V (Max.). 3-8. 3-9. [66]. 39.

(57) 3.6. [69]. [70]. 3-8. 3-9. 3-10. 3-8. 3-11. 3-9 E3000C-NE211 (NSK) 1,000~60,000 rpm AC100-240 V 350 W 1.8 A 2.8 kg. NRF-3060SDL (NSK) 500~6,0000 rpm 30 mm 350 W < 1 µm 300 g. 3-10. 3-11. 40. (NRF-3060SDL).

(58) 3-12(a). 3-12(b). (a). (b) 3-12. 3.7 Zerodur®. (Polisher). 3-13 3-10. [71]. 41.

(59) 3-10 1,000 rpm 203 mm 0.05, 0.1, 0.3 µm #800, #500, #2500 3-13. 3.8 3.8.1 [72]. 3-14. LED. 3-11 3-11 ( X, Y, Z. ). 200×200×150 mm 400×300 mm 0.5 µm Within 1 µm 640×480. 3-14. 3.8.2. (Chipping). (Scanning 42.

(60) Electron Microscope, SEM). 3-15. 5X-30,000X. 3-12. [73]. 3-12 (JSM6360). 3.00 nm ×15~×300,000 0.5~ 30 kV 50 mm. 3-15. 3.8.3 3D 3-16. 3D. (3D laser measuring microscope)[74]. Zerodur® 2D. 3D. 405nm INR(Intelligent Noise Reduction). 2D. 3D. 3-13. 3-13 3D. Z. (OLS4000) 276×358×405 mm 0.01 µm 5X 20X 50X 100X 2,560×2,560-16×16µm (405 nm) 3-16 3D. 43.

(61) 3.8.4. 3-17. 3-14. [75]. 3-14 (DPO2024) 4 200 MHz ±450 V 2.1 ns 4-100 ns 3-17. 3.8.5 X-. X(X-ray single-crystal diffractometer). 3-18 3-15. X-. [76]. 44.

(62) 3-15 X(D8 Advance) 2.03×1.4×1.26 m Stepper motors 360° 0.0001° 30°/s 3-18 X-. 3.8.6 X-. (Micro-raman spectrometer). 3-16. [77]. 3-16 (Senterra 127) 80~4,000 cm-1 0.5 cm-1 532 nm 20 mW 4 m 3-19. 45. 3-19.

(63) 3.9 Zerodur®. 3.9.1 Shoctt. 1968. Max Planck. Zerodur®. [78] 3-20(a) Zerodur®. 3-20(b). 70-78 %. [79]. Zerodur®. 50-80 nm. 0-100ºC. (Coefficient of Thermal Expansion, CTE). 3-21. 620. HK(BK7: 610 HK). IC 3-17. Zerodur®. LED. [80]. 3-17 Zerodur®. [80]. Zerodur® 90.3 GPa 0.24 2.53 g/cm2 620 HK 0 ± 0.02 (class 0) Coefficient of thermal expansion 0 ± 0.05 (class 1) CTE (0 °C - 50 °C)[10-6/K] 0 ± 0.10 (class 2) Properties Young’s modulus E Poisson’s ratio Density Knoop Hardness. Thermal Conductivity. 90°C. 1.46 W/(m-K). Max. Application Temperature 600°C. 46. Zerodur®.

(64) (b) Zerodur®. (a) 3-20 Zerodur®. 3-21 Zerodur®. [80]. 3.9.2 Zerodur® (Co). (Random) (Isotropic)[81] (Chips Pocket, CP). 3-22(a). 47.

(65) 3-22(b). 3-23(a). (B-Doped. Diamond, BDD). 3-18. 3-23(b). 3-18. [82] S-PCD (Standard PCD). EC-PCD (BD-PCD). Conventional HPHT diamond B doped HPHT diamond 500~600 W/m·K. 440~580 W/m·K. 10(6-12) m. 5-10 µm. Cobalt. Cobalt. 1.4×103 ·m. 5~37×10 ·m. 0.5 mm. 0.6 mm. (a). (b) 3-22 48.

(66) (a). (b). BD-PCD. 3-23. 3.9.3. 250 µm. 3-24. 3-19. 3-19 250 µm Within 1 µm 100 N/mm2 4%. 3-24. 49.

(67) Zerodur®. Zerodur®. (High Frequency Welding, HFW). Zerodur® Zerodur®. Zerodur®. (Feedback control equation) 4-1. 50.

(68) 4-1. 4.1 Zerodur® Zerodur®. 51.

(69) X Y Z A/D. 4.1.1 4-2 X Y Z X. Y. Z (Linear. scale). (Open loop). (Backlash) [83]. (Air gap) 4-1. 52. (Hysteresis).

