Fabrication and Characterization of MEMS-based Flow Sensors 江昇霖、蔡耀文
E-mail: [email protected]
ABSTRACT
The purpose of this study wind speed sensor. Research on the use of Micro-electro-mechanical process technology, to produce alumina for the substrate material for the heater and the platinum thin film of hot-film flowmeter, hotline type of way to make thin-film platinum temperature set at, winds blowing in different, cause changes in the characteristics of resistance to the production of micro-wind speed sensor.
This micro-sensor compared to the overall size of the sensor used in general for small, and simple structure, small size and because it can have very good sensitivity and precision of measurement. This study will be selected on the alumina plate, the alumina substrate for polishing and cutting process to the required size, and then deposited (deposition) platinum film, the production of a micro-heater and the sensors used. Finally and then cut into required size. Designed one of its sensing mechanism further divided into single-chip and dual chip. When the gas flows through the sensor side, the client will result in sensing a change in the resistance value through comparison measurement instruments because of the different air currents caused by changes in the value of resistance, and then determine the value of fluid to determine change in wind speed. In the experiment to give 10 m / s, 20 m / s, 30 m / s, 40 m / s, 50 m / s, 60 m / s wind speed, the trend of the law of waveform changes are presented, which can effectively reach the wind speed sensor Purpose. Also at a range of sensing a change in the relationship can be expected.
Finally, by changing the resistance of different size and spacing change ... and so on, to observe the trend of sensor characteristics, and to determine the best sensing mode. And in the appendix to the market for commercial paper flowmeter characteristics of the sensing element of comparison.
Keywords : Micro-electro-mechanical systems、Deposition、Air Flow Meter、Alumine plate Table of Contents
封面內頁 簽名頁
授權書……….. iii
中文摘要………..iv
英文摘要………... v
誌謝……….… vii
目錄………..…..viii
圖目錄………..xi
表目錄………xiii
符號說明………...……….xiv
第一章 緒論 1.1 前言……….………..… 1
1.2 微機電系統………..……. 2
1.2.1 微感測器特性……… 3
1.2.2 元件應用……… 6
1.3 文獻回顧………..…. 6
1.4 研究動機與目的………... 8
1.5 本文架構………...… 8
第二章 感測原理與設計 2.1熱線式空氣流量計………..…….……..….. 10
2.1.1 研究背景………..…….………. 10
2.1.2 壓阻性在懸臂樑之應用………...…………...10
2.1.3 熱線式風速計尺寸之設計………... 13
第三章 微型空氣流量計製程技術
3.1 製程處理………... 15
3.1.1基材潔淨………... 15
3.1.2 微影技術………...………… 16
3.1.3 薄膜製程………..………. 21
3.1.4 微機電系統技術加工…….……….…. 25
3.1.5 蝕刻………..………. 26
3.2 熱線式空氣流量計製程步驟…...……... 28
3.2.1 前置準備與製程圖………...…… 28
3.2.2 白金感測層圖形定義………...… 29
3.2.3 感測器實體外觀………...…… 32
第四章 結果與討論 4.1 量測儀器介紹……….. 33
4.2雙晶片熱線式空氣流量計……….. 36
4.2.1 量測模組建構………...………… 36
4.2.2加熱器電壓對溫度之響應…………...……… 38
4.2.3 加熱器與感測器前後位置對調之比較..….… 39
4.2.4 風速對溫度之響應………...… 41
4.2.5 加熱端與感測端之距離比較………... 43
4.2.6 反應時間……...……… 44
4.3 單晶片熱線式空氣流量計…………...………... 45
4.3.1 量測模組建構………...……… 45
4.3.2加熱器電壓對溫度之響應……… 46
4.3.3 風速與溫度之響應………...……… 47
4.3.4 反應時間………...…… 48
第五章 結論與未來展望 5.1 結論………...………... 49
5.2 未來展望……...……….……….. 49
參考文獻………...……….…. 51
附錄………..55 REFERENCES
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