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懸浮結構應用於紅外線感測器之設計與製作

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懸浮結構應用於紅外線感測器之設計與製作

Design and Fabrication of Suspended Membranes for Microbolometer Applications

研 究 生:郭定隆 Student:Ting-Long Kuo 指導教授:黃宇中 Adviser:Dr.Yu-Chung Huang

國 立 交 通 大 學 電子工程學系 電子研究所

碩 士 論 文

A Thesis

Submitted to Institute of Electronics

College of Electrical Engineering and Computer Science National Chiao Tung University

in Partial Fulfillment of the Requirements for the Degree of

Master In

Electronic Engineering June 2004

Hsinchu, Taiwan, Republic of China

中華民國九十三年六月

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