(70) 4-2. 4-1 X Y. Z. [84, 85]. X-axis Regimel Travel Accuracy Resolution Repeatability Straightness Maximum Speed Stage Mass Material. Z-axis. Y-axis. ANT-95-50-XY-PLUS. AVL125. 50 mm. 25 mm. 50 mm. ±250 nm. ±250 nm. 1 nm. 1 nm. ±2.0 m 0.0045-1.0 µm. 75 nm. 75 nm. 300 nm. 1 m. 1 m. 3 m. 500 mm/s. 500 mm/s 3.2 kg. 100 mm/s 5.6 kg. Aluminum Body/Black Hard-coat Finish 4-3(a). X. Y translation stage). (Compact). 4-3(b) (Abbe's error) 53. Z. (Vertical.

(71) (a). (b) 4-3. X Y Z 3D. 4-3(b) X Y Z. X. Z. X. 50 N( Y. 1 kg=10 N Y. Z ). 2 mN. Y 100. N. 2 mN. X Y Z. 4-4(a). 4-4(b). 54.

(72) (a). (b). 4-4. -. 4-5(a). 4-5(b). (a). (b). 4-5. -. 55.

(73) 4.1.2. (Deformation analysis) (Frequency analysis). X Y Z (Al alloy) (Bracket). (Nodular cast iron). (SS alloy). 8.7 µm. 0.19 µm. 4-6(a). 4-6(b). (a). (b) 4-6. 56. (Base).

(74) (Nature frequency). 4-7(a). 109.9 Hz. 4-1 [86] (Damping ratio,. 4-2. (Static stiffness, k) ). (Inherent resonant frequency, f ) 1590.1 Hz. 4-2. 4-7(b). 4-3. c 2 km. (4-1) c. k. m. f. f. 1 2. k m. (4-2). k. m. 57.

(75) 4-2 Spindle speed(rpm) 6594.0 9627.0 16330.2 26445.0 32563.8. Freq.(Hz) 109.9 160.45 272.17 440.75 542.73. (a). 4-3 Spindle speed(rpm) 95406 104556 104688 107646 128844. Freq.(Hz) 1590.1 1742.6 1744.8 1794.1 2147.4. (b) 4-7. 4.1.3 CAD 3D. 2D CNC. CNC 4-8(a). (Stainless steel screw). X Y Z 58.

(76) X Y Z 1 µm/50 mm. (a). 4-8(b). 4-9. (b) 4-8. (a). (b) 4-9. 4.1.4. (Auto) 59. (Single).

(77) I/O(Input/Output) X Y Z 4-10. 4-10. Window XP. Microsoft Visual. Studio 2010 C# 4-11. CNC. IEEE1394. (Feedback). 60.

(78) 4-11. 4.1.5 Zerodur®. (Gain). 4-4 5,000, 10,000, 15,000,. 20,000, 25,000, 30,000 rpm X. Y. Z. 1000ms (Position Error, PosErr). ±0.15 µm Z. 4-12(a) ±0.1 µm. 4-12(b) Zerodur®. 4-13(a)~(l). 61.

(79) 4-4 Parameters. X-axis. Y-axis. Z-axis. Kp. 2300. 1800. 1426. Ki. 28.1. 14. 59.1. Kpos. 52.2. 300. 35.1. Vff. 7.1399. 0. 7.4800. Aff. 1770. 1096. 1386. (a). (b) 4-12. (a) 5000rpm. (. ). (b) 5000rpm. 4-13. 62. (. ).

(80) (c) 10000rpm. (. ). (d) 10000rpm. (. ). (e) 15000rpm. (. ). (f) 15000rpm. (. ). (g) 20000rpm. (. ). (h) 20000rpm. (. ). 4-13. (. 63. ).

(81) (i) 25000rpm. (. ). (j) 25000rpm. (. ). (k) 30000rpm. (. ). (l) 30000rpm. (. ). 4-13. ( ). 4.2 4.2.1 Zerodur®. 1 mm. O. 64.

(82) 4-14(a). 200 Liter/min. (680 mmHg). 0.12 kgf/cm2. 4-3. [87]. 4-14(b). = PA = (. -. (4-3). )A. Fa. A. Pair. Pv. (a). (b) 4-14. 4.2.2 Zerodur® Z. 4-15(a). 65.

(83) 4-15(b) 1µm. 1kHz. 2000 N. (a). (b) 4-15. 4.3 4.3.1 Zerodur®. Zerodur®. (4-4). [88]. 66.

(84) V= V. (m/min). (4-4). 2 DT. (mm). (rev/s). 3D 2, 4, 6, 8. 4-16(a). Nf (Normal force)=1.0 N 4-16(b) 3 µm 0.6 µm. (a). (b) 4-16. 67. 4-16(c)~(f).

(85) (c). (d). (e). (f) 4-16. ( ). 4.3.2 4-17 (HFW) 10-15 µm. (Eddy current) (Silver brazing). 68.

(86) CNC. 4-17. 4.3.3. CAD CAM. CNC 4-18(a). 4-18(b). 69.

