Research Express@NCKU - Articles Digest
Research Express@NCKU Volume 15 Issue 6 - October 8, 2010 [ http://research.ncku.edu.tw/re/articles/e/20101008/4.html ]
Nanoscale Fabrication and Characterization with Micro/Nano Probes
Weng-Sing Hwang
1,*, In-Gann Chen
1, Jyh-Ming Ting
1, Lien-chung Hsu
1, Tzong-Yow Tsai
2, Changshu Kuo
11Department of Materials Science and Engineering and 2Institute of Microelectronics, National Cheng Kung University, Tainan 701, TAIWAN
NCKU Landmark Project《R048》
T
his Landmark research project is encouraged by the advantages of micro/nano thermal probes recently developed, which allow the in-situ and localized heating process to be conducted for the purposes of fabrications and characterization. Two integrated instruments involved in this project are “Nano-Manipulator System in SEM” and “Nano-TA controller integrated with a SPM”. Both are custom-built and operated in NCKU. Highly localized heating probe equipped with precisepositioning system in nanoscale exposes many novel fabrication techniques and possibilities from a materials science point of view. Incorporated with another novel inkjet printing technology, the goals and the achievements of this project are to
develop an enabling integrated fabrication system based on the scanning probe and the inkjet printing technologies, flexible enough for the direct production of inorganic micro- and nano-structures, including micro joints, micro conductive lines, and three-dimensional structures. Novel fabrication system developed in this project has explored the tremendous potentials of nano technologies for metallic microstructures and patterned oxide materials. It will not only dramatically reduce the manufacturing costs by minimizing the processing steps, but also improve the qualities of products with better precision/resolution and adoption of better conductive materials. It provides a general solution to address the critical issues considering the low processing temperatures. The success of this project is critical to the competitiveness of high-tech industries and revitalization of conventional industries in Taiwan.
1 of 2
Research Express@NCKU - Articles Digest
2 of 2
