懸浮結構應用於紅外線感測器之設計與製作
Design and Fabrication of Suspended Membranes for Microbolometer Applications
研 究 生:郭定隆 Student:Ting-Long Kuo 指導教授:黃宇中 Adviser:Dr.Yu-Chung Huang
國 立 交 通 大 學 電子工程學系 電子研究所
碩 士 論 文
A Thesis
Submitted to Institute of Electronics
College of Electrical Engineering and Computer Science National Chiao Tung University
in Partial Fulfillment of the Requirements for the Degree of
Master In
Electronic Engineering June 2004
Hsinchu, Taiwan, Republic of China