(87) 250 µm (One cut three skim). 4-19 4-5. 4-20(a)(b) 4-5 ( 3) (V). 70. 70. (µs). 2. 1. (µs). 15. 21. (µs). 1. 2. (µs). 15. 25. (V). 60. 65. 2. 2. 3. 4. 8.7. 22. 5. 2. (mm/sec) (N) (mm/min). 500 rpm Brass wire( 250 m) BD-PCD & WC. 70.

(88) (a). (b). (. 4-18. (a). (b). (c). 4-19. (a). (b) 4-20. 71. 3-12).

(89) 4.3.4 Zerodur®. X-. 43.9°, 75.57° 4-21(a) 4-21(b) (c). XRD 26.4° BD-CPD X-. (a). XRD. 4-21. (XRD. 72. ).

(90) (b). XRD. (c). XRD. 4-21. (XRD. )( ). 1332 cm-1. D-band 1332 cm-1 G-band. sp2. 1580 cm-1-1606cm-1 1332 cm-1. 73. [89]. 4-22(a).

(91) (sp3). 1350 cm-1. (Disordered graphite) 1586 cm-1. (. 4-22(b). 4-5). 4-22(c). 1594 cm-1. 1332 cm-1. 1594 cm-1. (a). (b). (. (. ). ). (c). 4-22. ( (. 74. ) ).

(92) Zerodur® Zerodur®. Zerodur®. Zerodur®. 5.1 Zerodur®. Zerodur®. 75.

(93) 5-1. 0.1 m/step (Critical contact) 5-2. 5-1. 5-2. 5.1.1 Zerodur® (Discontinuous chips). 5-1 (Dry air). (Oil flushing). (Oil mist) 76.

(94) 5-3(a)(b). 5-3(c)(d). 5-3(e)(f). 5-1 Parameter Condition Workpiece Zerodur® Cutting tool Two flutes Back rake angle( b) -70° Spindle speed 22000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 9 m Lubricant Dry, Oil flushing, Oil mist. (a). (b) Zerodur®. 5-3. 77.

(95) (c). (d). (e). (f) Zerodur®. 5-3. 5.1.2. 3D 5-2. 5-4 5-5(a)(b). 78. ( ).

(96) 5-5(c)(d) Zerodur®. 5-2 Parameter Condition Workpiece Zerodur® Cutting tool Two flutes, Four flutes Back rake angle( b) -70° Spindle speed 22,000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 9 m Lubricant Oil mist. (a). -70. (b). 5-4. -70 (. 79. 4-19).

(97) (a). (b). (c). (d) Zerodur®. 5-5. 5.1.3 Zerodur®. 5-3 -50°, -60°, -70°. 5-6 5-7. Zerodur®. 80.

(98) -70° 5-7(a)(b). -50°. -60°. -50°. -50° 5-7(c)~(f). -70°. 5-3 Parameter Workpiece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Total depth(Dt) Lubricant. 5-6. -50°, -60°, -70°. 81. Condition Zerodur® Four flutes -50°, -60° ,-70° 22,000 rpm 20 mm/min 300 nm/stroke 9 m Oil mist.

(99) (a). -70°. (b). -70°. (c). -60°. (d). -60°. (e). ( 5-7. -50°). (f) Zerodur®. 82. (. -50°).

(100) 5.1.4. 4,000(V= 12.56 m/min), 10,000(V= 31.4 m/min), 16,000(V= 50.24 m/min), 22,000(V= Zerodur®. 69.08 m/min), 28,000(V= 87.92 m/min) rpm 5-4 5-4 Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70° 4,000, 1,0000, 16,000, 22,000, 28,000 rpm Feed-rate(F) 20 mm/min. Spindle speed. Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 9 m Lubricant Oil mist 5-8(a)~(j). (0.006 mm/min) 5-8(a)(c). 5-9 Ra0.01 µm. 5-9(a) 3D 0.1 µm. 9 m. 83. 5-9(b).

(101) (a). (4,000 rpm). (b). (4,000 rpm). (c). (10,000 rpm). (d). (10,000 rpm). (e). (16,000 rpm). (f). (16,000 rpm). 5-8. 84.

(102) (g). (22,000 rpm). (h). (22,000 rpm). (i). (28,000 rpm). (j). (28,000 rpm). 5-8. ( ). (a). (b) 5-9. 85.

(103) 5.1.5 Zerodur® Zerodur® 100, 300, 500, 700, 900 nm/stroke 5-5. 5-5 Parameter Condition Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70° Spindle speed 22,000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 100, 300, 500, 700, 900 nm/stroke Total depth(Dt) 9 m Lubricant Oil mist. 5-10(a)~(j) 3D Ra0.01 m. 5-11(a). 5-11(b). 100 nm/stroke. (Dt). 900 nm/stroke 100 nm/stroke. (646 nm). (86 nm). 86. 900 nm/stroke.

