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Petri-net and GA based approach to modeling, scheduling, and performance evaluation for wafer fabrication

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Academic year: 2021

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Figure  2  Wafer processing model  Time-Critical Subnet
Table  1  Gene codes
Table  2  Three orders  Order  1D  Route  Quantity (lots)  Due Date  Order  01  Route  1  30  1999/12/180800  Order 02  Route 2  20  2000/0  1/03 08 00  Order  03  Route  3  50  2000/0  1/13  08  00 - - - -____ - - -_  _-_-

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