Design and manufacture of XYZ-three axis precision positioning system 林志豪、洪振義
E-mail: [email protected]
ABSTRACT
ABSTRACT Recently, the needs for precise micropositioning aries in many fields of research and technology, such as in cellular biology, and SXM(scanning tunneling microscopy or scanning probe microscopy). The requirement of positioning system with submicron order accuracy increases with the development of precision engineering. In this field, the piezoelectric (PZT) material is remarkable in submicron positioning systems for its merits in electromechanical couple. The features of the PZT material, such as less weigh, small size, fast reponse, high resolution, etc., have made it valuable for application in position engineering. However, there are some disadvantages of the PZT devices. The displacement precession of the PZT devices is limited by the hysteresis phenomenon. In addition, the maximum deformation for a piece of PZT material is quite small for most application. In order to improve these properties, the new compositions of the PZT material and multiplayer PZT ceramics have been development in recent years. The reformed PZT devices with these reformed PZT elements may obtain greater displacement and higher precision.
In this work, the characteristics of PZT actuators are investigated for its applicability in the scanning tunneling microscope (STM) system. The results are used to establish a high precession positioning stage for STM system. The positioning stage consists of a coarse stage and a three-axis micropositioner. The coarse stage is driven by an InchwormR motor (New Focus Inc.), which has s minimum resolution of 40 nm. The three-axis micropositioner is based on a PZT tube (PZT-5H). The displacement of the high precession positioning stage was measured by using the Optical lever method and the Michelson interferometer method in order to study the hysteresis characteristics as well as the displacement —voltage relation of the micropositioner.
Keywords : PZT ; hysteresis phenomenon ; Scanning Tunneling Microscope ; coarse stage ; three-axis micropositioner Table of Contents
目 錄 封面內頁 簽名頁 上網授權書………..………iii 授權書………
………..iv 中文摘要………v 英文摘要………
……….………vii 誌謝……….……… ix 目錄…………
……….……… xi 圖目錄……….………..……… xiii 表目 錄………...….………xvi 符號表………...
…xvii 第一章 緒論……….……..1 1.1研究背景………
………….1 1.2文獻回顧………..2 1.2.1微定位平台………
……..……….2 1.2.2掃描穿隧型顯微鏡………...5 1.3 研究目的與預期成果………
………6 第二章 壓電材料原理………...8 2.1壓電材料之簡………
………..8 2.2壓電材料組成律………...…………...16 2.3壓電諧振體………
………18 2.4壓電特性參數………19 第三章 系統組成設計與配置………
……….….23 3.1 設計流程規劃………..23 3.2組成系統之設計………
………23 3.2.1單自由度進給裝置……….……...24 3.2.2三自由度微動裝置………
……….……...30 3.3 組成系統之整合………..36 第四章 實驗量測………
………....38 4.1 實驗儀器………...………...38 4.2實驗原理與方法……
………39 4.2.1實驗原理………..………...40 4.2.1.1光槓桿法……
………..40 4.2.1.2光干涉法………..42 4.2.2實驗方法………
………..………...51 4.2.2.1光槓桿法實驗量測………...……..51 4.2.2.2麥克遜干涉儀實驗量 測………...…..55 4.3 實驗結果整理與討論………..58 4.3.1單自由度進給裝置……
……….58 4.3.2.三自由度微動裝置………59 4.3.2.1光槓桿法實驗………
………..60 4.3.2.2光干涉實驗-麥克遜干涉儀實驗………61 第五章 結論與未來展望………
………...79 參考文獻………81 附錄………
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