(104) (a). (. 100 nm). (b). (. 100 nm). (c). (. 300 nm). (d). (. 300 nm). (e). (. 500 nm). (f). (. 500 nm). 5-10. 87.

(105) (g). (. 700 nm). (i). (. 900 nm). (h). (. (j). 5-10. ( (. (a). (b) 5-11. 88. 700 nm). ). 900 nm).

(106) 5-12(a) (Sliding) (Plowing) (Ginding) [90] 5-12(b) 5-1. 5-2 =. =. (5-1). c. d( 0. ). (5-2). Kc Kd. 0. 5-1. 5-2. 5-3. d. =. c. +. (5-3). 0 d. 5-3 Kd. Kc 0. 89.

(107) (a). (b) 5-12. [91]. 5.2 Zerodur®. -. 5.1. Zerodur®. 90.

(108) 5.2.1. 5-6 4,000(V= 12.56 m/min), 10,000(V= 31.4 m/min), 16,000(V= 50.24 m/min), 22,000(V= 69.08 m/min), 28,000(V= 87.92 m/min), 34,000(V= 106.76 m/min), 40,000 rpm(V= 125.6 m/min). 5-6 Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70° 4,000, 1,0000, 16,000, 22,000, Spindle speed 28,000, 34,000, 40,000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 6 m Lubricant Oil mist 5-13(a)~(n) 3D. 16,000 rpm. 5-13(a)~(f). 91.

(109) 5-14(a)~(f) 22,000 rpm. 5-14(g) (Ra0.478 m). 5-14(h). 28,000 rpm (Ra0.453 m). 5-14(i)(j). 34,000 rpm (Ra0.539. m). 5-14(k)(l). 40,000 rpm (Ra0.440 m). 5-14(m)(n). 3D 5-15(a). 28,000 rpm 5-15(b). (a). (4,000 rpm). (b). 5-13. 92. (4,000 rpm).

(110) (c). (10,000 rpm). (d). (10,000 rpm). (e). (16,000 rpm). (f). (16,000 rpm). (g). (22,000 rpm). (h). (22,000 rpm). 5-13. ( ). 93.

(111) (i). (28,000 rpm). (j). (28,000 rpm). (k). (34,000 rpm). (l). (34,000 rpm). (m). (40,000 rpm). (n). (40,000 rpm). 5-13. ( ). 94.

(112) (a). (4,000 rpm). (b). (4,000 rpm). (c). (10,000 rpm). (d). (10,000 rpm). (e). (16,000 rpm). (f). (16,000 rpm). 5-14. 95.

(113) (g). (22,000 rpm). (h). (22,000 rpm). (i). (28,000 rpm). (j). (28,000 rpm). (k). (34,000 rpm). (l). (34,000 rpm). 5-14. (. 96. ).

(114) (m). (40,000 rpm). (n). 5-14. (40,000 rpm) (. (a). ). (b) 5-15. 5.2.2 Zerodur®. Zerodur® 100, 300, 500, 700, 900 nm/stroke 5-7. 97.

(115) 5-7 Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70° Spindle speed 28,000 rpm Feed-rate(F) 20 mm/min Depth of cut(Dc) 100, 300, 500, 700, 900 nm/stroke Total depth(Dt) 6 m Lubricant Oil mist. 100 nm/stroke (Ra0.475 µm). 5-16(a)(b). 300 nm/stroke (Ra0.484. 5-16(c)(d). m). 500 nm/stroke. (Ra0.679 µm). 5-16(e)(f). 700. nm/stroke 5-16(g)~(j) 3D 5-17(a). 300 nm/stroke 5-17(b). 98.

(116) (a). (. 100 nm). (b). (. 100 nm). (c). (. 300 nm). (d). (. 300 nm). (e). (. 500 nm). (f). (. 500 nm). 5-16. 99.

(117) (g). (. 700 nm). (h). (. 700 nm). (i). (. 900 nm). (j). (. 900 nm). 5-16. (. (a). (b) 5-17. 100. ).

(118) 5.2.3 Zerodur®. Zerodur® 10, 20, 30, 40, 50 mm/min. 5-8. 5-18(a)~(j). 10 mm/min 0.484 m). 5-18(a)(b). (Ra 30 mm/min. 5-19(a) 3D 5-19(b). 20 mm/min. 5-8 Parameter Conditions Workpiece Zerodur® Cutting tool Four flutes Back rake angle( b) -70° Spindle speed 28,000 rpm Feed-rate(F) 10, 20, 30, 40, 50 mm/min Depth of cut(Dc) 300 nm/stroke Total depth(Dt) 6 m Lubricant Oil mist. 101.

(119) (a). (. 10 mm/min). (b). (. 10 mm/min). (c). (. 20 mm/min). (d). (. 20 mm/min). (e). (. 30 mm/min). (f). 5-18. 102. (. 30 mm/min).

(120) (g). (. 40 mm/min). (h). (. 40 mm/min). (i). (. 50 mm/min). (j). (. 50 mm/min). 5-18. (. (a). (b) 5-19. 103. ).

(121) 5.3 28,000 rpm. 300 nm/stroke. 20 mm/min 5-20(a) 5-20(b). (Ra0.453 m). 1000 (. 1 µm). 5-9. 5-20(c) SEM. Ra0.388 m. 5-20(d). 5-9 Parameter Workpiece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Total depth(Dt) Lubricant Vibration amplitude Vibration frequency. 104. Conditions Zerodur® Four flutes -70° 28000 rpm 20 mm/min 300 nm/stroke 6 m Oil mist 1 m 1kHz.

(122) (a). (b). (c). (d) 5-20. 5.4. (Ductile regime). (Brittle Zerodur®. regime). 105.

(123) 5-10. Z. 5-21(a) 5-21(b). Z 5-21(c) Z 5-21(d). Z X Y. 5-21(e)(f) X. Y. 5-10 Parameter Workpiece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Total depth(Dt) Lubricant. 106. Conditions Zerodur® Two flutes -70° 28000 rpm 20 mm/min 300 nm/stroke 18, 24 m Oil mist.

(124) (a). (b). (c). (. (e). (. ) (d). ). (. (f). 5-21. 107. (. ). ).

(125) 5.4.1. 5-11. 1A. 5-22. 1 A. 5-23. (Current limit, Ilimit). (Override current, Io). (Judge number, Jt). Ilimit Jt. Inow 20%. Ilimit 5-4. Inow Io 5-5. 108.

(126) Jt 20%. now. now. Inow. -. (5-4). limit. At t=1 t. At. (A). Ilimit. (A). (5-5). o. It. Io. (A). 5-11 Parameters Conditions Work-piece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Total depth(Dt) Lubricant. 5-22. 109. Zerodur® Four flutes -70° 28000rpm 20 mm/min 300 nm/stroke 6 m Oil mist. (A) At.

(127) 5-23. 5.4.2 Zerodur®. 5-12. 5-24(a)(b). 5-25(a) 5-26(a). (Ra0.453 m) 110.

(128) 5-25(b) Ra0.338 m. 5-26(b). 5-12 Parameters Conditions Work-piece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Total depth(Dt) Lubricant. Zerodur® Four flutes -70° 28000 rpm 20 mm/min 300 nm/stroke 6 m Oil mist. Feedback control system on, off. (a). (b) 5-24. 111.

(129) (a). (b) 5-25. (a). (b) 5-26. 5.5. 112.

(130) 40%. (HF) 37%. (HCl). 2 1 1.5. 30 5-27 5-27(a)(b) (Ra2.117 m). 5-28(a). 5-27(c)(d). 5-28(b). (Ra1.000 m). 5-27(e)(f) (Ra0.792 m). 5-28(c) 5-28(d). (a). (. ). (b). 5-27. 113. (. ).

(131) (c). (. (e). (. ) (d). ). (. (f). 5-27. ( ( ). (a). (b) 5-28. 114. ). ).

(132) (c). (d) 5-28. ( ). 5.6. Zerodur® 0.3 mm. 0.25 mm. 5-29(a) 5-29(b). 5-13 5-30(a)(c). ;. 5-30(b)(d). 5-30(e)(f). 310 min. Zerodur®. 380 min. 16.3 mm/min. 115.

(133) 5-13 Parameters Conditions Zerodur® Four flutes -70° 28000 rpm 20 mm/min 300 nm/stroke Oil mist on, off. Work-piece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Lubricant Feedback control system. (a). (b) 5-29. (a). (. ). (b). 5-30. 116. (. ).

(134) (c). (. ). (d). (. ). (e). (. ). (f). (. ). 5-30. (. 5.7 Zerodur®. (Taylor’s formula) 5-6. [92]. n. C. 117. ).

(135) 5-14. V n. =. (m/min). (5-6) T C. (min). 5-14 Parameter Workpiece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Total depth(Dt) Lubricant. Condition Zerodur® Four flutes -70° 28000 rpm 20 mm/min 300 nm/stroke 18 µm Oil mist. Total machining distance 300, 600, 900, 1200 mm Ordinary, Machining regime High-frequency vibration assisted, Feedback control system 5-31(a)~(e). 5-32(a). 0.01 µm/mm. 0.005 µm/mm. 118.

(136) 0.002 µm/mm. 5-32(b). (a). (b). 300 mm. (c). 600 mm. (d). 900 mm. 5-31. 119.

(137) (e). 1200 mm. 5-31. (. (a). (b) 5-32. 5.8 Zerodur®. 5.7. 1200 mm. 120. ).

(138) 5-33 1586 cm-1 5-33(a) (b). 1586 cm-1. 5-33(c). 1332 cm-1 1586 cm-1 5-33(d). 5.5. 700°C. 121. 1332 cm-1.

(139) (a). (c). (. (. ). ). 5-33. 122. (b). (. ). (d). (. ).

(140) 6.1. Zerodur®. a.. PID 123.

(141) Zerodur® b.. c.. a.. b.. c.. (Ra0.004 µm). d. 6-1. (Ra0.453 µm). 124.

(142) 6-1 Zerodur® Parameters Conditions Work-piece Cutting tool Back rake angle( b) Spindle speed Feed-rate(F) Depth of cut(Dc) Lubricant. Zerodur® Four flutes -70° 28000 rpm 20 mm/min 300 nm/stroke Oil mist. a.. Ra0.453 µm. Ra0.388 µm. b.. 0.01 µm/mm. 0.002 µm/mm. a.. 1A b.. 125.

(143) (Ilimit). (Io). (Jt) Zerodur®. c.. Ra0.453 µm. Ra0.338 µm. d. 0.005 µm/mm Zerodur®. e.. 6.2. 1.. 2.. 3.. (40 kHz) 126.

(144) 4.. 5.. 6.. 127.

(145) 1.. H.N. Hansen, K. Carneiro, H. Haitjema, L. De Chiffre, Dimensional micro and nano metrology, Annals of the CIRP, vol.55/2, pp.721-743, 2006. 2.. N. Taniguchi, Ultra precision machining and ultrafine materials processing, Annals of the CIRP, vol.32/2, pp.573-582, 1983. 3.. 2011 http://www.tami.org.tw/market/seisanzai/sei-201101p2635.pdf. 4.. , pp.332, 1987. 5.. E.D. Zanotto, A bright future for glass-ceramics, American Ceramic Society Bulletin, American ceramic society bulletin-Emerging ceramics & Glass technology, vol.89, no.8, 2010. 6.. W. Höland, G.H. Beall, Glass-Ceramic Technology, Second Edition, The American Ceramic Society, 2012. 7.. H. Sumiya, T. Irifune, Indentation hardness of nano-polycrystalline diamond prepared from graphite by direct conversion, Diamond & Related Materials, vol.13, pp.1771-1776, 2004. 8.. B. Yang, X. Shen and S. Lei, Mechanisms of edge chipping in laserassisted milling of silicon nitride ceramics, International Journal of Machine Tools and Manufacture, vol.49, pp.344-350, 2009. 9.. R. Singh, S. N Melkote, Characterization of a hybrid laser-assisted mechanical micromachining (LAMM) process for a difficult–to- machine material, International Journal of Machine Tools and Manufacture, vol.47, pp.1139-1150, 2007. 10. B. Yang, X. Shen and S. Lei, Mechanisms of edge chipping in laser-assisted milling of silicon nitride ceramics, International Journal of Machine Tools and Manufacture, vol.49, pp.344-350, 2009 11. S.F. Tseng , M.F. Chen, W.T. Hsiao, C.Y. Huang, C.H. Yang and Y.S. Chen , Laser micro milling of convex micro fluidic channels onto glassy carbon for glass molding dies, Optics and Lasers in Engineering, vol.57, pp.58–63, 2014. 128.

(146) 12.. 2001 http://www.vtu.nat.gov.tw/admin/ability Front.do?act=load&materialId=null&countName=pdf&countId=5145&att Name=uploadFile/material/5145/301.pdf. 13. D.S. Park, M.W. Chob, H. Lee b, W.S. Choc, Micro-grooving of glass using micro-abrasive jet machining, Journal of Materials Processing Technology, vol.146, pp.234-240, 2004 14. T. Matsumura , T. Muramatsu, S. Fueki, Abrasive water jet machining of glass with stagnation effect, CIRP Annals - Manufacturing Technology, vol.60, pp.355-358, 2011 15. H. Nouraei, K. Kowsari, J.K. Spelt, M. Papini, Surface evolution models for abrasive slurry jet micro-machining of channels and holes in glass, Wear, vol.309, pp.65–73, 2014 16. M. Arif, M. Rahman and Y.S. Wong, Ultraprecision ductile mode machining of glass by micromilling process, Journal of Manufacturing Process, vol.13, pp.50-59, 2011 17. K.E. Puttick, M.R. Rudman, K.J. Smith, A. Franks and K. Lindsey, Single-point diamond machining of glasses, Proceedings of the Royal Society of London, vol.426, pp.19-30, 1989 18. C.J. Morgan, R.R. Vallance and E.R. Marsh, Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining, Journal of micro menhanics and micro engineering, vol.14, pp.1687-1692, 2004 19. T. Matsumura, P. Aristimuno, E. Gandarias, P.J. Arrazola, Cutting process in glass peripheral milling, Journal of Materials Processing Technology, vol.213, pp.1523-1531, 2013 20. P. Shore, C. Cunningham, D. DeBra, C. Evans, J. Hough, R. Gilmozzi, H. Kunzmann, P. Morantz, X. Tonnellier, Precision engineering for astronomy and gravity science, CIRP Annals-Manufacturing Technology, vol.59, pp.694–716, 2010 21. X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans and D.D. Walker, Subsurface damage in precision ground ULE® and Zerodur® surfaces, OPTICS EXPRESS, vol.15, no.19, 2007. 129.

(147) 22. S. Yin, H. Ohmori, Y. Dai, Y. Uehara, F. Chen, H. Tang, ELID grinding characteristics of glass – ceramic materials, International Journal of Machine Tools & Manufacture, vol.49, pp.333–338, 2009 23. 2010 24. K. Okano, Y. Akiba, T. Kurosu, M. Iida and T. Nkamura, Synthesis of B-doped diamond film, Journal of Crystal Growth, vol.99, pp.1192-1195, 1990 25. V.A. Sidorov, E.A. Ekimov, E.D. Bauer, N.N. Melnik, N.J. Curro, V. Fritsch,J.D. Thompson, S.M. Stishov, A.E. Alexenko, B.V. Spitsyn, Superconductivity in boron-doped diamond, Diamond & Related Materials, vol.14, pp.334-339, 2005 26. K. Suzuki, Y. Shiraishi, N. Nakajima, M. Iwai, S. Ninomiya, Y. Tanaka, T. Uematsu, Development of New PCD Made Up of Boron Doped Diamond Particles and its Machinability by EDM, Advanced Materials Research, vol.76-78, pp.684-689, 2009 27. S.T. Chen and C.H. Chang, Development of an ultrathin BD-PCD wheel-tool for in situ microgroove generation on NAK80 mold steel, Journal of Materials Processing Technology, vol.213, pp.740-751, 2013 28. P. Legge, Ultrasonic drilling of ceramics, Industrial diamond review, vol.124, pp.20-24, 1964 29. 2009 30. E. Shamoto, T. Moriwaki, Study on elliptical vibration cutting, CIRP Annals - Manufacturing Technology, vol.43, pp.35-38, 1994 31. M. Zhou, X.J. Wang, B.K.A. Ngoi and J.G.K. Gan, Brittle–ductile transition in the diamond cutting of glasses with the aid of ultrasonic vibration, Journal of Materials Processing Technology, vol.121, pp.243-251, 2002 32. K. Egashira and K. Mizutani, Ultrasonic vibration drilling of microholes in glass, CIRP Annals - Manufacturing Technology, vol.51, pp.339-342, 2002. 130.

(148) 33. X.H. Yang, J.C. Han, Y.M. Zhang, H.B. Zuo and X.J. Zhang, Research on ultrasonic vibration grinding of the hard and brittle materials, Chinese Journal of Aeronautics, vol.19, pp.9-13, 2006 34. C. Nath, M. Rahman, K. S. Neo, Machinability study of tungsten carbide using PCD tools under ultrasonic elliptical vibration cutting, International Journal of Machine Tools & Manufacture, vol.49, pp.1089-1095, 2009 35. BBC Research Market Forecasting, http://www.bccresearch.com/ 36. Photonics 21, http://www.photonics21.de/index.php 37. M. Arif, M. Rahman and Y. S. Wong, Ultra precision ductile mode machining of glass by micro milling process, Journal of Manufacturing Process, vol.13, pp.50-59, 2011 38. Schott, ZERODUR® - Extremely low expansion glass ceramic, 2013, http://www.schott.com/advanced_optics/english/download/schott-zerodurgeneral-may-2013-eng.pdf 39.. 2012. 40. S. Blackeley, R.O. Scattergood, Mechanics of material removal in diamond turning, Proceedings of ASPE Annual Meeting, Rochester NY, USA, pp. 68-71, 1990 41. B.K.A. Ngoi, P.S. Sreejith, Ductile regime finish machining – a review, The International Journal of Advanced Manufacturing Technology, vol.16, pp.547-550, 2000 42.. pp.8-11 2007. 43.. 355. pp.34-37. 2002 44. K. Okano, Y. Akiba, T. Kurosu, M. Iida, T. Nakamura, Synthesis of B-doped diamond film, Journal of Crystal Growth, vol.99, pp.1192-1195, 1990 45. S.T. Chen and C.H. Chang, Development of an ultrathin BD-PCD wheel-tool for in situ microgroove generation on NAK80 mold steel, Journal of Materials Processing Technology, vol.213, pp.740-751, 2013 46. C. Sommer, Non-traditional machining handbook, Advance Publishing, 131.

(149) Inc., pp.117-124, 2000 47.. , pp.74-75, 1988. 48. Sakshat virtual labs,To study erosion mechanism from Lazarenko's model, http://coep.vlab.co.in/ 49.. http://eshare.stut.edu.tw/EshareFile/2010_4/2010_4_e1e12437.ppt/. 50. G.M. Ma, C.R. Li, J. Jiang, Y.T. Luo and Y.C. Cheng, A novel optical load cell used in icing monitoring on overhead transmission lines, Cold Regions Science and Technology, vol.42, pp.67-72, 2012 51. pp.15 2001 52.. Load cell http://cht.nahua.com.tw/epaper/2011/186/. vol.186. 2011,. 53.. COMSOL, Excerpt from the proceedings of the COMSOL Users Conference, 2007. 54. KYOWA, How strain gages work, Strain Gage Bonding Manual, pp.1-8, 2011, http://www.jor.se/measurement/Kyowa/Kyowa-PDF/howsgw.pdf 55. AEROTECH inc, Aerotech - Advanced Automation Division, Amplifier Training, pp.19-25, 2006 56. AEROTECH inc, The unidex 500 motion conrtroller and windows software, Operation & Technical Manual, Version 1.3, pp.6-1, 2000 57.. http://mail.tajen.edu.tw/~scsheen/jetphoto/piezo.pdf. 1982. 58. Physik Instrumente PI, Piezo Nano Positioning, The world of micro- and nano positioning, 2005 59. Low voltage co-fired multilayer stacks, Rings and chips for actuation, http://www.piezomechanik.com/en/introduction/ 60. First Steps towards Piezoaction, Piezomechanik http://www.piezomechanik.com/en/introduction/ 61.. CNC B1 edition 2008 132. GmbH,.

(150) 62.. http://www.or.com.tw/uploads/product/ OR_Vcenter_55_70.pdf. 63.. 2014 http://www.tami.org.tw/print/book-11-557/20030700.htm. 64. Sodick NC 65.. AP1L premium. ver3.0 2008. Piezomechanik GmbH http://www.piezomechanik.com/. 66. PiezoMaster, VP7206 Technical Information - Wiring and Connections, http://www.piezomaster.com/TechnicalInfo.htm 67. 68.. http://www.motechsolar.com/ Piezo Master http://piezomaster.com/. 69. NAKANISHI, Micro-grinder, Motors & Spindles, 08/09 Edition, pp.2-13, 2008 70. NAKANISHI, E3000C operation manual, pp.5, 2008 71.. , http://www.hchtest.com.tw/series15.html. 72.. http://www.aixon.com.tw/. 73. JEOL USA inc, Scanning Elextron Microscope http://www.jeolusa.com/Default.aspx?tabid=174 74. OLYMPUS 3D en/metrology/ols4000/ 75.. JSM-6360,. http://www.olympus-ims.com/. http://www1.tek.com/zh-tw/. 76. BRUKER inc, X-ray diffraction solutions D8 advance, http://www.bruk er.com/tw/products/x-ray-diffraction-and-elemental-analysis/x-ray-diffract i on/d8-advance/overview.html 77. BRUKER inc, Senterra raman microscope, http://www.bruker.co m/cn/products/infrared-near-infrared-and-raman-spectroscopy/raman/sent e rra/overview.html 78. T. Döhring, B. Jedamzik, A. Thomas, P. Hartmann, Forty years of Zerodur® mirror substrates for astronomy: review and outlook, Proceedings of the SPIE, vol.7018, pp.12, 2008. 133.

(151) 79. Schott, Zerodur®–Extremely low expansion glass ceramic, 2013, http://www.schott.com/advanced_optics/english/download/schott-zerodurgeneral-may-2013-eng.pdf 80. Schott Lithotec, Zerodur®–Zero thermal expansion glass ceramic, http://sydor.com/pdfs/Schott_zerodur.pdf 81.. 2000. 82. E. Mah´e, D. Devilliers, Ch. Comninellis, Electrochemical reactivity at graphitic micro-domains on polycrystalline boron doped diamond thin-films electrodes, Electrochimica Acta, vol.50, pp.2263-2277, 2005 83. NSK, Precision Machinery & Parts, NSK Ltds., pp.10 84. Aerotech, NANO motion technology - ANT95-XY Series, pp.25-30, http://www.aerotech.com/ 85. Aerotech, Vertical Lift http://www.aerotech.com/. Stages. -. AVL125. Series,. pp.478-481,. 86. K. Cheng, Machining Dynamics: Fundamentals, Applications and Practices Springer, pp.1-16, 2009 87. R.E. Sonntag, C. Borgnakke, Engineeering thermodynamics, 2th edition, pp.25-26, 2006 88. J.L. Meriam, L.G. Kraige, Engineering mechanics dynamics, 5th edition, pp.56-58, 2003 89. Y. Chen, L.C. Zhang, J.A. Arsecularatne, Polishing of polycrystalline diamond by the technique of dynamic friction. Part 2: Material removal mechanism, International Journal of Machine Tools and Manufacture, vol.47, pp.1615-1624, 2007 90.. NTS ISBN4-8043-059-X C3050 pp.4-5 2004. 91. pp.21-22 2010 92. F.W. Taylor, On the art of cutting metals, Transactions of ASME, vol.28, pp.31-58, 1907. 134.

(152) 02-7734-3486 0921-891-726 [email protected] (2014) (2012) (2008). 135.

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